JP4191642B2 - 半透過型液晶表示装置およびその製造方法 - Google Patents
半透過型液晶表示装置およびその製造方法 Download PDFInfo
- Publication number
- JP4191642B2 JP4191642B2 JP2004110300A JP2004110300A JP4191642B2 JP 4191642 B2 JP4191642 B2 JP 4191642B2 JP 2004110300 A JP2004110300 A JP 2004110300A JP 2004110300 A JP2004110300 A JP 2004110300A JP 4191642 B2 JP4191642 B2 JP 4191642B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- electrode
- insulating film
- conductive film
- pixel electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 77
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000010408 film Substances 0.000 claims description 306
- 239000000758 substrate Substances 0.000 claims description 76
- 238000000034 method Methods 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 15
- 238000002834 transmittance Methods 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 6
- 238000000206 photolithography Methods 0.000 claims description 6
- 238000002310 reflectometry Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 21
- 239000011347 resin Substances 0.000 description 18
- 229920005989 resin Polymers 0.000 description 18
- 239000011229 interlayer Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 12
- 239000011651 chromium Substances 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 11
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 10
- 229910052804 chromium Inorganic materials 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 238000010301 surface-oxidation reaction Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- XMPZTFVPEKAKFH-UHFFFAOYSA-P ceric ammonium nitrate Chemical compound [NH4+].[NH4+].[Ce+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O XMPZTFVPEKAKFH-UHFFFAOYSA-P 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
Description
藤森孝一著 他二名 「高透過アドバンストTFT−LCD技術」シャープ技報第85号・2003年4月(第35−36頁、第4図)
TFTアレイ基板は、
透明絶縁性基板上に形成された第一の導電膜からなるゲート電極を有する複数本のゲート配線と補助容量電極および補助容量配線と、
第一の導電膜の上に形成された第一の絶縁膜と、
第一の絶縁膜上に形成された第二の導電膜からなり、ゲート配線と交差する複数本のソース電極を備えたソース配線およびドレイン電極と、
ゲート電極と、ゲート電極上に第一の絶縁膜を介して形成された半導体層と、ソース電極およびドレイン電極からなる薄膜トランジスタと、
薄膜トランジスタおよび第二の導電膜の上に形成された第二の絶縁膜と、
第二の絶縁膜上に形成され、第二の絶縁膜に形成されたコンタクトホールを介してドレイン電極と電気的に接続された透過率の高い導電膜からなる透過画素電極と、
透過画素電極とともに透過率の高い導電膜で形成された透明導電膜部上に形成され、透明導電膜部およびコンタクトホールを介してドレイン電極に電気的に接続された反射率の高い導電膜からなる反射画素電極を備えており、
反射画素電極は、第一の絶縁膜および第二の絶縁膜を介して補助容量電極および補助容量配線に重畳されて補助容量を形成しているものである。
以下に、本発明を実施するための最良の形態である実施の形態1について述べる。図1は、本発明の実施の形態1における半透過型液晶表示装置を構成するTFTアレイ基板の一画素を示す平面図、図2(a)〜(f)は、図1と同様に本実施の形態1における半透過型液晶表示装置を構成するTFTアレイ基板の製造プロセスフローを示す断面図である。図中、同一、相当部分には同一符号を付している。
なお、ゲート配線22とソース配線63との交差部には、交差部の耐電圧を向上させるために半導体能動膜4およびオーミックコンタクト膜5を残存させている。
図4は、本発明の実施の形態2における半透過型液晶表示装置を構成するTFTアレイ基板を示す断面図である。図中、同一、相当部分には同一符号を付している。
23ゲート端子、24 補助容量配線、3 第一の絶縁膜(ゲート絶縁膜)、
4 半導体能動膜、5 オーミックコンタクト膜、6 第二の導電膜、
61 ソース電極、62 ドレイン電極、63 ソース配線、64 ソース端子、
65 導電膜部分、
7 第二の絶縁膜、8a、8b、8c コンタクトホール、9 透明導電性膜、
91 電極パターン、91a 透過画素電極、91b 透明導電膜部、
92、93 端子パターン、10反射画素電極、10a、10b 第三の導電膜、
11 第三の絶縁膜、100 TFTアレイ基板、101 対向基板、
102 透明絶縁性基板、103 ブラックマトリクス、104 カラーフイルタ、105 対向透明電極、106 凸部。
Claims (3)
- 1画素内に光を透過する透過画素電極と光を反射する反射画素電極を有するTFTアレイ基板と、対向透明電極を有する対向基板との間に液晶が配置されてなる半透過型液晶表示装置において、
前記TFTアレイ基板は、
透明絶縁性基板上に形成された第一の導電膜からなる複数本のゲート電極を備えたゲート配線と補助容量電極および補助容量配線、
前記第一の導電膜の上に形成された第一の絶縁膜、
前記第一の絶縁膜上に形成された第二の導電膜からなり、前記ゲート配線と交差する複数本のソース電極を備えたソース配線およびドレイン電極、
前記ゲート電極と、前記ゲート電極上に前記第一の絶縁膜を介して形成された半導体層と前記ソース電極およびドレイン電極からなる薄膜トランジスタ、
前記薄膜トランジスタおよび前記第二の導電膜の上に形成された第二の絶縁膜、
前記第二の絶縁膜上に形成され、前記第二の絶縁膜に形成されたコンタクトホールを介して前記ドレイン電極と電気的に接続された透過率の高い導電膜からなる透過画素電極、
前記透過画素電極とともに前記透過率の高い導電膜で形成された透明導電膜部上に形成され、前記透明導電膜部および前記コンタクトホールを介して前記ドレイン電極に電気的に接続された反射率の高い導電膜からなる反射画素電極を備え、
