JP4354722B2 - Clamp device and vertical drive positioning device with tilt function provided with the same - Google Patents

Clamp device and vertical drive positioning device with tilt function provided with the same Download PDF

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Publication number
JP4354722B2
JP4354722B2 JP2003086932A JP2003086932A JP4354722B2 JP 4354722 B2 JP4354722 B2 JP 4354722B2 JP 2003086932 A JP2003086932 A JP 2003086932A JP 2003086932 A JP2003086932 A JP 2003086932A JP 4354722 B2 JP4354722 B2 JP 4354722B2
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Prior art keywords
clamp
support member
shaft
ball
balls
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JP2004291156A (en
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英一 平岡
良幸 冨田
和晴 内海
達也 小原
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Priority to JP2003086932A priority Critical patent/JP4354722B2/en
Priority to TW093104614A priority patent/TWI245681B/en
Priority to KR1020040013869A priority patent/KR100541170B1/en
Priority to CNB2004100313375A priority patent/CN1274462C/en
Publication of JP2004291156A publication Critical patent/JP2004291156A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/40—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using ball, roller or wheel arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/42—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using T-, V-, dovetail-section or like guides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00—Work clamping
    • B23Q2703/02—Work clamping means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Pivots And Pivotal Connections (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、鉛直方向、すなわちＺ軸方向の駆動機能と傾き、すなわちチルト機能とを有するチルト機能付き鉛直方向駆動位置決め装置に関する。
【０００２】
【従来の技術】
位置決めステージ等に用いられるＺ軸（鉛直）方向の駆動装置として、３つの駆動機構を組み合わせ、それらにより支えられる被支持体、例えば、テーブルあるいは吸着盤等に対し上下方向の並進動作を与えることができるようにしたものが提案されている（例えば、特許文献１）。
【０００３】
これは、キネマティッククランプ（いわゆるケルビンクランプ）を用いたものであるが、位置決めのための装置であり、ある大きさ以上の水平あるいは下方向加速度が働くと、上部物体がずれる可能性がある。
【０００４】
以下に、このことを図４〜図６を参照して説明する。
【０００５】
（１）ケルビンクランプは、図４（ａ）に示すように、上部テーブル２０の下面に軸を介して取り付けられた３個の球２２、２３、２４が、それぞれ下部テーブル２１の上面に形成された三角錐（又は円錐）状の凹部２５、断面Ｖ字状のＶ溝２６、平面２７と接触することにより、下部テーブル２１の面に対し上部テーブル２０の面を相対的に位置決めを行うことができるものである。なお、図４（ｂ）に示すように、３個の球のすべてが下部テーブル２１´の上面に形成された３組のＶ溝２６´に接触するように構成される場合もある。
【０００６】
（２）このようなケルビンクランプは、図４（ａ）のもので言えば、Ｖ溝２６の軸方向の延長線上に凹部２５の三角錐の頂点が位置するように構成されている。これにより、一方の面、例えば球が固定されている方の上部テーブル２０が熱膨張（あるいは収縮）等で３つの球の間隔が拡がった（狭まった）としても、あるいは下部テーブル２１が熱膨張（あるいは収縮）しても、図５に示されるように、三角錐状の凹部２５と接している球２２を固定点とし、Ｖ溝２６に接した球２３はＶ溝２６の軸方向に移動し、平面と接した球２４は三角錐状の凹部２５とＶ溝２６の相対位置関係から決まる位置に移動することができる。なお、図４（ｂ）の場合には、３組のＶ溝２６´が一点で交差する配置とされ、図４（ａ）のものと同じ機能を持つ。
【０００７】
