JP4590940B2 - Surface coated cemented carbide cutting tool with excellent wear resistance due to hard coating layer - Google Patents
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- 238000005520 cutting process Methods 0.000 title claims description 62
- 239000011247 coating layer Substances 0.000 title claims description 21
- 239000010936 titanium Substances 0.000 claims description 62
- 239000010410 layer Substances 0.000 claims description 48
- 229910052719 titanium Inorganic materials 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 43
- 238000009826 distribution Methods 0.000 claims description 32
- 239000013078 crystal Substances 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 16
- 238000012986 modification Methods 0.000 claims description 10
- 230000004048 modification Effects 0.000 claims description 10
- 238000007733 ion plating Methods 0.000 claims description 9
- 239000011195 cermet Substances 0.000 claims description 4
- 238000001887 electron backscatter diffraction Methods 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 238000005240 physical vapour deposition Methods 0.000 claims description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- 239000000843 powder Substances 0.000 description 30
- 238000012360 testing method Methods 0.000 description 17
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- 239000000203 mixture Substances 0.000 description 16
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- 238000010891 electric arc Methods 0.000 description 12
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 229910001018 Cast iron Inorganic materials 0.000 description 7
- 239000012298 atmosphere Substances 0.000 description 7
- 238000005553 drilling Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910000975 Carbon steel Inorganic materials 0.000 description 2
- 239000010962 carbon steel Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
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- 238000000227 grinding Methods 0.000 description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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Description
この発明は、特に鋼や鋳鉄などの切削加工に際して、硬質被覆層が一段とすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具（以下、被覆超硬工具という）に関するものである。 The present invention relates to a surface-coated cemented carbide cutting tool (hereinafter referred to as a coated cemented carbide tool) in which a hard coating layer exhibits excellent wear resistance, particularly when cutting steel or cast iron.
一般に、被覆超硬工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるスローアウエイチップ、穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに切刃が断続切削加工形態をとる面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、また前記スローアウエイチップを着脱自在に取り付けて前記ソリッドタイプのエンドミルと同様に切削加工を行うスローアウエイエンドミル工具などが知られている。 In general, coated carbide tools are used for slow-away inserts that are detachably attached to the tip of a cutting tool for drilling and cutting of various materials such as steel and cast iron, and for flat cutting. There are drills, miniature drills, solid type end mills that are used for chamfering, grooving, shoulder processing, etc. where the cutting blade takes an intermittent cutting form, and the solid type with the above throwaway tip attached detachably A slow-away end mill tool that performs a cutting process in the same manner as an end mill is known.
また、被覆超硬工具として、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された超硬基体の表面に、
組成式：（Ｔｉ1-（X＋Ｚ） ＡｌX ＳｉＺ ）Ｎ（ただし、原子比で、Ｘは０．４５〜０．７０、Ｚは０．０１〜０．１５を示す）、
を満足するＴｉとＡｌとＳｉの複合窒化物［以下、（Ｔｉ，Ａｌ，Ｓｉ）Ｎで示す］層からなる硬質被覆層を１〜１５μｍの平均層厚で蒸着形成してなる被覆超硬工具が知られており、前記（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層が、構成成分であるＡｌによって高温硬さと耐熱性、同Ｔｉによって高温強度を具備し、さらに同Ｓｉによる一段の耐熱性向上効果と相俟って、これを各種の鋼や鋳鉄などの連続切削や断続切削加工を高速切削条件で用いた場合にすぐれた切削性能を発揮することも知られている。
Further, as a coated carbide tool, on the surface of a carbide substrate composed of tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet,
Composition formula: (Ti 1- (X + Z) Al X Si Z ) N (wherein, X is 0.45 to 0.70, Z is 0.01 to 0.15 in atomic ratio),
Coated carbide tool formed by vapor-depositing a hard coating layer composed of a composite nitride of Ti, Al, and Si (hereinafter referred to as (Ti, Al, Si) N) satisfying the above conditions with an average layer thickness of 1 to 15 μm The (Ti, Al, Si) N layer has high-temperature hardness and heat resistance due to Al as a constituent component, high-temperature strength due to Ti, and further improved heat resistance due to Si. In combination, it is also known to exhibit excellent cutting performance when continuous cutting and intermittent cutting of various steels and cast iron are used under high-speed cutting conditions.
さらに、上記の被覆超硬工具が、例えば図５に概略説明図で示される物理蒸着装置の１種であるアークイオンプレーティング装置に上記の超硬基体を装着し、
装置内雰囲気：０．１Ｐａ以下の真空、
装置内加熱温度：３００〜５００℃、
超硬基体に印加する直流バイアス電圧：−６００〜−１０００Ｖ、
カソード電極：金属チタン（Ｔｉ）、
上記カソード電極とアノード電極間のアーク放電電流：６０〜１００Ａ
処理時間：１〜１０分、
の条件で、超硬基体の表面をＴｉボンバード洗浄処理した状態で、ヒータで装置内を、例えば５００℃の温度に加熱保持しながら、硬質被覆層である（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層形成用カソード電極（蒸発源）として装着された所定組成を有するＴｉ−Ａｌ−Ｓｉ合金とアノード電極との間に、例えば電流：９０Ａの条件でアーク放電を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して、例えば２Ｐａの反応雰囲気とし、一方上記超硬基体には、例えば−１００Ｖのバイアス電圧を印加した条件で、前記超硬基体の表面に、上記（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層からなる硬質被覆層を蒸着することにより製造されることも知られている。
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 300-500 ° C
DC bias voltage applied to the carbide substrate: −600 to −1000 V,
Cathode electrode: metal titanium (Ti),
Arc discharge current between the cathode electrode and the anode electrode: 60 to 100 A
Processing time: 1-10 minutes,
(Ti, Al, Si) N layer formation as a hard coating layer while maintaining the inside of the apparatus heated to a temperature of, for example, 500 ° C. with a heater in a state where the surface of the carbide substrate is subjected to a Ti bombard cleaning process under the conditions of For example, an arc discharge is generated between the Ti—Al—Si alloy having a predetermined composition mounted as a cathode electrode (evaporation source) and the anode electrode under the condition of current: 90 A, and at the same time, nitrogen as a reaction gas in the apparatus A gas is introduced to form a reaction atmosphere of, for example, 2 Pa. On the other hand, on the surface of the cemented carbide substrate, a bias voltage of, for example, −100 V is applied to the surface of the cemented carbide substrate. It is also known to be produced by vapor-depositing a hard coating layer consisting of layers.
近年の切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、被覆超硬工具にはより一段の長寿命化が求められる傾向にあるが、上記の従来被覆超硬工具においては、硬質被覆層である（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の摩耗進行が相対的に速く、この結果比較的短時間で使用寿命に至るのが現状である。 In recent years, there has been a strong demand for labor saving, energy saving, and cost reduction for cutting, and along with this, coated carbide tools tend to require a much longer life. In the tool, the progress of wear of the (Ti, Al, Si) N layer which is a hard coating layer is relatively fast, and as a result, the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記の従来被覆超硬工具の硬質被覆層に着目し、これの一段の耐摩耗性向上をはかるべく研究を行った結果、
（ａ）図４に示されるアークイオンプレーティング装置を用い、上記の従来の超硬基体表面に対するＴｉボンバード洗浄処理に代って、
装置内雰囲気：０．１Ｐａ以下の真空、
装置内加熱温度：５５０〜７００℃、
超硬基体に印加する直流バイアス電圧：−６００〜−１０００Ｖ、
カソード電極：金属クロム（Ｃｒ）、
上記カソード電極とアノード電極間のアーク放電電流：６０〜１００Ａ、
処理時間：１〜１０分、
の条件で、超硬基体表面をＣｒボンバード処理する基体表面改質処理を施した状態で、通常の条件で、硬質被覆層として上記の組成式：（Ｔｉ1-（X＋Ｚ） ＡｌX ＳｉＺ ）Ｎ（ただし、原子比で、Ｘは０．４５〜０．７０、Ｚは０．０１〜０．１５を示す）、を満足する（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を形成すると、この結果形成された（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層は、鋼や鋳鉄などを高速切削加工した場合にも長期に亘ってすぐれた耐摩耗性を発揮するようになること。
Therefore, the present inventors, from the above viewpoint, paying attention to the hard coating layer of the above conventional coated carbide tool, as a result of conducting research to improve this one-stage wear resistance,
(A) Using the arc ion plating apparatus shown in FIG. 4, instead of the above-described conventional Ti bombard cleaning treatment for the carbide substrate surface,
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 550 to 700 ° C.
DC bias voltage applied to the carbide substrate: -600 to -1000 V,
Cathode electrode: chromium metal (Cr),
Arc discharge current between the cathode electrode and the anode electrode: 60 to 100 A,
Processing time: 1-10 minutes,
Under the conditions described above, the above-described composition formula: (Ti 1- (X + Z) Al x Si Z ) When a (Ti, Al, Si) N layer satisfying N (wherein, X is 0.45 to 0.70 and Z is 0.01 to 0.15 in terms of atomic ratio) is formed as a result The (Ti, Al, Si) N layer should exhibit excellent wear resistance over a long period even when steel or cast iron is cut at high speed.
（ｂ）上記（ａ）の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層と上記の従来（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層について、電界放出型走査電子顕微鏡を用い、図１に概略説明図で示される通り、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用いて、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{１００}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層は、図３に例示される通り、{１００}面の測定傾斜角の分布が０〜４５度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記（ａ）の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の傾斜角度数分布グラフは、図２に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは超硬基体表面をＣｒでボンバード処理する表面改質処理に際して、カソード電極である金属Ｃｒとアノード電極間のアーク放電電流を変化させることによりグラフ横軸の傾斜角区分に現れる位置が変ること。 (B) The (Ti, Al, Si) N layer of (a) and the above-described conventional (Ti, Al, Si) N layer are schematically illustrated in FIG. 1 using a field emission scanning electron microscope. As described above, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and using an electron backscatter diffraction image apparatus, a predetermined region is spaced at an interval of 0.1 μm / step . The inclination angle formed by the normal line of the {100} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the surface polished surface, and is within the range of 0 to 45 degrees of the measurement inclination angle. When the measurement inclination angle is divided for each pitch of 0.25 degrees and the inclination angle number distribution graph is formed by counting the frequencies existing in each division, the conventional (Ti, Al, Si) N layer is As illustrated in FIG. 3, the distribution of measured inclination angles on the {100} plane is in the range of 0 to 45 degrees. In FIG. 2, the inclination angle number distribution graph of the (Ti, Al, Si) N layer in (a) is shown in FIG. A sharp maximum peak appears at a specific position, and this sharp maximum peak changes the arc discharge current between the cathode metal Cr and the anode electrode during the surface modification treatment in which the carbide substrate surface is bombarded with Cr. As a result, the position that appears in the tilt angle section of the horizontal axis of the graph changes.
（ｃ）多くの試験結果によれば、上記カソード電極とアノード電極間のアーク放電電流を上記の通り６０〜１００Ａの範囲内で変化させると、上記シャープな最高ピークが傾斜角区分の８〜２０度の範囲内に現れると共に、前記８〜２０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示すようになり、こような傾斜角度数分布グラフを示す（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を硬質被覆層として形成してなる被覆超硬工具は高速切削加工ですぐれた耐摩耗性を長期に亘って発揮するようになること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) According to many test results, when the arc discharge current between the cathode electrode and the anode electrode is changed within the range of 60 to 100 A as described above, the sharp maximum peak is 8 to 20 of the inclination angle section. As shown in the slope angle distribution graph, which appears in the range of degrees and the total of the frequencies existing in the range of 8 to 20 degrees occupies a ratio of 45 to 65% of the whole degrees in the slope angle distribution graph. The coated carbide tool formed by forming the (Ti, Al, Si) N layer as a hard coating layer, which shows such an inclination angle number distribution graph, exhibits excellent wear resistance over a long period of time by high-speed cutting. To come to do.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、アークイオンプレティング装置を用い、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された超硬基体の表面に、Ｃｒボンバード処理（表面改質処理）した状態で、
組成式：（Ｔｉ1-（X＋Ｚ） ＡｌX ＳｉＺ ）Ｎ（ただし、原子比で、Ｘは０．４５〜０．７０、Ｚは０．０１〜０．１５を示す）を満足し、かつ、１〜１５μｍの平均層厚で物理蒸着形成してなる（Ｔｉ，Ａｌ，Ｓｉ）Ｎで硬質被覆層を構成し、
上記の硬質被覆層を構成する（Ｔｉ，Ａｌ，Ｓｉ）Ｎは、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用いて、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{１００}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、８〜２０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記８〜２０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示す、被覆超硬工具に特徴を有するものである。
The present invention has been made based on the above research results, and using an arc ion plating apparatus, the surface of a cemented carbide substrate made of a WC-based cemented carbide or TiCN-based cermet is treated with a Cr bombardment treatment ( In a state of surface modification treatment)
Compositional formula: (Ti 1− (X + Z) Al X Si Z ) N (wherein X is 0.45 to 0.70 and Z is 0.01 to 0.15 in atomic ratio), and The hard coating layer is composed of (Ti, Al, Si) N formed by physical vapor deposition with an average layer thickness of 1 to 15 μm ,
The (Ti, Al, Si) N constituting the hard coating layer is obtained by using a field emission scanning electron microscope and applying an electron beam to each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Irradiate and use the electron backscatter diffraction image apparatus, and the method of the {100} plane that is the crystal plane of the crystal grain with respect to the normal line of the surface-polished surface at a predetermined region at an interval of 0.1 μm / step Measure the tilt angle formed by the line, and divide the measured tilt angles within the range of 0 to 45 degrees out of the measured tilt angles by pitch of 0.25 degrees, and count the frequencies existing in each section In the inclination angle distribution graph, the highest peak is present in the inclination angle section within the range of 8 to 20 degrees, and the sum of the frequencies existing within the range of 8 to 20 degrees is the inclination angle number distribution graph. Tilt angle occupying 45-65% of total frequency It is characterized by a coated carbide tool showing a frequency distribution graph.
