JP4889197B2 - アクチュエータ及びその製造方法並びに印刷ヘッド - Google Patents
アクチュエータ及びその製造方法並びに印刷ヘッド Download PDFInfo
- Publication number
- JP4889197B2 JP4889197B2 JP2003357880A JP2003357880A JP4889197B2 JP 4889197 B2 JP4889197 B2 JP 4889197B2 JP 2003357880 A JP2003357880 A JP 2003357880A JP 2003357880 A JP2003357880 A JP 2003357880A JP 4889197 B2 JP4889197 B2 JP 4889197B2
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- JP
- Japan
- Prior art keywords
- actuator
- flow path
- ink
- displacement
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000004519 manufacturing process Methods 0.000 title description 6
- 238000006073 displacement reaction Methods 0.000 claims description 49
- 239000000203 mixture Substances 0.000 claims description 33
- 239000000919 ceramic Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 15
- 229910052745 lead Inorganic materials 0.000 claims description 8
- 229910052726 zirconium Inorganic materials 0.000 claims description 8
- 238000007639 printing Methods 0.000 description 13
- 238000010304 firing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 239000004570 mortar (masonry) Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000002893 slag Substances 0.000 description 4
- -1 BaCO 3 Inorganic materials 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052573 porcelain Inorganic materials 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- HEPLMSKRHVKCAQ-UHFFFAOYSA-N lead nickel Chemical compound [Ni].[Pb] HEPLMSKRHVKCAQ-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000009774 resonance method Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
の気孔率が望ましい。
2、12・・・基板
4、14・・・圧電セラミック層
5、15・・・共通電極
6、16・・・個別電極
7、17・・・変位素子
13・・・流路部材
13a・・・インク流路
13b・・・隔壁
18・・・吐出孔
Claims (4)
- 下部電極と、該下部電極上に設けられた圧電セラミック層と、該圧電セラミック層上に設けられた上部電極とを有した変位素子が、基板の上面に設けられており、前記基板の下面から前記上部電極の上面までの全体厚みが100μm以下のアクチュエータであって、
前記基板および前記圧電セラミック層が、少なくともPb、Zr、およびTiを含むペロブスカイト型結晶を主成分とし、
前記圧電セラミック層の前記上部電極が設けられていない表面と前記基板の内部とにおける組成比Pb/(Ti+Zr)の最大差が0.02以下であることを特徴とするアクチュエータ。 - 前記変位素子が、前記基板の上面に複数設けられている、請求項1に記載のアクチュエータ。
- 前記基板および前記圧電セラミック層の気孔率が、1%以下である、請求項1または2に記載のアクチュエータ。
- 流路部材と、該流路部材の上に設けられた請求項1〜3のいずれか一項に記載のアクチュエータとを備え、前記アクチュエータを構成する前記変位素子の変位によって前記流路部材に設けられたインク流路に充填されたインクを吐出させる、印刷ヘッド。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003357880A JP4889197B2 (ja) | 2002-10-17 | 2003-10-17 | アクチュエータ及びその製造方法並びに印刷ヘッド |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002303548 | 2002-10-17 | ||
JP2002303548 | 2002-10-17 | ||
JP2003357880A JP4889197B2 (ja) | 2002-10-17 | 2003-10-17 | アクチュエータ及びその製造方法並びに印刷ヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004158849A JP2004158849A (ja) | 2004-06-03 |
JP4889197B2 true JP4889197B2 (ja) | 2012-03-07 |
Family
ID=32827972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003357880A Expired - Lifetime JP4889197B2 (ja) | 2002-10-17 | 2003-10-17 | アクチュエータ及びその製造方法並びに印刷ヘッド |
Country Status (1)
Country | Link |
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JP (1) | JP4889197B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5178065B2 (ja) * | 2007-06-27 | 2013-04-10 | 京セラ株式会社 | 圧電セラミックス、圧電アクチュエータおよび液体吐出ヘッド |
EP2833423B1 (en) * | 2012-03-30 | 2020-11-04 | Kyocera Corporation | Piezoelectric actuator, inkjet head, and method for manufacturing piezoelectric actuator |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3070638B2 (ja) * | 1991-06-25 | 2000-07-31 | 株式会社日本自動車部品総合研究所 | 圧電セラミック板及び誘電体セラミック板の製造方法 |
JP3103433B2 (ja) * | 1992-06-09 | 2000-10-30 | 株式会社タムラ製作所 | Plzt焼結体の製造方法 |
JPH0985947A (ja) * | 1995-09-28 | 1997-03-31 | Kyocera Corp | 圧電ポンプ |
JP3341672B2 (ja) * | 1998-04-13 | 2002-11-05 | 株式会社村田製作所 | 圧電セラミック素子の製造方法 |
JP4582835B2 (ja) * | 1999-08-30 | 2010-11-17 | 京セラ株式会社 | アクチュエータ用圧電部材の製造方法 |
JP3812936B2 (ja) * | 2000-12-28 | 2006-08-23 | ボッシュ株式会社 | セラミック材料及びそれを用いた圧電素子 |
-
2003
- 2003-10-17 JP JP2003357880A patent/JP4889197B2/ja not_active Expired - Lifetime
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