JP4332612B2 - 熱電堆パターンを備える気体センサ - Google Patents
熱電堆パターンを備える気体センサ Download PDFInfo
- Publication number
- JP4332612B2 JP4332612B2 JP2003424926A JP2003424926A JP4332612B2 JP 4332612 B2 JP4332612 B2 JP 4332612B2 JP 2003424926 A JP2003424926 A JP 2003424926A JP 2003424926 A JP2003424926 A JP 2003424926A JP 4332612 B2 JP4332612 B2 JP 4332612B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- sensor
- conductor pattern
- gas sensor
- thermopile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 72
- 239000007789 gas Substances 0.000 claims description 59
- 239000004020 conductor Substances 0.000 claims description 48
- 229910052739 hydrogen Inorganic materials 0.000 claims description 45
- 239000001257 hydrogen Substances 0.000 claims description 44
- 239000010409 thin film Substances 0.000 claims description 43
- 229910052697 platinum Inorganic materials 0.000 claims description 36
- 229910001006 Constantan Inorganic materials 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 230000003197 catalytic effect Effects 0.000 claims description 12
- 238000007254 oxidation reaction Methods 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 32
- 239000010408 film Substances 0.000 description 20
- 150000002431 hydrogen Chemical class 0.000 description 20
- 229920001721 polyimide Polymers 0.000 description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- 229910052802 copper Inorganic materials 0.000 description 16
- 239000010949 copper Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 12
- 230000035945 sensitivity Effects 0.000 description 10
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000446 fuel Substances 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000003054 catalyst Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- -1 diamine copper chloride Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003055 poly(ester-imide) Polymers 0.000 description 1
- 238000011176 pooling Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Description
たとえば、非特許文献3および4参照)。
インターネット、URL<: HYPERLINK http://www.wired.com/news/b usiness/0,1367,59482,00.html> Proceedings of the 1999 U.S. DOE Hydrogen Program Review NREL/CP-570-26938 申ウソウ、村山宣光「高性能普及形水素センサの開発」(Material Stage Vol. 2, No.10, 2003) Woosuck SHIN, Kiyohisa IMAI, Noriya Izu and Norimitsu MURAYAMA "Thermolelectric Thick-Film Hydrogen Gas Sensor Operating ay Room Temperature", Jpn. J. Appl. Phys. Vol 40 (2001) pp.L1232-L1234 part 2, No. 11B. 15 November 2001.
(第一の実施態様)
図2は、本発明による気体センサの第一の実施態様として、前記気体センサの基本構造の一例を示す図である。図2(a)は、基本構造の正面図であり、図2(b)は、図2(a)のC−C線に沿った、基本構造の側断面図である。
(第二の実施態様)
図5は、本発明に係る気体センサの別の実施態様の概略正面図である。図5に示す気体センサ200は、図2に示す気体センサと比して、熱電堆パターン24,26の形状と白金薄膜形成領域28の数および配置を変更したセンサである。具体的には、図5に示す気体センサ200は、第一の導体パターンと第二の導体パターンとからなる熱電堆パターンを、さらに繰り返す構造を採用している。
(第三の実施態様)
図7は、本発明に係る気体センサを利用した、本発明のさらに別の実施態様のセンサシステムを示す図である。図7(a)は、図2に気体センサと同様のセンサであって、本発明の第三の実施態様に使用されるセンサの一例を示し、一方、図7(b)は、図7(a)に示すセンサの折目に沿って折り曲げ、熱抵抗体に巻回させたセンサシステムの側断面図を示す。
Claims (6)
- 第一の面および第二の面を備える、耐熱性の可撓性支持体と、
第一の金属からなる第一の導体パターンと、前記第一の金属とは異なる第二の金属からなる第二の導体パターンとを含む熱電堆パターンであって、前記第一の導体パターンの一の端部と前記第二の導体パターンの一の端部とが連接した連接部を介して連なり、前記第一の面に配設された熱電堆パターンと、
前記第二の面に面状に配設される、気体の酸化反応に対して触媒作用を有する材料からなる薄膜と、を備え、
前記支持体を介して、前記薄膜の形成領域に対向する第一の面上の領域内に、前記連接部が包含され、前記対向する第一の面上の領域を超えた外側に、前記熱電堆パターンが延在する、気体センサ。 - 前記熱電堆パターンは、前記第一の導体パターンと前記第二の導体パターンとが交互に連接するように、前記第一の導体パターンの他の端部と連接する別の第二の導体パターンを、または前記第二の導体パターンの他の端部と連接する別の第一の導体パターンを、さらに備える、請求項1に記載の気体センサ。
- 前記気体が水素であり、前記気体の酸化反応に対して触媒作用を有する材料が、白金である、請求項1または2に記載の気体センサ。
- 前記第一の金属がコンスタンタンであり、前記第二の金属が、銅めっきされたコンスタンタンである、請求項1ないし3のうち何れか一項に記載の気体センサ。
- 前記第一の金属がニッケルである、前記第二の金属が、銅めっきされたニッケルである、請求項1または3のうち何れか一項に記載の気体センサ。
- 請求項1ないし5のうち何れか一項に記載の気体センサと、熱抵抗体とを備え、
前記気体センサを前記熱抵抗体に対して巻回させたセンサシステム。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003424926A JP4332612B2 (ja) | 2003-12-22 | 2003-12-22 | 熱電堆パターンを備える気体センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003424926A JP4332612B2 (ja) | 2003-12-22 | 2003-12-22 | 熱電堆パターンを備える気体センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005183795A JP2005183795A (ja) | 2005-07-07 |
JP4332612B2 true JP4332612B2 (ja) | 2009-09-16 |
Family
ID=34784973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003424926A Expired - Lifetime JP4332612B2 (ja) | 2003-12-22 | 2003-12-22 | 熱電堆パターンを備える気体センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4332612B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009133636A (ja) * | 2007-11-28 | 2009-06-18 | Tdk Corp | 水素ガスセンサ |
JP6685043B2 (ja) * | 2016-04-20 | 2020-04-22 | 学校法人 東洋大学 | 熱電式水素センサ |
US10935514B2 (en) * | 2017-08-10 | 2021-03-02 | International Business Machines Corporation | Low power combustible gas sensing |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2929789B2 (ja) * | 1990-08-10 | 1999-08-03 | 三菱マテリアル株式会社 | 触媒燃焼式ガスセンサ |
JP2001099801A (ja) * | 1999-09-29 | 2001-04-13 | Yazaki Corp | 接触燃焼式ガスセンサ |
JP4238309B2 (ja) * | 2001-09-07 | 2009-03-18 | 独立行政法人産業技術総合研究所 | 可燃性ガスセンサ |
JP2005098845A (ja) * | 2003-09-25 | 2005-04-14 | Tdk Corp | ガスセンサ |
-
2003
- 2003-12-22 JP JP2003424926A patent/JP4332612B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005183795A (ja) | 2005-07-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1853446B (zh) | 加热器及利用pcb制造加热器的方法 | |
US8156789B2 (en) | Gas sensor chip and gas sensor provided therewith | |
TW506942B (en) | Gas sensor and fabrication method thereof | |
JP4820528B2 (ja) | 触媒センサ | |
US10697920B2 (en) | Gas sensor | |
KR20030055341A (ko) | 가스 센서 및 가스 농도의 검출 방법 및 장치 | |
JP2007271556A (ja) | 接触燃焼式ガスセンサとその検知素子および補償素子 | |
JP4801396B2 (ja) | ガスセンサ及びガスセンサの製造方法 | |
JP6213866B2 (ja) | 薄膜型水素ガスセンサ | |
JP2929789B2 (ja) | 触媒燃焼式ガスセンサ | |
WO2009081814A1 (ja) | 燃料電池および温度測定方法 | |
JP4332612B2 (ja) | 熱電堆パターンを備える気体センサ | |
JP6243040B2 (ja) | 被酸化性ガスを検出するセンサ | |
JP4798961B2 (ja) | ヒータデバイス及びこれを用いた気体センサ装置 | |
JP2008203263A (ja) | 放射センサ素子、センサフィールドおよび放射センサ素子の製造方法 | |
JP2007255960A (ja) | 可燃性ガスの干渉を無くすガス検知方法及びガス検知センサ | |
WO2009017265A1 (en) | Gas sensor and method for manufacturing the same | |
JP3204365B2 (ja) | マイクロヒータ及びcoセンサ | |
JP2008292387A (ja) | 可燃性ガスセンサ | |
JP2004325218A (ja) | 温度制御装置および温度制御方法ならびにそれらを用いたガス検出装置 | |
JP2008233030A (ja) | 可燃性ガスセンサ及びそれの製造方法 | |
KR101992022B1 (ko) | 반도체식 가스센서 | |
JP2009281758A (ja) | 薄膜ガスセンサ、ガス漏れ警報器、薄膜ガスセンサ設定調節装置および薄膜ガスセンサ設定調節方法 | |
JP5129553B2 (ja) | 水素検知素子 | |
JP7503226B1 (ja) | ガス濃度測定デバイス及び被測定ガス中の被検出対象ガス濃度の測定方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050802 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090427 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090501 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090519 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120703 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4332612 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120703 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120703 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150703 Year of fee payment: 6 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |