JP4391276B2 - 半導体実装用半田合金とその製造方法、及び半田ボール、電子部材 - Google Patents
半導体実装用半田合金とその製造方法、及び半田ボール、電子部材 Download PDFInfo
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- JP4391276B2 JP4391276B2 JP2004070878A JP2004070878A JP4391276B2 JP 4391276 B2 JP4391276 B2 JP 4391276B2 JP 2004070878 A JP2004070878 A JP 2004070878A JP 2004070878 A JP2004070878 A JP 2004070878A JP 4391276 B2 JP4391276 B2 JP 4391276B2
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- solder
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- 229910000679 solder Inorganic materials 0.000 title claims description 121
- 229910045601 alloy Inorganic materials 0.000 title claims description 67
- 239000000956 alloy Substances 0.000 title claims description 67
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000012298 atmosphere Substances 0.000 claims description 22
- 229910052684 Cerium Inorganic materials 0.000 claims description 7
- 229910052779 Neodymium Inorganic materials 0.000 claims description 7
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 7
- 229910052772 Samarium Inorganic materials 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 229910052746 lanthanum Inorganic materials 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 4
- 229910052691 Erbium Inorganic materials 0.000 claims description 4
- 229910052693 Europium Inorganic materials 0.000 claims description 4
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 4
- 229910052689 Holmium Inorganic materials 0.000 claims description 4
- 229910052765 Lutetium Inorganic materials 0.000 claims description 4
- 229910052771 Terbium Inorganic materials 0.000 claims description 4
- 229910052775 Thulium Inorganic materials 0.000 claims description 4
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 15
- 229910000765 intermetallic Inorganic materials 0.000 description 13
- 238000002844 melting Methods 0.000 description 12
- 230000008018 melting Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 230000006378 damage Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 239000000654 additive Substances 0.000 description 6
- 230000000996 additive effect Effects 0.000 description 6
- 229910001111 Fine metal Inorganic materials 0.000 description 3
- 229910020836 Sn-Ag Inorganic materials 0.000 description 3
- 229910020988 Sn—Ag Inorganic materials 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000009863 impact test Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000005496 eutectics Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Wire Bonding (AREA)
Description
(1) Sn、Ag及びCuを主体とする半田合金であって、Ag:1〜5質量%及びCu:0.1〜2質量%を含み、さらにMg、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Luから成る元素群から選ばれた1種又は2種以上の元素を総計で0.0005〜0.5質量%含有し(ただし、前記総計が、La、Ce、Pr、Nd、Sm、又はGdの元素で0.5質量%とする場合を除く)、残部がSn及び不可避不純物から成ることを特徴とする半導体実装用半田合金。
(2) さらに、Ni:0.0005〜0.5質量%、Fe:0.0005〜0.5質量%、Al:0.0005〜0.5質量%、Sb:0.1〜3.0質量%、Bi:0.1〜3.0質量%、P:0.0005〜0.005質量%の内の少なくとも1種を含有することを特徴とする(1)に記載の半導体実装用半田合金。
(3) さらに、Zn、In、Pt、Pdから成る群から選ばれた1種又は2種以上の元素を総計で0.01〜0.5質量%含有することを特徴とする上記(1)又は(2)に記載の半導体実装用半田合金。
(4) 上記(1)〜(3)のいずれかに記載の半田合金の製造方法であって、半田合金成分の溶融混合時に、0.1〜101.3Paの雰囲気又は0.1〜10130Paの非酸化雰囲気の一方又は両方に曝すことを特徴とする半導体実装用半田合金の製造方法。
(5) 上記(1)〜(3)のいずれかに記載の半田合金から成ることを特徴とする半田ボール。
(6) 半田接合部を有する電子部材であって、該半田接合部の一部又は全部に上記(1)〜(3)のいずれかに記載の半田合金を用いて成ることを特徴とする電子部材。
Claims (6)
- Sn、Ag及びCuを主体とする半田合金であって、Ag:1〜5質量%及びCu:0.1〜2質量%を含み、さらにMg、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Luから成る元素群から選ばれた1種又は2種以上の元素を総計で0.0005〜0.5質量%含有し(ただし、前記総計が、La、Ce、Pr、Nd、Sm、又はGdの元素で0.5質量%とする場合を除く)、残部がSn及び不可避不純物から成ることを特徴とする半導体実装用半田合金。
- さらに、Ni:0.0005〜0.5質量%、Fe:0.0005〜0.5質量%、Al:0.0005〜0.5質量%、Sb:0.1〜3.0質量%、Bi:0.1〜3.0質量%、P:0.0005〜0.005質量%の内の少なくとも1種を含有することを特徴とする請求項1に記載の半導体実装用半田合金。
