JP4519010B2 - 空気分離装置 - Google Patents
空気分離装置 Download PDFInfo
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- JP4519010B2 JP4519010B2 JP2005179388A JP2005179388A JP4519010B2 JP 4519010 B2 JP4519010 B2 JP 4519010B2 JP 2005179388 A JP2005179388 A JP 2005179388A JP 2005179388 A JP2005179388 A JP 2005179388A JP 4519010 B2 JP4519010 B2 JP 4519010B2
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- 238000000926 separation method Methods 0.000 title claims description 36
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 414
- 229910052757 nitrogen Inorganic materials 0.000 claims description 204
- 239000001301 oxygen Substances 0.000 claims description 140
- 229910052760 oxygen Inorganic materials 0.000 claims description 140
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 139
- 238000004821 distillation Methods 0.000 claims description 99
- 239000002994 raw material Substances 0.000 claims description 35
- 239000012141 concentrate Substances 0.000 claims description 27
- 239000007788 liquid Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010992 reflux Methods 0.000 claims description 8
- 230000008016 vaporization Effects 0.000 claims description 7
- 238000009834 vaporization Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 12
- 239000012071 phase Substances 0.000 description 10
- 239000007791 liquid phase Substances 0.000 description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 8
- 229910001882 dioxygen Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 230000009897 systematic effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000005292 vacuum distillation Methods 0.000 description 2
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04624—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using integrated mass and heat exchange, so-called non-adiabatic rectification, e.g. dephlegmator, reflux exchanger
- F25J3/0463—Simultaneously between rectifying and stripping sections, i.e. double dephlegmator
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04006—Providing pressurised feed air or process streams within or from the air fractionation unit
- F25J3/04078—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression
- F25J3/0409—Providing pressurised feed air or process streams within or from the air fractionation unit providing pressurized products by liquid compression and vaporisation with cold recovery, i.e. so-called internal compression of oxygen
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
- F25J3/04187—Cooling of the purified feed air by recuperative heat-exchange; Heat-exchange with product streams
- F25J3/04193—Division of the main heat exchange line in consecutive sections having different functions
- F25J3/04206—Division of the main heat exchange line in consecutive sections having different functions including a so-called "auxiliary vaporiser" for vaporising and producing a gaseous product
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
- F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
- F25J3/0429—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of feed air, e.g. used as waste or product air or expanded into an auxiliary column
- F25J3/04303—Lachmann expansion, i.e. expanded into oxygen producing or low pressure column
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
- F25J3/04284—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams
- F25J3/04309—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of nitrogen
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/04—Processes or apparatus using separation by rectification in a dual pressure main column system
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/32—Processes or apparatus using separation by rectification using a side column fed by a stream from the high pressure column
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/02—Processes or apparatus using other separation and/or other processing means using simple phase separation in a vessel or drum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/42—Nitrogen or special cases, e.g. multiple or low purity N2
- F25J2215/44—Ultra high purity nitrogen, i.e. generally less than 1 ppb impurities
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2250/00—Details related to the use of reboiler-condensers