なお、上記の通り、この発明の被覆超硬工具の硬質被覆層を構成する（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層におけるＡｌ成分には高温硬さと耐熱性を向上させ、一方同Ｔｉ成分には高温強度を向上させ、さらに同Ｓｉ成分にはＡｌとの共存において一段と耐熱性を向上させる作用があるが、Ａｌの割合を示すＸ値がＴｉとＳｉとの合量に占める割合（原子比、以下同じ）で０．４５未満になると、相対的にＴｉの割合が多くなり過ぎて、すぐれた高温硬さと耐熱性を確保することができず、摩耗進行が急激に促進するようになり、一方Ａｌの割合を示すＸ値が同０．７０を越えると、相対的にＴｉの割合が少なくなり過ぎて、高温強度が急激に低下し、チッピングが発生し易くなることから、Ｘ値を０．４５〜０．７０と定めた。
また、Ｓｉの割合を示すＺ値がＴｉとＡｌの合量に占める割合で、０．０１未満では、所望の耐熱性向上効果が得られず、一方同Ｚ値が０．１５を超えると、高温強度が低下するようになることから、Ｚ値を０．０１〜０．１５と定めた。
さらに、その平均層厚が１μｍ未満では、自身のもつすぐれた耐摩耗性を長期に亘って発揮するには不十分であり、一方その平均層厚が１５μｍを越えると、チッピングが発生し易くなることから、その平均層厚を１〜１５μｍと定めた。
As described above, the Al component in the (Ti, Al, Si) N layer constituting the hard coating layer of the coated carbide tool of the present invention improves the high temperature hardness and heat resistance, while the Ti component has a high temperature. The Si component has the effect of further improving the heat resistance in the coexistence with Al, but the ratio of the Al value to the total amount of Ti and Si (atomic ratio, below) If the ratio is less than 0.45, the proportion of Ti is excessively increased, and excellent high-temperature hardness and heat resistance cannot be secured, and the progress of wear is rapidly promoted. If the X value indicating the ratio exceeds 0.70, the Ti ratio becomes relatively small, the high-temperature strength rapidly decreases, and chipping is likely to occur. It was set to -0.70.
Moreover, if the Z value indicating the proportion of Si is a proportion of the total amount of Ti and Al, and less than 0.01, the desired heat resistance improvement effect cannot be obtained, while if the Z value exceeds 0.15, Since the high-temperature strength is lowered, the Z value is determined to be 0.01 to 0.15.
Furthermore, if the average layer thickness is less than 1 μm, it is insufficient to exhibit its excellent wear resistance over a long period of time, whereas if the average layer thickness exceeds 15 μm, chipping is likely to occur. Therefore, the average layer thickness was determined to be 1 to 15 μm.
また、上記の通り、（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、超硬基体表面をＣｒボンバード処理する基体表面改質処理に際して、金属Ｃｒのカソード電極とアノード電極間のアーク放電電流を変化させることによって変化するが、多くの試験の結果、前記アーク放電電流を６０〜１００Ａとした場合に、最高ピークが８〜２０度の範囲内の傾斜角区分に現れると共に、前記８〜２０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフが得られるようになる、という結論に達したものであり、したがって、前記アーク放電電流が６０Ａ未満でも、１００Ａを越えても、測定傾斜角の最高ピーク位置は８〜２０度の範囲から外れてしまい、このような場合には所望のすぐれた耐摩耗性を発揮することができないものである。 In addition, as described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the (Ti, Al, Si) N layer is the same as that of the metal Cr during the substrate surface modification treatment in which the carbide substrate surface is Cr bombarded. It changes by changing the arc discharge current between the cathode electrode and the anode electrode. As a result of many tests, when the arc discharge current is 60 to 100 A, the maximum peak is in the range of 8 to 20 degrees. In addition to appearing in the angle section, an inclination angle number distribution graph is obtained in which the total number of frequencies existing in the range of 8 to 20 degrees occupies a proportion of 45 to 65% of the entire frequency in the inclination angle frequency distribution graph. Therefore, even if the arc discharge current is less than 60 A or more than 100 A, the maximum peak position of the measured inclination angle is 8 to 20 degrees. Deviates from the range, in this case are those unable to exert the desired excellent wear resistance.
この発明の被覆超硬工具は、特に鋼や鋳鉄などの高速切削加工に際して、硬質被覆層が一段とすぐれた耐摩耗性を発揮し、使用寿命の延命化に寄与するものである。 In the coated carbide tool of the present invention, particularly in high-speed cutting processing of steel, cast iron and the like, the hard coating layer exhibits much higher wear resistance and contributes to the extension of the service life.
つぎに、この発明の被覆超硬工具を実施例により具体的に説明する。 Next, the coated carbide tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、ボールミルで７２時間湿式混合し、乾燥した後、１００ＭＰａ の圧力で圧粉体にプレス成形し、この圧粉体を６Ｐａの真空中、温度：１４００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＷＣ基超硬合金製の超硬基体Ａ１〜Ａ１０を形成した。 As raw material powders, WC powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, and Co powder, all having an average particle diameter of 1 to 3 μm, were prepared. And then wet-mixed with a ball mill for 72 hours, dried, and press-molded into a green compact at a pressure of 100 MPa. The green compact was vacuumed at 6 Pa at a temperature of 1400 ° C. for 1 hour. Sintered under the holding conditions, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03, and the carbide bases A1 to A10 made of WC-based cemented carbide having ISO / CNMG120408 chip shape Formed.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（重量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、１００ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を２ｋＰａの窒素雰囲気中、温度：１５００℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３のホーニング加工を施してＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣＮ基サーメット製の超硬基体Ｂ１〜Ｂ６を形成した。 In addition, as raw material powders, all are TiCN (weight ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 100 MPa. The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to obtain ISO standard / CNMG120408. The carbide substrates B1 to B6 made of TiCN base cermet having the following chip shape were formed.
