TWI245681B - Clamp device and vertical direction drive positioner equipped with tilt function having same - Google Patents
Clamp device and vertical direction drive positioner equipped with tilt function having same Download PDFInfo
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- TWI245681B TWI245681B TW093104614A TW93104614A TWI245681B TW I245681 B TWI245681 B TW I245681B TW 093104614 A TW093104614 A TW 093104614A TW 93104614 A TW93104614 A TW 93104614A TW I245681 B TWI245681 B TW I245681B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/40—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using ball, roller or wheel arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/42—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using T-, V-, dovetail-section or like guides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2703/00—Work clamping
- B23Q2703/02—Work clamping means
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- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Pivots And Pivotal Connections (AREA)
Abstract
Description
1245681 ⑴ 玖、發明說明 【發明所屬之技術領域】 本發明’是有關具有鉛直方向即Z軸方向的驅動功能 及傾斜即傾斜功能的附有傾斜功能的鉛直方向驅動定位裝 置。 【先前技術】 已被提案的使用於定位平台等的2軸（鉛直）方向的 驅動裝置，是組合3個驅動機構，而可以對於藉由那些被 支撐的支撐體，例如載置台或是吸著盤等給與上下方向的 並進動作（例如，專利文獻1 )。 這是因爲，雖是使用動態夾具（即開爾文夾具），但 是是定位用的裝置’當某大小以上的水平或是下方向加速 度作動的話，上部物體就有偏離的可能性。 以下，參照第4圖〜第6圖說明。 (1) 開爾文（Kelvin)夾具，是如第4(a)圖所 示’在上部載置台20的下面通過軸安裝的3個球22、 23、24，是藉由與分別形成於下部載置台21的上面的三 角錐（或是圓錐）狀的凹部2 5、剖面v字狀的v溝2 6、 平面27接觸，就可對於下部載置台21的面將上部載置台 2 0的面相對地進行定位。然而，如第4 ( b )圖所示，也 有3個球全部是與形成於下部載置台2 1 ”的上面的在3組 的V溝26’接觸的情況。 (2) 這種開爾文夾具，如第4圖（a)，凹部25的 -5- (2) 12456811245681 ⑴ 玖, description of the invention [Technical field to which the invention belongs] The present invention 'relates to a vertical-direction driving and positioning device with a tilt function having a drive function in a vertical direction, that is, a Z-axis direction, and a tilt-that-tilt function. [Prior art] The proposed two-axis (vertical) driving device used for positioning platforms, etc., is a combination of three driving mechanisms, and can support those supported bodies, such as a mounting table or suction. A disc or the like is given a parallel motion in the vertical direction (for example, Patent Document 1). This is because although a dynamic jig (ie, a Kelvin jig) is used, it is a positioning device. When the horizontal or downward acceleration above a certain size is actuated, the upper object may deviate. Hereinafter, description will be made with reference to FIGS. 4 to 6. (1) Kelvin fixtures are three balls 22, 23, and 24 mounted on the bottom of the upper mounting table 20 through the shaft as shown in Fig. 4 (a). A triangular pyramid (or conical) recess 25 on the upper surface of 21, a v-shaped v-groove 26 on the cross section 6, and a plane 27 are in contact with each other, and the surface of the upper mounting table 20 can be relatively opposed to the surface of the lower mounting table 21. Position it. However, as shown in Fig. 4 (b), there may be a case where all three balls are in contact with the V grooves 26 'in three groups formed on the upper surface of the lower stage 2 1 ". (2) This Kelvin fixture, As shown in Figure 4 (a), the -5- (2) 1245681 of the recess 25
二角錐的頂點是位置在V溝2 6的軸方向的延長線上。由 此’一方的面’例如固定有球的上部載置台2 0即使因熱 膨脹（或是收縮）等使3個球之間隔擴大（變窄），或者 是下部載置台2 1熱膨脹（或是收縮），如第5圖所示， 也可將與三角錐狀的凹部2 5接觸的球2 2作爲固定點，使 與V溝26接觸的球23朝V溝26的軸方向移動，與平面 接觸的球2 4是可以由三角錐狀的凹部2 5及v溝2 6的相 對位置關係移動至決定位置。然而，在第4圖（b)的情 況中，3組的V溝26,是在一點交叉，具有與第4圖（a) 相同的功能。The apex of the pyramid is located on the extension line of the V-groove 26 in the axial direction. As a result, the "one side", for example, the upper mounting table 2 to which the ball is fixed, even if the interval between the three balls is enlarged (narrowed) due to thermal expansion (or contraction), or the lower mounting table 21 is thermally expanded (or contracted). ), As shown in FIG. 5, the ball 22 that is in contact with the triangular conical recess 25 may be used as a fixed point, and the ball 23 that is in contact with the V groove 26 may be moved in the axial direction of the V groove 26 to be in contact with the plane. The ball 24 can be moved to the determined position from the relative positional relationship of the triangular pyramid-shaped concave portion 25 and the v-groove 26. However, in the case of Fig. 4 (b), the V grooves 26 of the three groups cross at one point and have the same functions as those of Fig. 4 (a).
(3 )凹部’將設有溝的面作爲下部側、及將固定各 球的面作爲上部側，在各夾具部分使下部側支撐上部側， 在下部側讓水平加速度作用。此情況，如第6 ( a )圖所 示，是利用由V溝2 6及球2 3所形成的夾具部支撐的上 部側的重量所產生的摩擦力μ · F 1 ( μ是摩擦係數）作 用’當作用於下部側的水平加速度小的情況時使上下兩側 的相對位置被保持。但是，在下部側由大的水平加速度α 所產生的水平力F2作動的情況時，其分力F2 ’（沿著V 溝26的面方向的分力）是超過摩擦力μ. F1的話，上部 側的位置會偏離。或者是，如第6 ( b )圖所示，整體是 朝下方由超過重力加速度的加速度α 1移動的情況時，上 部側無法追隨於下部側而徧離。因此，爲了給與更大的摩 擦力而將上下兩側由彈簧等連繫來給與附加負荷。 [專利文獻1]日本特開平1〇_79344號（第2頁，第9 -6 - (3) 1245681(3) The recessed portion 'uses the surface on which the groove is provided as the lower side and the surface on which the balls are fixed as the upper side, and supports the upper side on the lower side in each clamp portion and applies horizontal acceleration on the lower side. In this case, as shown in FIG. 6 (a), the friction force μ · F 1 (μ is the friction coefficient) generated by the weight of the upper side supported by the clamp portion formed by the V groove 26 and the ball 23 is shown. The action is used to maintain the relative positions of the upper and lower sides when the horizontal acceleration on the lower side is small. However, when the horizontal force F2 generated by a large horizontal acceleration α is actuated on the lower side, the component force F2 '(the component force along the plane direction of the V groove 26) exceeds the frictional force μ. F1, the upper part The side position will deviate. Alternatively, as shown in Fig. 6 (b), when the whole is moved downward by an acceleration? 1 exceeding the acceleration due to gravity, the upper side cannot follow the lower side and move away. Therefore, in order to provide greater friction, the upper and lower sides are connected by a spring or the like to apply an additional load. [Patent Document 1] Japanese Patent Laid-Open No. 10-79344 (Page 2, No. 9 -6-(3) 1245681
【發明內容】 (本發明所欲解決的課題）[Summary of the invention] (Problems to be solved by the present invention)
但是’在2軸（鉛直）方向的定位裝置中，使用3組 的2軸驅動機構支撐上部側（例如旋轉載置台），2軸方 向的並進動作之外也要求傾斜動作。對於此，上下兩側的 結合是由前述開爾文夾具構成的話，就可進行具有傾斜的 傾斜動作。但是，這3組的Z軸是設置於水平方向的定位 載置台（X-Y載置台）上的情況時，由上述（3)的理由 當水平方向的定位載置台是以大的加速度移動的話，上部 側會偏離。爲了防止而將上下兩側由彈簧等連繫的情況， 其分負荷會施加在Z軸驅動機構，使Z軸驅動機構的容 量需要增大。而且，Z軸方向的驅動量（行程）是愈大的 話由彈簧所產生的負荷會愈增加。在此，本發明的課題， 是提供一種將動態夾具（所謂開爾文夾具）剛性化，而可 進行鉛直（Z軸）方向的並進及傾斜動作的同時，即使水 平方向或是下方向的加速度是動作也不會位置偏離的夾持 裝置。 本發明的其他的課題，是提供一種具備上述夾持裝置 的附有傾斜功能的鉛直方向驅動定位裝置。 (用以解決課題的手段） 依據本發明，可提供夾持裝置’其特徵爲，具備複數 (4) 1245681 組：設置在支撐構件上的球、及在下部具有該球的承受部 並將該承受部抵接前述球的上部的夾具軸的組合’前述夾 具軸是由：前述承受部、及從其朝上方延伸的軸部所構 成，在前述支撐構件側中將前述軸部擺動可能地朝上方突 出的狀態下固定供保持前述球及前述夾具軸的組合用的支 架，在前述承受部及前述支架之間設有將該承受部朝下方 推迫用的碟形彈簧。However, in the two-axis (vertical) positioning device, three sets of two-axis drive mechanisms are used to support the upper side (for example, a rotary mounting table), and tilting is required in addition to the two-axis parallel movement. In this regard, if the upper and lower joints are constituted by the aforementioned Kelvin jig, a tilting operation with a tilt can be performed. However, when the Z axes of the three groups are set on a positioning table (XY mounting table) in the horizontal direction, for the reason (3) above, if the positioning table in the horizontal direction moves with a large acceleration, the upper part The side will deviate. In order to prevent the upper and lower sides from being connected by a spring or the like, load sharing is applied to the Z-axis driving mechanism, so that the capacity of the Z-axis driving mechanism needs to be increased. In addition, the larger the driving amount (stroke) in the Z-axis direction, the more the load generated by the spring increases. Here, an object of the present invention is to provide a dynamic jig (so-called Kelvin jig) that can perform simultaneous and tilting movements in the vertical (Z-axis) direction, and can act even when the acceleration is horizontal or downward. The clamping device does not deviate from the position. Another object of the present invention is to provide a vertical-direction drive positioning device with a tilt function having the above-mentioned holding device. (Means for Solving the Problems) According to the present invention, a gripping device can be provided, including a plurality of (4) 1245681 sets: a ball provided on a support member, and a receiving portion having the ball at a lower portion and the Combination of the receiving shaft abutting the upper clamp shaft of the ball 'The aforementioned clamping shaft is composed of the receiving portion and a shaft portion extending upward from the receiving portion, and the shaft portion may be swung toward the support member side. A bracket for holding the combination of the ball and the clamp shaft is fixed in a state protruding upward, and a disc spring for urging the receiving portion downward is provided between the receiving portion and the bracket.
