JP4534500B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4534500B2 JP4534500B2 JP2004020266A JP2004020266A JP4534500B2 JP 4534500 B2 JP4534500 B2 JP 4534500B2 JP 2004020266 A JP2004020266 A JP 2004020266A JP 2004020266 A JP2004020266 A JP 2004020266A JP 4534500 B2 JP4534500 B2 JP 4534500B2
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- 239000004065 semiconductor Substances 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000137 annealing Methods 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 26
- 229910052739 hydrogen Inorganic materials 0.000 claims description 23
- 239000001257 hydrogen Substances 0.000 claims description 23
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 28
- 239000013078 crystal Substances 0.000 description 27
- 238000005530 etching Methods 0.000 description 13
- 108091006146 Channels Proteins 0.000 description 10
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 238000013508 migration Methods 0.000 description 7
- 230000005012 migration Effects 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28202—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a nitrogen-containing ambient, e.g. nitride deposition, growth, oxynitridation, NH3 nitridation, N2O oxidation, thermal nitridation, RTN, plasma nitridation, RPN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/518—Insulating materials associated therewith the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7809—Vertical DMOS transistors, i.e. VDMOS transistors having both source and drain contacts on the same surface, i.e. Up-Drain VDMOS transistors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
本発明の一実施形態となる製造方法を表した工程図を図1に示し、図1に基づいてトレンチの形成工程の詳細を説明する。図1(a)から(e)は工程順に並んでいるものとする。
本発明の一実施形態が適用されて形成されたトレンチゲート型のパワーMOSFETを図6に示す。
図1(d)のゲート絶縁膜(7)を形成する工程において、CVD法による酸化膜形成工程の後に窒化膜形成工程を行い、次いで熱酸化膜を形成することによって、誘電率に優れるONO膜と呼ばれる酸化膜/窒化膜/酸化膜の積層のゲート絶縁膜を有する低結晶欠陥密度のトレンチゲートを得ることができる。
Claims (5)
- 主表面(9a)および前記主表面の反対面となる裏面(9b)を有し、前記主表面から該主表面の垂直方向に第1導電型のチャネル領域(12)が延設されていると共に、前記チャネル領域内において前記主表面から垂直方向に第2導電型のソース領域(13)が延設され、さらに、前記チャネル領域を挟んで前記ソース領域の反対側にドリフト領域(11)が形成されていると共に、前記主表面から垂直方向に第2導電型のドレイン層(9)が前記チャネル領域から離間するように延設された半導体基板(9)を用意する工程と、
前記主表面から、前記主表面と平行を成す一方向において、前記ソース領域から前記チャネル領域を貫通するように、深さが10μm以上となるトレンチ(14)を形成したのち、還元性雰囲気下でアニール処理する工程と、
前記トレンチの内壁にゲート絶縁膜(15)を形成する工程と、
前記ゲート絶縁膜の表面にゲート電極(16)を形成する工程と、を含んでなる半導体装置の製造方法において、
前記アニール処理は950℃以上1030℃以下、且つ20kPa以上の条件で処理することを特徴とする半導体装置の製造方法。 - 前記アニール処理は950℃以上1030℃以下、且つ40kPa以上の条件で処理することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記還元性雰囲気は水素雰囲気であることを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記ゲート絶縁膜(7)を形成する工程は、CVD法による酸化膜形成工程を含むことを特徴とする請求項1ないし3のいずれか1つに記載の半導体装置の製造方法。
- 前記ゲート絶縁膜(7)を形成する工程は、CVD法による酸化膜形成工程の後に窒化膜形成工程を行い、次いで熱酸化膜を形成する工程を含む工程からなることを特徴とする請求項1ないし3のいずれか1つに記載の半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004020266A JP4534500B2 (ja) | 2003-05-14 | 2004-01-28 | 半導体装置の製造方法 |
US10/834,029 US20040229420A1 (en) | 2003-05-14 | 2004-04-29 | Method for manufacturing semiconductor device having trench gate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003135543 | 2003-05-14 | ||
JP2004020266A JP4534500B2 (ja) | 2003-05-14 | 2004-01-28 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004363551A JP2004363551A (ja) | 2004-12-24 |
JP4534500B2 true JP4534500B2 (ja) | 2010-09-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004020266A Expired - Fee Related JP4534500B2 (ja) | 2003-05-14 | 2004-01-28 | 半導体装置の製造方法 |
Country Status (2)
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US (1) | US20040229420A1 (ja) |
JP (1) | JP4534500B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150398A (ja) * | 2003-11-14 | 2005-06-09 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法および半導体の表面処理方法 |
JP2009141307A (ja) * | 2007-11-15 | 2009-06-25 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
JP5500002B2 (ja) * | 2010-08-31 | 2014-05-21 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
JP5729331B2 (ja) | 2011-04-12 | 2015-06-03 | 株式会社デンソー | 半導体装置の製造方法及び半導体装置 |
JP5673601B2 (ja) * | 2011-07-10 | 2015-02-18 | 株式会社デンソー | 半導体基板の製造方法 |
JP7009933B2 (ja) * | 2017-11-03 | 2022-01-26 | 株式会社デンソー | 半導体装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1174483A (ja) * | 1997-06-30 | 1999-03-16 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2000357779A (ja) * | 1999-04-15 | 2000-12-26 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2001326273A (ja) * | 2000-05-16 | 2001-11-22 | Denso Corp | 半導体装置の製造方法 |
JP2002231945A (ja) * | 2001-02-06 | 2002-08-16 | Denso Corp | 半導体装置の製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3260944B2 (ja) * | 1993-12-15 | 2002-02-25 | 三菱電機株式会社 | 電圧駆動型サイリスタおよびその製造方法 |
US6100132A (en) * | 1997-06-30 | 2000-08-08 | Kabushiki Kaisha Toshiba | Method of deforming a trench by a thermal treatment |
JP3647676B2 (ja) * | 1999-06-30 | 2005-05-18 | 株式会社東芝 | 半導体装置 |
JP3356162B2 (ja) * | 1999-10-19 | 2002-12-09 | 株式会社デンソー | 半導体装置及びその製造方法 |
JP3485081B2 (ja) * | 1999-10-28 | 2004-01-13 | 株式会社デンソー | 半導体基板の製造方法 |
KR100338771B1 (ko) * | 1999-11-12 | 2002-05-30 | 윤종용 | 수소 어닐링 단계를 포함하는 공정이 간단한 트렌치소자분리방법 |
US6825087B1 (en) * | 1999-11-24 | 2004-11-30 | Fairchild Semiconductor Corporation | Hydrogen anneal for creating an enhanced trench for trench MOSFETS |
JP4285899B2 (ja) * | 2000-10-10 | 2009-06-24 | 三菱電機株式会社 | 溝を有する半導体装置 |
-
2004
- 2004-01-28 JP JP2004020266A patent/JP4534500B2/ja not_active Expired - Fee Related
- 2004-04-29 US US10/834,029 patent/US20040229420A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1174483A (ja) * | 1997-06-30 | 1999-03-16 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2000357779A (ja) * | 1999-04-15 | 2000-12-26 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2001326273A (ja) * | 2000-05-16 | 2001-11-22 | Denso Corp | 半導体装置の製造方法 |
JP2002231945A (ja) * | 2001-02-06 | 2002-08-16 | Denso Corp | 半導体装置の製造方法 |
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Publication number | Publication date |
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JP2004363551A (ja) | 2004-12-24 |
US20040229420A1 (en) | 2004-11-18 |
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