ついで、上記の超硬基体Ａ１〜Ａ１０およびＢ１〜Ｂ６のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図４に示されるアークイオンプレーティング装置に装着し、カソード電極（蒸発源）として、種々の成分組成をもったＴｉ−Ａｌ−Ｓｉ合金および超硬基体表面改質処理用金属Ｃｒを装着し、まず、
装置内雰囲気：０．１Ｐａ以下の真空、
装置内加熱温度：６００℃、
超硬基体に印加する直流バイアス電圧：−８００Ｖ、
カソード電極：金属Ｃｒ、
アーク放電電流：６０〜１００Ａの範囲内の所定の電流、
処理時間：５分、
の条件で、上記カソード電極の前記金属Ｃｒとアノード電極との間にアーク放電を発生させて、上記超硬基体表面をＣｒボンバード処理する超硬基体表面改質処理を行い、ついで装置内に反応ガスとして窒素ガスを導入して２Ｐａの反応雰囲気とすると共に、前記超硬基体に−１００Ｖの直流バイアス電圧を印加し、前記カソード電極であるＴｉ−Ａｌ−Ｓｉ合金とアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって前記超硬基体の表面に、表３に示される目標組成および目標層厚の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を蒸着することにより、本発明被覆超硬工具としての本発明表面被覆超硬合金製スローアウエイチップ（以下、本発明被覆超硬チップと云う）１〜１６をそれぞれ製造した。
Next, each of the above-mentioned carbide substrates A1 to A10 and B1 to B6 was ultrasonically cleaned in acetone and dried, and mounted on the arc ion plating apparatus shown in FIG. ), A Ti—Al—Si alloy having various component compositions and a metal Cr for carbide substrate surface modification treatment were mounted,
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 600 ° C.
DC bias voltage applied to the carbide substrate: -800V,
Cathode electrode: metal Cr,
Arc discharge current: a predetermined current in the range of 60-100A,
Processing time: 5 minutes
Under these conditions, arc discharge is generated between the metal Cr and the anode electrode of the cathode electrode, and the carbide substrate surface is reformed by Cr bombarding the surface of the carbide substrate. Nitrogen gas is introduced as a gas to form a reaction atmosphere of 2 Pa, a DC bias voltage of −100 V is applied to the cemented carbide substrate, and 100 A is provided between the cathode electrode Ti—Al—Si alloy and the anode electrode. The current coating is applied to generate arc discharge, and the (Ti, Al, Si) N layer having the target composition and target layer thickness shown in Table 3 is deposited on the surface of the cemented carbide substrate. The present invention surface-coated cemented carbide throwaway tips (hereinafter referred to as the present invention coated carbide tips) 1 to 16 as carbide tools were produced, respectively.
また、比較の目的で、図５のアークイオンプレーティング装置を用い、上記の超硬基体表面を、上記のＣｒボンバード処理による超硬表面改質処理に代って、
装置内雰囲気：０．１Ｐａ以下の真空、
装置内加熱温度：５００℃、
超硬基体に印加する直流バイアス電圧：−８００Ｖ、
カソード電極：金属Ｔｉ、
アーク放電電流：６０〜１００Ａの範囲内の所定の電流、
処理時間：５分、
の条件で、上記超硬基体の表面をＴｉボンバード洗浄処理する以外は同一の条件で（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を蒸着することにより、表４に示される通りの従来被覆超硬工具としての従来表面被覆超硬合金製スローアウエイチップ（以下、従来被覆超硬チップと云う）１〜１６をそれぞれ製造した。
Further, for the purpose of comparison, using the arc ion plating apparatus of FIG. 5, the above-mentioned carbide substrate surface is replaced with the above-described carbide surface modification treatment by Cr bombardment treatment,
In-apparatus atmosphere: vacuum of 0.1 Pa or less,
In-apparatus heating temperature: 500 ° C
DC bias voltage applied to the carbide substrate: -800V,
Cathode electrode: Ti metal,
Arc discharge current: a predetermined current in the range of 60-100A,
Processing time: 5 minutes
The conventional coated carbide tool as shown in Table 4 is formed by vapor-depositing a (Ti, Al, Si) N layer under the same conditions except that the surface of the carbide substrate is subjected to a Ti bombard cleaning process under the conditions of Conventional surface-coated cemented carbide throwaway tips (hereinafter referred to as conventional coated cemented carbide tips) 1 to 16 were produced.
つぎに、上記本発明被覆超硬チップ１〜１６および従来被覆超硬チップ１〜１６について、これを工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＮＣＭ４３９の丸棒、
切削速度：３５０ｍ／ｍｉｎ．、
切り込み：１．４ｍｍ、
送り：０．３ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件（切削条件Ａという）での合金鋼の乾式連続高速切削加工試験（通常の切削速度は２００ｍ／ｍｉｎ．）、
被削材：ＪＩＳ・Ｓ４５Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：３６０ｍ／ｍｉｎ．、
切り込み：１．０ｍｍ、
送り：０．２４ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件（切削条件Ｂという）での炭素鋼の乾式断続高速切削加工試験（通常の切削速度は２００ｍ／ｍｉｎ．）、さらに、
被削材：ＪＩＳ・ＦＣ３００の丸棒、
切削速度：３６０ｍ／ｍｉｎ．、
切り込み：１．２ｍｍ、
送り：０．２５ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件（切削条件Ｃという）での鋳鉄の乾式連続高速切削加工試験（通常の切削速度は２００ｍ／ｍｉｎ．）を行い、いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表５に示した。
Next, with the present invention coated carbide tips 1-16 and conventional coated carbide tips 1-16, in a state where this is screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SNCM439 round bar,
Cutting speed: 350 m / min. ,
Cutting depth: 1.4mm,
Feed: 0.3 mm / rev. ,
Cutting time: 10 minutes,
Dry continuous high-speed cutting test of alloy steel under the conditions (cutting condition A) (normal cutting speed is 200 m / min.),
Work material: JIS · S45C lengthwise equal 4 round grooved round bars,
Cutting speed: 360 m / min. ,
Cutting depth: 1.0 mm,
Feed: 0.24 mm / rev. ,
Cutting time: 10 minutes,
Dry intermittent high-speed cutting test of carbon steel under the conditions (referred to as cutting condition B) (normal cutting speed is 200 m / min.),
Work material: JIS / FC300 round bar,
Cutting speed: 360 m / min. ,
Cutting depth: 1.2mm,
Feed: 0.25 mm / rev. ,
Cutting time: 10 minutes,
The dry continuous high-speed cutting test (normal cutting speed is 200 m / min.) Of cast iron under the above conditions (referred to as cutting condition C) was performed, and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 5.
原料粉末として、平均粒径：５．５μｍを有する中粗粒ＷＣ粉末、同０．８μｍの微粒ＷＣ粉末、同１．３μｍのＴａＣ粉末、同１．２μｍのＮｂＣ粉末、同１．２μｍのＺｒＣ粉末、同２．３μｍのＣｒ3Ｃ2粉末、同１．５μｍのＶＣ粉末、同１．０μｍの（Ｔｉ，Ｗ）Ｃ［質量比で、５０／５０］粉末、および同１．８μｍのＣｏ粉末を用意し、これら原料粉末をそれぞれ表６に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、１００ＭＰａの圧力で所定形状の各種の圧粉体にプレス成形し、これらの圧粉体を、６Ｐａの真空雰囲気中、７℃／分の昇温速度で１３７０〜１４７０℃の範囲内の所定の温度に昇温し、この温度に１時間保持後、炉冷の条件で焼結して、直径が８ｍｍ、１３ｍｍ、および２６ｍｍの３種の超硬基体形成用丸棒焼結体を形成し、さらに前記の３種の丸棒焼結体から、研削加工にて、表６に示される組合せで、切刃部の直径×長さがそれぞれ６ｍｍ×１３ｍｍ、１０ｍｍ×２２ｍｍ、および２０ｍｍ×４５ｍｍの寸法、並びにいずれもねじれ角：３０度の４枚刃スクエアの形状をもった超硬基体（エンドミル）Ｃ−１〜Ｃ−８をそれぞれ製造した。
また、別途、上記超硬基体（エンドミル）Ｃ−１〜Ｃ−８とそれぞれ同じ組成をもち、かついずれも平面：１２ｍｍ×１２ｍｍ、厚さ：６ｍｍの寸法をもった電界放出型走査電子顕微鏡による傾斜角度数分布グラフ作成用試験片を用意した。
As raw material powders, medium coarse WC powder having an average particle diameter of 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, NbC powder of 1.2 μm, ZrC of 1.2 μm Powder, 2.3 μm Cr 3 C 2 powder, 1.5 μm VC powder, 1.0 μm (Ti, W) C [50/50 by mass ratio] powder, and 1.8 μm Co Prepare powders, mix each of these raw material powders with the composition shown in Table 6, add wax, ball mill mix in acetone for 24 hours, dry under reduced pressure, and then press various pressures of a predetermined shape at a pressure of 100 MPa. The powder compact is press-molded, and these green compacts are heated to a predetermined temperature in the range of 1370 to 1470 ° C. at a heating rate of 7 ° C./min in a vacuum atmosphere of 6 Pa, and this temperature is maintained for 1 hour. After holding, sintering under furnace cooling conditions, the diameter is 8m , 13 mm, and 26 mm round bar sintered bodies for forming a cemented carbide substrate were formed, and the above three types of round bar sintered bodies were cut into the combinations shown in Table 6 by grinding. Carbide substrate (end mill) C- having a shape of a four-blade square with a blade portion diameter × length of 6 mm × 13 mm, 10 mm × 22 mm, and 20 mm × 45 mm, respectively, and a twist angle of 30 degrees. 1 to C-8 were produced.
Separately, by a field emission scanning electron microscope having the same composition as the above-mentioned carbide substrates (end mills) C-1 to C-8, and each having dimensions of plane: 12 mm × 12 mm, thickness: 6 mm. A test piece for preparing an inclination angle number distribution graph was prepared.
ついで、これらの超硬基体（エンドミル）Ｃ−１〜Ｃ−８および試験片を、アセトン中で超音波洗浄し、乾燥した状態で、同じく図４に示されるアークイオンプレーティング装置に装入し、上記実施例１と同一の条件で、超硬基体表面改質処理を行い、かつ表７に示される目標組成および目標層厚の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を蒸着することにより、本発明被覆超硬工具としての本発明表面被覆超硬合金製エンドミル（以下、本発明被覆超硬エンドミルと云う）１〜８をそれぞれ製造した。 Then, these carbide substrates (end mills) C-1 to C-8 and test pieces were ultrasonically cleaned in acetone and dried, and then loaded into the arc ion plating apparatus shown in FIG. By performing a carbide substrate surface modification treatment under the same conditions as in Example 1 above, and depositing a (Ti, Al, Si) N layer having the target composition and target layer thickness shown in Table 7, End mills made of the present invention surface coated cemented carbide alloy (hereinafter referred to as the present invention coated carbide end mill) 1 to 8 as invention coated carbide tools were produced, respectively.
また、比較の目的で、上記実施例１と同一の条件で、上記の超硬基体の表面を、上記のＷボンバード処理による超硬基体表面改質処理に代って、Ｔｉボンバード洗浄処理する以外は同一の条件で（Ａｌ，Ｔｉ）Ｎ層を蒸着することにより、同じく表７に示される通りの（従来被覆超硬工具としての従来表面被覆超硬合金製エンドミル（以下、従来被覆超硬エンドミルと云う）１〜８をそれぞれ製造した。 For the purpose of comparison, the surface of the above-mentioned carbide substrate is subjected to Ti bombard cleaning treatment in place of the above-described carbide substrate surface modification treatment by W bombardment treatment under the same conditions as in Example 1. (Al, Ti) N layer is deposited under the same conditions, as shown in Table 7 (the conventional surface-coated cemented carbide end mill (hereinafter referred to as the conventional coated carbide end mill as a conventional coated carbide tool). 1) to 8 were produced.