對於本發明的夾持裝置，其中，前述球及前述夾具軸 的組合是3組’第1組的第1球是被收容於由設置在第1 支撐構件的角錐或是圓錐的凹部，第2組的第2球是被收 容於事先在設置第 2支撐構件的朝決定方向延伸的 V 溝，第3組的第3球是設置在第3支撐構件的平面上。In the clamping device of the present invention, the combination of the ball and the clamp shaft is three groups, and the first ball of the first group is housed in a concave portion of a pyramid or a cone provided on the first support member, and the second The second ball of the group is accommodated in a V-groove extending in a predetermined direction in which a second support member is provided in advance, and the third ball of the third group is provided on a plane of the third support member.
對於本發明的夾持裝置，其中，前述球及前述夾具軸 的組合是3組，第1組的第1球是被收容在設置於第1支 撐構件的第1 V溝，第2組的第2球是被收容在設置於第 2支撐構件的第2V溝，第3組的第3球是被收容在設置 於第3支撐構件的第3 V溝，前述第1〜第3支撐構件是 使前述第1〜第3 V溝的延長線在一點交叉而構成。 上述的夾持裝置，第1態樣，是將前述第1〜第3組 的軸部分別安裝於相同上部構件，同時，藉由將前述第1 〜桌3支撐構件分別獨立上下動可能地構成，使前述上部 構件可上下方向動作及傾斜動作。 上述的夾持裝置，第2態樣，是將前述第1〜第3組 的軸部分別安裝於相同的上部構件，同時，將前述第1〜 -8 - (5) 1245681 第3支撐構件由1個共通的支撐構件構成。 依據本發明，可提供一種附有傾斜功能的鉛直方向驅 動定位裝置，具備如申請專利範圍第4項的夾持裝置的附 有傾斜功能的錯直方向驅動定位裝置’其特徵爲·將使則 述第1〜第3支撐構件上下動的第1〜第8驅動機構設在 底基構件上。In the clamping device of the present invention, the combination of the ball and the clamp shaft is three groups, and the first ball of the first group is accommodated in a first V groove provided in the first support member, and the second Two balls are accommodated in the 2V groove provided in the second support member, and the third ball of the third group is accommodated in the 3 V groove provided in the third support member. The aforementioned first to third support members are The extension lines of the first to third V grooves are configured to cross at one point. The above-mentioned clamping device, in a first aspect, is a structure in which the shaft portions of the first to third groups are respectively mounted on the same upper member, and the support members of the first to table 3 are independently moved up and down, respectively. , So that the upper member can move up and down and tilt. In the second aspect of the above clamping device, the shaft portions of the first to third groups are respectively mounted on the same upper member, and at the same time, the first to third members of the first to eight members (-8) (5) 1245681 are formed by One common support member. According to the present invention, it is possible to provide a vertical-direction driving and positioning device with a tilt function, and a staggered-direction driving and positioning device with a tilt function having a clamping device such as the patent application scope item 4, which is characterized by: The first to eighth driving mechanisms in which the first to third supporting members move up and down are provided on the base member.
對於本發明的附有傾斜功能的鉛直方向驅動定位裝 置，其中，前述第1〜第3驅動機構是滑動楔機構。 【實施方式】 參照第1圖〜第3圖，說明本發明的夾持裝置及使用 其的附有傾斜功能鉛直方向驅動定位裝置的較佳實施例。In the vertical drive positioning device with a tilt function according to the present invention, the first to third drive mechanisms are sliding wedge mechanisms. [Embodiment] With reference to Figs. 1 to 3, preferred embodiments of a holding device of the present invention and a vertical direction driving and positioning device with a tilt function using the holding device according to the present invention will be described.
第1圖，顯示本發明的夾持裝置是由改良前述開爾文 夾具而實現的情況的實施例。構成開爾文夾具的3組的夾 具之中，第1圖（a)是顯示由三角錐等的角錐的凹部 (或是圓錐的凹部也可以）l〇7a及被收容於其的球13所 構成的第1組，第1圖（b)是顯示由v溝108a及被收容 於其的球14所構成的第2組’第1圖（c)是顯示由平面 及設置於其上的球1 5所構成的第3組。設置有球的部分 的構造以外，第1〜第3組皆爲相同構造。 第1圖（a)的第1夾具10，是包含··在上面形成由 圓錐（或是角錐）所構成的凹部（以下，略稱凹部）；[07a 的第1支撐構件107、及被收容於凹部107a的第！球 1 3、及在下部具有球1 3的承受部1 6_ 1和具有朝上方延伸 -9- (6) 1245681 的軸部1 6 · 2並將承受部1 6 - 1抵接於球1 3的上部的夾具 軸16、及被固定於第I支撐構件107將軸部16-2擺動可 能地朝上方突出的狀態下供保持球1 3及夾具軸1 6的組合 用的支架1 04、及位在承受部1 6- 1的上側及支架1 04的 內面側之間將承受部1 6-】朝下方推迫用的碟形彈簧 1 0 ] 〇Fig. 1 shows an embodiment in which the holding device of the present invention is realized by improving the Kelvin jig. Among the three sets of jigs constituting the Kelvin jig, Fig. 1 (a) shows a concave portion of a pyramid such as a triangular cone (or a concave portion of a cone) 107a and the ball 13 accommodated in it. The first group, the first figure (b) shows the second group consisting of the v-groove 108a and the ball 14 housed therein. The first group (c) shows the flat surface and the ball 1 5 The third group. Except for the structure of the portion where the ball is provided, the first to third groups have the same structure. The first jig 10 of FIG. 1 (a) includes a recess (hereinafter referred to as a recess) formed by a cone (or a pyramid) formed on the first jig 10; [07a's first support member 107, and a housing The first in the recess 107a! Ball 1 3, and a receiving portion 1 6_ 1 having a ball 1 3 at the lower portion, and a shaft portion 1 6 · 2 extending upwardly by -9- (6) 1245681, and abutting the receiving portion 1 6-1 against the ball 1 3 The upper clamp shaft 16 and the bracket 10 fixed to the first support member 107 for holding the combination of the ball 1 3 and the clamp shaft 16 in a state where the shaft portion 16-2 may swing upward may be projected upwards, and Between the upper side of the receiving portion 16-1 and the inner surface side of the bracket 104, the disk spring 10 for pressing the receiving portion 1 6-] downwards is pressed].