前記反射画素電極は、前記第一の絶縁膜および前記第二の絶縁膜を介して前記補助容量電極および補助容量配線に重畳されて補助容量を形成していることを特徴とする半透過型液晶表示装置。 - 前記反射画素電極は、第三の絶縁膜により被覆されていることを特徴とする請求項1記載の半透過型液晶表示装置。
- 1画素内に光を透過する透過画素電極と光を反射する反射画素電極を有するTFTアレイ基板と、対向透明電極を有する対向基板との間に液晶が配置されてなる半透過型液晶表示装置の製造方法において、
前記TFTアレイ基板の製造方法は、透明絶縁性基板上に第一の導電膜を成膜し、パターニングしてゲート電極とゲート配線と補助容量電極および補助容量配線を形成する工程と、
前記第一の導電膜の上に第一の絶縁膜、半導体能動膜、オーミックコンタクト膜を順次成膜する工程と、
前記半導体能動膜と前記オーミックコンタクト膜をパターニングして前記ゲート電極の上に前記第一の絶縁膜を介して半導体層を形成する工程と、
前記第一の絶縁膜および前記半導体層の上に第二の導電膜を成膜し、パターニングしてソース電極とドレイン電極とソース配線を形成する工程と、
前記第一の絶縁膜および前記第二の導電膜の上に第二の絶縁膜を成膜する工程と、
前記第二の絶縁膜をパターニングして前記ドレイン電極上の前記第二の絶縁膜にコンタクトホールを形成する工程と、
前記第二の絶縁膜上および前記コンタクトホール内に透過率の高い導電膜を成膜し、パターニングして前記ドレイン電極と電気的に接続された透明導電膜部および透過画素電極を形成する工程と、
前記透過率の高い導電膜の上方に反射率の高い導電膜および第三の絶縁膜を成膜し、前記反射率の高い導電膜および前記第三の絶縁膜を同一写真製版工程によりパターニングして、前記透明導電膜部上に前記透明導電膜部および前記コンタクトホールを介して前記ドレイン電極に電気的に接続された反射画素電極および前記反射画素電極を被覆する第三の絶縁膜を形成する工程を備え、
前記反射画素電極は、前記第一の絶縁膜および前記第二の絶縁膜を介して前記補助容量電極および補助容量配線に重畳されて補助容量を形成していることを特徴とする半透過型液晶表示装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004110300A JP4191642B2 (ja) | 2004-04-02 | 2004-04-02 | 半透過型液晶表示装置およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004110300A JP4191642B2 (ja) | 2004-04-02 | 2004-04-02 | 半透過型液晶表示装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005292661A JP2005292661A (ja) | 2005-10-20 |
JP4191642B2 true JP4191642B2 (ja) | 2008-12-03 |
Family
ID=35325617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004110300A Expired - Lifetime JP4191642B2 (ja) | 2004-04-02 | 2004-04-02 | 半透過型液晶表示装置およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4191642B2 (ja) |
Cited By (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7647084B2 (en) | 2005-08-08 | 2010-01-12 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7650177B2 (en) | 2005-09-29 | 2010-01-19 | Nellcor Puritan Bennett Llc | Medical sensor for reducing motion artifacts and technique for using the same |
US7657295B2 (en) | 2005-08-08 | 2010-02-02 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7657296B2 (en) | 2005-08-08 | 2010-02-02 | Nellcor Puritan Bennett Llc | Unitary medical sensor assembly and technique for using the same |
US7676253B2 (en) | 2005-09-29 | 2010-03-09 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7720516B2 (en) | 1996-10-10 | 2010-05-18 | Nellcor Puritan Bennett Llc | Motion compatible sensor for non-invasive optical blood analysis |
US7725147B2 (en) | 2005-09-29 | 2010-05-25 | Nellcor Puritan Bennett Llc | System and method for removing artifacts from waveforms |
US7725146B2 (en) | 2005-09-29 | 2010-05-25 | Nellcor Puritan Bennett Llc | System and method for pre-processing waveforms |
US7796403B2 (en) | 2006-09-28 | 2010-09-14 | Nellcor Puritan Bennett Llc | Means for mechanical registration and mechanical-electrical coupling of a faraday shield to a photodetector and an electrical circuit |
US7869849B2 (en) | 2006-09-26 | 2011-01-11 | Nellcor Puritan Bennett Llc | Opaque, electrically nonconductive region on a medical sensor |
US7881762B2 (en) | 2005-09-30 | 2011-02-01 | Nellcor Puritan Bennett Llc | Clip-style medical sensor and technique for using the same |
US7890154B2 (en) | 2004-03-08 | 2011-02-15 | Nellcor Puritan Bennett Llc | Selection of ensemble averaging weights for a pulse oximeter based on signal quality metrics |
US7890153B2 (en) | 2006-09-28 | 2011-02-15 | Nellcor Puritan Bennett Llc | System and method for mitigating interference in pulse oximetry |
US7894869B2 (en) | 2007-03-09 | 2011-02-22 | Nellcor Puritan Bennett Llc | Multiple configuration medical sensor and technique for using the same |
