JP4603101B1 - 回折光学素子の製造方法および回折光学素子 - Google Patents
回折光学素子の製造方法および回折光学素子 Download PDFInfo
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Abstract
【選択図】図1
Description
図1、図2は、本発明の第1の実施の形態に係る回折光学素子の製造方法を示す図である。図1、図2を参照して、回折光学素子である回折レンズの基材の中心と、金型の成型面の中心とを認識し、高精度に回折光学素子を製造する方法について説明する。
次に、本発明の実施の形態2に係る回折光学素子の成型誤差を検出する方法を説明する。
図5は、本発明の第3の実施の形態に係る回折光学素子の製造方法を示す図である。図5(a)は、レンズ基材4の平面図および断面図であり、図5(b)は、金型1の平面図および断面図である。
図6(a)〜(d)を参照して、レンズ基材の回折輪帯と金型のマーカーを認識して位置決めする製造方法とは異なり、金型同士を位置決めしてナノコンポジット膜を成形する回折光学素子の製造方法を説明する。
2 成型面
3 マーカー
4 レンズ基材
5 回折格子
6 回折輪帯
7 カメラ
8 滴下装置
9 ナノコンポジット材料
10 光学調整層
11 マーカー
Claims (8)
- 第1の樹脂を含む第1の光学材料からなり、表面に回折格子形状を有する基材と、
第2の樹脂を含む第2の光学材料からなり、前記基材の前記回折格子形状上に形成された光学調整層と、
を有する回折光学素子の製造方法であって、
前記製造方法は、
金型の成型面の中心に形成された所定形状のマーカーと、前記基材の前記回折格子形状とに基づいて、前記金型の前記成型面の中心と前記基材の前記回折格子形状の中心との位置合わせをする工程と、
前記金型の前記成型面と前記基材の前記回折格子形状との間に、前記第2の光学材料の原料を配置する工程と、
前記金型と前記基材とにより前記第2の光学材料の原料を押圧して、前記回折格子形状上に前記光学調整層を形成する工程と、
を包含し、
前記位置合わせをする工程は、前記回折格子形状の複数の座標より求めた前記回折格子形状の中心位置と前記マーカーとの位置合わせをする工程を含む、回折光学素子の製造方法。 - 前記位置合わせをする工程は、前記回折格子形状の輪帯と前記マーカーとの位置合わせをする工程を含む、請求項1に記載の回折光学素子の製造方法。
- 前記位置合わせをする工程は、前記回折格子形状の最内周の輪帯と前記マーカーとの位置合わせをする工程を含む、請求項1または2に記載の回折光学素子の製造方法。
- 前記位置合わせをする工程は、
前記回折格子形状の最内周の輪帯を検出する工程と、
前記最内周の輪帯よりも内側に前記マーカーの位置を設定する工程と、
を含む、請求項1から3のいずれかに記載の回折光学素子の製造方法。 - 前記マーカーは、前記成型面に形成された凹部または凸部である、請求項1から4のいずれかに記載の回折光学素子の製造方法。
- 前記マーカーの大きさは、前記成型面に沿った長さが50μm以下であり、かつ前記成型面に対する深さが50μm以下である、請求項1から5のいずれかに記載の回折光学素子の製造方法。
- 回折光学素子の成型誤差を検出する方法であって、
前記回折光学素子は、
第1の樹脂を含む第1の光学材料からなり、表面に回折格子形状を有する基材と、
第2の樹脂を含む第2の光学材料からなり、前記基材の前記回折格子形状上に形成された光学調整層と、
を有し、
前記光学調整層は、成型面の中心に所定形状のマーカーを有する金型を用いて前記基材上に成型されており、
前記光学調整層のうちの前記基材側とは反対側の表面には、前記マーカーの形状に応じた所定形状の凹部または凸部が形成されており、
前記方法は、
表示装置に表示された第1の印と、前記回折格子形状の輪帯との位置合わせを行う工程と、
前記第1の印に対応付けて前記表示装置に表示された第2の印と、前記光学調整層の前記凹部または凸部との位置関係を検出する工程と、
を包含する、回折光学素子の成型誤差を検出する方法。 - 前記第1の印と前記回折格子形状の最内周の輪帯との位置合わせを行う、請求項7に記載の回折光学素子の成型誤差を検出する方法。
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US9609342B2 (en) * | 2010-02-19 | 2017-03-28 | Skype | Compression for frames of a video signal using selected candidate blocks |
JP5742234B2 (ja) * | 2011-01-18 | 2015-07-01 | 株式会社ニコン | 光学素子用成形型、光学素子の製造方法、および光学素子 |
EP2481559B1 (en) * | 2011-02-01 | 2019-05-01 | Siemens Aktiengesellschaft | Preparing a wind turbine blade for correct positioning in a subsequent assembly step |
CN103348270B (zh) * | 2011-02-08 | 2016-08-17 | 浜松光子学株式会社 | 光学元件及其制造方法 |
DE102017200428B3 (de) | 2017-01-12 | 2018-06-21 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage sowie Verfahren zum Vermessen eines Abbildungsfehlers |
JP6824424B2 (ja) * | 2017-09-11 | 2021-02-03 | 富士フイルム株式会社 | 複合レンズの製造装置、方法およびプログラム |
JP7201620B2 (ja) * | 2017-12-27 | 2023-01-10 | 株式会社日立ハイテク | 凹面回折格子の製造方法 |
US20210060824A1 (en) * | 2019-08-30 | 2021-03-04 | Lightpath Technologies, Inc. | Fiducials for precision optics molding |
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JP2002062417A (ja) * | 2000-06-07 | 2002-02-28 | Canon Inc | 回折光学素子、該回折光学素子を有する光学系及び光学機器、回折光学素子の製造方法、回折光学素子製造用の金型 |
JP2002182022A (ja) * | 2000-12-14 | 2002-06-26 | Canon Inc | 回折光学素子とその製造方法、及び該回折光学素子を有する光学系、観察装置、撮像素子及び撮像装置 |
JP2006268015A (ja) * | 2005-02-25 | 2006-10-05 | Sanyo Electric Co Ltd | 光学素子、光学系及びそれらの製造方法並びに光学装置 |
WO2007111077A1 (ja) * | 2006-03-24 | 2007-10-04 | Matsushita Electric Industrial Co., Ltd. | 複合光学素子 |
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WO2010073675A1 (ja) | 2010-07-01 |
US8559109B2 (en) | 2013-10-15 |
JPWO2010073675A1 (ja) | 2012-06-07 |
US20110026119A1 (en) | 2011-02-03 |
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