如第1圖（b)的第2夾具11，包含：在上面形成有 V溝1 0 8 a的第2支撐構件1 0 8、及被收容於V溝1 0 8 a的 第2球14、及在下部具有球14的承受部17-1和具有朝 上方延伸的軸部1 7-2並將承受部1 7-1抵接於球14的上 部的夾具軸17、及被固定於第2支撐構件108將軸部17-2擺動可能地朝上方突出的狀態下供保持球1 4及夾具軸 17的組合用的支架105、及位在承受部17-1的上側及支 架105的內面側之間將承受部17-1朝下方推迫用的碟形 彈簧1 0 2。The second jig 11 as shown in FIG. 1 (b) includes a second supporting member 108 having a V groove 10 8 a formed thereon, and a second ball 14 housed in the V groove 10 8 a. And a receiving part 17-1 having a ball 14 in the lower part and a shaft part 1 7-2 extending upward and abutting the receiving part 1 7-1 on the upper part of the ball 14 and a fixture shaft 17 fixed to the second The support member 108 holds the combination of the ball 14 and the clamp shaft 17 in a state where the shaft portion 17-2 is swingably protruded upward, and the bracket 105 is located on the upper side of the receiving portion 17-1 and the inner surface of the bracket 105. The disc spring 102 for pressing the receiving portion 17-1 downward between the sides.
如第1圖（c)的第3夾具12，是包含：第3支撐構 件109、及設置其上面即平面上的第3球15、及在下部具 有球15的承受部18-1和具有朝上方延伸的軸部18-2並 將承受部1 8 - 1抵接於球1 5的上部的夾具軸1 8、及被固 定於第3支撐構件109將軸部18-2擺動可能地朝上方突 出的狀態下供保持球1 5及夾具軸1 8的組合用的支架 106、及位在承受部18-1的上側及支架106的內面側之間 將承受部18-1朝下方推迫用的碟形彈簧103。 承受部〗6-1〜1 8-1，皆在其下面側形成角錐或是圓錐 -10- 1245681As shown in FIG. 1 (c), the third jig 12 includes a third support member 109, a third ball 15 provided on the upper surface, that is, a plane, a receiving portion 18-1 having the ball 15 at the lower portion, and The upper extending shaft portion 18-2 and the receiving portion 1 8-1 abut the upper part of the clamp shaft 18 of the ball 15 and the third support member 109 is fixed to swing the shaft portion 18-2 upward. The bracket 106 for holding the combination of the ball 15 and the clamp shaft 18 in the protruding state, and the receiving portion 18-1 is pushed downward between the upper side of the receiving portion 18-1 and the inner surface side of the bracket 106. Used of a disc spring 103. Bearing section 6-1 ~ 1 8-1, all form a pyramid or cone on the lower side -10- 1245681
的凹部並在此凹部收谷球13〜15。且，支架104〜106， 皆在其上部側’爲了將軸部1 6 - 2〜1 8 · 2擺動可能地插 通，而由具有比供具有軸部〜18-2的徑大的開口用 的板構件構成’此板構件是具有將碟形彈簧承受部按壓在 彈簧的按壓功能，給與支架所需要的負荷。厳格說來，爲 了可給與各支架相對運動’彈簧按壓的開口是形成比加上 軸部的徑及相對運動的移動距離更大而可容許隨著傾斜動 作的相對移動。且’裝設可給與碟形彈簧所要求的負荷的 構件，使用即使夾具軸傾斜也不會超過彈簧的彈性限度的 構件。The recessed part and receive the valley ball 13 ~ 15 in this recessed part. In addition, the brackets 104 to 106 are on the upper side of the brackets. In order to swing through the shaft portions 1 6-2 to 1 8 · 2 as possible, they are provided with openings having a larger diameter than the shaft portions ~ 18-2. The structure of the plate member 'This plate member has a pressing function of pressing the disc spring receiving portion against the spring, and gives the load required by the bracket. In terms of grids, in order to allow relative movement of the brackets, the spring-pressed openings are formed larger than the diameter of the shaft portion and the movement distance of the relative movement to allow relative movement with tilting motion. In addition, a member capable of giving the load required by the disc spring is installed, and a member which does not exceed the elastic limit of the spring even if the clamp shaft is inclined is used.
