JP4897891B2 - デバイス製造方法およびリソグラフィ装置 - Google Patents
デバイス製造方法およびリソグラフィ装置 Download PDFInfo
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- JP4897891B2 JP4897891B2 JP2009546042A JP2009546042A JP4897891B2 JP 4897891 B2 JP4897891 B2 JP 4897891B2 JP 2009546042 A JP2009546042 A JP 2009546042A JP 2009546042 A JP2009546042 A JP 2009546042A JP 4897891 B2 JP4897891 B2 JP 4897891B2
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- pressure
- vacuum chamber
- radiation
- radiation beam
- substrate
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
- G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants
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- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
Claims (8)
- リソグラフィ投影装置の真空チャンバ内の圧力を温度安定圧範囲に収めること、
前記真空チャンバ内の温度を安定化させるように、前記真空チャンバ内の前記圧力を一定の期間前記温度安定圧範囲内に維持すること、
前記真空チャンバ内の前記圧力を製造圧範囲にまで減少させること、
放射システムで放射ビームを生成すること、
前記放射ビームにパターン形成すること、
前記真空チャンバを介して前記パターン付き放射ビームを基板上の放射感応性材料層のターゲット部分上に投影すること、および
前記放射システムまたは投影システムのミラーをガスでクリーニングすること、
を含み、
前記真空チャンバ内の前記圧力を前記温度安定圧範囲に収めることは、常気圧から前記温度安定圧範囲へと前記圧力をポンプダウンすること、および、クリーニング圧から前記温度安定圧範囲へと前記圧力を上昇させることを含む、
デバイス製造方法。 - パージガスで前記真空チャンバをパージすることをさらに含む、請求項1に記載の方法。
- 前記パージガスは、ヘリウム、水素、窒素、アルゴン、またはそれらの混合物を含む、請求項2に記載の方法。
- 前記放射ビームの前記生成は、前記圧力が前記製造圧範囲内にあるときに行われる、請求項1乃至3のいずれか1項に記載の方法。
- 前記真空チャンバ内の前記圧力を前記温度安定圧範囲に収めることは、前記圧力を上昇させた後、前記ミラーの温度が安定するように、前記圧力を一定の期間保持することを含む、請求項1乃至4のいずれか1項に記載の方法。
- 前記ミラーの温度が安定した後、前記圧力を減少させる、請求項5に記載の方法。
- 放射ビームを生成する放射システム、
前記放射ビームの断面にパターンを付与してパターン付き放射ビームを形成することができるパターニングデバイスを支持する支持体、
基板を保持する基板テーブル、
前記基板のターゲット部分上に前記パターン付き放射ビームを投影する投影システム、
真空ビームパスを前記放射ビームに提供する真空チャンバであって、当該真空チャンバを真空にするポンプと、前記真空チャンバをパージするパージシステムと、前記ポンプおよび前記パージシステムを制御する真空制御システムとを備える、真空チャンバ、および
前記放射システムまたは前記投影システムのミラーをクリーニングするクリーニングユニット、を含み、
前記真空制御システムは、前記真空チャンバ内の圧力を温度安定圧範囲に収める制御を行うものであり、該制御において、常気圧から前記温度安定圧範囲へと前記圧力をポンプダウンすること、および、クリーニング圧から前記温度安定圧範囲へと前記圧力を上昇させることを実行する、
リソグラフィ装置。 - 前記パージシステムは、ヘリウム、水素、窒素、アルゴン、またはそれらの混合物を含むパージガスを提供する、請求項7に記載のリソグラフィ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/654,037 US7426015B2 (en) | 2007-01-17 | 2007-01-17 | Device manufacturing method and lithographic apparatus |
US11/654,037 | 2007-01-17 | ||
PCT/IB2008/050160 WO2008087597A2 (en) | 2007-01-17 | 2008-01-16 | Device manufacturing method and lithographic apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010517260A JP2010517260A (ja) | 2010-05-20 |
JP4897891B2 true JP4897891B2 (ja) | 2012-03-14 |
Family
ID=39473622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009546042A Expired - Fee Related JP4897891B2 (ja) | 2007-01-17 | 2008-01-16 | デバイス製造方法およびリソグラフィ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7426015B2 (ja) |
JP (1) | JP4897891B2 (ja) |
KR (1) | KR101152833B1 (ja) |
CN (1) | CN101595431B (ja) |
TW (1) | TWI390360B (ja) |
WO (1) | WO2008087597A2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5315100B2 (ja) * | 2009-03-18 | 2013-10-16 | 株式会社ニューフレアテクノロジー | 描画装置 |
TWI408511B (zh) * | 2009-04-24 | 2013-09-11 | E Way Technology Co Ltd | Exposure machine and its exposure method |
NL2009378A (en) * | 2011-10-07 | 2013-04-09 | Asml Netherlands Bv | Lithographic apparatus and method of cooling a component in a lithographic apparatus. |
JP6218459B2 (ja) * | 2013-07-02 | 2017-10-25 | キヤノン株式会社 | 除振装置、除振方法、リソグラフィ装置及びデバイスの製造方法 |
CN104914676B (zh) * | 2014-03-12 | 2017-05-10 | 旺昌机械工业(昆山)有限公司 | 网板曝光机监控*** |
TWI559093B (zh) * | 2014-03-12 | 2016-11-21 | 鈦興有限公司 | 網板曝光機監控系統 |
