JP4584313B2 - 同軸光照射装置 - Google Patents
同軸光照射装置 Download PDFInfo
- Publication number
- JP4584313B2 JP4584313B2 JP2007533255A JP2007533255A JP4584313B2 JP 4584313 B2 JP4584313 B2 JP 4584313B2 JP 2007533255 A JP2007533255 A JP 2007533255A JP 2007533255 A JP2007533255 A JP 2007533255A JP 4584313 B2 JP4584313 B2 JP 4584313B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- workpiece
- light irradiation
- organic
- irradiation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003384 imaging method Methods 0.000 claims description 22
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000005286 illumination Methods 0.000 description 4
- 239000013585 weight reducing agent Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 241000255777 Lepidoptera Species 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- -1 polyphenylene vinylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/813—Anodes characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
- H10K59/80515—Anodes characterised by their shape
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Description
3…透光板
3a…一方の面(ワーク対向面)
3b…他方の面(反ワーク対向面)
3…有機EL素子
6…撮像装置(CCDカメラ)
S…隙間
W…ワーク
本実施形態に係る光照射装置1は、図1、図2に概略図を示すように、全体として薄い板状をなすもので、光の照射対象である製品等のワークWと、CCDカメラ等の撮像装置6との間の撮像軸C上に直交して配置され、ワークWを照明するとともに、ワークWからの反射光の一部を透過させて、撮像装置6によるワークWの撮像を可能ならしめるものである。
Claims (4)
- 製品等のワークに対して光を照射し、その表面の検査等を行うためのものであって、
ワーク側に配置した透明電極層と、反ワーク側に配置した非透明電極層と、それら電極間に配置され、電圧付与によって発光する発光層とを備えた微細EL素子を、互いの間に隙間を設けて多数並び設けた構造としており、
所定厚みを有した透光板をさらに備え、前記EL素子がその透光板のいずれかの面に貼り付けられて支持されており、
前記微細EL素子及び前記透光板が、前記ワークから離間して設けられるとともに、
前記微細EL素子の隙間の大きさ又はピッチが、前記ワークに照射された光の反射光が該隙間を通ってワークの反対側に配される撮像装置によって撮像可能となるように設定されていることを特徴とする光照射装置。 - 前記EL素子が有機EL素子である請求項1記載の光照射装置。
- 前記非透明電極層の発光層側の面が光反射面であり、その反対側の面が光を遮蔽又は吸収する光遮蔽面である請求項1記載の光照射装置。
- 隣り合うEL素子の電極層同士を接続し、EL素子全体としての電極層が格子状をなすように構成している請求項1記載の光照射装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005252728 | 2005-08-31 | ||
JP2005252728 | 2005-08-31 | ||
PCT/JP2006/316962 WO2007026690A1 (ja) | 2005-08-31 | 2006-08-29 | 同軸光照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007026690A1 JPWO2007026690A1 (ja) | 2009-03-05 |
JP4584313B2 true JP4584313B2 (ja) | 2010-11-17 |
Family
ID=37808779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007533255A Expired - Fee Related JP4584313B2 (ja) | 2005-08-31 | 2006-08-29 | 同軸光照射装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20100033080A1 (ja) |
EP (1) | EP1930719A4 (ja) |
JP (1) | JP4584313B2 (ja) |
WO (1) | WO2007026690A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2452737B (en) * | 2007-09-12 | 2011-09-14 | Roger Seaman | Light emitting and/or receiving apparatus |
CN102027614B (zh) * | 2008-05-16 | 2013-05-29 | 株式会社半导体能源研究所 | 发光元件、发光装置和电子设备 |
DE102008055714B4 (de) * | 2008-11-04 | 2018-07-19 | Carl Zeiss Ag | Semitransparente Beleuchtungsvorrichtung |
JP5182833B1 (ja) * | 2012-06-19 | 2013-04-17 | バイスリープロジェクツ株式会社 | 表面検査装置および表面検査方法 |
JP2014096253A (ja) * | 2012-11-08 | 2014-05-22 | Yamagata Prefecture | 透視性を有する面状光源及びそれを用いた撮像方法 |
JP7143740B2 (ja) * | 2018-02-07 | 2022-09-29 | オムロン株式会社 | 画像検査装置および照明装置 |
JP7027926B2 (ja) | 2018-02-07 | 2022-03-02 | オムロン株式会社 | 画像検査装置および照明装置 |
EP3524967B1 (en) * | 2018-02-07 | 2024-01-31 | OMRON Corporation | Image inspection device and lighting device |
JP6939640B2 (ja) * | 2018-02-23 | 2021-09-22 | オムロン株式会社 | 画像検査装置および画像検査方法 |
JP6939641B2 (ja) * | 2018-02-23 | 2021-09-22 | オムロン株式会社 | 画像検査装置および画像検査方法 |
JP7187782B2 (ja) | 2018-03-08 | 2022-12-13 | オムロン株式会社 | 画像検査装置 |
JP2020068160A (ja) * | 2018-10-26 | 2020-04-30 | シーシーエス株式会社 | Oled照明装置 |
JP7392582B2 (ja) * | 2020-06-12 | 2023-12-06 | オムロン株式会社 | 検査システムおよび検査方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002207434A (ja) * | 2001-01-11 | 2002-07-26 | Seiko Epson Corp | 照明装置、表示装置、並びに電子機器 |
JP2003098093A (ja) * | 2001-09-25 | 2003-04-03 | Ccs Inc | 検査用照明装置 |
JP2003332066A (ja) * | 2002-05-10 | 2003-11-21 | Seiko Instruments Inc | フロントライト用有機el素子および反射型液晶表示装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4972093A (en) * | 1987-10-09 | 1990-11-20 | Pressco Inc. | Inspection lighting system |
US5172005A (en) * | 1991-02-20 | 1992-12-15 | Pressco Technology, Inc. | Engineered lighting system for tdi inspection comprising means for controlling lighting elements in accordance with specimen displacement |
US5690417A (en) * | 1996-05-13 | 1997-11-25 | Optical Gaging Products, Inc. | Surface illuminator with means for adjusting orientation and inclination of incident illumination |
JP3118503B2 (ja) * | 1996-07-08 | 2000-12-18 | シーシーエス株式会社 | 照明装置 |
JP2975893B2 (ja) * | 1996-07-08 | 1999-11-10 | シーシーエス株式会社 | 照明装置の製造方法 |
US6075883A (en) * | 1996-11-12 | 2000-06-13 | Robotic Vision Systems, Inc. | Method and system for imaging an object or pattern |
IES20000356A2 (en) * | 1999-05-14 | 2001-02-07 | Mv Res Ltd | A microvia inspection system |
US6788411B1 (en) * | 1999-07-08 | 2004-09-07 | Ppt Vision, Inc. | Method and apparatus for adjusting illumination angle |
ATE376178T1 (de) * | 2000-06-28 | 2007-11-15 | Bosch Gmbh Robert | Vorrichtung zum bildlichen erfassen von stückgütern |
US6644832B2 (en) * | 2000-12-25 | 2003-11-11 | Seiko Epson Corporation | Illumination device and manufacturing method therefor, display device, and electronic instrument |
US20020135757A1 (en) * | 2001-01-02 | 2002-09-26 | Robotic Vision Systems, Inc. | LCC device inspection module |
JP3496644B2 (ja) * | 2001-01-12 | 2004-02-16 | シーシーエス株式会社 | 検査用照明装置 |
CN1266451C (zh) * | 2001-04-03 | 2006-07-26 | 沃思测量技术股份有限公司 | 用于照明物体的测量仪和方法 |
US6861669B2 (en) * | 2003-03-31 | 2005-03-01 | Agilent Technologies, Inc. | Compound display |
US7504613B2 (en) * | 2004-03-25 | 2009-03-17 | The Board Of Trustees Of The Leland Stanford Junior University | Optical imaging system having an illumination source between object and image |
US7429753B2 (en) * | 2005-05-20 | 2008-09-30 | Sanyo Electric Co., Ltd. | Display device |
US7891840B1 (en) * | 2010-01-22 | 2011-02-22 | Southern Taiwan University | Polygonal radiation module having radiating members without light guiding board |
-
2006
- 2006-08-29 EP EP06796942A patent/EP1930719A4/en not_active Withdrawn
- 2006-08-29 JP JP2007533255A patent/JP4584313B2/ja not_active Expired - Fee Related
- 2006-08-29 WO PCT/JP2006/316962 patent/WO2007026690A1/ja active Application Filing
- 2006-08-29 US US12/064,707 patent/US20100033080A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002207434A (ja) * | 2001-01-11 | 2002-07-26 | Seiko Epson Corp | 照明装置、表示装置、並びに電子機器 |
JP2003098093A (ja) * | 2001-09-25 | 2003-04-03 | Ccs Inc | 検査用照明装置 |
JP2003332066A (ja) * | 2002-05-10 | 2003-11-21 | Seiko Instruments Inc | フロントライト用有機el素子および反射型液晶表示装置 |
Also Published As
Publication number | Publication date |
---|---|
EP1930719A1 (en) | 2008-06-11 |
WO2007026690A1 (ja) | 2007-03-08 |
US20100033080A1 (en) | 2010-02-11 |
EP1930719A4 (en) | 2009-11-25 |
JPWO2007026690A1 (ja) | 2009-03-05 |
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