使用如以上的3組的夾具合一的夾持裝置的情況時， 例如將軸部1 6 · 2〜1 8 - 2安裝於作爲被夾具構件的一上部 構件110。一方面，對於支撐構件1〇7〜1〇9也將安裝有 這些的下部構件1 1 1、1 1 2、1 1 3由一構件構成。然而，對 於第2夾具11是形成於第2支撐構件1〇8的V溝I08a的 延長線，當然是與形成於第1夾具1 〇的第1支撐構件 107交叉的凹部107a的頂點的結構。當然，從開始就將 支撐構件107〜109由一構件構成也可以。而且，將支撐 構件1 0 7〜1 0 9由一構件構成，在此一構件的上面將第1 〜第3的V溝在一點交叉形成的話，當然可以提供具有 與第4圖（b )相同功能的夾持裝置。無論如何，由這些 的結構所構成的夾持裝置，其第1〜第3夾具10〜12是 分別具有與第4圖（a)或第4圖（b)的相同功能，且藉 由使下部側及上部側成爲剛性化結構，即使水平方向或是 -11 - (8) 1245681 的下方向的加速度動作，相互的位置也不會偏離。 一方面，使用第1圖（a )〜第1圖（c )所示的3組 的夾具〗0〜1 2構成附有傾斜功能的鉛直方向驅動定位裝 置的情況時，將各組的下部構件1 1 1〜1 1 3分別由Z軸驅 動機構可獨立地朝上下方向驅動即可。 在Z軸驅動機構中，可以使用例如第2圖所示的滑動 楔方式。第2圖，雖是顯示將Z軸驅動機構40適用在第 1夾具1 〇的情況，但是對於第2、第3夾具1 1、1 2的任 一皆可使用完全相同的機構。 在第2圖，Z軸驅動構40，是包含：在底基構件50 上朝水平方向滑動可能且在上面側具有傾斜面的水平移動 塊體6 1、及在下面側具有對應於此水平移動塊體6 1的傾 斜面的傾斜面藉由水平移動塊體6 1的水平移動而上下動 可能的垂直移動塊體62、及作爲供移動水平移動塊體61 用的驅動源作用的馬達63、及對於水平移動塊體6 1朝水 平方向作用按壓力的汽缸64。 水平移動塊體6 1，是在下面側具有：將設置在底基 構件5 0上的至少1條的水平方向的導引構件5 0- 1滑動可 能的滑動構件6 1 - 1。且水平移動塊體6 1，是在傾斜面設 有至少1條的導引構件6 1-2。一方面，在垂直移動塊體 62的傾斜面中，設有可滑動導引構件61-2的滑動構件 62-1。且在底基構件50上，設有對應於垂直移動塊體62 的裏面並可朝上方延伸的塊體體50-2，在此塊體體50-2 的垂直移動塊體62側設有朝上下方向延伸的上下方向的 •12- (9) 1245681 導引構件50-3。而且，在垂直移動塊體62的裏面設有可 滑動導引構件5 0 - 3的滑動構件6 2 - 2。在馬達6 3的輸出軸 及水平移動塊體6 1之間，是設有將輸出軸的旋轉運動變 換成水平方向運動用的蝸軸機構6 5。In the case of using a three-set clamp unit as described above, for example, the shaft portion 16 · 2 to 18-2 is mounted on an upper member 110 as a clamped member. On the one hand, these lower members 1 1 1, 1 1 2, 1 1 3 will also be mounted on the supporting members 1 07 to 10 9 by one member. However, the second jig 11 is an extension of the V-groove I08a formed in the second support member 108, and it is a structure of the apex of the recess 107a which intersects the first support member 107 formed in the first jig 10. Of course, the supporting members 107 to 109 may be formed of a single member from the beginning. In addition, if the supporting members 107 to 109 are composed of a single member, and the first to third V grooves are formed at one point on the upper surface of this member, it is of course possible to provide the same as in FIG. 4 (b). Functional clamping device. In any case, the first to third clamps 10 to 12 of the holding device constituted by these structures have the same functions as those in Fig. 4 (a) or Fig. 4 (b), respectively. The side and the upper side are rigid structures, so that they will not deviate from each other even if the horizontal direction or the downward acceleration action of -11-(8) 1245681. On the other hand, when three sets of jigs shown in Figs. 1 (a) to 1 (c) are used: 0 ~ 1 2 When a vertical direction driving positioning device with a tilt function is configured, the lower members of each group 1 1 1 to 1 1 3 can be independently driven by the Z-axis driving mechanism in the vertical direction. For the Z-axis drive mechanism, for example, a sliding wedge method shown in Fig. 2 can be used. Fig. 2 shows a case where the Z-axis driving mechanism 40 is applied to the first jig 10, but the same mechanism can be used for any of the second and third jigs 11 and 12. In FIG. 2, the Z-axis driving mechanism 40 includes a horizontally moving block 61 capable of sliding horizontally on the base member 50 and having an inclined surface on the upper side, and a horizontal movement corresponding to this on the lower side. The inclined surface of the inclined surface of the block 61 is a vertically movable block 62 that can be moved up and down by the horizontal movement of the horizontally moving block 61, and a motor 63 serving as a drive source for moving the horizontally moved block 61. And a cylinder 64 that applies a pressing force to the horizontally moving block 61 in a horizontal direction. The horizontally moving block 61 has a sliding member 6 1-1 on the lower surface side, and at least one horizontal guide member 50-1 provided on the base member 50 can slide. The horizontally moving block 61 is provided with at least one guide member 61-2 on the inclined surface. On the one hand, a sliding member 62-1 of the slidable guide member 61-2 is provided in the inclined surface of the vertically moving block 62. The base member 50 is provided with a block body 50-2 corresponding to the inside of the vertically moving block body 62 and extending upwards. A vertical movement block 62 side of the block body 50-2 is provided with a • 12- (9) 1245681 Guide member 50-3 extending up and down. Further, a sliding member 6 2-2 of a slidable guide member 50-3 is provided on the inside of the vertical moving block 62. Between the output shaft of the motor 63 and the horizontally moving block 61, there is provided a worm shaft mechanism 65 for converting the rotational movement of the output shaft into a horizontal movement.
