JP4243766B2 - 非接触搬送装置 - Google Patents
非接触搬送装置 Download PDFInfo
- Publication number
- JP4243766B2 JP4243766B2 JP2006270735A JP2006270735A JP4243766B2 JP 4243766 B2 JP4243766 B2 JP 4243766B2 JP 2006270735 A JP2006270735 A JP 2006270735A JP 2006270735 A JP2006270735 A JP 2006270735A JP 4243766 B2 JP4243766 B2 JP 4243766B2
- Authority
- JP
- Japan
- Prior art keywords
- swirl chamber
- workpiece
- inclined surface
- air
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
前記ボディの内部に形成され、エア供給部から供給されたエアが流通する通路と、
前記ボディの端部に設けられ、ワークに臨む保持面と、
前記保持面の半径内方向に設けられ、前記ワークに臨んで開口すると共に前記ワーク側に向かって徐々に拡径した第1傾斜面を有する環状の旋回室と、
前記旋回室の第1傾斜面に接続され、該旋回室と通路とを連通して前記エアを前記旋回室へと導出する導出孔と、
前記旋回室の略中央部に設けられ、前記ワーク側に向かって徐々に縮径するように膨出し、外周側に前記第1傾斜面に臨んだ第2傾斜面を有する突部と、
を備え、
前記導出孔が、前記保持面と略平行に延在し、前記第1傾斜面に対して前記旋回室の接線方向に接続されることを特徴とする。
14…インナ部材 18…孔部
20…フランジ部 36…ボス部
38…ベース部 40…保持面
42…プレート部 44…接合部
46…供給ポート 48…環状通路
50…連通路 54…膨出部
56…第1テーパ面 60…第2テーパ面
62…環状凹部 64…導出孔
66…第3テーパ面 68…旋回室
Claims (3)
- ボディと、
前記ボディの内部に形成され、エア供給部から供給されたエアが流通する通路と、
前記ボディの端部に設けられ、ワークに臨む保持面と、
前記保持面の半径内方向に設けられ、前記ワークに臨んで開口すると共に前記ワーク側に向かって徐々に拡径した第1傾斜面を有する環状の旋回室と、
前記旋回室の第1傾斜面に接続され、該旋回室と通路とを連通して前記エアを前記旋回室へと導出する導出孔と、
前記旋回室の略中央部に設けられ、前記ワーク側に向かって徐々に縮径するように膨出し、外周側に前記第1傾斜面に臨んだ第2傾斜面を有する突部と、
を備え、
前記導出孔が、前記保持面と略平行に延在し、前記第1傾斜面に対して前記旋回室の接線方向に接続されることを特徴とする非接触搬送装置。 - 請求項1記載の非接触搬送装置において、
前記第2傾斜面の傾斜角度は、該第2傾斜面の起点となる前記旋回室の壁面に対して30度以上且つ90度未満に設定されることを特徴とする非接触搬送装置。 - 請求項1又は2記載の非接触搬送装置において、
前記第1傾斜面の傾斜角度は、該第1傾斜面の起点となる前記旋回室の壁面に対して30度以上且つ90度未満に設定されることを特徴とする非接触搬送装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006270735A JP4243766B2 (ja) | 2006-10-02 | 2006-10-02 | 非接触搬送装置 |
DE102007045854A DE102007045854B4 (de) | 2006-10-02 | 2007-09-26 | Kontaktfreie Transportvorrichtung |
TW096135661A TWI331981B (en) | 2006-10-02 | 2007-09-26 | Non-contact transport apparatus |
CN2007101529722A CN101172540B (zh) | 2006-10-02 | 2007-09-29 | 非接触式运送装置 |
US11/865,150 US7690869B2 (en) | 2006-10-02 | 2007-10-01 | Non-contact transport apparatus |
KR1020070099279A KR100916673B1 (ko) | 2006-10-02 | 2007-10-02 | 비접촉 반송장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006270735A JP4243766B2 (ja) | 2006-10-02 | 2006-10-02 | 非接触搬送装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008087910A JP2008087910A (ja) | 2008-04-17 |
JP2008087910A5 JP2008087910A5 (ja) | 2008-07-17 |
JP4243766B2 true JP4243766B2 (ja) | 2009-03-25 |
Family
ID=39134698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006270735A Expired - Fee Related JP4243766B2 (ja) | 2006-10-02 | 2006-10-02 | 非接触搬送装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7690869B2 (ja) |
JP (1) | JP4243766B2 (ja) |
KR (1) | KR100916673B1 (ja) |
CN (1) | CN101172540B (ja) |
DE (1) | DE102007045854B4 (ja) |
TW (1) | TWI331981B (ja) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4740414B2 (ja) * | 2007-04-24 | 2011-08-03 | 東京エレクトロン株式会社 | 基板搬送装置 |
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WO2009119377A1 (ja) * | 2008-03-24 | 2009-10-01 | オイレス工業株式会社 | 非接触搬送装置 |
KR100859835B1 (ko) * | 2008-05-13 | 2008-09-23 | 한국뉴매틱(주) | 비접촉식 진공패드 |
JP4982875B2 (ja) * | 2008-07-03 | 2012-07-25 | Smc株式会社 | シート状物品のための非接触パッド |
DE202008009838U1 (de) * | 2008-07-22 | 2008-10-23 | Robotics Technology Leaders Gmbh | Luftkissenplattform zum Tragen eines Manipulatorarms und verfahrbarer Roboter |
US8231157B2 (en) * | 2008-08-28 | 2012-07-31 | Corning Incorporated | Non-contact manipulating devices and methods |
WO2010058689A1 (ja) * | 2008-11-18 | 2010-05-27 | オイレス工業株式会社 | 非接触搬送装置 |
CN101733716B (zh) * | 2008-11-18 | 2013-03-20 | 鸿富锦精密工业(深圳)有限公司 | 镜片承载治具 |
DE102008062343B4 (de) * | 2008-12-15 | 2013-05-29 | Festo Ag & Co. Kg | Nach dem Bernoulli-Prinzip arbeitender Sauggreifer |
TWI449653B (zh) * | 2009-04-03 | 2014-08-21 | Oiles Industry Co Ltd | Non - contact delivery device |
JP2010253567A (ja) * | 2009-04-21 | 2010-11-11 | Seiko Epson Corp | 吸引保持ハンド、吸引保持方法、及び搬送装置 |
JP5370664B2 (ja) * | 2009-09-07 | 2013-12-18 | 村田機械株式会社 | 基板の移載装置、およびその方法 |
DE102009051565A1 (de) | 2009-10-22 | 2011-04-28 | Alexander Borowski | Ansaug-Greifervorrichtung für flache Substrate |
US20110140726A1 (en) * | 2009-11-23 | 2011-06-16 | Applied Materials, Inc. | Apparatus and Methods for Measuring Solar Cell Module Performance |
CN102101296B (zh) * | 2009-12-21 | 2015-05-13 | 柳州市中晶科技有限公司 | 非接触搬运装置 |
JP2011138877A (ja) * | 2009-12-28 | 2011-07-14 | Seiko Epson Corp | 非接触保持体及び非接触保持ハンド |
JP5110480B2 (ja) * | 2010-05-11 | 2012-12-26 | Smc株式会社 | 非接触搬送装置 |
KR101309144B1 (ko) | 2011-01-10 | 2013-09-17 | 엘아이지에이디피 주식회사 | 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치 |
US8683676B1 (en) * | 2011-04-29 | 2014-04-01 | Western Digital Technologies, Inc. | Apparatus and method to grip a disk clamp of a disk drive |
US8544362B2 (en) * | 2011-06-02 | 2013-10-01 | Speedranger Aviation, Llc | Crankshaft flange protector and support assembly |
US8613474B2 (en) * | 2011-07-06 | 2013-12-24 | Tel Nexx, Inc. | Substrate loader and unloader having a Bernoulli support |
JP5875294B2 (ja) * | 2011-08-29 | 2016-03-02 | 日本空圧システム株式会社 | 保持具 |
US8905680B2 (en) | 2011-10-31 | 2014-12-09 | Masahiro Lee | Ultrathin wafer transport systems |
JP2013179137A (ja) * | 2012-02-28 | 2013-09-09 | Tokyo Institute Of Technology | 力発生装置 |
CN102730445B (zh) * | 2012-06-29 | 2015-07-29 | 四川长虹电器股份有限公司 | 一种真空吸取装置 |
CN103662835B (zh) * | 2013-09-03 | 2015-07-29 | 浙江大学 | 气旋流悬浮装置 |
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US9202738B2 (en) * | 2013-09-26 | 2015-12-01 | Applied Materials, Inc. | Pneumatic end effector apparatus and substrate transportation systems with annular flow channel |
CN104626174B (zh) * | 2013-11-13 | 2016-06-15 | 浙江大学 | 吸盘 |
KR20160093674A (ko) * | 2013-12-03 | 2016-08-08 | 가부시키가이샤 하모테크 | 유지 장치, 유지 시스템, 제어 방법 및 반송 장치 |
CN105792997A (zh) * | 2013-12-03 | 2016-07-20 | 哈莫技术股份有限公司 | 传送设备 |
TWI524012B (zh) * | 2014-07-31 | 2016-03-01 | Gison Machinery Co Ltd | Sucker |
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JP5908136B1 (ja) * | 2015-03-03 | 2016-04-26 | 株式会社ハーモテック | 吸引装置 |
JP6116629B2 (ja) * | 2015-08-11 | 2017-04-19 | 株式会社ハーモテック | 吸引装置 |
DE102017203468B4 (de) | 2017-03-03 | 2021-05-06 | Festo Se & Co. Kg | Bernoulli-Sauggreifer |
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US11254014B2 (en) * | 2017-07-21 | 2022-02-22 | Electro Scientific Industries, Inc. | Non-contact handler and method of handling workpieces using the same |
CN109303088B (zh) * | 2017-07-27 | 2024-02-02 | 成都松川雷博机械设备有限公司 | 带有非接触切面机构的包馅食品成型机 |
