JP4937724B2 - 基板載置台、基板載置台の製造方法、基板処理装置、流体供給機構 - Google Patents
基板載置台、基板載置台の製造方法、基板処理装置、流体供給機構 Download PDFInfo
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- JP4937724B2 JP4937724B2 JP2006337683A JP2006337683A JP4937724B2 JP 4937724 B2 JP4937724 B2 JP 4937724B2 JP 2006337683 A JP2006337683 A JP 2006337683A JP 2006337683 A JP2006337683 A JP 2006337683A JP 4937724 B2 JP4937724 B2 JP 4937724B2
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- 239000000758 substrate Substances 0.000 title claims description 105
- 239000012530 fluid Substances 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 230000007246 mechanism Effects 0.000 title claims description 11
- 239000000919 ceramic Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 33
- 238000004140 cleaning Methods 0.000 claims description 22
- 239000010410 layer Substances 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 238000005304 joining Methods 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 92
- 239000004065 semiconductor Substances 0.000 description 22
- 230000008569 process Effects 0.000 description 18
- 238000001020 plasma etching Methods 0.000 description 17
- 239000007921 spray Substances 0.000 description 9
- 239000000112 cooling gas Substances 0.000 description 7
- 238000010926 purge Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 238000005507 spraying Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 239000010407 anodic oxide Substances 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims (12)
- 基板が載置される載置面と、前記載置面に開口し当該載置面と前記基板との間にガスを供給する複数のガス吐出孔と、前記ガス吐出孔へガスを供給するためのガス供給路とを有する板状部材を具備し、前記載置面を覆うセラミック溶射層が設けられた基板載置台であって、
少なくとも前記ガス吐出孔と対向する部位の前記ガス供給路の内壁が、当該ガス供給路の幅方向に沿った縦断面形状が下部に向けて凸形状となるR面となるように、曲面状に形成されていることを特徴とする基板載置台。 - 請求項1記載の基板載置台であって、
前記ガス供給路は、複数の前記ガス吐出孔により共有されていることを特徴とする基板載置台。 - 請求項2記載の基板載置台であって、
前記板状部材は、前記ガス吐出孔を有する第1の板状部材と、底部が曲面状とされた溝を有する第2の板状部材とを接合して構成されていることを特徴とする基板載置台。 - 請求項3記載の基板載置台であって、
前記第2の板状部材に、前記ガス供給路内にガスを供給するためのガス供給穴と、前記ガス供給路内を洗浄するための流体を供給又は排出するための洗浄用穴が設けられていることを特徴とする基板載置台。 - 請求項1〜4いずれか1項記載の基板載置台であって、
前記板状部材がアルミニウムからなり、前記ガス供給路内に陽極酸化皮膜が形成されていることを特徴とする基板載置台。 - 基板が載置される載置面と、前記載置面に開口し当該載置面と前記基板との間にガスを供給する複数のガス吐出孔と、前記ガス吐出孔へガスを供給するためのガス供給路とを有する板状部材を具備し、前記載置面を覆うセラミック溶射層が設けられた基板載置台の製造方法であって、
少なくとも前記ガス吐出孔と対向する部位の前記ガス供給路の内壁を曲面状とした前記板状部材を形成する工程と、
前記ガス吐出孔からガスを吐出させながら、前記板状部材の前記載置面にセラミック溶射層を形成する工程と、
前記ガス供給路の内部を洗浄する工程と
を具備したことを特徴とする基板載置台の製造方法。 - 請求項6記載の基板載置台の製造方法であって、
前記ガス供給路は、複数の前記ガス吐出孔により共有されていることを特徴とする基板載置台の製造方法。 - 請求項7記載の基板載置台の製造方法であって、
前記板状部材は、前記ガス吐出孔を有する第1の板状部材と、底部が曲面状とされた溝を有する第2の板状部材とを接合して形成することを特徴とする基板載置台の製造方法。 - 請求項8記載の基板載置台の製造方法であって、
前記第2の板状部材に設けられたガス供給穴と、前記第2の板状部材に設けられた洗浄用穴とを用いて、前記ガス供給路の内部に洗浄用流体を供給及び排出して洗浄を行うことを特徴とする基板載置台の製造方法。 - 請求項6〜9いずれか1項記載の基板載置台の製造方法であって、
前記板状部材がアルミニウムからなり、セラミック溶射層を形成する工程の前に前記ガス供給路内に陽極酸化皮膜を形成する工程を具備したことを特徴とする基板載置台の製造方法。 - 基板を収容して処理する処理チャンバーを具備した基板処理装置であって、
前記処理チャンバー内に、請求項1〜5いずれか1項記載の基板載置台が配設されていることを特徴とする基板処理装置。 - 複数の流体吐出孔を具備した第1の板状部材と、複数の前記流体吐出孔に共有され当該流体吐出孔に流体を供給するための流体供給路を形成する溝を具備した第2の板状部材とを、前記第1の板状部材の下側に前記第2の板状部材が位置するように接合して構成された板状部材を有し、前記第1の板状部材の表面にセラミック溶射膜層が形成された流体供給機構であって、
少なくとも前記流体吐出孔と対向する部位の前記流体供給路を形成する前記溝の底部が、当該溝の幅方向に沿った縦断面形状が下部に向けて凸形状となるR面となるように、曲面状に形成されていることを特徴とする流体供給機構。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006337683A JP4937724B2 (ja) | 2006-12-15 | 2006-12-15 | 基板載置台、基板載置台の製造方法、基板処理装置、流体供給機構 |
CN2007101544027A CN101207061B (zh) | 2006-12-15 | 2007-09-11 | 基板载置台及其制造方法、基板处理装置、流体供给机构 |
KR1020070127552A KR100948984B1 (ko) | 2006-12-15 | 2007-12-10 | 기판 탑재대, 기판 탑재대의 제조 방법, 기판 처리 장치,유체 공급기구 |
US11/954,832 US8491752B2 (en) | 2006-12-15 | 2007-12-12 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism |
TW096148083A TWI427734B (zh) | 2006-12-15 | 2007-12-14 | Manufacturing method of substrate mounting table |
US13/944,948 US8869376B2 (en) | 2006-12-15 | 2013-07-18 | Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism |
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JP2006337683A JP4937724B2 (ja) | 2006-12-15 | 2006-12-15 | 基板載置台、基板載置台の製造方法、基板処理装置、流体供給機構 |
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JP2008153314A JP2008153314A (ja) | 2008-07-03 |
JP4937724B2 true JP4937724B2 (ja) | 2012-05-23 |
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KR (1) | KR100948984B1 (ja) |
CN (1) | CN101207061B (ja) |
TW (1) | TWI427734B (ja) |
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JP2011225949A (ja) * | 2010-04-21 | 2011-11-10 | Ibiden Co Ltd | 炭素部品および炭素部品の製造方法 |
JP6100564B2 (ja) * | 2013-01-24 | 2017-03-22 | 東京エレクトロン株式会社 | 基板処理装置及び載置台 |
CN104752258A (zh) * | 2013-12-30 | 2015-07-01 | 中微半导体设备(上海)有限公司 | 等离子体处理腔室的清洁方法 |
CN105934715B (zh) * | 2014-01-20 | 2019-01-01 | Asml荷兰有限公司 | 衬底保持件、用于光刻设备的支撑台、光刻设备和器件制造方法 |
CN106311843B (zh) * | 2016-08-31 | 2018-09-21 | 重庆泽田汽车部件有限责任公司 | 一种自动卸料的冷冲压装置 |
KR102188779B1 (ko) * | 2018-10-15 | 2020-12-08 | 세메스 주식회사 | 기판 지지 장치 및 그 제조방법 |
KR20210090279A (ko) | 2018-12-07 | 2021-07-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 컴포넌트, 컴포넌트를 제조하는 방법, 및 컴포넌트를 세정하는 방법 |
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US4338360A (en) * | 1980-05-01 | 1982-07-06 | General Motors Corporation | Method for coating porous metal structure |
US5350479A (en) * | 1992-12-02 | 1994-09-27 | Applied Materials, Inc. | Electrostatic chuck for high power plasma processing |
JPH06349938A (ja) * | 1993-06-11 | 1994-12-22 | Tokyo Electron Ltd | 真空処理装置 |
JP3488334B2 (ja) * | 1996-04-15 | 2004-01-19 | 京セラ株式会社 | 静電チャック |
US5835334A (en) * | 1996-09-30 | 1998-11-10 | Lam Research | Variable high temperature chuck for high density plasma chemical vapor deposition |
JPH1112742A (ja) * | 1997-06-27 | 1999-01-19 | Nissin Electric Co Ltd | Cvd装置およびそのクリーニング方法 |
CN1461493A (zh) * | 2000-12-18 | 2003-12-10 | 住友精密工业株式会社 | 清洗方法和腐蚀方法 |
US6490145B1 (en) * | 2001-07-18 | 2002-12-03 | Applied Materials, Inc. | Substrate support pedestal |
KR20030094492A (ko) * | 2002-06-04 | 2003-12-12 | 삼성전자주식회사 | 기판을 지지하기 위한 척 및 이를 제조하는 방법 |
JP4260450B2 (ja) * | 2002-09-20 | 2009-04-30 | 東京エレクトロン株式会社 | 真空処理装置における静電チャックの製造方法 |
JP4128469B2 (ja) * | 2003-02-25 | 2008-07-30 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
KR20050116078A (ko) * | 2004-06-04 | 2005-12-09 | 삼성전자주식회사 | 플라즈마 발생장치용 전극과 그 제조방법 |
CN100470756C (zh) * | 2004-06-28 | 2009-03-18 | 京瓷株式会社 | 静电卡盘 |
JP5004436B2 (ja) * | 2005-05-23 | 2012-08-22 | 東京エレクトロン株式会社 | 静電吸着電極および処理装置 |
JP2006352151A (ja) * | 2006-07-24 | 2006-12-28 | Kyocera Corp | 静電チャック及びその製造方法 |
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CN101207061A (zh) | 2008-06-25 |
KR100948984B1 (ko) | 2010-03-23 |
KR20080055645A (ko) | 2008-06-19 |
TWI427734B (zh) | 2014-02-21 |
JP2008153314A (ja) | 2008-07-03 |
CN101207061B (zh) | 2010-09-29 |
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