藉由以上的構造，馬達63是朝一方向旋轉的話，其 會變換成水平方向的運動並使水平移動塊體61朝第2圖 的右方向水平移動，其結果，垂直移動塊體62是朝上方 移動。一方面，馬達6 3是朝相反方向旋轉的話，其會變 換成水平方向運動使水平移動塊體61朝第2圖的左方向 水平移動，其結果，垂直移動塊體62是朝下方移動。With the above structure, if the motor 63 is rotated in one direction, it will transform into a horizontal movement and move the horizontally moving block 61 horizontally to the right in FIG. 2. As a result, the vertically moving block 62 will be upward. mobile. On the other hand, if the motor 63 is rotated in the opposite direction, it will be transformed into a horizontal movement so that the horizontally moving block 61 moves horizontally in the left direction in Fig. 2. As a result, the vertically moving block 62 moves downward.
然而，使用汽缸64，是爲了以下的理由。藉由上部 構件1 1 〇及依據情況載置於其的工件、其他的負荷，使垂 直方向的力會作用於垂直移動塊體62，其他的水平方向 成分會作用於水平移動塊體61。爲了讓此水平方向成分 只需馬達63的輸出就夠用而要求高輸出的馬達，將上述 水平方向成分藉由將汽缸64的輸出軸64-1抵接的水平移 動塊體61承受，就可縮小馬達63的輸出。 無論如何，組合上述的構造的2軸驅動機構4 〇、 7 0、8 0的3組的夾具1 0〜1 2是如第3圖所示配置於底基 構件5 0上。當然，此情況也對於第2夾具1 1，使形成於 第2支撐構件1 〇 8的V溝1 0 8 a的延長線，是與形成於第 1夾具10的第1支撐構件1〇7的凹部l〇7a的頂點交叉地 構成。一方面，將Z軸驅動定位裝置形成如第4(b)圖 所示的型式的情況時’是使3組的夾具的全部具有第1圖 -13· (10) 1245681 (b)在顯示V溝108a，獨立各夾具並藉由上述z軸驅動 機構驅動地構成。當然，此情況，3組的夾具也使3個V 溝的延長線疋父叉於一^點地配置。無論如何，3組的夾具 1 0〜1 2的上部構件1 1 0是同一部分材，將3組的夾具1 0 〜1 2的上下方向的移動量形成相同的話就可並進動作， 藉由使移動量具有差，就可傾斜動作。However, the cylinder 64 is used for the following reasons. Due to the upper member 1 10 and the workpiece placed thereon and other loads, forces in the vertical direction will act on the vertically moving block 62, and other horizontal components will act on the horizontally moving block 61. In order to make this horizontal component sufficient for the output of the motor 63 and requiring a high output motor, the horizontal component can be received by the horizontal moving block 61 which abuts the output shaft 64-1 of the cylinder 64, The output of the motor 63 is reduced. In any case, the three sets of jigs 10 to 12 combining two-axis drive mechanisms 40, 70, and 80 having the above-described structure are arranged on the base member 50 as shown in FIG. Of course, also in this case, for the second jig 11, the extension line of the V groove 108 8 a formed in the second support member 10 is the same as that of the first support member 107 formed in the first jig 10. The apex of the recessed part 107a is comprised so that it may cross | intersect. On the other hand, when the Z-axis driving and positioning device is formed into a pattern as shown in FIG. 4 (b), “all three sets of jigs are provided with FIG. 1 · (10) 1245681 (b) on the display V The grooves 108a are formed independently of each jig and driven by the z-axis drive mechanism. Of course, in this case, the three sets of jigs also make the extensions of the three V-grooves intersect at one point. In any case, the upper members 1 10 of the three groups of jigs 10 to 12 are the same part material, and the movements of the three groups of jigs 10 to 12 in the vertical direction can be made to move in parallel. If there is a difference in the amount of movement, tilting can be performed.
如以上，可以提供一種可將動態夾具（所謂開爾文夾 具）剛性化，可進行Z軸方向的並進及傾斜動作的同時， 即使水平方向或是的下方向的加速度動作也無位置偏離的 附有傾斜功能的Z軸驅動定位裝置。上述z軸驅動機構 只是一例，並不限定於滑動楔方式，只是由汽缸或是蝸軸 等的周知的驅動機構實現也可以。 且’依據情況將上部側及下部側的位置關係上下相反 的構造也可以。As described above, it is possible to provide a dynamic jig (so-called Kelvin jig) that can be rigid, and can perform simultaneous and tilting movements in the Z-axis direction, and has no position deviation even with acceleration action in the horizontal or downward direction. Functional Z-axis drive positioning device. The above z-axis driving mechanism is only an example, and is not limited to the sliding wedge method, and may be realized by a known driving mechanism such as a cylinder or a worm shaft. In addition, a structure in which the positional relationship between the upper side and the lower side is reversed depending on the situation may be used.
然而’藉由上述的將3軸的鉛直方向驅動定位裝置設 置於χ·γ平台的χ軸載置台或是γ軸載置台，就可構成 X-Y-Z的3軸方向移動可能的平台裝置。此情況，底基構 件50是成爲X軸載置台或是γ軸載置台。 (發明之效果） {衣_本發明，可以提供一種可將動態夾具即所謂開爾 文夾具的上部側及下部側及剛性化，可進行Z軸方向的並 it及ί頃斜·動作的同時，即使水平方向或是的下方向的加速 度動作也無位置偏離的附有傾斜功能的Ζ軸驅動定位裝 -14- (11) 1245681 置。 且依據本發明，可以提供一種具備上述夾持裝置的附 有傾斜功能的鉛直方向驅動定位裝置。 【圖式簡單說明】 [第1圖]說明本發明的構成夾持裝置的3組夾具用的 剖面圖。However, by setting the three-axis vertical-direction driving and positioning device on the χ-axis stage or γ-axis stage of the χ · γ platform as described above, a platform device capable of moving in the 3-axis direction of X-Y-Z can be constructed. In this case, the base member 50 is an X-axis mounting table or a γ-axis mounting table. (Effects of the Invention) {Apparel_The present invention can provide an upper and a lower side of a dynamic jig, a so-called Kelvin jig, and rigidity, and can perform Z-axis parallel it and tilt tilt and movement. The Z-axis drive positioning device with tilt function, which does not deviate from acceleration in the horizontal direction or in the downward direction, is set to -14- (11) 1245681. Furthermore, according to the present invention, it is possible to provide a vertical-direction drive positioning device with a tilt function provided with the clamping device. [Brief description of the drawings] [FIG. 1] A cross-sectional view for explaining three sets of jigs constituting a clamping device according to the present invention.
[第2圖]將Z軸驅動機構組合在第1圖的各組的夾具 來構成鉛直方向驅動定位裝置的情況的構造以1個夾具顯 示的側面圖。 [第3圖]顯示使用第2圖的夾具及Z軸驅動機構的組 合將構成鉛直方向驅動定位裝置的情況的各組的配置圖的 平面圖。[Fig. 2] A side view showing a structure in the case where the Z-axis driving mechanism is combined with the jigs of each group in Fig. 1 to form a vertical-direction driving positioning device. [Fig. 3] A plan view showing an arrangement drawing of each group in a case where a combination of the jig and Z-axis driving mechanism of Fig. 2 is used to constitute a vertical direction driving positioning device.
[第4圖]供說明習知的開爾文夾具的2個例用的圖。 [第5圖]說明對於習知的開爾文夾具，依據支撐構件 的熱膨脹來吸收偏離的作用的圖。 [第6圖]說明在習知的開爾文夾具上施加水平方向的 加速度、下方向的加速度的情況的問題用的圖。 [圖號說明] α ’加速度 PF1 摩擦力 F2’分力 F 2水平力 10夾具 -15- (12)1245681 11 夾具 1 2 夾具 13 球 14 球 15 球 16 夾具軸 16- 1承受 部 16- 2軸部 17 夾具軸 17- 1承受 部 \1· 2軸部 18 夾具軸 1 8-1 承受 部 1 8 _ 2軸部 20 上部載 置台 2 1 下部載 置台 2 1， ’下部載置台 22 球 23 球 24 球 25 凹部 26 V溝 26 丨V溝 27 平面[Fig. 4] A diagram for explaining two examples of a conventional Kelvin jig. [Fig. 5] A view explaining the effect of absorbing a deviation in the conventional Kelvin jig in accordance with the thermal expansion of a supporting member. [Fig. 6] A diagram for explaining a problem in a case where a horizontal acceleration and a downward acceleration are applied to a conventional Kelvin jig. [Illustration of figure number] α 'Acceleration PF1 Friction force F2' Component force F 2 Horizontal force 10 Fixture-15- (12) 1245681 11 Fixture 1 2 Fixture 13 Ball 14 Ball 15 Ball 16 Fixture shaft 16- 1 Receiving portion 16- 2 Shaft section 17 Fixture shaft 17-1 Receiving section \ 1 · 2 Shaft section 18 Fixture shaft 1 8-1 Receiving section 1 8 _ 2 Shaft section 20 Upper mounting table 2 1 Lower mounting table 2 1, 'Lower mounting table 22 Ball 23 Ball 24 ball 25 recess 26 V groove 26 丨 V groove 27 plane
-16- (13) 1245681 40 2軸驅動機構 4 0 Z軸驅動構 40 Z軸驅動機構 5 0 底基構件 50-1導引構件 50-2塊體體 50-3導引構件-16- (13) 1245681 40 2-axis drive mechanism 4 0 Z-axis drive mechanism 40 Z-axis drive mechanism 5 0 Base member 50-1 guide member 50-2 block body 50-3 guide member
6 1水平移動塊體 6 1 - 1滑動構件 61- 2導引構件 62垂直移動塊體 62- 1滑動構件 62-2滑動構件 63 馬達6 1 Horizontally moving block 6 1-1 Slide member 61-2 Guide member 62 Vertically move block 62-1 Slide member 62-2 Slide member 63 Motor
64汽缸 6 4 - I 輸出軸 6 5蝸軸機構 1 0 1碟形彈簧 102碟形彈簧 103碟形彈簧 1 04 支架 105 支架 106支架 10 7支撐構件 -17- (14) (14)1245681 1 〇 7 a凹部 1 〇 8支撐構件 1 0 8 a V 溝 109支撐構件 110上部構件 111下部構件64 cylinder 6 4-I output shaft 6 5 worm shaft mechanism 1 0 1 disc spring 102 disc spring 103 disc spring 1 04 bracket 105 bracket 106 bracket 10 7 support member -17- (14) (14) 1245681 1 〇 7 a recess 1 〇8 support member 1 0 8 a V groove 109 support member 110 upper member 111 lower member
