JP4770383B2 - 顕微鏡 - Google Patents
顕微鏡 Download PDFInfo
- Publication number
- JP4770383B2 JP4770383B2 JP2005302588A JP2005302588A JP4770383B2 JP 4770383 B2 JP4770383 B2 JP 4770383B2 JP 2005302588 A JP2005302588 A JP 2005302588A JP 2005302588 A JP2005302588 A JP 2005302588A JP 4770383 B2 JP4770383 B2 JP 4770383B2
- Authority
- JP
- Japan
- Prior art keywords
- light source
- photon
- photons
- measured
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 claims description 27
- 238000005286 illumination Methods 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 9
- 238000003491 array Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- 241000276498 Pollachius virens Species 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 230000010287 polarization Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000011358 absorbing material Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 101000694017 Homo sapiens Sodium channel protein type 5 subunit alpha Proteins 0.000 description 1
- 102100027198 Sodium channel protein type 5 subunit alpha Human genes 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Images
Landscapes
- Microscoopes, Condenser (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
Claims (5)
- 同一位置から2光子の光子対を放出し、被測定物を照明する面光源と、前記被測定物より光学的に後面に設けられ、前記光子対を2つのパスに分けるビームスプリッタと、前記ビームスプリッタにより分けられた光子により形成された前記被測定物の像を、それぞれ撮像面に拡大投影する投影光学系と、前記各撮像面に設けられた2つの2次元フォトン検出器アレイと、前記2次元フォトン検出器アレイのピクセルに対応した複数の計数器を備えた計数装置とを有し、前記計数器は、前記2つの2次元フォトン検出器のそれぞれの対応するピクセルにおいて、同時に光子が検出されたときのみ、計数を行うようにされており、所定撮像時間経過後の、前記計数装置の前記計数器の計数値に基づいて、前記被測定物の像を形成するように構成されていることを特徴とする顕微鏡。
- 請求項1に記載の顕微鏡であって、前記面光源は、インコヒーレントな光源と、当該光源で照明される非線形結晶とを含むことを特徴とする顕微鏡。
- 請求項2に記載の顕微鏡であって、前記光源による前記非線形結晶の照明が、ケーラー照明であることを特徴とする顕微鏡。
- 請求項2又は請求項3に記載の顕微鏡であって、前記非線形結晶が、半導体結晶であることを特徴とする顕微鏡。
- 請求項1から請求項4のうちいずれか1項に記載の顕微鏡であって、前記被測定物を前記面光源と光学的に共役な位置又は前記面光源から、測定に使用される光子の波長以下の位置に配置したことを特徴とする顕微鏡。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005302588A JP4770383B2 (ja) | 2005-10-18 | 2005-10-18 | 顕微鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005302588A JP4770383B2 (ja) | 2005-10-18 | 2005-10-18 | 顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007114246A JP2007114246A (ja) | 2007-05-10 |
JP4770383B2 true JP4770383B2 (ja) | 2011-09-14 |
Family
ID=38096542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005302588A Active JP4770383B2 (ja) | 2005-10-18 | 2005-10-18 | 顕微鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4770383B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9134422B2 (en) * | 2009-04-04 | 2015-09-15 | The Boeing Company | Generation and detection of frequency entangled photons |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4342334B2 (ja) * | 2004-02-12 | 2009-10-14 | 株式会社東芝 | 顕微鏡 |
-
2005
- 2005-10-18 JP JP2005302588A patent/JP4770383B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2007114246A (ja) | 2007-05-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI665840B (zh) | 使用單體頻寬窄化裝置之雷射總成及檢測系統 | |
JP5444334B2 (ja) | 干渉欠陥検知及び分類 | |
JP5526370B2 (ja) | 照明光学系、照明方法、及び検査装置 | |
JP5038094B2 (ja) | レーザー走査型顕微鏡 | |
US20180246307A1 (en) | Polarisation microscope | |
US7872741B2 (en) | Method and apparatus for scatterfield microscopical measurement | |
US20090161117A1 (en) | Inclined exposure lithography system | |
JP4770383B2 (ja) | 顕微鏡 | |
JP5489620B2 (ja) | 観察装置 | |
JP3282790B2 (ja) | 位相シフトマスクの欠陥検査装置 | |
JP5344344B2 (ja) | 観察装置 | |
JPH10281876A (ja) | 偏光性イメージング装置 | |
JP2007248554A (ja) | 顕微鏡 | |
JP4557723B2 (ja) | 非走査型時間分解蛍光顕微鏡 | |
JP2007121312A (ja) | 表面欠陥検査装置 | |
JP2022000692A (ja) | マイクロリソグラフィマスクを特徴付けるための装置および方法 | |
JP4358955B2 (ja) | 異物検査装置 | |
JP2015224912A (ja) | 欠陥測定装置及び欠陥測定方法 | |
WO2010024235A1 (ja) | 共焦点顕微鏡装置 | |
NL2029773B1 (en) | Composite lithography alignment system and method based on super-resolution imaging of dielectric microspheres | |
JP2006133026A5 (ja) | ||
US20070258635A1 (en) | Apparatus and method for inspecting mask for use in fabricating an integrated circuit device | |
Di et al. | Nonclassical noise features in a correlation plenoptic imaging setup | |
JP2009156728A (ja) | 検査光源装置及び欠陥検査装置 | |
JP2007183111A (ja) | 光強度検出装置とこれを有する光学装置、顕微鏡 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080729 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20080801 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110524 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110606 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140701 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4770383 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140701 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |