JP4342843B2 - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法 Download PDF

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Publication number: JP4342843B2
Authority: JP; Japan
Prior art keywords: film; semiconductor film; semiconductor; gettering; layer
Prior art date: 2002-06-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP2003167422A

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English (en)

Japanese (ja)

Other versions

JP2004072083A5 (ko

JP2004072083A (ja

Inventor

英人大沼

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Semiconductor Energy Laboratory Co Ltd

Original Assignee

Semiconductor Energy Laboratory Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-06-12

Filing date

2003-06-12

Publication date

2009-10-14

2003-06-12 Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd

2003-06-12 Priority to JP2003167422A priority Critical patent/JP4342843B2/ja

2004-03-04 Publication of JP2004072083A publication Critical patent/JP2004072083A/ja

2006-06-22 Publication of JP2004072083A5 publication Critical patent/JP2004072083A5/ja

2009-10-14 Application granted granted Critical

2009-10-14 Publication of JP4342843B2 publication Critical patent/JP4342843B2/ja

2023-06-12 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

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239000011787 zinc oxide Substances 0.000 description 1

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JP2003167422A 2002-06-12 2003-06-12 半導体装置の作製方法 Expired - Fee Related JP4342843B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2003167422A JP4342843B2 (ja)	2002-06-12	2003-06-12	半導体装置の作製方法

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Application Number	Priority Date	Filing Date	Title
JP2002171224		2002-06-12
JP2003167422A JP4342843B2 (ja)	2002-06-12	2003-06-12	半導体装置の作製方法

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Publication Number	Publication Date
JP2004072083A JP2004072083A (ja)	2004-03-04
JP2004072083A5 JP2004072083A5 (ko)	2006-06-22
JP4342843B2 true JP4342843B2 (ja)	2009-10-14

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Publication number	Priority date	Publication date	Assignee	Title
JP5030406B2 (ja) *	2004-08-30	2012-09-19	株式会社半導体エネルギー研究所	表示装置の作製方法
JP5235051B2 (ja) *	2005-08-31	2013-07-10	株式会社半導体エネルギー研究所	半導体装置の作製方法

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