-18--18-
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003086932A JP4354722B2 (en) | 2003-03-27 | 2003-03-27 | Clamp device and vertical drive positioning device with tilt function provided with the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200422135A TW200422135A (en) | 2004-11-01 |
| TWI245681B true TWI245681B (en) | 2005-12-21 |
Family
ID=33401420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093104614A TWI245681B (en) | 2003-03-27 | 2004-02-24 | Clamp device and vertical direction drive positioner equipped with tilt function having same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4354722B2 (en) |
| KR (1) | KR100541170B1 (en) |
| CN (1) | CN1274462C (en) |
| TW (1) | TWI245681B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT520419A1 (en) * | 2017-09-06 | 2019-03-15 | Anton Paar Gmbh | Positioning device for positioning a functional body |
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| JP3868474B1 (en) | 2006-05-08 | 2007-01-17 | 司工機株式会社 | Machining tools |
| JP5093805B2 (en) * | 2008-02-01 | 2012-12-12 | 津田駒工業株式会社 | Strengthening device for index table clamping device |
| JP5371394B2 (en) | 2008-11-27 | 2013-12-18 | 株式会社三恵シーアンドシー | Tilt device |
| CN101856793A (en) * | 2010-06-22 | 2010-10-13 | 深圳市银宝山新科技股份有限公司 | Universal fixture |
| US8899535B2 (en) * | 2012-04-05 | 2014-12-02 | The Boeing Company | Mount for a calibration standard |
| CN102962782B (en) * | 2012-11-20 | 2015-05-20 | 无锡麦铁精密机械制造有限公司 | Self-positioning adjusting mechanism |
| JP5594404B1 (en) * | 2013-07-02 | 2014-09-24 | 日本精工株式会社 | Table device, transfer device, semiconductor manufacturing device, and flat panel display manufacturing device |
| CN103537924B (en) * | 2013-09-29 | 2016-01-20 | 芜湖永裕汽车工业有限公司 | A kind of engine cylinder cap processing retaining clip tool that there is ball-type and support |
| CN103921149B (en) * | 2014-05-09 | 2016-08-17 | 昆山华辰精密工具有限公司 | A kind of clamp base |
| JP6050799B2 (en) * | 2014-10-20 | 2016-12-21 | 中央精機株式会社 | Stage equipment |
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| CN104924123B (en) * | 2015-07-17 | 2017-04-26 | 安阳工学院 | Special front shaft machining clamp capable of automatically aligning caster angle and inward camber |
| CN106181439B (en) * | 2016-08-22 | 2018-06-12 | 马鞍山市新华异型钢开发有限责任公司 | Guidance type support equipment |
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| CN108637308B (en) * | 2018-05-17 | 2020-02-07 | 潜山县福达橡胶刷业制品厂 | Brush disc drilling positioning device |
| CN110860713B (en) * | 2019-11-06 | 2020-12-04 | 深圳市华荣科技有限公司 | A high-efficient type numerical control drilling equipment for panel processing |
| CN112091651B (en) * | 2020-11-17 | 2021-02-26 | 烟台工程职业技术学院(烟台市技师学院) | Fixed clamping extension type automobile part machining machine tool |
| CN112720333B (en) * | 2021-01-14 | 2024-03-26 | 龙铁纵横（北京）轨道交通科技股份有限公司 | Gear box multi-degree-of-freedom overturning machine and method |
-
2003
- 2003-03-27 JP JP2003086932A patent/JP4354722B2/en not_active Expired - Fee Related
-
2004
- 2004-02-24 TW TW093104614A patent/TWI245681B/en not_active IP Right Cessation
- 2004-03-02 KR KR1020040013869A patent/KR100541170B1/en not_active IP Right Cessation
- 2004-03-26 CN CNB2004100313375A patent/CN1274462C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT520419A1 (en) * | 2017-09-06 | 2019-03-15 | Anton Paar Gmbh | Positioning device for positioning a functional body |
| AT520419B1 (en) * | 2017-09-06 | 2019-07-15 | Anton Paar Gmbh | Positioning device for positioning a functional body |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1533864A (en) | 2004-10-06 |
| CN1274462C (en) | 2006-09-13 |
| KR20040086548A (en) | 2004-10-11 |
| TW200422135A (en) | 2004-11-01 |
| JP2004291156A (en) | 2004-10-21 |
| KR100541170B1 (en) | 2006-01-10 |
| JP4354722B2 (en) | 2009-10-28 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |