JP4829634B2 - 触媒の形成方法およびそれを用いた炭素膜の製造方法 - Google Patents
触媒の形成方法およびそれを用いた炭素膜の製造方法 Download PDFInfo
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- JP4829634B2 JP4829634B2 JP2006037880A JP2006037880A JP4829634B2 JP 4829634 B2 JP4829634 B2 JP 4829634B2 JP 2006037880 A JP2006037880 A JP 2006037880A JP 2006037880 A JP2006037880 A JP 2006037880A JP 4829634 B2 JP4829634 B2 JP 4829634B2
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- 239000003054 catalyst Substances 0.000 title claims description 83
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 68
- 229910052799 carbon Inorganic materials 0.000 title claims description 40
- 238000000034 method Methods 0.000 title claims description 37
- 238000004519 manufacturing process Methods 0.000 title description 14
- 239000000758 substrate Substances 0.000 claims description 97
- 238000000137 annealing Methods 0.000 claims description 50
- 239000010419 fine particle Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 230000003197 catalytic effect Effects 0.000 claims description 14
- 230000001737 promoting effect Effects 0.000 claims description 4
- 239000010953 base metal Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 63
- 239000002041 carbon nanotube Substances 0.000 description 30
- 229910021393 carbon nanotube Inorganic materials 0.000 description 30
- 230000015572 biosynthetic process Effects 0.000 description 27
- 239000002245 particle Substances 0.000 description 26
- 239000007789 gas Substances 0.000 description 21
- 238000009826 distribution Methods 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 7
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005328 electron beam physical vapour deposition Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000002238 carbon nanotube film Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000445 field-emission scanning electron microscopy Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- -1 methanol and ethanol Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000002110 nanocone Substances 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Description
前記電気的エネルギの付与を、前記基板に対する電圧の印加により行ない、
前記電圧が、放電現象が発生しない電圧であることを特徴とするものである。
12 カーボンナノチューブ(炭素膜)
20 石英管チャンバ
22,24 平行平板電極
24a アルミナ
24b 電極
26 ガス導入管
28 排気管
30 電気炉
32 直流電源
34 石英板
Claims (3)
- 炭素膜の成長を促進する作用を有する触媒金属膜を成長させた基板に、熱エネルギおよび電気的エネルギを付与して前記触媒金属膜を微粒子化する触媒の形成方法であって、
前記電気的エネルギの付与を、前記基板に対する電圧の印加により行ない、前記電圧が、放電現象が発生しない電圧であることを特徴とする触媒の形成方法。 - 前記熱エネルギの付与がアニール処理である請求項1に記載の触媒の形成方法。
- 前記基板は、前記触媒金属膜の下層に下地金属膜を有する請求項1または請求項2に記載の触媒の形成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006037880A JP4829634B2 (ja) | 2005-03-30 | 2006-02-15 | 触媒の形成方法およびそれを用いた炭素膜の製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005099612 | 2005-03-30 | ||
JP2005099612 | 2005-03-30 | ||
JP2006037880A JP4829634B2 (ja) | 2005-03-30 | 2006-02-15 | 触媒の形成方法およびそれを用いた炭素膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006305554A JP2006305554A (ja) | 2006-11-09 |
JP4829634B2 true JP4829634B2 (ja) | 2011-12-07 |
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JP2006037880A Expired - Fee Related JP4829634B2 (ja) | 2005-03-30 | 2006-02-15 | 触媒の形成方法およびそれを用いた炭素膜の製造方法 |
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JP (1) | JP4829634B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009155693A (ja) * | 2007-12-27 | 2009-07-16 | Sonac Kk | 基板ユニット |
WO2019040597A1 (en) | 2017-08-22 | 2019-02-28 | Ntherma Corporation | GRAPHENE NANORUBANS, GRAPHENE NANOPLAQUETTES AND CORRESPONDING MIXTURES AND METHODS OF SYNTHESIS |
JP7284149B2 (ja) | 2017-08-22 | 2023-05-30 | インサーマ コーポレーション | カーボンナノチューブの合成のための方法及び装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH10203810A (ja) * | 1997-01-21 | 1998-08-04 | Canon Inc | カーボンナノチューブの製法 |
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