- F25J2250/30—External or auxiliary boiler-condenser in general, e.g. without a specified fluid or one fluid is not a primary air component or an intermediate fluid
- F25J2250/40—One fluid being air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2250/00—Details related to the use of reboiler-condensers
- F25J2250/30—External or auxiliary boiler-condenser in general, e.g. without a specified fluid or one fluid is not a primary air component or an intermediate fluid
- F25J2250/50—One fluid being oxygen
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Separation By Low-Temperature Treatments (AREA)
Description
Claims (9)
- 原料空気を圧縮する原料空気圧縮機と、圧縮された原料空気を冷却する主熱交換器と、冷却された原料空気を酸素蒸留通路と相互に熱交換する空気蒸留通路で蒸留して上部の窒素濃縮物と下部の酸素富化液化空気とに分離するとともに前記酸素蒸留通路で粗酸素を蒸留して下部に酸素が濃縮された液化酸素を生成する熱交換型蒸留器と、前記熱交換型蒸留器で蒸留された蒸留物を更に蒸留する蒸留塔とを備えた空気液化分離装置において、高純窒素塔と、窒素凝縮器と、前記空気蒸留通路の上部に分離した前記窒素濃縮物を前記高純窒素塔の下部に導入する経路と、高純窒素塔の上部に生成した高純窒素を前記窒素凝縮器に導入する経路と、窒素凝縮器で凝縮された高純液化窒素の一部を前記高純塔の上部に還流液として導入する経路と、高純液化窒素の残部を前記蒸留塔の上部に還流液として導入する経路と、高純窒素塔の下部に生成した低純液化窒素を前記蒸留塔の中部に導入する経路とを備え、前記高純窒素塔は、前記窒素濃縮物と高純液化窒素とを蒸留することによって塔上部に窒素が濃縮された高純窒素を、塔下部に窒素濃度が低い低純液化窒素をそれぞれ生成するものであり、前記窒素凝縮器は、前記高純窒素を凝縮させて高純液化窒素を得るものであり、前記蒸留塔は、前記高純液化窒素と前記低純液化窒素と前記酸素富化液化空気とを蒸留して、上部に窒素が濃縮された低圧高純窒素を、下部に酸素が濃縮された前記粗酸素をそれぞれ生成するものであることを特徴とする空気分離装置。
- 前記高純窒素塔の上部に生成した高純窒素を、前記主熱交換器を通して回収する経路を備えていることを特徴とする請求項1記載の空気分離装置。
- 前記窒素凝縮器は、前記酸素富化液化空気の一部を冷却源として導入する経路を備えていることを特徴とする請求項1記載の空気分離装置。
- 前記窒素凝縮器は、前記粗酸素を冷却源として導入する経路を備えていることを特徴とする請求項1記載の空気分離装置。
- 前記原料空気圧縮機で圧縮された原料空気の一部を更に圧縮する二次空気圧縮機と、該二次空気圧縮機で圧縮した二次圧縮原料空気を熱源として前記液化酸素を気化させる液化酸素気化手段とを備えていることを特徴とする請求項1記載の空気分離装置。
- 前記液化酸素気化手段は、液化酸素ポンプによって昇圧された液化酸素を気化させるものであることを特徴とする請求項5記載の空気分離装置。
- 前記高純窒素塔の上部から導出した窒素の一部を圧縮する窒素圧縮機と、該窒素圧縮機で圧縮された圧縮窒素を断熱膨張させる窒素膨張タービンとを備え、前記窒素圧縮機と前記窒素膨張タービンとが同軸で連結されていることを特徴とする請求項1記載の空気分離装置。
- 前記空気蒸留通路で分離した前記窒素濃縮物の一部を圧縮する窒素濃縮物圧縮機と、該窒素濃縮物圧縮機で圧縮された圧縮窒素濃縮物を断熱膨張させる窒素濃縮物膨張タービンとを備え、前記窒素濃縮物圧縮機と前記窒素濃縮物膨張タービンとが同軸で連結されていることを特徴とする請求項1記載の空気分離装置。
- 圧縮された原料空気の一部をさらに二次圧縮する二次空気圧縮機と、該二次空気圧縮機で圧縮された二次圧縮原料空気を断熱膨張させる空気膨張タービンとを備え、前記二次空気圧縮機と前記空気膨張タービンとが同軸で連結されていることを特徴とする請求項1記載の空気分離装置。
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JP2005179388A JP4519010B2 (ja) | 2005-06-20 | 2005-06-20 | 空気分離装置 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2945111A1 (fr) * | 2009-05-04 | 2010-11-05 | Air Liquide | Procede et appareil de separation d'air par distillation cryogenique |
FR2959802B1 (fr) * | 2010-05-10 | 2013-01-04 | Air Liquide | Procede et appareil de separation d'air par distillation cryogenique |
JP6140591B2 (ja) | 2013-11-21 | 2017-05-31 | 東洋エンジニアリング株式会社 | 蒸留装置 |
JP6289112B2 (ja) * | 2014-01-17 | 2018-03-07 | 東洋エンジニアリング株式会社 | 蒸留塔 |
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JPS62141485A (ja) * | 1985-12-16 | 1987-06-24 | 日本酸素株式会社 | 高純度窒素製造方法 |
JPS62194178A (ja) * | 1986-02-20 | 1987-08-26 | 日本酸素株式会社 | 空気液化分離方法 |
JPH02225994A (ja) * | 1988-12-02 | 1990-09-07 | Boc Group Plc:The | 窒素を精製する方法及び装置 |
JPH02298789A (ja) * | 1989-05-12 | 1990-12-11 | Nippon Sanso Kk | 空気液化分離方法及びその装置 |
JPH03158693A (ja) * | 1989-11-16 | 1991-07-08 | Daido Sanso Kk | 窒素ガスおよび酸素ガス製造装置 |
JPH07174461A (ja) * | 1993-08-23 | 1995-07-14 | Boc Group Inc:The | 空気を分離してガス状酸素生成物を供給圧力にて製造する方法 |
JPH09170875A (ja) * | 1995-10-03 | 1997-06-30 | Air Prod And Chem Inc | 酸素製品製造のための低温法及び装置 |
JP2003028568A (ja) * | 2001-07-17 | 2003-01-29 | Nippon Sanso Corp | 空気分離方法および装置 |
JP2003028569A (ja) * | 2001-07-17 | 2003-01-29 | Nippon Sanso Corp | 空気分離方法および装置 |
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2005
- 2005-06-20 JP JP2005179388A patent/JP4519010B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS62141485A (ja) * | 1985-12-16 | 1987-06-24 | 日本酸素株式会社 | 高純度窒素製造方法 |
JPS62194178A (ja) * | 1986-02-20 | 1987-08-26 | 日本酸素株式会社 | 空気液化分離方法 |
JPH02225994A (ja) * | 1988-12-02 | 1990-09-07 | Boc Group Plc:The | 窒素を精製する方法及び装置 |
JPH02298789A (ja) * | 1989-05-12 | 1990-12-11 | Nippon Sanso Kk | 空気液化分離方法及びその装置 |
JPH03158693A (ja) * | 1989-11-16 | 1991-07-08 | Daido Sanso Kk | 窒素ガスおよび酸素ガス製造装置 |
JPH07174461A (ja) * | 1993-08-23 | 1995-07-14 | Boc Group Inc:The | 空気を分離してガス状酸素生成物を供給圧力にて製造する方法 |
JPH09170875A (ja) * | 1995-10-03 | 1997-06-30 | Air Prod And Chem Inc | 酸素製品製造のための低温法及び装置 |
JP2003028568A (ja) * | 2001-07-17 | 2003-01-29 | Nippon Sanso Corp | 空気分離方法および装置 |
JP2003028569A (ja) * | 2001-07-17 | 2003-01-29 | Nippon Sanso Corp | 空気分離方法および装置 |
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