JP6733216B2 (ja) * | 2016-02-26 | 2020-07-29 | セイコーエプソン株式会社 | フィルム |
TWI674482B (zh) * | 2018-04-24 | 2019-10-11 | 台灣積體電路製造股份有限公司 | 曝光設備及曝光方法 |
JP7419030B2 (ja) * | 2019-11-18 | 2024-01-22 | キヤノン株式会社 | 保持装置、露光装置、及び物品の製造方法 |
WO2021126594A1 (en) * | 2019-12-20 | 2021-06-24 | Cymer, Llc | Gas purge systems for a laser source |
Citations (3)
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JP2004029314A (ja) * | 2002-06-25 | 2004-01-29 | Nikon Corp | 光学素子冷却装置、光学素子冷却方法及び露光装置 |
JP2004039905A (ja) * | 2002-07-04 | 2004-02-05 | Nikon Corp | 露光装置、ミラーの冷却方法、反射マスクの冷却方法及び露光方法 |
JP2005223011A (ja) * | 2004-02-03 | 2005-08-18 | Canon Inc | 露光装置及び半導体デバイスの製造方法 |
Family Cites Families (12)
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US4825247A (en) * | 1987-02-16 | 1989-04-25 | Canon Kabushiki Kaisha | Projection exposure apparatus |
US6545746B1 (en) * | 1996-03-04 | 2003-04-08 | Nikon Corporation | Projection exposure apparatus |
JP2003115451A (ja) * | 2001-07-30 | 2003-04-18 | Canon Inc | 露光装置及びそれを用いたデバイスの製造方法 |
EP1376239A3 (en) | 2002-06-25 | 2005-06-29 | Nikon Corporation | Cooling device for an optical element |
EP1387054B1 (en) * | 2002-07-31 | 2012-07-25 | Canon Kabushiki Kaisha | Cooling apparatus for an optical element, exposure apparatus comprising said cooling apparatus, and device fabrication method |
JP4458333B2 (ja) * | 2003-02-13 | 2010-04-28 | キヤノン株式会社 | 露光装置、およびデバイスの製造方法 |
SG115630A1 (en) * | 2003-03-11 | 2005-10-28 | Asml Netherlands Bv | Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock |
WO2005010617A2 (en) | 2003-07-29 | 2005-02-03 | Philips Intellectual Property & Standards Gmbh | Method of cleaning a surface of an optical device |
GB0408543D0 (en) | 2004-04-16 | 2004-05-19 | Boc Group Plc | Cleaning of multi-layer mirrors |
US7423721B2 (en) * | 2004-12-15 | 2008-09-09 | Asml Netherlands B.V. | Lithographic apparatus |
US7868304B2 (en) | 2005-02-07 | 2011-01-11 | Asml Netherlands B.V. | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
JP2006222165A (ja) * | 2005-02-08 | 2006-08-24 | Canon Inc | 露光装置 |
-
2007
- 2007-01-17 US US11/654,037 patent/US7426015B2/en not_active Expired - Fee Related
-
2008
- 2008-01-10 TW TW097101015A patent/TWI390360B/zh not_active IP Right Cessation
- 2008-01-16 CN CN2008800024193A patent/CN101595431B/zh not_active Expired - Fee Related
- 2008-01-16 KR KR1020097014878A patent/KR101152833B1/ko not_active IP Right Cessation
- 2008-01-16 WO PCT/IB2008/050160 patent/WO2008087597A2/en active Application Filing
- 2008-01-16 JP JP2009546042A patent/JP4897891B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004029314A (ja) * | 2002-06-25 | 2004-01-29 | Nikon Corp | 光学素子冷却装置、光学素子冷却方法及び露光装置 |
JP2004039905A (ja) * | 2002-07-04 | 2004-02-05 | Nikon Corp | 露光装置、ミラーの冷却方法、反射マスクの冷却方法及び露光方法 |
JP2005223011A (ja) * | 2004-02-03 | 2005-08-18 | Canon Inc | 露光装置及び半導体デバイスの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200841133A (en) | 2008-10-16 |
JP2010517260A (ja) | 2010-05-20 |
KR101152833B1 (ko) | 2012-06-12 |
KR20090101931A (ko) | 2009-09-29 |
CN101595431A (zh) | 2009-12-02 |
WO2008087597A3 (en) | 2008-09-12 |
CN101595431B (zh) | 2012-03-14 |
US20080170210A1 (en) | 2008-07-17 |
WO2008087597A2 (en) | 2008-07-24 |
US7426015B2 (en) | 2008-09-16 |
TWI390360B (zh) | 2013-03-21 |
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