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JP7148105B2 (ja) * | 2017-09-20 | 2022-10-05 | 株式会社ハーモテック | 吸引装置 |
EP3687884A4 (en) * | 2017-09-25 | 2021-07-14 | WCB Robotics Inc. | LOW PRESSURE SUCTIONS WITH HIGH FLOW RATE |
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DE102020205955A1 (de) | 2020-05-12 | 2021-11-18 | Festo Se & Co. Kg | Bernoulli-Sauggreifer |
JP7418924B2 (ja) * | 2020-05-13 | 2024-01-22 | 株式会社ディスコ | 保持機構 |
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CN115159089B (zh) * | 2022-06-30 | 2023-09-08 | 江苏科技大学 | 一种油漆桶液氮处理用夹持运送机构 |
CN116759369B (zh) * | 2023-08-17 | 2023-10-31 | 北京锐洁机器人科技有限公司 | 一种伯努利手指 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3036829A1 (de) * | 1980-09-30 | 1982-05-13 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zum aufnehmen von kristallscheiben |
JPS62211236A (ja) | 1986-03-12 | 1987-09-17 | Hitachi Ltd | 板状体の保持装置 |
US5169196A (en) * | 1991-06-17 | 1992-12-08 | Safabakhsh Ali R | Non-contact pick-up head |
US6099056A (en) * | 1996-05-31 | 2000-08-08 | Ipec Precision, Inc. | Non-contact holder for wafer-like articles |
US6467297B1 (en) * | 2000-10-12 | 2002-10-22 | Jetek, Inc. | Wafer holder for rotating and translating wafers |
JP3981241B2 (ja) * | 2000-06-09 | 2007-09-26 | 株式会社ハーモテック | 旋回流形成体および非接触搬送装置 |
JP4669252B2 (ja) | 2000-06-09 | 2011-04-13 | 株式会社ハーモテック | 旋回流形成体および非接触搬送装置 |
US6427991B1 (en) * | 2000-08-04 | 2002-08-06 | Tru-Si Technologies, Inc. | Non-contact workpiece holder using vortex chuck with central gas flow |
EP1233442B1 (en) * | 2001-02-20 | 2009-10-14 | Harmotec Corporation | Non-contacting conveyance equipment |
US6601888B2 (en) * | 2001-03-19 | 2003-08-05 | Creo Inc. | Contactless handling of objects |
US20020185230A1 (en) * | 2001-06-08 | 2002-12-12 | Sam Kao | Article holders that use gas vortices to hold an article in a desired position |
JP4342331B2 (ja) * | 2004-02-09 | 2009-10-14 | 株式会社コガネイ | 非接触搬送装置 |
JP4437415B2 (ja) | 2004-03-03 | 2010-03-24 | リンク・パワー株式会社 | 非接触保持装置および非接触保持搬送装置 |
DE102004045957A1 (de) * | 2004-09-22 | 2006-04-06 | Singulus Technologies Ag | Vorrichtung zum Halten und Transportieren eines Werkstücks mit einer ebenen Oberfläche |
JP2006156692A (ja) * | 2004-11-29 | 2006-06-15 | Smc Corp | 非接触搬送装置 |
-
2006
- 2006-10-02 JP JP2006270735A patent/JP4243766B2/ja not_active Expired - Fee Related
-
2007
- 2007-09-26 TW TW096135661A patent/TWI331981B/zh active
- 2007-09-26 DE DE102007045854A patent/DE102007045854B4/de not_active Expired - Fee Related
- 2007-09-29 CN CN2007101529722A patent/CN101172540B/zh not_active Expired - Fee Related
- 2007-10-01 US US11/865,150 patent/US7690869B2/en active Active
- 2007-10-02 KR KR1020070099279A patent/KR100916673B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2008087910A (ja) | 2008-04-17 |
DE102007045854B4 (de) | 2013-08-08 |
KR20080030945A (ko) | 2008-04-07 |
US7690869B2 (en) | 2010-04-06 |
TWI331981B (en) | 2010-10-21 |
US20080079208A1 (en) | 2008-04-03 |
DE102007045854A1 (de) | 2008-04-03 |
KR100916673B1 (ko) | 2009-09-08 |
TW200817262A (en) | 2008-04-16 |
CN101172540A (zh) | 2008-05-07 |
CN101172540B (zh) | 2012-04-18 |
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