JP4745829B2 - 垂直記録用磁気ヘッドの製造方法 - Google Patents
垂直記録用磁気ヘッドの製造方法 Download PDFInfo
- Publication number
- JP4745829B2 JP4745829B2 JP2006000185A JP2006000185A JP4745829B2 JP 4745829 B2 JP4745829 B2 JP 4745829B2 JP 2006000185 A JP2006000185 A JP 2006000185A JP 2006000185 A JP2006000185 A JP 2006000185A JP 4745829 B2 JP4745829 B2 JP 4745829B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- mask
- inorganic insulating
- insulating film
- magnetic pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
Claims (9)
- 主磁極材層を形成する工程と、
前記主磁極材層の上に非磁性金属層と無機絶縁膜をその順に形成する工程と、
前記無機絶縁膜の上にマスク材を塗布し、それをパターニングしてマスクを形成する工程と、
前記マスクを用いて、前記主磁極材層をイオンミリングにより主磁極加工する工程と、
前記マスクを除去する工程と、
アルカリ溶液により前記加工された主磁極上の無機絶縁膜の一部を溶解する工程と、
前記一部が溶解された無機絶縁膜の上にトレーリングシールド、もしくはラップアラウンドシールドを形成する工程とを有し、
前記イオンミリングにより主磁極加工する工程において前記マスクの側面でかつ前記無機絶縁膜の上面に形成された再付着物を、前記無機絶縁膜の一部を溶解する工程で除去することを特徴とする垂直磁気記録ヘッドの製造方法。 - 前記マスクを形成する工程では、前記無機絶縁膜の上に第1の有機レジスト膜を塗布し、前記第1の有機レジスト膜の上に第2の有機レジスト膜を塗布して、前記第2の有機レジスト膜をパターニングし、前記パターニングした第2の有機レジスト膜をマスクにして前記第1の有機レジスト膜をエッチングすることにより前記マスクを形成することを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- 前記無機絶縁膜はアルカリに可溶であることを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- アルカリ溶液により一部を溶解した後の前記無機絶縁膜の形状は、前記主磁極のトラック幅方向の両端のエッジが丸くなっていることを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- 前記マスクを形成する工程では、前記無機絶縁膜の上に感光性を持たない樹脂を塗布し、その上に有機レジスト膜を塗布して、前記有機レジスト膜をパターニングし、前記パターニングした前記有機レジスト膜をマスクにして前記感光性を持たない樹脂をエッチングすることにより前記マスクを形成することを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- 前記主磁極材層の上に形成される無機絶縁膜の膜厚は10nm〜100nmの範囲であることを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- 前記非磁性金属層はNiCr、Cr又はTaからなることを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- 前記非磁性金属層の膜厚は5〜20nmの範囲であることを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
- 前記主磁極材層は、スパッタ膜で作製されるFeCo膜あるいはFeCo膜と非磁性膜の多層膜、又はめっき法で形成されるCoNiFe膜あるいはFeCo膜であることを特徴とする請求項1記載の垂直磁気記録ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006000185A JP4745829B2 (ja) | 2006-01-04 | 2006-01-04 | 垂直記録用磁気ヘッドの製造方法 |
US11/645,104 US7389578B2 (en) | 2006-01-04 | 2006-12-21 | Manufacturing method of a perpendicular recording magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006000185A JP4745829B2 (ja) | 2006-01-04 | 2006-01-04 | 垂直記録用磁気ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007184020A JP2007184020A (ja) | 2007-07-19 |
JP4745829B2 true JP4745829B2 (ja) | 2011-08-10 |
Family
ID=38339972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006000185A Expired - Fee Related JP4745829B2 (ja) | 2006-01-04 | 2006-01-04 | 垂直記録用磁気ヘッドの製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7389578B2 (ja) |
JP (1) | JP4745829B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009146519A (ja) * | 2007-12-14 | 2009-07-02 | Hitachi Global Storage Technologies Netherlands Bv | 垂直磁気記録ヘッド及びその製造方法 |
WO2009116167A1 (ja) * | 2008-03-21 | 2009-09-24 | 富士通株式会社 | 磁気ヘッド、磁気記憶装置、及び磁気ヘッドの製造方法 |
JP2009230810A (ja) * | 2008-03-24 | 2009-10-08 | Hitachi Global Storage Technologies Netherlands Bv | 垂直磁気記録ヘッドの製造方法 |
US8137570B2 (en) * | 2008-04-09 | 2012-03-20 | Hitachi Global Storage Technologies Netherlands B.V. | Additive write pole process for wrap around shield |
US8470189B2 (en) | 2008-06-03 | 2013-06-25 | Tdk Corporation | Method of forming mask pattern, method of forming thin film pattern and method of forming magnetoresistive element |
US8411384B2 (en) * | 2011-06-06 | 2013-04-02 | HGST Netherlands B.V. | Writer having a shield structure for adjacent and far track interference refreshment |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04222911A (ja) * | 1990-12-26 | 1992-08-12 | Matsushita Electric Ind Co Ltd | 薄膜磁気ヘッドの製造方法 |
JP2863018B2 (ja) * | 1991-02-26 | 1999-03-03 | 株式会社日立製作所 | ドライエッチングによる微細加工方法及びドライエッチング用レジストマスク樹脂組成物 |
JP2000268320A (ja) * | 1999-03-16 | 2000-09-29 | Read Rite Smi Kk | 薄膜磁気ヘッドの製造方法、並びに、薄膜磁気ヘッドの下部磁極層のトリミング方法 |
JP2000339622A (ja) * | 1999-05-31 | 2000-12-08 | Fujitsu Ltd | 薄膜磁気ヘッドの磁極形成方法 |
US6470565B1 (en) * | 2000-02-22 | 2002-10-29 | Tdk Corporation | Method of manufacturing slider of thin-film magnetic head |
JP2002042309A (ja) * | 2000-07-21 | 2002-02-08 | Sony Corp | 薄膜磁気ヘッドの配線形成方法 |
JP3458352B2 (ja) * | 2000-10-05 | 2003-10-20 | Tdk株式会社 | レジストパターンの作製方法、薄膜のパターニング方法、及びマイクロデバイスの製造方法 |
JP3943337B2 (ja) * | 2000-11-10 | 2007-07-11 | Tdk株式会社 | 薄膜磁気ヘッドの製造方法 |
US6850390B2 (en) * | 2000-11-10 | 2005-02-01 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
JP3999469B2 (ja) * | 2001-03-21 | 2007-10-31 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
JP3869766B2 (ja) * | 2001-12-14 | 2007-01-17 | Tdk株式会社 | 垂直磁気記録ヘッドおよびその製造方法 |
JP2003203311A (ja) | 2001-12-28 | 2003-07-18 | Tdk Corp | 磁性層パターンの形成方法および薄膜磁気ヘッドの製造方法 |
JP2004094997A (ja) * | 2002-08-29 | 2004-03-25 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
JP2004281017A (ja) * | 2003-03-19 | 2004-10-07 | Alps Electric Co Ltd | 磁気ヘッドの製造方法 |
JP2005018836A (ja) * | 2003-06-23 | 2005-01-20 | Hitachi Ltd | 磁気ヘッド及びその製造方法 |
JP4260002B2 (ja) * | 2003-12-24 | 2009-04-30 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 磁気ヘッドとその製造方法および磁気記録再生装置 |
JP2006202436A (ja) * | 2005-01-21 | 2006-08-03 | Tdk Corp | 薄膜パターンの形成方法および薄膜磁気ヘッドの製造方法 |
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2006
- 2006-01-04 JP JP2006000185A patent/JP4745829B2/ja not_active Expired - Fee Related
- 2006-12-21 US US11/645,104 patent/US7389578B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US7389578B2 (en) | 2008-06-24 |
US20070186409A1 (en) | 2007-08-16 |
JP2007184020A (ja) | 2007-07-19 |
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