つぎに、上記本発明被覆超硬エンドミル１〜８および従来被覆超硬エンドミル１〜８のうち、本発明被覆超硬エンドミル１〜３および従来被覆超硬エンドミル１〜３については、
被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＪＩＳ・ＳＫＤ６１の板材、
切削速度：８０ｍ／ｍｉｎ．、
溝深さ（切り込み）：０．２２ｍｍ、
テーブル送り：３２０ｍｍ／分、
の条件での工具鋼の乾式高速溝切削加工試験（通常の切削速度は４５ｍ／ｍｉｎ．）、本発明被覆超硬エンドミル４〜６および従来被覆超硬エンドミル４〜６については、
被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＪＩＳ・Ｓ５５Ｃの板材、
切削速度：１８０ｍ／ｍｉｎ．、
溝深さ（切り込み）：２．４ｍｍ、
テーブル送り：８００ｍｍ／分、
の条件での炭素鋼の乾式高速溝切削加工試験（通常の切削速度は１００ｍ／ｍｉｎ．）、本発明被覆超硬エンドミル７，８および従来被覆超硬エンドミル７，８については、
被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＪＩＳ・ＳＣＭ４４０の板材、
切削速度：２００ｍ／ｍｉｎ．、
溝深さ（切り込み）：４．５ｍｍ、
テーブル送り：４５０ｍｍ／分、
の条件での合金鋼の乾式高速溝切削加工試験（通常の切削速度は１００ｍ／ｍｉｎ．）をそれぞれ行い、いずれの溝切削加工試験でも切刃部の外周刃の逃げ面摩耗幅が使用寿命の目安とされる０．１ｍｍに至るまでの切削溝長を測定した。この測定結果を表７にそれぞれ示した。
Next, of the present invention coated carbide end mills 1-8 and conventional coated carbide end mills 1-8, the present invention coated carbide end mills 1-3 and conventional coated carbide end mills 1-3 are as follows:
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / SKD61 plate material,
Cutting speed: 80 m / min. ,
Groove depth (cut): 0.22 mm,
Table feed: 320 mm / min,
The dry high-speed grooving test of the tool steel under the conditions (normal cutting speed is 45 m / min.), The coated carbide end mills 4 to 6 of the present invention and the conventional coated carbide end mills 4 to 6
Work material: Plane dimension: 100 mm × 250 mm, thickness: 50 mm JIS / S55C plate material,
Cutting speed: 180 m / min. ,
Groove depth (cut): 2.4 mm,
Table feed: 800mm / min,
The dry high-speed grooving test of carbon steel under the conditions (normal cutting speed is 100 m / min.), The coated carbide end mills 7 and 8 of the present invention and the conventional coated carbide end mills 7 and 8 are as follows:
Work material: Plane dimension: 100 mm × 250 mm, thickness: 50 mm JIS / SCM440 plate material,
Cutting speed: 200 m / min. ,
Groove depth (cut): 4.5 mm,
Table feed: 450mm / min,
The dry high-speed grooving test of alloy steel under the conditions (normal cutting speed is 100 m / min.) Is performed, and the flank wear width of the outer peripheral edge of the cutting edge is the service life in any grooving test. The cutting groove length up to 0.1 mm as a standard was measured. The measurement results are shown in Table 7, respectively.
上記の実施例２で製造した直径が８ｍｍ（超硬基体Ｃ−１〜Ｃ−３形成用）、１３ｍｍ（超硬基体Ｃ−４〜Ｃ−６形成用）、および２６ｍｍ（超硬基体Ｃ−７、Ｃ−８形成用）の３種の丸棒焼結体を用い、この３種の丸棒焼結体から、研削加工にて、溝形成部の直径×長さがそれぞれ４ｍｍ×１３ｍｍ（超硬基体Ｄ−１〜Ｄ−３）、８ｍｍ×２２ｍｍ（超硬基体Ｄ−４〜Ｄ−６）、および１６ｍｍ×４５ｍｍ（超硬基体Ｄ−７、Ｄ−８）の寸法、並びにいずれもねじれ角：３０度の２枚刃形状をもった超硬基体（ドリル）Ｄ−１〜Ｄ−８をそれぞれ製造した。
また、同じく上記超硬基体（ドリル）Ｄ−１〜Ｄ−８とそれぞれ同じ組成を有し、かついずれも平面：１２ｍｍ×１２ｍｍ、厚さ：６ｍｍの寸法をもった電界放出型走査電子顕微鏡による傾斜角度数分布グラフ作成用試験片も用意した。
The diameters produced in Example 2 above were 8 mm (for forming carbide substrates C-1 to C-3), 13 mm (for forming carbide substrates C-4 to C-6), and 26 mm (for carbide substrates C-). 7, for C-8 formation), from these three types of round bar sintered bodies, the diameter x length of the groove forming portion is 4 mm x 13 mm (by grinding), respectively. Carbide substrates D-1 to D-3), 8 mm × 22 mm (Carbide substrates D-4 to D-6), and 16 mm × 45 mm (Carbide substrates D-7 and D-8), and all Carbide substrates (drills) D-1 to D-8 having a two-blade shape with a twist angle of 30 degrees were produced.
Similarly, by using a field emission scanning electron microscope having the same composition as the above-mentioned carbide substrates (drills) D-1 to D-8 and having dimensions of plane: 12 mm × 12 mm and thickness: 6 mm. A specimen for preparing an inclination angle number distribution graph was also prepared.
ついで、これらの超硬基体（ドリル）Ｄ−１〜Ｄ−８の切刃に、ホーニングを施し、上記の試験片と共に、アセトン中で超音波洗浄し、乾燥した状態で、同じく図１に示されるアークイオンプレーティング装置に装入し、上記実施例１と同一の条件で、超硬基体表面改質処理を行い、かつ表８に示される目標組成および目標層厚の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を蒸着することにより、本発明被覆超硬工具としての本発明表面被覆超硬合金製ドリル（以下、本発明被覆超硬ドリルと云う）１〜８をそれぞれ製造した。 Next, the cutting edges of these carbide substrates (drills) D-1 to D-8 are honed, and ultrasonically washed in acetone together with the above test pieces, and then dried, as shown in FIG. The carbide substrate surface modification treatment was performed under the same conditions as in Example 1, and the target composition and target layer thickness (Ti, Al, Si) shown in Table 8 were charged. ) By drilling the N layer, drills made of the surface-coated cemented carbide of the present invention (hereinafter referred to as the present coated carbide drill) 1 to 8 as the coated carbide tool of the present invention were produced.
また、比較の目的で、上記実施例１と同一の条件で、上記の超硬基体の表面を、上記のＷボンバード処理による超硬基体表面改質処理に代って、Ｔｉボンバード洗浄処理する以外は同一の条件で（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層を蒸着することにより、表８に示される通りの従来被覆超硬工具としての従来表面被覆超硬合金製ドリル（以下、従来被覆超硬ドリルと云う）１〜８をそれぞれ製造した。 For the purpose of comparison, the surface of the above-mentioned carbide substrate is subjected to Ti bombard cleaning treatment in place of the above-described carbide substrate surface modification treatment by W bombardment treatment under the same conditions as in Example 1. Is a conventional surface-coated cemented carbide drill (hereinafter referred to as a conventional coated carbide drill) as a conventional coated carbide tool as shown in Table 8 by depositing a (Ti, Al, Si) N layer under the same conditions. 1) to 8 were produced.