（３）凹部、溝を設けた面を下部側とし、各球を固定した面を上部側として、各クランプ部分において下部側が上部側を支えているものとし、下部側に水平加速度が作用したとする。この場合、図６（ａ）に示されるように、Ｖ溝２６と球２３とによるクランプ部で支える上部側の重量による摩擦力μ・Ｆ1 （但し、μは摩擦係数）の作用によって、下部側に作用する水平加速度が小さい場合には上下両側の相対位置は保持される。しかし、下部側に大きな水平加速度αによる水平力Ｆ2 が働く場合、その分力Ｆ2 ´（Ｖ溝２６の面方向に沿った分力）が摩擦力μ・Ｆ1 を上回ると上部側の位置がずれてしまう。あるいは、図６（ｂ）に示されるように、全体が下方に重力加速度を越える加速度α´で移動する場合は、上部側は下部側に追随できず、離れてしまう。このため、より大きな摩擦力を与えるために上下両側をばね等でつないで付加荷重を与えていた。
【０００８】
【特許文献１】
特開平１０−７９３４４号（第２頁、図９）
【０００９】
【発明が解決しようとする課題】
ところで、Ｚ軸（鉛直）方向の位置決め装置では、３組のＺ軸駆動機構を用いて上部側（例えば回転テーブル）を支え、Ｚ軸方向の並進動作に加えて傾き（チルト）動作を与えることが要求される場合がある。これに対し、上下両側の結合を前述したケルビンクランプとすれば、傾きを与えるチルト動作が可能となる。しかし、これら３組のＺ軸が水平方向の位置決めテーブル（Ｘ−Ｙテーブル）の上に設置される場合、上記（３）に記述した理由で水平方向の位置決めテーブルが大きな加速度で移動すると、上部側がずれることになる。それを防ぐために上下両側をばね等でつないだ場合、Ｚ軸駆動機構にその分荷重が加わることになり、Ｚ軸駆動機構の容量増大が必要となる。そして、Ｚ軸方向の駆動量（ストローク）が大きくなればなるほどばねによる荷重が増加する。
【００１０】
そこで、本発明の課題は、キネマティッククランプ（いわゆるケルビンクランプ）をリジッド化し、鉛直（Ｚ軸）方向の並進及びチルト動作を可能とすると共に水平方向あるいは下方向の加速度が働いても位置のずれを無くすことを可能にするクランプ装置を提供することにある。
【００１１】
本発明の他の課題は、上記クランプ装置を備えたチルト機能付き鉛直方向駆動位置決め装置を提供することにある。
【００１２】
【課題を解決するための手段】
本発明によれば、支持部材上に置かれるボールと、該ボールの受け部を下部に有し該受け部を前記ボールの上部に当接させたクランプ軸との組合わせを複数組備え、前記クランプ軸は前記受け部とそこから上方に延びる軸部とから成り、前記支持部材側には前記軸部を揺動可能に上方に突出させた状態で前記ボールと前記クランプ軸との組合わせを保持するためのホルダを固定し、前記受け部と前記ホルダとの間には該受け部を下方に付勢するためのばね部材を介在させたことを特徴とするクランプ装置が提供される。
【００１３】
本発明によるクランプ装置においては、前記ボールと前記クランプ軸との組合わせが３組であり、第１の組の第１のボールは第１の支持部材に設けられた角錐または円錐による凹部に収容され、第２の組の第２のボールは第２の支持部材にあらかじめ決められた方向に延在するように設けられたＶ溝に収容され、第３の組の第３のボールは第３の支持部材の平面上に置かれることを特徴とする。
【００１４】
本発明によるクランプ装置はまた、前記ボールと前記クランプ軸との組合わせが３組であり、第１の組の第１のボールは第１の支持部材に設けられた第１のＶ溝に収容され、第２の組の第２のボールは第２の支持部材に設けられた第２のＶ溝に収容され、第３の組の第３のボールは第３の支持部材に設けられた第３のＶ溝に収容され、前記第１〜第３の支持部材は前記第１〜第３のＶ溝の延長線が一点で交差するように構成されても良い。
【００１５】
上記のクランプ装置においては、第１の態様として、前記第１〜第３の組の軸部をそれぞれ同じ上部部材に取り付けると共に、前記第１〜第３の支持部材をそれぞれ独立して上下動可能に構成することにより、前記上部部材が上下方向動作及びチルト動作可能なクランプ装置を提供できる。
【００１６】
上記のクランプ装置においてはまた、第２の態様として、前記第１〜第３の組の軸部をそれぞれ同じ上部部材に取り付けると共に、前記第１〜第３の支持部材を１つの共通の支持部材で構成したクランプ装置を提供できる。
【００１７】
本発明によればまた、上記の第１の態様によるクランプ装置を備えたチルト機能付き鉛直方向駆動位置決め装置であって、前記第１〜第３の支持部材を上下動させる第１〜第３の駆動機構をベース部材上に備えたことを特徴とするチルト機能付き鉛直方向駆動位置決め装置が提供される。
【００１８】
本発明によるチルト機能付き鉛直方向駆動位置決め装置においては、前記第１〜第３の駆動機構としてスライドウェッジ機構を備えたものが提供される。
【００１９】
【発明の実施の形態】
図１〜図３を参照して、本発明によるクランプ装置及びこれを用いたチルト機能付き鉛直方向駆動位置決め装置の好ましい実施の形態について説明する。
【００２０】
図１は、本発明によるクランプ装置を前述したケルビンクランプを改良して実現する場合の実施の形態を示している。ケルビンクランプを構成する３組のクランプのうち、図１（ａ）は三角錐等の角錐による凹部（または円錐による凹部でも良い）１０７ａとこれに収容された球１３とによる第１の組を示し、図１（ｂ）はＶ溝１０８ａとこれに収容された球１４とによる第２の組を示し、図１（ｃ）は平面とその上に置かれた球１５とによる第３の組を示している。球が置かれる部分の構造以外は第１〜第３の組のいずれも同じ構造である。
【００２１】
図１（ａ）に示された第１のクランプ１０は、上面に円錐（又は角錐）による凹部（以下、凹部と略称する）１０７ａが形成された第１の支持部材１０７と、凹部１０７ａに収容された第１の球１３と、球１３の受け部１６−１を下部に有すると共に上方に延びる軸部１６−２を有して、受け部１６−１を球１３の上部に当接させたクランプ軸１６と、第１の支持部材１０７に固定され軸部１６−２を揺動可能に上方に突出させた状態で球１３とクランプ軸１６との組合わせを保持するためのホルダ１０４と、受け部１６−１の上側とホルダ１０４の内面側との間に介在して受け部１６−１を下方に付勢するための皿ばね１０１とを含む。
【００２２】
図１（ｂ）に示された第２のクランプ１１は、上面にＶ溝１０８ａが形成された第２の支持部材１０８と、Ｖ溝１０８ａに収容された第２の球１４と、球１４の受け部１７−１を下部に有すると共に上方に延びる軸部１７−２を有して、受け部１７−１を球１４の上部に当接させたクランプ軸１７と、第２の支持部材１０８に固定され軸部１７−２を揺動可能に上方に突出させた状態で球１４とクランプ軸１７との組合わせを保持するためのホルダ１０５と、受け部１７−１の上側とホルダ１０５の内面側との間に介在して受け部１７−１を下方に付勢するための皿ばね１０２とを含む。
【００２３】
図１（ｃ）に示された第３のクランプ１２は、第３の支持部材１０９と、その上面、つまり平面上に置かれた第３の球１５と、球１５の受け部１８−１を下部に有すると共に上方に延びる軸部１８−２を有して、受け部１８−１を球１５の上部に当接させたクランプ軸１８と、第３の支持部材１０９に固定され軸部１８−２を揺動可能に上方に突出させた状態で球１５とクランプ軸１８との組合わせを保持するためのホルダ１０６と、受け部１８−１の上側とホルダ１０６の内面側との間に介在して受け部１８−１を下方に付勢するための皿ばね１０３とを含む。
【００２４】
受け部１６−１〜１８−１は、いずれもその下面側に角錐または円錐による凹部を形成してこの凹部に球１３〜１５を収容するようにされている。また、ホルダ１０４〜１０６は、いずれもその上部側に、軸部１６−２〜１８−２を揺動可能に挿通可能とするために、軸部１６−２〜１８−２の径より大きめの開口を持つ板部材を持つもので構成され、この板部材が皿ばねを受け部に押し付けるばね押えとして機能し、ホルダに必要な荷重を与える。厳密に言えば、各ホルダに相対運動を与えることができるようにするために、ばね押えの開口は軸部の径と相対運動の移動距離を加えたものより大きくしてチルト動作に伴う相対移動を許容するように構成される。また、皿ばねは要求される荷重を与えるものを装着し、クランプ軸が傾いてもばねの弾性限界を越えないものを使用する。
【００２５】
以上のような３組のクランプを一つのクランプ装置として使用する場合、例えば軸部１６−２〜１８−２を被クランプ部材としての一つの上部部材１１０に取り付ける。一方、支持部材１０７〜１０９についてもこれらを取り付ける下部部材１１１、１１２、１１３を一つの部材で構成する。なお、第２のクランプ１１においては第２の支持部材１０８に形成されたＶ溝１０８ａの延長線が、第１のクランプ１０における第１の支持部材１０７に形成された凹部１０７ａの頂点に交差するように構成されることは言うまでも無い。勿論、はじめから支持部材１０７〜１０９を一つの部材で構成するようにしても良い。そして、支持部材１０７〜１０９を一つの部材で構成し、この一つの部材の上面に第１〜第３のＶ溝をそれらが一点で交差するように形成すると、図４（ｂ）に示されたものと同じ機能を持つクランプ装置を提供できることは言うまでも無い。いずれにしても、これらの構成によるクランプ装置は、第１〜第３のクランプ１０〜１２がそれぞれ、図４（ａ）や図４（ｂ）に示したものと同じ機能を持ちながら、下部側と上部側とがリジッド化された構成となることにより、水平方向あるいは下方向の加速度が働いても互いの位置のずれを無くすことが可能となる。
【００２６】
一方、図１（ａ）〜図１（ｃ）に示される３組のクランプ１０〜１２を用いてチルト機能付き鉛直方向駆動位置決め装置を構成する場合、各組の下部部材１１１〜１１３をそれぞれＺ軸駆動機構で独立して上下方向に駆動可能に構成すれば良い。
【００２７】
Ｚ軸駆動機構には、例えば図２に示すようないわゆるスライドウェッジ方式のものを使用することができる。図２は、第１のクランプ１０にＺ軸駆動機構４０を適用した場合について示しているが、第２、第３のクランプ１１、１２のいずれにおいてもまったく同じものが使用される。
【００２８】
図２において、Ｚ軸駆動機構４０は、ベース部材５０上において水平方向にスライド可能にされて上面側に傾斜面を持つ水平移動ブロック６１と、この水平移動ブロック６１の傾斜面に対応する傾斜面を下面側に有して水平移動ブロック６１の水平移動により上下動可能にされた垂直移動ブロック６２と、水平移動ブロック６１を移動させるための駆動源として作用するモータ６３と、水平移動ブロック６１に対して水平方向に押し付け力を作用させるエアシリンダ６４とを含む。
【００２９】
水平移動ブロック６１は、ベース部材５０上に設けられた少なくとも１本の水平方向のガイド部材５０−１をスライド可能なスライド部材６１−１を下面側に有する。水平移動ブロック６１はまた、傾斜面に少なくとも１本のガイド部材６１−２が設けられている。一方、垂直移動ブロック６２の傾斜面には、ガイド部材６１−２をスライド可能なスライド部材６２−１が設けられている。ベース部材５０上にはまた、垂直移動ブロック６２の背面に対応して上方に延びるようにブロック体５０−２が設けられてこのブロック体５０−２における垂直移動ブロック６２側には上下方向に延在する上下方向のガイド部材５０−３が設けられている。そして、垂直移動ブロック６２の背面にはガイド部材５０−３をスライド可能なスライド部材６２−２が設けられている。モータ６３の出力軸と水平移動ブロック６１との間には、出力軸の回転運動を水平方向の運動に変換するためのボールねじ機構６５が設けられている。
【００３０】
以上のような構造により、モータ６３が一方向に回転するとこれが水平方向の運動に変換されて水平移動ブロック６１が図２中右方向に水平移動し、その結果、垂直移動ブロック６２は上方に移動する。一方、モータ６３が反対方向に回転するとこれが水平方向の運動に変換されて水平移動ブロック６１が図２中左方向に水平移動し、その結果、垂直移動ブロック６２は下方に移動する。
【００３１】
なお、エアシリンダ６４を使用するのは、以下の理由による。上部部材１１０及び場合によってはこれに載せられるワーク、その他の荷重により垂直移動ブロック６２には垂直方向の力が作用し、水平移動ブロック６１にはその水平方向成分が作用する。この水平方向成分をモータ６３の出力だけでカバーするには高出力のモータが要求されるので、上記水平方向成分をエアシリンダ６４の出力軸６４−１を水平移動ブロック６１を当接させて受けることでモータ６３の出力を小さくできるようにしている。
【００３２】
いずれにしても、上記のような構造のＺ軸駆動機構４０、７０、８０を組み合わされた３組のクランプ１０〜１２が図３に示すようにベース部材５０上に配置される。勿論、この場合にも第２のクランプ１１においては第２の支持部材１０８に形成されたＶ溝１０８ａの延長線が、第１のクランプ１０における第１の支持部材１０７に形成された凹部１０７ａの頂点に交差するように構成されることは言うまでも無い。一方、Ｚ軸駆動位置決め装置を図４（ｂ）に示すタイプにする場合には、３組のクランプのすべてを図1（ｂ）に示されるＶ溝１０８ａを持つものとし、各クランプを独立して上述したＺ軸駆動機構により駆動するように構成される。勿論、この場合にも３組のクランプは３つのＶ溝の延長線が一点で交差するように配置される。いずれにしても、３組のクランプ１０〜１２における上部部材１１０は同一部材であり、３組のクランプ１０〜１２の上下方向の移動量を同じにすれば並進動作となり、移動量に差を持たせることでチルト動作となる。
【００３３】
以上のようにして、キネマティッククランプ（いわゆるケルビンクランプ）をリジッド化し、Ｚ軸方向の並進及びチルト動作を可能とすると共に水平方向あるいは下方向の加速度が働いても位置のずれを無くすことのできるチルト機能付きＺ軸駆動位置決め装置を提供できる。上述したＺ軸駆動機構は一例にすぎず、スライドウェッジ方式のものに限らず、単なるエアシリンダあるいはボールねじ等の周知の駆動機構で実現されても良い。
【００３４】
また、場合によっては上部側と下部側の位置関係を上下逆にするような構造にしても良い。
【００３５】
なお、上記のような３軸による鉛直方向駆動位置決め装置をＸ−ＹステージのＸ軸テーブルあるいはＹ軸テーブルに設けることでＸ−Ｙ−Ｚの３軸方向に移動可能なステージ装置を構成することができる。この場合、ベース部材５０がＸ軸テーブルあるいはＹ軸テーブルとなる。
【００３６】
【発明の効果】
本発明によれば、キネマティッククランプ、いわゆるケルビンクランプにおける上部側と下部側とをリジッド化し、Ｚ軸方向の並進及びチルト動作を可能とすると共に水平方向あるいは下方向の加速度が働いても位置のずれを無くすことのできるクランプ装置を提供することができる。
【００３７】
本発明によればまた、上記の効果を持つクランプ装置を備えたチルト機能付き鉛直方向駆動位置決め装置を提供することができる。
【図面の簡単な説明】
【図１】本発明によるクランプ装置を構成する３組のクランプを説明するための断面図である。
【図２】図１の各組のクランプにＺ軸駆動機構を組み合わせて鉛直方向駆動位置決め装置を構成する場合の構造を１つのクランプについて示した側面図である。
【図３】図２に示されたクランプとＺ軸駆動機構の組合わせを用いて鉛直方向駆動位置決め装置を構成する場合の各組の配置図を示した平面図である。
【図４】従来のケルビンクランプの２つの例を説明するための図である。
【図５】従来のケルビンクランプにおいて支持部材の熱膨張に基づくずれを吸収する作用を説明するための図である。
【図６】従来のケルビンクランプにおいて水平方向の加速度、下方向の加速度が加わった場合の問題点を説明するための図である。
【符号の説明】
１０、１１、１２ 第１、第２、第３のクランプ
１３〜１５ 球
１６〜１８ クランプ軸
１６−１、１７−１、１８−１ 受け部
１６−２、１７−２、１８−２ 軸部
４０、７０、８０ Ｚ軸駆動機構
５０ ベース部材
５０−１、５０−３、６１−２ ガイド部材
６１ 水平移動部材
６２ 垂直移動部材
６１−１、６２−１、６２−２ スライド部材
６３ モータ
６４ エアシリンダ
６５ ボールねじ機構
１０１、１０２、１０３ 皿ばね
１０４〜１０６ ホルダ
１０７、１０８、１０９ 第１、第２、第３の支持部材
１１０ 上部材
１１１、１１２、１１３ 下部材[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vertical drive positioning apparatus with a tilt function having a drive function and tilt in a vertical direction, that is, a Z-axis direction, that is, a tilt function.
[0002]
[Prior art]
As a driving device in the Z-axis (vertical) direction used for a positioning stage, etc., it is possible to combine three driving mechanisms and to give a translational motion in the vertical direction to a supported body, such as a table or a suction board, supported by them. What has been made possible is proposed (for example, Patent Document 1).
[0003]
Although this uses a kinematic clamp (so-called Kelvin clamp), it is a positioning device. If a horizontal or downward acceleration of a certain size or more acts, the upper object may be displaced.
[0004]
Hereinafter, this will be described with reference to FIGS.
[0005]
(1) As shown in FIG. 4A, the Kelvin clamp has three balls 22, 23, and 24 attached to the lower surface of the upper table 20 via shafts on the upper surface of the lower table 21. The surface of the upper table 20 can be positioned relative to the surface of the lower table 21 by contacting the triangular pyramid (or conical) concave portion 25, the V-shaped groove 26 having a V-shaped cross section, and the flat surface 27. It can be done. As shown in FIG. 4B, there are cases where all of the three spheres are configured to contact three sets of V grooves 26 ′ formed on the upper surface of the lower table 21 ′.
[0006]
(2) Such a Kelvin clamp is configured such that the apex of the triangular pyramid of the recess 25 is located on the extension line in the axial direction of the V groove 26 in the case of FIG. As a result, even if one surface, for example, the upper table 20 to which the sphere is fixed is expanded (or contracted) due to thermal expansion (or contraction) or the like, the interval between the three spheres is expanded (narrowed), or the lower table 21 is thermally expanded. Even if (or contracts), as shown in FIG. 5, the sphere 22 in contact with the triangular pyramid-shaped recess 25 is a fixed point, and the sphere 23 in contact with the V-groove 26 moves in the axial direction of the V-groove 26. The sphere 24 in contact with the plane can move to a position determined from the relative positional relationship between the triangular pyramid-shaped recess 25 and the V-groove 26. In the case of FIG. 4B, the three V-grooves 26 'are arranged so as to intersect at one point, and have the same function as that of FIG. 4A.
[0007]
(3) The surface provided with the recess and groove is the lower side, the surface to which each ball is fixed is the upper side, the lower side supports the upper side in each clamp part, and horizontal acceleration acts on the lower side To do. In this case, as shown in FIG. 6 (a), the friction force μ · F 1 (where μ is a friction coefficient) due to the weight on the upper side supported by the clamp portion formed by the V groove 26 and the ball 23 causes the lower portion When the horizontal acceleration acting on the side is small, the relative positions of the upper and lower sides are maintained. However, when a horizontal force F 2 due to a large horizontal acceleration α acts on the lower side, if the component force F 2 ′ (component force along the surface direction of the V groove 26) exceeds the frictional force μ · F 1 , The position will shift. Alternatively, as shown in FIG. 6B, when the whole moves downward at an acceleration α ′ exceeding the gravitational acceleration, the upper side cannot follow the lower side but is separated. For this reason, in order to give a larger frictional force, an additional load is applied by connecting the upper and lower sides with a spring or the like.
[0008]
[Patent Document 1]
JP-A-10-79344 (2nd page, FIG. 9)
[0009]
[Problems to be solved by the invention]
By the way, in the positioning device in the Z-axis (vertical) direction, an upper side (for example, a rotary table) is supported using three sets of Z-axis driving mechanisms, and in addition to the translation operation in the Z-axis direction, a tilt (tilt) operation is given. May be required. On the other hand, if the coupling on the upper and lower sides is the above-described Kelvin clamp, a tilting operation that gives an inclination becomes possible. However, when these three sets of Z-axis are installed on a horizontal positioning table (XY table), if the horizontal positioning table moves with a large acceleration for the reason described in (3) above, The side will shift. In order to prevent this, when the upper and lower sides are connected by a spring or the like, a load is applied to the Z-axis drive mechanism, and the capacity of the Z-axis drive mechanism needs to be increased. And the load by a spring increases, so that the drive amount (stroke) of a Z-axis direction becomes large.
[0010]
Accordingly, an object of the present invention is to make a kinematic clamp (so-called Kelvin clamp) rigid so that vertical (Z-axis) translation and tilt operations can be performed, and even if horizontal or downward acceleration is applied, the position shifts. It is an object of the present invention to provide a clamping device that makes it possible to eliminate the problem.
[0011]
Another object of the present invention is to provide a vertical drive positioning device with a tilt function provided with the clamp device.
[0012]
[Means for Solving the Problems]
According to the present invention, there are provided a plurality of combinations of a ball placed on a support member and a clamp shaft having a receiving part for the ball at the lower part and abutting the receiving part on the upper part of the ball, The clamp shaft includes the receiving portion and a shaft portion extending upward from the receiving portion, and the ball and the clamp shaft are combined with the shaft portion projecting upward on the support member side so as to be swingable. A clamp device is provided, in which a holder for holding is fixed, and a spring member for biasing the receiving portion downward is interposed between the receiving portion and the holder.
[0013]
In the clamping device according to the present invention, there are three combinations of the ball and the clamp shaft, and the first ball of the first group is accommodated in a concave portion formed by a pyramid or a cone provided on the first support member. The second ball of the second set is received in a V-groove provided in the second support member so as to extend in a predetermined direction, and the third ball of the third set is the third ball. It is characterized by being placed on the plane of the support member.
[0014]
In the clamping device according to the present invention, there are three combinations of the ball and the clamp shaft, and the first ball of the first group is accommodated in the first V-groove provided in the first support member. The second set of second balls is accommodated in the second V-groove provided in the second support member, and the third set of third balls is provided in the third support member. The first to third support members may be configured such that the extension lines of the first to third V grooves intersect at one point.
[0015]
In the above-described clamping device, as a first aspect, the first to third sets of shaft portions are attached to the same upper member, and the first to third support members can be moved up and down independently. By configuring in this way, it is possible to provide a clamp device in which the upper member can move in the vertical direction and tilt.
[0016]
In the above clamping apparatus, as a second aspect, the first to third sets of shaft portions are respectively attached to the same upper member, and the first to third support members are used as one common support member. The clamp apparatus comprised by can be provided.
[0017]
According to the present invention, there is also a tilt direction vertical drive positioning device including the clamp device according to the first aspect, wherein the first to third support members are moved up and down. There is provided a vertical drive positioning apparatus with a tilt function, characterized in that a drive mechanism is provided on a base member.
[0018]
In the vertical direction drive positioning device with a tilt function according to the present invention, a device provided with a slide wedge mechanism as the first to third drive mechanisms is provided.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
A preferred embodiment of a clamping device according to the present invention and a vertical drive positioning device with a tilt function using the same will be described with reference to FIGS.
[0020]
FIG. 1 shows an embodiment in which the clamping device according to the present invention is realized by improving the aforementioned Kelvin clamp. Of the three sets of clamps constituting the Kelvin clamp, FIG. 1A shows a first set of a concave portion 107a (or a concave portion by a cone) 107a and a sphere 13 accommodated therein by a pyramid such as a triangular pyramid. 1 (b) shows a second set of V-grooves 108a and spheres 14 accommodated therein, and FIG. 1 (c) shows a third set of planes and spheres 15 placed thereon. Show. Except for the structure of the part where the sphere is placed, all of the first to third sets have the same structure.
[0021]
A first clamp 10 shown in FIG. 1A is accommodated in a concave portion 107a, a first support member 107 having a concave portion (hereinafter, abbreviated as a concave portion) 107a formed by a cone (or pyramid) on the upper surface. The first sphere 13 and the receiving portion 16-1 of the sphere 13 are provided in the lower portion and the shaft portion 16-2 extending upward is provided so that the receiving portion 16-1 is brought into contact with the upper portion of the sphere 13. A clamp shaft 16 and a holder 104 for holding the combination of the sphere 13 and the clamp shaft 16 in a state where the shaft portion 16-2 is fixed to the first support member 107 and protrudes upward in a swingable manner. A disc spring 101 is provided between the upper side of the receiving portion 16-1 and the inner surface side of the holder 104 to urge the receiving portion 16-1 downward.
[0022]
The second clamp 11 shown in FIG. 1B includes a second support member 108 having a V-groove 108a formed on the upper surface, a second sphere 14 accommodated in the V-groove 108a, A clamp shaft 17 having a receiving portion 17-1 at the lower portion and a shaft portion 17-2 extending upward, and contacting the receiving portion 17-1 with the upper portion of the ball 14, and the second support member 108 A holder 105 for holding the combination of the sphere 14 and the clamp shaft 17 in a state where the shaft portion 17-2 protrudes upward so as to be swingable, and the upper surface of the receiving portion 17-1 and the inner surface of the holder 105 And a disc spring 102 for biasing the receiving portion 17-1 downward.
[0023]
The third clamp 12 shown in FIG. 1C includes a third support member 109, a third sphere 15 placed on the upper surface, that is, a plane, and a receiving portion 18-1 of the sphere 15. A clamp shaft 18 that has a shaft portion 18-2 that has a lower portion and extends upward, and a receiving portion 18-1 that is in contact with the upper portion of the ball 15, and a shaft portion 18- fixed to the third support member 109. 2 is held between the holder 106 for holding the combination of the ball 15 and the clamp shaft 18 in a state of projecting upward in a swingable manner, and between the upper side of the receiving portion 18-1 and the inner surface side of the holder 106. And a disc spring 103 for urging the receiving portion 18-1 downward.
[0024]
Each of the receiving portions 16-1 to 18-1 is configured such that a concave portion of a pyramid or a cone is formed on the lower surface side and the spheres 13 to 15 are accommodated in the concave portion. Also, the holders 104 to 106 are larger than the diameters of the shaft portions 16-2 to 18-2 so that the shaft portions 16-2 to 18-2 can be swingably inserted into the upper portions thereof. The plate member has a plate member having an opening, and the plate member functions as a spring presser that presses the disc spring against the receiving portion, and applies a necessary load to the holder. Strictly speaking, in order to allow relative movement to each holder, the opening of the spring presser is made larger than the sum of the diameter of the shaft and the movement distance of the relative movement, and the relative movement accompanying the tilting operation is made. Configured to allow. In addition, a disc spring is used that gives a required load, and a spring that does not exceed the elastic limit of the spring even if the clamp shaft is tilted is used.
[0025]
When three sets of clamps as described above are used as one clamping device, for example, the shaft portions 16-2 to 18-2 are attached to one upper member 110 as a member to be clamped. On the other hand, the lower members 111, 112, and 113 to which the supporting members 107 to 109 are attached are configured as a single member. In the second clamp 11, the extended line of the V groove 108 a formed in the second support member 108 intersects the apex of the recess 107 a formed in the first support member 107 in the first clamp 10. Needless to say, the configuration is as follows. Of course, the support members 107 to 109 may be configured as a single member from the beginning. Then, when the supporting members 107 to 109 are constituted by one member and the first to third V grooves are formed on the upper surface of the one member so as to intersect at one point, it is shown in FIG. Needless to say, it is possible to provide a clamping device having the same function as the conventional one. In any case, the first to third clamps 10 to 12 have the same functions as those shown in FIG. 4A and FIG. By adopting a configuration in which the upper side and the upper side are made rigid, it becomes possible to eliminate the displacement of the mutual position even when horizontal or downward acceleration is applied.
[0026]
On the other hand, when the vertical drive positioning device with a tilt function is configured using the three sets of clamps 10 to 12 shown in FIGS. 1A to 1C, the lower members 111 to 113 of each set are respectively set to Z. What is necessary is just to comprise so that it can drive to an up-down direction independently with an axial drive mechanism.
[0027]
As the Z-axis drive mechanism, for example, a so-called slide wedge type as shown in FIG. 2 can be used. FIG. 2 shows the case where the Z-axis drive mechanism 40 is applied to the first clamp 10, but the same one is used for both the second and third clamps 11 and 12.
[0028]
In FIG. 2, the Z-axis drive mechanism 40 includes a horizontal moving block 61 that is slidable in the horizontal direction on the base member 50 and has an inclined surface on the upper surface side, and an inclined surface corresponding to the inclined surface of the horizontal moving block 61. On the lower surface side, and a vertical movement block 62 that can be moved up and down by horizontal movement of the horizontal movement block 61, a motor 63 that acts as a drive source for moving the horizontal movement block 61, and the horizontal movement block 61 And an air cylinder 64 that applies a pressing force in the horizontal direction.
[0029]
The horizontal movement block 61 has a slide member 61-1 on the lower surface side that can slide at least one horizontal guide member 50-1 provided on the base member 50. The horizontal movement block 61 is also provided with at least one guide member 61-2 on an inclined surface. On the other hand, a slide member 62-1 capable of sliding the guide member 61-2 is provided on the inclined surface of the vertical movement block 62. A block body 50-2 is provided on the base member 50 so as to extend upward corresponding to the back surface of the vertical movement block 62, and extends vertically on the vertical movement block 62 side of the block body 50-2. An existing vertical guide member 50-3 is provided. A slide member 62-2 capable of sliding the guide member 50-3 is provided on the back surface of the vertical movement block 62. Between the output shaft of the motor 63 and the horizontal movement block 61, a ball screw mechanism 65 for converting the rotational motion of the output shaft into a motion in the horizontal direction is provided.
[0030]
With the structure as described above, when the motor 63 rotates in one direction, this is converted into a horizontal movement, and the horizontal movement block 61 moves horizontally in the right direction in FIG. 2, and as a result, the vertical movement block 62 moves upward. To do. On the other hand, when the motor 63 rotates in the opposite direction, this is converted into a horizontal movement, and the horizontal movement block 61 moves horizontally in the left direction in FIG. 2, and as a result, the vertical movement block 62 moves downward.
[0031]
The air cylinder 64 is used for the following reason. A vertical force acts on the vertical movement block 62 due to the upper member 110 and, optionally, a workpiece placed thereon, and other loads, and a horizontal component acts on the horizontal movement block 61. In order to cover this horizontal component only with the output of the motor 63, a high output motor is required. Therefore, the horizontal component is received by contacting the output shaft 64-1 of the air cylinder 64 with the horizontal moving block 61. Thus, the output of the motor 63 can be reduced.
[0032]
In any case, three sets of clamps 10 to 12 in which the Z-axis drive mechanisms 40, 70, and 80 having the above-described structure are combined are disposed on the base member 50 as shown in FIG. Of course, in this case as well, in the second clamp 11, the extension line of the V-shaped groove 108 a formed in the second support member 108 is formed by the recess 107 a formed in the first support member 107 in the first clamp 10. Needless to say, it is configured to intersect the vertices. On the other hand, when the Z-axis drive positioning device is of the type shown in FIG. 4B, all three sets of clamps have the V-groove 108a shown in FIG. And is configured to be driven by the Z-axis drive mechanism described above. Of course, also in this case, the three sets of clamps are arranged so that the extension lines of the three V grooves intersect at one point. In any case, the upper member 110 in the three sets of clamps 10 to 12 is the same member, and if the amount of movement in the vertical direction of the three sets of clamps 10 to 12 is the same, the translation operation is performed and there is a difference in the amount of movement. By doing so, it becomes a tilt operation.
[0033]
As described above, the kinematic clamp (so-called Kelvin clamp) is made rigid so that translation and tilting operations in the Z-axis direction can be performed, and positional deviation can be eliminated even if horizontal or downward acceleration is applied. A Z-axis drive positioning device with a tilt function can be provided. The Z-axis drive mechanism described above is merely an example, and is not limited to the slide wedge type, and may be realized by a known drive mechanism such as a simple air cylinder or a ball screw.
[0034]
In some cases, the upper side and the lower side may be structured upside down.
[0035]
It is to be noted that a stage device capable of moving in the XYZ three-axis directions is configured by providing the above-described three-axis vertical drive positioning device on the X-axis table or the Y-axis table of the XY stage. Can do. In this case, the base member 50 is an X-axis table or a Y-axis table.
[0036]
【The invention's effect】
According to the present invention, the upper side and the lower side of a kinematic clamp, so-called Kelvin clamp, are made rigid so that translation and tilting operations in the Z-axis direction can be performed, and the position can be adjusted even if horizontal or downward acceleration is applied. It is possible to provide a clamp device that can eliminate the displacement.
[0037]
According to the present invention, it is also possible to provide a vertical drive positioning device with a tilt function provided with a clamp device having the above-described effects.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view for explaining three sets of clamps constituting a clamp device according to the present invention.
2 is a side view showing a structure of one clamp when a vertical drive positioning device is configured by combining each set of clamps of FIG. 1 with a Z-axis drive mechanism. FIG.
3 is a plan view showing a layout of each set when a vertical drive positioning device is configured using a combination of the clamp and the Z-axis drive mechanism shown in FIG. 2; FIG.
FIGS. 4A and 4B are diagrams for explaining two examples of a conventional Kelvin clamp. FIGS.
FIG. 5 is a diagram for explaining an action of absorbing a shift due to thermal expansion of a support member in a conventional Kelvin clamp.
FIG. 6 is a diagram for explaining a problem when a horizontal acceleration and a downward acceleration are applied in a conventional Kelvin clamp.
