JP4884964B2 - 放射線撮像装置 - Google Patents
放射線撮像装置 Download PDFInfo
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- JP4884964B2 JP4884964B2 JP2006513030A JP2006513030A JP4884964B2 JP 4884964 B2 JP4884964 B2 JP 4884964B2 JP 2006513030 A JP2006513030 A JP 2006513030A JP 2006513030 A JP2006513030 A JP 2006513030A JP 4884964 B2 JP4884964 B2 JP 4884964B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20182—Modular detectors, e.g. tiled scintillators or tiled photodiodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20188—Auxiliary details, e.g. casings or cooling
- G01T1/20189—Damping or insulation against damage, e.g. caused by heat or pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02322—Optical elements or arrangements associated with the device comprising luminescent members, e.g. fluorescent sheets upon the device
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/30—Transforming light or analogous information into electric information
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- H04N5/321—Transforming X-rays with video transmission of fluoroscopic images
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H04N23/30—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from X-rays
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Molecular Biology (AREA)
- High Energy & Nuclear Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Medical Informatics (AREA)
- Heart & Thoracic Surgery (AREA)
- Multimedia (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Optics & Photonics (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Signal Processing (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
2、3、3a 放射線撮像素子
5 イメージセンサ
6 載置用装置
9 被験者
10 固定基台
10a、10b 載置面
11、12 配線基板
20、30 Si基板
21、31 光感応部
22、32 シフトレジスタ部
23、33 増幅部
24、34 ボンディングパッド部
25、35 シンチレータ
26、36 保護膜
60 上空間
61 下空間
62 真空ポンプ
70、71 プレート
75 放射線源
90 ***
100 放射線撮像装置
111、121 貫通孔
112、122 接着材
Claims (7)
- 2次元に画素を配列して受光部を形成した固体撮像素子の受光面に、放射線入射によって前記固体撮像素子が感度を有する波長の光を含む光を発するシンチレータを堆積し、前記シンチレータを保護膜で覆って形成した放射線撮像素子を基台上にm×n(mは2以上、nは1以上の整数)個並べて配置した放射線撮像装置において、
隣接して配置される任意の2つの放射線撮像素子間では、一方の放射線撮像素子の基台への固定面が他方の放射線撮像素子の放射線入射面より放射線入射方向に突出するとともに、
放射線入射方向からみて背面に配置される放射線撮像素子の受光部が前面に配置される放射線撮像素子によって遮られない状態で、両者は近接して配置されており、
放射線入射方向からみて前面に配置される放射線撮像素子の受光部は、他方の放射線撮像素子側の受光部端部を有しており、該受光部端部まで受光部中心部と同一の厚みのシンチレータが形成されており、
前記隣接して配置される任意の2つの放射線撮像素子において、放射線入射方向からみて背面に配置される放射線撮像素子においては、前面に配置される放射線撮像素子側の受光部端部より外側までシンチレータが堆積されており、該受光部端部まで均一な厚みのシンチレータが形成されていることを特徴とする放射線撮像装置。 - 前記隣接して配置される任意の2つの放射線撮像素子において、放射線入射方向からみて背面に配置される放射線撮像素子の端部と前面に配置される放射線撮像素子の端部とが重なり合う位置に配置されていることを特徴とする請求項1記載の放射線撮像装置。
- 放射線入射方向からみて背面に配置される放射線撮像素子の受光部端部より外側となる領域の幅が、前面に配置される放射線撮像素子の受光部端部より外側となる領域の幅よりも広いことを特徴とする請求項1又は2記載の放射線撮像装置。
- 放射線入射方向からみて背面に配置される放射線撮像素子が、前面に配置される放射線撮像素子よりも大きいことを特徴とする請求項1〜3のいずれか一項記載の放射線撮像装置。
- 放射線入射方向からみて背面に配置される放射線撮像素子が備えるシンチレータにおける受光部端部より外側の部分は、前面に配置される放射線撮像素子を構成するSi基板と、背面に配置される放射線撮像素子を構成するSi基板との間に位置することを特徴とする請求項1〜4のいずれか一項記載の放射線撮像装置。
- シンチレータは、放射線撮像素子を構成するSi基板において、受光部同士が近接している側壁部まで連続して形成されていることを特徴とする請求項1〜5のいずれか一項記載の放射線撮像装置。