つぎに、上記本発明被覆超硬ドリル１〜８および従来被覆超硬ドリル１〜８のうち、本発明被覆超硬ドリル１〜３および従来被覆超硬ドリル１〜３については、
被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＪＩＳ・ＳＫＤ６１の板材、
切削速度：６０ｍ／ｍｉｎ．、
送り：０．１ｍｍ／ｒｅｖ．、
穴深さ：８ｍｍ
の条件での工具鋼の湿式高速穴あけ切削加工試験（通常の切削速度は３０ｍ／ｍｉｎ．）、本発明被覆超硬ドリル４〜６および従来被覆超硬ドリル４〜６については、
被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＪＩＳ・ＦＣ２００の板材、
切削速度：１１０ｍ／ｍｉｎ．、
送り：０．２４ｍｍ／ｒｅｖ、
穴深さ：１６ｍｍ
の条件での鋳鉄の湿式高速穴あけ切削加工試験（通常の切削速度は６０ｍ／ｍｉｎ．）、本発明被覆超硬ドリル７，８および従来被覆超硬ドリル７，８については、
被削材：平面寸法：１００ｍｍ×２５０ｍｍ、厚さ：５０ｍｍのＪＩＳ・ＳＣＭ４３５の板材、
切削速度：８０ｍ／ｍｉｎ．、
送り：０．１８ｍｍ／ｒｅｖ、
穴深さ：３２ｍｍ
の条件での合金鋼の湿式高速穴あけ切削加工試験（通常の切削速度は４０ｍ／ｍｉｎ．）、をそれぞれ行い、いずれの湿式穴あけ切削加工試験（水溶性切削油使用）でも先端切刃面の逃げ面摩耗幅が０．３ｍｍに至るまでの穴あけ加工数を測定した。この測定結果を表８に示した。
Next, of the present invention coated carbide drills 1-8 and conventional coated carbide drills 1-8, the present invention coated carbide drills 1-3 and conventional coated carbide drills 1-3,
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / SKD61 plate material,
Cutting speed: 60 m / min. ,
Feed: 0.1 mm / rev. ,
Hole depth: 8mm
With respect to the tool steel wet high-speed drilling cutting test under the conditions (normal cutting speed is 30 m / min.), The present invention coated carbide drills 4-6 and conventional coated carbide drills 4-6,
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / FC200 plate material,
Cutting speed: 110 m / min. ,
Feed: 0.24mm / rev,
Hole depth: 16mm
With regard to the cast iron wet high speed drilling cutting test under the conditions (normal cutting speed is 60 m / min.), The present coated carbide drills 7 and 8 and the conventional coated carbide drills 7 and 8,
Work material: Plane dimensions: 100 mm × 250 mm, thickness: 50 mm JIS / SCM435 plate material,
Cutting speed: 80 m / min. ,
Feed: 0.18mm / rev,
Hole depth: 32mm
Wet high-speed drilling test (normal cutting speed is 40 m / min.) Of alloy steel under the above conditions, respectively, and any wet drilling test (using water-soluble cutting oil) escapes the tip cutting edge surface The number of drilling processes until the surface wear width reached 0.3 mm was measured. The measurement results are shown in Table 8.
この結果得られた本発明被覆超硬工具としての本発明被覆超硬チップ１〜１６、本発明被覆超硬エンドミル１〜８、および本発明被覆超硬ドリル１〜８、並びに従来被覆超硬工具としての従来被覆超硬チップ１〜１６、従来被覆超硬エンドミル１〜８、および従来被覆超硬ドリル１〜８の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の組成をオージェ分光分析装置を用いて測定したところ、それぞれ目標組成と実質的に同じ組成を示した。
また、これらの本発明被覆超硬工具および従来被覆超硬工具の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の厚さを、走査型電子顕微鏡を用いて断面測定したところ、いずれも目標値と実質的に同じ平均層厚（５点測定の平均値）を示した。
As a result, the coated carbide tips 1 to 16 of the present invention, the coated carbide end mills 1 to 8 of the present invention, the coated carbide drills 1 to 8 of the present invention, and the conventionally coated carbide tools of the present invention. The composition of the (Ti, Al, Si) N layer of the conventional coated carbide tips 1 to 16, the conventional coated carbide end mills 1 to 8, and the conventional coated carbide drills 1 to 8 was measured using an Auger spectrometer. As a result, each showed substantially the same composition as the target composition.
Moreover, when the thickness of the (Ti, Al, Si) N layer of these coated carbide tools of the present invention and the conventional coated carbide tools was measured by a cross-section using a scanning electron microscope, both were substantially the target value. The same average layer thickness (average value of 5-point measurement) was shown.
さらに、上記の本発明被覆超硬工具と従来被覆超硬工具の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{１００}面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Further, a gradient angle distribution graph was prepared for each of the (Ti, Al, Si) N layers of the above-described coated carbide tool of the present invention and the conventional coated carbide tool using a field emission scanning electron microscope.
That is, the tilt angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surface of the (Ti, Al, Si) N layer is a polished surface, and 70 is applied to the polished surface. An electron backscatter diffraction image apparatus is irradiated by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle of 15 degrees with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Using a 30 × 50 μm region at an interval of 0.1 μm / step, the inclination angle formed by the normal of the {100} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface polished surface Based on the measurement results, the measurement inclination angles within the range of 0 to 45 degrees out of the measurement inclination angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each division are tabulated. Created by.
この結果得られた各種の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の傾斜角度数分布グラフにおいて、本発明被覆超硬工具の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層は、表３、表７、および表８にそれぞれ示される通り、いずれも{１００}面の測定傾斜角の分布が８〜２０度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示すのに対して、従来被覆超硬工具の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層は、表４、表７、および表８にそれぞれ示される通り、いずれも{１００}面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示すものであった。
また表３、表４、表７、および表８には、上記の本発明被覆超硬工具および従来被覆超硬工具の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の傾斜角度数分布グラフにおいて、８〜２０度の範囲内の傾斜角区分に存在する傾斜角度数のグラフ全体の傾斜角度数に占める割合を示した。
なお、図２は、本発明被覆超硬チップ１の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の傾斜角度数分布グラフ、図３は、従来被覆超硬チップ１の（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の傾斜角度数分布グラフをそれぞれ示すものである。
In the gradient angle distribution graphs of various (Ti, Al, Si) N layers obtained as a result, the (Ti, Al, Si) N layers of the coated carbide tool of the present invention are shown in Tables 3, 7, and As shown in FIG. 8, each of the {100} planes shows a slope angle distribution graph in which the highest peak appears in the slope section where the measured slope angle distribution is in the range of 8 to 20 degrees. As shown in Table 4, Table 7, and Table 8, the (Ti, Al, Si) N layer of the carbide tool has a measured inclination angle distribution on the {100} plane within the range of 0 to 45 degrees. It shows an inclination angle distribution graph that is unbiased and has no highest peak.