- さらに、Zn、In、Pt、Pdから成る群から選ばれた1種又は2種以上の元素を総計で0.01〜0.5質量%含有することを特徴とする請求項1又は2に記載の半導体実装用半田合金。
- 請求項1〜3のいずれかに記載の半田合金の製造方法であって、半田合金成分の溶融混合時に、0.1〜101.3Paの雰囲気又は0.1〜10130Paの非酸化雰囲気の一方又は両方に曝すことを特徴とする半導体実装用半田合金の製造方法。
- 請求項1〜3のいずれかに記載の半田合金から成ることを特徴とする半田ボール。
- 半田接合部を有する電子部材であって、該半田接合部の一部又は全部に請求項1〜3のいずれかに記載の半田合金を用いて成ることを特徴とする電子部材。
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JP2004070878A JP4391276B2 (ja) | 2004-03-12 | 2004-03-12 | 半導体実装用半田合金とその製造方法、及び半田ボール、電子部材 |
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JP2004070878A JP4391276B2 (ja) | 2004-03-12 | 2004-03-12 | 半導体実装用半田合金とその製造方法、及び半田ボール、電子部材 |
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JP2005254298A JP2005254298A (ja) | 2005-09-22 |
JP4391276B2 true JP4391276B2 (ja) | 2009-12-24 |
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JP2004070878A Expired - Lifetime JP4391276B2 (ja) | 2004-03-12 | 2004-03-12 | 半導体実装用半田合金とその製造方法、及び半田ボール、電子部材 |
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Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
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US9260768B2 (en) * | 2005-12-13 | 2016-02-16 | Indium Corporation | Lead-free solder alloys and solder joints thereof with improved drop impact resistance |
CN100464931C (zh) * | 2006-02-17 | 2009-03-04 | 河南科技大学 | 高强度高韧性含镍SnAgCuRE无铅钎料及制备方法 |
CN100439027C (zh) * | 2007-01-18 | 2008-12-03 | 广州有色金属研究院 | 适用于铜铝异种金属软钎焊的无铅焊料合金 |
KR100902163B1 (ko) * | 2007-03-28 | 2009-06-10 | 한국과학기술원 | 취성파괴 방지를 위한 무연솔더와 금속 표면의 합금원소접합방법 |
TW200927357A (en) * | 2007-10-17 | 2009-07-01 | Ishikawa Metal Co Ltd | Lead-free solder |
WO2009051181A1 (ja) * | 2007-10-19 | 2009-04-23 | Nihon Superior Sha Co., Ltd. | 無鉛はんだ合金 |
KR100833113B1 (ko) | 2007-12-31 | 2008-06-12 | 덕산하이메탈(주) | 무연솔더합금 및 그 제조방법 |
JP5379403B2 (ja) * | 2008-05-12 | 2013-12-25 | 株式会社弘輝 | 鉛フリーSn−Ni系半田合金及び半田合金粉末 |
JP5584427B2 (ja) * | 2009-04-14 | 2014-09-03 | 新日鉄住金マテリアルズ株式会社 | 無鉛ハンダ合金、ハンダボール及びハンダバンプを有する電子部材 |
JP2011005510A (ja) * | 2009-06-24 | 2011-01-13 | Mitsubishi Electric Corp | はんだ合金および電子回路基板 |
JP5413926B2 (ja) * | 2010-08-18 | 2014-02-12 | 新日鉄住金マテリアルズ株式会社 | 半導体実装用半田ボール及び電子部材 |
WO2012127642A1 (ja) | 2011-03-23 | 2012-09-27 | 千住金属工業株式会社 | 鉛フリーはんだ合金 |
WO2013005312A1 (ja) * | 2011-07-06 | 2013-01-10 | 有限会社ソフィアプロダクト | 酸化物接合材及びこれを用いた接合体 |
JP5777979B2 (ja) * | 2011-08-30 | 2015-09-16 | 日本アルミット株式会社 | はんだ合金 |
JP5238088B1 (ja) * | 2012-06-29 | 2013-07-17 | ハリマ化成株式会社 | はんだ合金、ソルダペーストおよび電子回路基板 |
WO2014002304A1 (ja) * | 2012-06-29 | 2014-01-03 | ハリマ化成株式会社 | はんだ合金、ソルダペーストおよび電子回路基板 |
CN102862001B (zh) * | 2012-10-10 | 2015-04-01 | 浙江高博焊接材料有限公司 | 含Nd、Te和Ga的Sn-Ag-Cu无铅钎料 |
CN103240541B (zh) * | 2013-05-13 | 2014-08-13 | 金封焊宝有限责任公司 | 一种用于铜铝焊接的锡锌多元合金焊料及制造方法 |
JP5730353B2 (ja) * | 2013-07-17 | 2015-06-10 | ハリマ化成株式会社 | はんだ組成物、ソルダペーストおよび電子回路基板 |
CN104759783B (zh) * | 2015-03-24 | 2017-02-01 | 广东工业大学 | 一种低银无铅焊料及其制备方法 |
CN106425154A (zh) * | 2016-11-29 | 2017-02-22 | 东莞市广信知识产权服务有限公司 | 无铅钎料 |
JP7057997B2 (ja) * | 2017-11-01 | 2022-04-21 | 株式会社日本スペリア社 | 鉛フリーはんだ合金及びはんだ継手 |
TWI820277B (zh) * | 2018-12-27 | 2023-11-01 | 美商阿爾發金屬化工公司 | 無鉛焊料組成物 |
TWI814081B (zh) * | 2019-09-02 | 2023-09-01 | 美商阿爾發金屬化工公司 | 高溫超高可靠性合金、其製造方法及其應用 |
CN110952017B (zh) * | 2019-12-27 | 2020-10-09 | 华北水利水电大学 | 一种高熵超银钎料合金及其制备方法 |
CN113182727A (zh) * | 2021-04-08 | 2021-07-30 | 北京科技大学 | 一种耐氯离子腐蚀的Sn-Ag-Cu-Nd无铅焊料合金及其制备方法 |
CN116967655A (zh) * | 2022-04-01 | 2023-10-31 | 中山翰华锡业有限公司 | 一种高绝缘预成型焊片及其制备方法 |
JP2024013585A (ja) * | 2022-07-20 | 2024-02-01 | 日立Astemo株式会社 | 半導体装置 |
CN115446493A (zh) * | 2022-08-31 | 2022-12-09 | 昆明理工大学 | 一种含Bi、Sb、Yb的高润湿性Sn-Ag-Cu系无铅钎料 |
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2004
- 2004-03-12 JP JP2004070878A patent/JP4391276B2/ja not_active Expired - Lifetime
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