JP4411331B2 - 磁気記録媒体用シリコン基板およびその製造方法 - Google Patents
磁気記録媒体用シリコン基板およびその製造方法 Download PDFInfo
- Publication number
- JP4411331B2 JP4411331B2 JP2007071337A JP2007071337A JP4411331B2 JP 4411331 B2 JP4411331 B2 JP 4411331B2 JP 2007071337 A JP2007071337 A JP 2007071337A JP 2007071337 A JP2007071337 A JP 2007071337A JP 4411331 B2 JP4411331 B2 JP 4411331B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- magnetic recording
- substrate
- oxide film
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73913—Composites or coated substrates
- G11B5/73915—Silicon compound based coating
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Description
2 Cr系下地層
3、13 磁気記録層
4、14 保護層
5、15 潤滑層
12 軟磁性裏打ち層
Claims (7)
- 純度99.999%以上の多結晶シリコン基板の主面上に酸化膜を備え、該酸化膜表面は前記多結晶シリコン基板の粒界を反映した表面段差を有しない表面平滑性を有する、ウェビネスとマイクロウェビネスの2乗平均値が何れも0.3nm以下であることを特徴とする磁気記録媒体用シリコン基板。
- 前記シリコン基板の直径は65mm以下である請求項1記載の磁気記録媒体用シリコン基板。
- 前記酸化膜の厚みは500nm以下10nm以上である請求項1又は2に記載の磁気記録媒体用シリコン基板。
- 請求項1乃至3の何れか1項に記載のシリコン基板上に磁気記録層を備えている磁気記録媒体。
- 純度99.999%以上の多結晶シリコン基板の主面上に酸化膜を形成する工程と、該酸化膜表面が前記多結晶シリコン基板の粒界を反映した表面段差を有しない表面平滑性を有するように平坦化する研磨工程とを備え、前記酸化膜形成工程は、多結晶シリコン基板の主面に有機シリカ若しくはシリコーン系材料をスピン塗布して熱処理を施すことにより実行されることを特徴とする磁気記録媒体用シリコン基板の製造方法。
- 純度99.999%以上の多結晶シリコン基板の主面上に酸化膜を形成する工程と、該酸化膜表面が前記多結晶シリコン基板の粒界を反映した表面段差を有しない表面平滑性を有するように平坦化する研磨工程とを備え、前記酸化膜形成工程は、多結晶シリコン基板の主面を熱酸化することにより実行されることを特徴とする磁気記録媒体用シリコン基板の製造方法。
- 前記研磨工程は、前記酸化膜に中性若しくはアルカリ性のスラリを用いたCMP処理を施して、前記酸化膜付き多結晶シリコン基板の表面が多結晶シリコンの粒界を反映した表面段差を有しないように平滑化して、ウェビネスとマイクロウェビネスの2乗平均値を何れも0.3nm以下とするものである請求項5又は6に記載の磁気記録媒体用シリコン基板の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007071337A JP4411331B2 (ja) | 2007-03-19 | 2007-03-19 | 磁気記録媒体用シリコン基板およびその製造方法 |
CNA2008100829334A CN101299334A (zh) | 2007-03-19 | 2008-03-13 | 磁记录介质用硅衬底及其制造方法 |
US12/050,504 US20080233330A1 (en) | 2007-03-19 | 2008-03-18 | Silicon substrate for magnetic recording media and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007071337A JP4411331B2 (ja) | 2007-03-19 | 2007-03-19 | 磁気記録媒体用シリコン基板およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008234750A JP2008234750A (ja) | 2008-10-02 |
JP4411331B2 true JP4411331B2 (ja) | 2010-02-10 |
Family
ID=39775011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007071337A Expired - Fee Related JP4411331B2 (ja) | 2007-03-19 | 2007-03-19 | 磁気記録媒体用シリコン基板およびその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20080233330A1 (ja) |
JP (1) | JP4411331B2 (ja) |
CN (1) | CN101299334A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009093758A (ja) * | 2007-10-10 | 2009-04-30 | Shin Etsu Chem Co Ltd | 磁気記録媒体用シリコン基板の製造方法および磁気記録媒体 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009084534A1 (ja) | 2007-12-28 | 2009-07-09 | Hoya Corporation | 磁気ディスク用ガラス基板、磁気ディスク、及び磁気ディスクの製造方法 |
JP4551459B2 (ja) * | 2008-02-19 | 2010-09-29 | 信越化学工業株式会社 | 磁気記録用シリコン基板および磁気記録用媒体の製造方法 |
JP5751748B2 (ja) | 2009-09-16 | 2015-07-22 | 信越化学工業株式会社 | 多結晶シリコン塊群および多結晶シリコン塊群の製造方法 |
DE112011106043T5 (de) * | 2011-12-27 | 2014-09-18 | Intel Corporation | Herstellung von elektrochemischen Kondensatoren mit porösem Silicium |
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DE69107101T2 (de) * | 1990-02-06 | 1995-05-24 | Semiconductor Energy Lab | Verfahren zum Herstellen eines Oxydfilms. |
TW237562B (ja) * | 1990-11-09 | 1995-01-01 | Semiconductor Energy Res Co Ltd | |
JP2933429B2 (ja) * | 1991-11-06 | 1999-08-16 | キヤノン株式会社 | 液体噴射記録ヘッド用基板、液体噴射記録ヘッドおよび液体噴射記録装置 |
US5487931A (en) * | 1993-12-02 | 1996-01-30 | Annacone; William R. | Rigid disc substrate comprising a central hard core substrate with a hard, thermally and mechanically matched overlying smoothing layer and method for making the same |
US6077619A (en) * | 1994-10-31 | 2000-06-20 | Sullivan; Thomas M. | Polycrystalline silicon carbide ceramic wafer and substrate |
JPH1092637A (ja) * | 1996-09-13 | 1998-04-10 | Fujitsu Ltd | 磁気記録媒体及び装置 |
JP2001516324A (ja) * | 1997-03-04 | 2001-09-25 | アストロパワー,インコーポレイテッド | 柱状結晶粒状多結晶太陽電池基材及び改良された製造方法 |
FR2761629B1 (fr) * | 1997-04-07 | 1999-06-18 | Hoechst France | Nouveau procede de polissage mecano-chimique de couches de materiaux semi-conducteurs a base de polysilicium ou d'oxyde de silicium dope |
KR100238128B1 (ko) * | 1997-04-21 | 2000-01-15 | 윤종용 | 과전류 및 과전압 인가로부터 보호되는 구조의 플래너실리콘헤드 및 그 제조방법 |
US6537648B1 (en) * | 1999-03-31 | 2003-03-25 | Hoya Corporation | Substrate for an information recording medium, information recording medium using the substrate and method of producing the substrate |
JP4554011B2 (ja) * | 1999-08-10 | 2010-09-29 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
US6454820B2 (en) * | 2000-02-03 | 2002-09-24 | Kao Corporation | Polishing composition |
US6821653B2 (en) * | 2000-09-12 | 2004-11-23 | Showa Denko Kabushiki Kaisha | Magnetic recording medium, process for producing the same, and magnetic recording and reproducing apparatus |
JP2002110662A (ja) * | 2000-09-29 | 2002-04-12 | Toshiba Corp | 半導体装置の製造方法および半導体装置 |
JP2002176180A (ja) * | 2000-12-06 | 2002-06-21 | Hitachi Ltd | 薄膜半導体素子及びその製造方法 |
TW569195B (en) * | 2001-01-24 | 2004-01-01 | Matsushita Electric Ind Co Ltd | Micro-particle arranged body, its manufacturing method, and device using the same |
JP4744700B2 (ja) * | 2001-01-29 | 2011-08-10 | 株式会社日立製作所 | 薄膜半導体装置及び薄膜半導体装置を含む画像表示装置 |
US6916740B2 (en) * | 2001-06-25 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | Method of forming smooth polycrystalline silicon electrodes for molecular electronic devices |
MY133305A (en) * | 2001-08-21 | 2007-11-30 | Kao Corp | Polishing composition |
JP2003332350A (ja) * | 2002-05-17 | 2003-11-21 | Hitachi Ltd | 薄膜半導体装置 |
KR100578105B1 (ko) * | 2003-12-30 | 2006-05-10 | 한국과학기술원 | 알루미늄 할로겐 화합물과 이종 금속 화합물의 혼합분위기를 이용한 다결정 규소박막의 제조방법 |
WO2006022443A1 (en) * | 2004-08-27 | 2006-03-02 | Showa Denko K.K. | Magnetic disk substrate and production method of magnetic disk |
US20060159964A1 (en) * | 2005-01-19 | 2006-07-20 | Shin-Etsu Chemical Co., Ltd. | Method for manufacturing a surface-treated silicon substrate for magnetic recording medium |
WO2006102318A2 (en) * | 2005-03-18 | 2006-09-28 | Applied Materials, Inc. | Electroless deposition process on a contact containing silicon or silicide |
TW200707640A (en) * | 2005-03-18 | 2007-02-16 | Applied Materials Inc | Contact metallization scheme using a barrier layer over a silicide layer |
US20060286774A1 (en) * | 2005-06-21 | 2006-12-21 | Applied Materials. Inc. | Method for forming silicon-containing materials during a photoexcitation deposition process |
JP2009020920A (ja) * | 2007-07-10 | 2009-01-29 | Shin Etsu Chem Co Ltd | 磁気記録媒体用多結晶シリコン基板および磁気記録媒体 |
JP2009093758A (ja) * | 2007-10-10 | 2009-04-30 | Shin Etsu Chem Co Ltd | 磁気記録媒体用シリコン基板の製造方法および磁気記録媒体 |
WO2009084534A1 (ja) * | 2007-12-28 | 2009-07-09 | Hoya Corporation | 磁気ディスク用ガラス基板、磁気ディスク、及び磁気ディスクの製造方法 |
JP4551459B2 (ja) * | 2008-02-19 | 2010-09-29 | 信越化学工業株式会社 | 磁気記録用シリコン基板および磁気記録用媒体の製造方法 |
JP5250838B2 (ja) * | 2009-01-27 | 2013-07-31 | 昭和電工株式会社 | 磁気記録媒体の製造方法及び磁気記録媒体、並びに磁気記録再生装置 |
-
2007
- 2007-03-19 JP JP2007071337A patent/JP4411331B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-13 CN CNA2008100829334A patent/CN101299334A/zh active Pending
- 2008-03-18 US US12/050,504 patent/US20080233330A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009093758A (ja) * | 2007-10-10 | 2009-04-30 | Shin Etsu Chem Co Ltd | 磁気記録媒体用シリコン基板の製造方法および磁気記録媒体 |
Also Published As
Publication number | Publication date |
---|---|
JP2008234750A (ja) | 2008-10-02 |
US20080233330A1 (en) | 2008-09-25 |
CN101299334A (zh) | 2008-11-05 |
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