In Table 3, Table 4, Table 7, and Table 8, the inclination angle number distribution graph of the (Ti, Al, Si) N layer of the above-described coated carbide tool of the present invention and the conventional coated carbide tool is 8 to The ratio of the inclination angle number existing in the inclination angle section within the range of 20 degrees to the inclination angle number of the entire graph is shown.
2 is an inclination angle number distribution graph of the (Ti, Al, Si) N layer of the coated carbide tip 1 of the present invention, and FIG. 3 is a (Ti, Al, Si) N layer of the conventional coated carbide tip 1. The inclination angle number distribution graphs are respectively shown.
表３〜８に示される結果から、本発明被覆超硬工具は、いずれも硬質被覆層を構成する（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層の{１００}面が傾斜角度数分布グラフで８〜２０度の範囲内の傾斜角区分で最高ピークを示し、すぐれた耐摩耗性を示すのに対して、硬質被覆が、{１００}面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す（Ｔｉ，Ａｌ，Ｓｉ）Ｎ層で構成された従来被覆超硬工具においては、相対的に摩耗進行が速く、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 3-8, in the coated carbide tools of the present invention, the {100} plane of the (Ti, Al, Si) N layer constituting the hard coating layer is 8-20 in the inclination angle number distribution graph. In contrast to the highest peak in the tilt angle section within the range of degrees and excellent wear resistance, the hard coating is unbiased in the measured tilt angle distribution of the {100} plane within the range of 0 to 45 degrees. In conventional coated carbide tools composed of (Ti, Al, Si) N layers, which show a distribution graph of the tilt angle without the highest peak, the wear progresses relatively quickly and can be used in a relatively short time. It is clear that it reaches the end of its life.
上述のように、この発明の被覆超硬工具は、各種鋼や鋳鉄などの連続切削や断続切削を高速切削条件で行った場合にもすぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated carbide tool of the present invention exhibits excellent wear resistance even when continuous cutting and intermittent cutting of various steels and cast irons are performed under high-speed cutting conditions, and excellent cutting over a long period of time. Since it demonstrates its performance, it can respond satisfactorily to labor saving, energy saving, and cost reduction in cutting.
Claims (1)
組成式：（Ｔｉ1-（X＋Ｚ） ＡｌX ＳｉＺ ）Ｎ（ただし、原子比で、Ｘは０．４５〜０．７０、Ｚは０．０１〜０．１５を示す）を満足し、かつ、１〜１５μｍの平均層厚で物理蒸着形成してなるＴｉとＡｌとＳｉの複合窒化物層で硬質被覆層を構成し、
上記の硬質被覆層を構成するＴｉとＡｌとＳｉの複合窒化物層は、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用いて、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{１００}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、８〜２０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記８〜２０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示すこと、
を特徴とする硬質被覆層がすぐれた耐摩耗性を発揮する被覆超硬合金製切削工具。 Using an arc ion plating device, the surface of the substrate made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet was subjected to Cr bombardment treatment (surface modification treatment) ,
Compositional formula: (Ti 1− (X + Z) Al X Si Z ) N (wherein X is 0.45 to 0.70 and Z is 0.01 to 0.15 in atomic ratio), and The hard coating layer is composed of a composite nitride layer of Ti, Al and Si formed by physical vapor deposition with an average layer thickness of 1 to 15 μm ,
The composite nitride layer of Ti, Al, and Si that constitutes the hard coating layer described above uses a field emission scanning electron microscope, and each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface has electrons. A {100} plane which is a crystal plane of the crystal grain with respect to the normal line of the surface polished surface at an interval of 0.1 μm / step using an electron backscatter diffraction image apparatus The inclination angle formed by the normal line is measured, and among the measurement inclination angles, the measurement inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, and the frequency existing in each division In the inclination angle distribution graph obtained by summing up, the highest peak exists in the inclination angle section within the range of 8 to 20 degrees, and the total of the frequencies existing within the range of 8 to 20 degrees is the inclination angle number. Occupies 45-65% of the total frequency in the distribution graph Showing an inclination angle number distribution graph,
A coated cemented carbide cutting tool with a hard coating layer featuring excellent wear resistance.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013018768A1 (en) | 2011-08-01 | 2013-02-07 | 日立ツール株式会社 | Surface-modified wc-based cemented carbide member, hard film-coated wc-based cemented carbide member, method for producing surface-modified wc-based cemented carbide member, and method for producing hard film-coated wc-based cemented carbide member |
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| JP6284034B2 (en) * | 2014-09-25 | 2018-02-28 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
| JP6709526B2 (en) * | 2014-10-28 | 2020-06-17 | 三菱マテリアル株式会社 | Surface coated cutting tool |
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| JPH08209336A (en) * | 1995-01-31 | 1996-08-13 | Hitachi Tool Eng Ltd | Coated hard alloy |
| JP2793773B2 (en) * | 1994-05-13 | 1998-09-03 | 神鋼コベルコツール株式会社 | Hard coating, hard coating tool and hard coating member excellent in wear resistance |
| JP2001293602A (en) * | 2000-04-11 | 2001-10-23 | Sumitomo Electric Ind Ltd | Cutting tool, and manufacturing method and device for the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2793773B2 (en) * | 1994-05-13 | 1998-09-03 | 神鋼コベルコツール株式会社 | Hard coating, hard coating tool and hard coating member excellent in wear resistance |
| JPH08209336A (en) * | 1995-01-31 | 1996-08-13 | Hitachi Tool Eng Ltd | Coated hard alloy |
| JP2001293602A (en) * | 2000-04-11 | 2001-10-23 | Sumitomo Electric Ind Ltd | Cutting tool, and manufacturing method and device for the same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013018768A1 (en) | 2011-08-01 | 2013-02-07 | 日立ツール株式会社 | Surface-modified wc-based cemented carbide member, hard film-coated wc-based cemented carbide member, method for producing surface-modified wc-based cemented carbide member, and method for producing hard film-coated wc-based cemented carbide member |
| US9492872B2 (en) | 2011-08-01 | 2016-11-15 | Hitachi Tool Engineering, Ltd. | Surface-modified, WC-based cemented carbide member, hard-coated, WC-based cemented carbide member, and their production methods |
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