[Explanation of symbols]
10, 11, 12 1st, 2nd, 3rd clamps 13-15 Balls 16-18 Clamp shafts 16-1, 17-1, 18-1 Receiving portions 16-2, 17-2, 18-2 Shaft portions 40, 70, 80 Z-axis drive mechanism 50 Base members 50-1, 50-3, 61-2 Guide member 61 Horizontally moving member 62 Vertically moving members 61-1, 62-1 and 62-2 Slide member 63 Motor 64 Air Cylinder 65 Ball screw mechanism 101, 102, 103 Belleville springs 104-106 Holders 107, 108, 109 First, second and third support members 110 Upper members 111, 112, 113 Lower members

Claims (7)

支持部材上に置かれるボールと、該ボールの受け部を下部に有し該受け部を前記ボールの上部に当接させたクランプ軸との組合わせを複数組備え、前記クランプ軸は前記受け部とそこから上方に延びる軸部とから成り、前記支持部材側には前記軸部を揺動可能に上方に突出させた状態で前記ボールと前記クランプ軸との組合わせを保持するためのホルダを固定し、前記受け部と前記ホルダとの間には該受け部を下方に付勢するためのばね部材を介在させたことを特徴とするクランプ装置。A plurality of combinations of a ball placed on a support member and a clamp shaft having a receiving portion for the ball at the lower portion and the receiving portion being in contact with the upper portion of the ball, the clamp shaft being the receiving portion And a shaft portion extending upward therefrom, and a holder for holding the combination of the ball and the clamp shaft in a state in which the shaft portion protrudes upward in a swingable manner on the support member side. A clamping device characterized in that a spring member is interposed between the receiving portion and the holder for fixing and biasing the receiving portion downward. 請求項１に記載のクランプ装置において、前記ボールと前記クランプ軸との組合わせが３組であり、第１の組の第１のボールは第１の支持部材に設けられた角錐または円錐による凹部に収容され、第２の組の第２のボールは第２の支持部材にあらかじめ決められた方向に延在するように設けられたＶ溝に収容され、第３の組の第３のボールは第３の支持部材の平面上に置かれることを特徴とするクランプ装置。2. The clamping device according to claim 1, wherein there are three combinations of the ball and the clamp shaft, and the first ball of the first set is a concave portion formed by a pyramid or a cone provided on the first support member. The second set of second balls is received in a V-groove provided in the second support member so as to extend in a predetermined direction, and the third set of third balls is A clamping device, wherein the clamping device is placed on a plane of a third support member. 請求項１に記載のクランプ装置において、前記ボールと前記クランプ軸との組合わせが３組であり、第１の組の第１のボールは第１の支持部材に設けられた第１のＶ溝に収容され、第２の組の第２のボールは第２の支持部材に設けられた第２のＶ溝に収容され、第３の組の第３のボールは第３の支持部材に設けられた第３のＶ溝に収容され、前記第１〜第３の支持部材は前記第１〜第３のＶ溝の延長線が一点で交差するように構成されることを特徴とするクランプ装置。2. The clamp device according to claim 1, wherein the number of combinations of the balls and the clamp shaft is three, and the first balls of the first set are provided in a first support member. The second set of second balls is received in a second V-groove provided in the second support member, and the third set of third balls is provided in the third support member. The clamp device is housed in a third V-groove, and the first to third support members are configured such that an extension line of the first to third V-grooves intersects at one point. 請求項２または３に記載のクランプ装置において、前記第１〜第３の組の軸部をそれぞれ同じ上部部材に取り付けると共に、前記第１〜第３の支持部材をそれぞれ独立して上下動可能に構成することにより、前記上部部材を上下方向動作及びチルト動作可能にしたことを特徴とするクランプ装置。4. The clamping device according to claim 2, wherein the first to third sets of shaft portions are attached to the same upper member, and the first to third support members can be moved up and down independently. By configuring, the upper member can be operated in a vertical direction and a tilt operation. 請求項２または３に記載のクランプ装置において、前記第１〜第３の組の軸部をそれぞれ同じ上部部材に取り付けると共に、前記第１〜第３の支持部材を１つの共通の支持部材で構成したことを特徴とするクランプ装置。4. The clamp device according to claim 2, wherein the first to third sets of shaft portions are respectively attached to the same upper member, and the first to third support members are configured by one common support member. A clamping device characterized by that. 請求項４に記載のクランプ装置を備えたチルト機能付き鉛直方向駆動位置決め装置であって、前記第１〜第３の支持部材を上下動させる第１〜第３の駆動機構をベース部材上に備えたことを特徴とするチルト機能付き鉛直方向駆動位置決め装置。5. A vertical drive positioning device with a tilt function comprising the clamp device according to claim 4, wherein first to third drive mechanisms for moving the first to third support members up and down are provided on a base member. A vertical drive positioning apparatus with a tilt function. 請求項６に記載のチルト機能付き鉛直方向駆動位置決め装置において、前記第１〜第３の駆動機構としてスライドウェッジ機構を備えることを特徴とするチルト機能付き鉛直方向駆動位置決め装置。The vertical drive positioning apparatus with a tilt function according to claim 6, further comprising a slide wedge mechanism as the first to third drive mechanisms.
JP2003086932A 2003-03-27 2003-03-27 Clamp device and vertical drive positioning device with tilt function provided with the same Expired - Fee Related JP4354722B2 (en)

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JP2003086932A JP4354722B2 (en) 2003-03-27 2003-03-27 Clamp device and vertical drive positioning device with tilt function provided with the same
TW093104614A TWI245681B (en) 2003-03-27 2004-02-24 Clamp device and vertical direction drive positioner equipped with tilt function having same
KR1020040013869A KR100541170B1 (en) 2003-03-27 2004-03-02 A clamping apparatus and a determinating apparatus equipped with the same for driving position in perpendicular direction with tilting function
CNB2004100313375A CN1274462C (en) 2003-03-27 2004-03-26 Llamping device and vertical direction driving positioner with inclination function

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JP2004291156A (en) 2004-10-21
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