- 保護膜は、放射線撮像素子の裏側まで回り込んで基台との間に挟み込まれて固定されていることを特徴とする請求項1〜6のいずれか一項記載の放射線撮像装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006513030A JP4884964B2 (ja) | 2004-05-11 | 2005-05-10 | 放射線撮像装置 |
Applications Claiming Priority (4)
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---|---|---|---|
JP2004141546 | 2004-05-11 | ||
JP2004141546 | 2004-05-11 | ||
JP2006513030A JP4884964B2 (ja) | 2004-05-11 | 2005-05-10 | 放射線撮像装置 |
PCT/JP2005/008530 WO2005109037A1 (ja) | 2004-05-11 | 2005-05-10 | 放射線撮像装置 |
Publications (2)
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JPWO2005109037A1 JPWO2005109037A1 (ja) | 2008-03-21 |
JP4884964B2 true JP4884964B2 (ja) | 2012-02-29 |
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JP2006513030A Active JP4884964B2 (ja) | 2004-05-11 | 2005-05-10 | 放射線撮像装置 |
Country Status (7)
Country | Link |
---|---|
US (3) | US7834323B2 (ja) |
EP (2) | EP2103958B1 (ja) |
JP (1) | JP4884964B2 (ja) |
KR (3) | KR101218521B1 (ja) |
CN (3) | CN101552265B (ja) |
TW (3) | TWI399860B (ja) |
WO (1) | WO2005109037A1 (ja) |
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JP5000258B2 (ja) * | 2006-10-18 | 2012-08-15 | 浜松ホトニクス株式会社 | 固体撮像装置 |
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JP5101402B2 (ja) | 2008-06-18 | 2012-12-19 | 浜松ホトニクス株式会社 | 固体撮像装置 |
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JP2013217769A (ja) * | 2012-04-09 | 2013-10-24 | Canon Inc | 放射線検出装置 |
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JP6007694B2 (ja) | 2012-09-14 | 2016-10-12 | ソニー株式会社 | 固体撮像装置及び電子機器 |
JP5395240B2 (ja) * | 2012-09-26 | 2014-01-22 | 浜松ホトニクス株式会社 | 固体撮像装置 |
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TWI521686B (zh) | 2013-05-24 | 2016-02-11 | 友達光電股份有限公司 | 光偵測器及其製造方法 |
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CN105628717B (zh) * | 2014-10-30 | 2020-05-19 | 通用电气公司 | 光检测器、x射线检测装置和x射线成像设备 |
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US7728303B2 (en) | 2010-06-01 |
EP1746440B1 (en) | 2015-11-18 |
TWI447924B (zh) | 2014-08-01 |
CN101961247B (zh) | 2012-05-30 |
US8026490B2 (en) | 2011-09-27 |
WO2005109037A1 (ja) | 2005-11-17 |
CN1954238B (zh) | 2010-12-22 |
TW200939501A (en) | 2009-09-16 |
EP2103958B1 (en) | 2017-08-02 |
KR101151146B1 (ko) | 2012-06-01 |
CN1954238A (zh) | 2007-04-25 |
JPWO2005109037A1 (ja) | 2008-03-21 |
TW200939500A (en) | 2009-09-16 |
KR101218521B1 (ko) | 2013-01-18 |
US20090224166A1 (en) | 2009-09-10 |
TW200541089A (en) | 2005-12-16 |
EP1746440A4 (en) | 2013-09-25 |
US7834323B2 (en) | 2010-11-16 |
KR101260634B1 (ko) | 2013-05-03 |
CN101961247A (zh) | 2011-02-02 |
KR20070009617A (ko) | 2007-01-18 |
US20080192891A1 (en) | 2008-08-14 |
US20090224165A1 (en) | 2009-09-10 |
TWI399860B (zh) | 2013-06-21 |
KR20120035226A (ko) | 2012-04-13 |
CN101552265B (zh) | 2012-07-18 |
EP2103958A3 (en) | 2013-10-09 |
EP1746440A1 (en) | 2007-01-24 |
EP2103958A2 (en) | 2009-09-23 |
KR20090034967A (ko) | 2009-04-08 |
CN101552265A (zh) | 2009-10-07 |
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