US7899510B2 (en) | 2005-09-29 | 2011-03-01 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US8068891B2 (en) | 2006-09-29 | 2011-11-29 | Nellcor Puritan Bennett Llc | Symmetric LED array for pulse oximetry |
US8073518B2 (en) | 2006-05-02 | 2011-12-06 | Nellcor Puritan Bennett Llc | Clip-style medical sensor and technique for using the same |
US8095192B2 (en) | 2003-01-10 | 2012-01-10 | Nellcor Puritan Bennett Llc | Signal quality metrics design for qualifying data for a physiological monitor |
US8112375B2 (en) | 2008-03-31 | 2012-02-07 | Nellcor Puritan Bennett Llc | Wavelength selection and outlier detection in reduced rank linear models |
US8145288B2 (en) | 2006-08-22 | 2012-03-27 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8175667B2 (en) | 2006-09-29 | 2012-05-08 | Nellcor Puritan Bennett Llc | Symmetric LED array for pulse oximetry |
US8175671B2 (en) | 2006-09-22 | 2012-05-08 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8190225B2 (en) | 2006-09-22 | 2012-05-29 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8204567B2 (en) | 2007-12-13 | 2012-06-19 | Nellcor Puritan Bennett Llc | Signal demodulation |
US8238994B2 (en) | 2005-10-28 | 2012-08-07 | Nellcor Puritan Bennett Llc | Adjusting parameters used in pulse oximetry analysis |
US8260391B2 (en) | 2005-09-12 | 2012-09-04 | Nellcor Puritan Bennett Llc | Medical sensor for reducing motion artifacts and technique for using the same |
US8346328B2 (en) | 2007-12-21 | 2013-01-01 | Covidien Lp | Medical sensor and technique for using the same |
US8352004B2 (en) | 2007-12-21 | 2013-01-08 | Covidien Lp | Medical sensor and technique for using the same |
US8352009B2 (en) | 2005-09-30 | 2013-01-08 | Covidien Lp | Medical sensor and technique for using the same |
US8386002B2 (en) | 2005-09-30 | 2013-02-26 | Covidien Lp | Optically aligned pulse oximetry sensor and technique for using the same |
US8386000B2 (en) | 2008-09-30 | 2013-02-26 | Covidien Lp | System and method for photon density wave pulse oximetry and pulse hemometry |
US8396527B2 (en) | 2006-09-22 | 2013-03-12 | Covidien Lp | Medical sensor for reducing signal artifacts and technique for using the same |
US8401608B2 (en) | 2009-09-30 | 2013-03-19 | Covidien Lp | Method of analyzing photon density waves in a medical monitor |
US8423109B2 (en) | 2005-03-03 | 2013-04-16 | Covidien Lp | Method for enhancing pulse oximery calculations in the presence of correlated artifacts |
US8433382B2 (en) | 2008-09-30 | 2013-04-30 | Covidien Lp | Transmission mode photon density wave system and method |
US8437822B2 (en) | 2008-03-28 | 2013-05-07 | Covidien Lp | System and method for estimating blood analyte concentration |
US8483788B2 (en) | 2010-02-28 | 2013-07-09 | Covidien Lp | Motion compensation in a sensor |
US8494604B2 (en) | 2009-09-21 | 2013-07-23 | Covidien Lp | Wavelength-division multiplexing in a multi-wavelength photon density wave system |
US8634891B2 (en) | 2009-05-20 | 2014-01-21 | Covidien Lp | Method and system for self regulation of sensor component contact pressure |
US8750953B2 (en) | 2008-02-19 | 2014-06-10 | Covidien Lp | Methods and systems for alerting practitioners to physiological conditions |
US8788001B2 (en) | 2009-09-21 | 2014-07-22 | Covidien Lp | Time-division multiplexing in a multi-wavelength photon density wave system |
US8798704B2 (en) | 2009-09-24 | 2014-08-05 | Covidien Lp | Photoacoustic spectroscopy method and system to discern sepsis from shock |
US8930145B2 (en) | 2010-07-28 | 2015-01-06 | Covidien Lp | Light focusing continuous wave photoacoustic spectroscopy and its applications to patient monitoring |
US9833146B2 (en) | 2012-04-17 | 2017-12-05 | Covidien Lp | Surgical system and method of use of the same |
US9895068B2 (en) | 2008-06-30 | 2018-02-20 | Covidien Lp | Pulse oximeter with wait-time indication |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3892882B2 (ja) | 2005-06-13 | 2007-03-14 | 三菱電機株式会社 | 半透過型液晶表示装置 |
-
2004
- 2004-04-02 JP JP2004110300A patent/JP4191642B2/ja not_active Expired - Lifetime
Cited By (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7720516B2 (en) | 1996-10-10 | 2010-05-18 | Nellcor Puritan Bennett Llc | Motion compatible sensor for non-invasive optical blood analysis |
US8649839B2 (en) | 1996-10-10 | 2014-02-11 | Covidien Lp | Motion compatible sensor for non-invasive optical blood analysis |
US8095192B2 (en) | 2003-01-10 | 2012-01-10 | Nellcor Puritan Bennett Llc | Signal quality metrics design for qualifying data for a physiological monitor |
US7890154B2 (en) | 2004-03-08 | 2011-02-15 | Nellcor Puritan Bennett Llc | Selection of ensemble averaging weights for a pulse oximeter based on signal quality metrics |
US8560036B2 (en) | 2004-03-08 | 2013-10-15 | Covidien Lp | Selection of ensemble averaging weights for a pulse oximeter based on signal quality metrics |
US9351674B2 (en) | 2005-03-03 | 2016-05-31 | Covidien Lp | Method for enhancing pulse oximetry calculations in the presence of correlated artifacts |
US8818475B2 (en) | 2005-03-03 | 2014-08-26 | Covidien Lp | Method for enhancing pulse oximetry calculations in the presence of correlated artifacts |
US8423109B2 (en) | 2005-03-03 | 2013-04-16 | Covidien Lp | Method for enhancing pulse oximery calculations in the presence of correlated artifacts |
US7657296B2 (en) | 2005-08-08 | 2010-02-02 | Nellcor Puritan Bennett Llc | Unitary medical sensor assembly and technique for using the same |
US8528185B2 (en) | 2005-08-08 | 2013-09-10 | Covidien Lp | Bi-stable medical sensor and technique for using the same |
US7693559B2 (en) | 2005-08-08 | 2010-04-06 | Nellcor Puritan Bennett Llc | Medical sensor having a deformable region and technique for using the same |
US7684843B2 (en) | 2005-08-08 | 2010-03-23 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7738937B2 (en) | 2005-08-08 | 2010-06-15 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7657295B2 (en) | 2005-08-08 | 2010-02-02 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7657294B2 (en) | 2005-08-08 | 2010-02-02 | Nellcor Puritan Bennett Llc | Compliant diaphragm medical sensor and technique for using the same |
US7647084B2 (en) | 2005-08-08 | 2010-01-12 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US8311602B2 (en) | 2005-08-08 | 2012-11-13 | Nellcor Puritan Bennett Llc | Compliant diaphragm medical sensor and technique for using the same |
US8260391B2 (en) | 2005-09-12 | 2012-09-04 | Nellcor Puritan Bennett Llc | Medical sensor for reducing motion artifacts and technique for using the same |
US7869850B2 (en) | 2005-09-29 | 2011-01-11 | Nellcor Puritan Bennett Llc | Medical sensor for reducing motion artifacts and technique for using the same |
US8744543B2 (en) | 2005-09-29 | 2014-06-03 | Covidien Lp | System and method for removing artifacts from waveforms |
US7899510B2 (en) | 2005-09-29 | 2011-03-01 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7904130B2 (en) | 2005-09-29 | 2011-03-08 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US8060171B2 (en) | 2005-09-29 | 2011-11-15 | Nellcor Puritan Bennett Llc | Medical sensor for reducing motion artifacts and technique for using the same |
US8965473B2 (en) | 2005-09-29 | 2015-02-24 | Covidien Lp | Medical sensor for reducing motion artifacts and technique for using the same |
US8600469B2 (en) | 2005-09-29 | 2013-12-03 | Covidien Lp | Medical sensor and technique for using the same |
US7729736B2 (en) | 2005-09-29 | 2010-06-01 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7725146B2 (en) | 2005-09-29 | 2010-05-25 | Nellcor Puritan Bennett Llc | System and method for pre-processing waveforms |
US7725147B2 (en) | 2005-09-29 | 2010-05-25 | Nellcor Puritan Bennett Llc | System and method for removing artifacts from waveforms |
US7676253B2 (en) | 2005-09-29 | 2010-03-09 | Nellcor Puritan Bennett Llc | Medical sensor and technique for using the same |
US7650177B2 (en) | 2005-09-29 | 2010-01-19 | Nellcor Puritan Bennett Llc | Medical sensor for reducing motion artifacts and technique for using the same |
US7881762B2 (en) | 2005-09-30 | 2011-02-01 | Nellcor Puritan Bennett Llc | Clip-style medical sensor and technique for using the same |
US8352009B2 (en) | 2005-09-30 | 2013-01-08 | Covidien Lp | Medical sensor and technique for using the same |
US8386002B2 (en) | 2005-09-30 | 2013-02-26 | Covidien Lp | Optically aligned pulse oximetry sensor and technique for using the same |
US8238994B2 (en) | 2005-10-28 | 2012-08-07 | Nellcor Puritan Bennett Llc | Adjusting parameters used in pulse oximetry analysis |
US8437826B2 (en) | 2006-05-02 | 2013-05-07 | Covidien Lp | Clip-style medical sensor and technique for using the same |
US8073518B2 (en) | 2006-05-02 | 2011-12-06 | Nellcor Puritan Bennett Llc | Clip-style medical sensor and technique for using the same |
US8577436B2 (en) | 2006-08-22 | 2013-11-05 | Covidien Lp | Medical sensor for reducing signal artifacts and technique for using the same |
US8145288B2 (en) | 2006-08-22 | 2012-03-27 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8190224B2 (en) | 2006-09-22 | 2012-05-29 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8175671B2 (en) | 2006-09-22 | 2012-05-08 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8195264B2 (en) | 2006-09-22 | 2012-06-05 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8190225B2 (en) | 2006-09-22 | 2012-05-29 | Nellcor Puritan Bennett Llc | Medical sensor for reducing signal artifacts and technique for using the same |
US8396527B2 (en) | 2006-09-22 | 2013-03-12 | Covidien Lp | Medical sensor for reducing signal artifacts and technique for using the same |
US7869849B2 (en) | 2006-09-26 | 2011-01-11 | Nellcor Puritan Bennett Llc | Opaque, electrically nonconductive region on a medical sensor |
US7890153B2 (en) | 2006-09-28 | 2011-02-15 | Nellcor Puritan Bennett Llc | System and method for mitigating interference in pulse oximetry |
US7796403B2 (en) | 2006-09-28 | 2010-09-14 | Nellcor Puritan Bennett Llc | Means for mechanical registration and mechanical-electrical coupling of a faraday shield to a photodetector and an electrical circuit |
US8660626B2 (en) | 2006-09-28 | 2014-02-25 | Covidien Lp | System and method for mitigating interference in pulse oximetry |
US8175667B2 (en) | 2006-09-29 | 2012-05-08 | Nellcor Puritan Bennett Llc | Symmetric LED array for pulse oximetry |
US8068891B2 (en) | 2006-09-29 | 2011-11-29 | Nellcor Puritan Bennett Llc | Symmetric LED array for pulse oximetry |
US7894869B2 (en) | 2007-03-09 | 2011-02-22 | Nellcor Puritan Bennett Llc | Multiple configuration medical sensor and technique for using the same |
US8204567B2 (en) | 2007-12-13 | 2012-06-19 | Nellcor Puritan Bennett Llc | Signal demodulation |
US8352004B2 (en) | 2007-12-21 | 2013-01-08 | Covidien Lp | Medical sensor and technique for using the same |
US8346328B2 (en) | 2007-12-21 | 2013-01-01 | Covidien Lp | Medical sensor and technique for using the same |
US8750953B2 (en) | 2008-02-19 | 2014-06-10 | Covidien Lp | Methods and systems for alerting practitioners to physiological conditions |
US11298076B2 (en) | 2008-02-19 | 2022-04-12 | Covidien Lp | Methods and systems for alerting practitioners to physiological conditions |
US10076276B2 (en) | 2008-02-19 | 2018-09-18 | Covidien Lp | Methods and systems for alerting practitioners to physiological conditions |
US8437822B2 (en) | 2008-03-28 | 2013-05-07 | Covidien Lp | System and method for estimating blood analyte concentration |
US8112375B2 (en) | 2008-03-31 | 2012-02-07 | Nellcor Puritan Bennett Llc | Wavelength selection and outlier detection in reduced rank linear models |
US9895068B2 (en) | 2008-06-30 | 2018-02-20 | Covidien Lp | Pulse oximeter with wait-time indication |
US8433382B2 (en) | 2008-09-30 | 2013-04-30 | Covidien Lp | Transmission mode photon density wave system and method |
US8386000B2 (en) | 2008-09-30 | 2013-02-26 | Covidien Lp | System and method for photon density wave pulse oximetry and pulse hemometry |
US8634891B2 (en) | 2009-05-20 | 2014-01-21 | Covidien Lp | Method and system for self regulation of sensor component contact pressure |
US8494604B2 (en) | 2009-09-21 | 2013-07-23 | Covidien Lp | Wavelength-division multiplexing in a multi-wavelength photon density wave system |
US8788001B2 (en) | 2009-09-21 | 2014-07-22 | Covidien Lp | Time-division multiplexing in a multi-wavelength photon density wave system |
US8798704B2 (en) | 2009-09-24 | 2014-08-05 | Covidien Lp | Photoacoustic spectroscopy method and system to discern sepsis from shock |
US8401608B2 (en) | 2009-09-30 | 2013-03-19 | Covidien Lp | Method of analyzing photon density waves in a medical monitor |
US8483788B2 (en) | 2010-02-28 | 2013-07-09 | Covidien Lp | Motion compensation in a sensor |
US8930145B2 (en) | 2010-07-28 | 2015-01-06 | Covidien Lp | Light focusing continuous wave photoacoustic spectroscopy and its applications to patient monitoring |
US9833146B2 (en) | 2012-04-17 | 2017-12-05 | Covidien Lp | Surgical system and method of use of the same |
Also Published As
Publication number | Publication date |
---|---|
JP2005292661A (ja) | 2005-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4191642B2 (ja) | 半透過型液晶表示装置およびその製造方法 | |
US7733446B2 (en) | Semitransmissive liquid crystal display device and manufacturing method thereof | |
US7612373B2 (en) | Liquid crystal display device and method of manufacturing liquid crystal display device with color filter layer on thin film transistor | |
JP4619997B2 (ja) | 液晶表示装置とその製造方法 | |
KR101221261B1 (ko) | 액정 표시 장치용 어레이 기판 및 그 제조 방법 | |
KR100741537B1 (ko) | 반투과형 액정표시장치 및 그 제조방법 | |
KR100287666B1 (ko) | 액티브매트릭스기판 | |
JPH11281992A (ja) | 液晶表示装置及びその製造方法 | |
KR20120099009A (ko) | Mofet을 위한 마스크 레벨 감소 | |
US6724453B2 (en) | Method of fabricating array substrate for use in an in-plane switching mode liquid crystal display device | |
US20060139547A1 (en) | Liquid crystal display device and fabricating method thereof | |
JP3892882B2 (ja) | 半透過型液晶表示装置 | |
KR100660809B1 (ko) | 액정 표시장치 제조방법 및 그 제조방법에 따른 액정표시장치 | |
JP4799926B2 (ja) | 半透過型tftアレイ基板、および半透過型液晶表示装置 | |
JP2000122096A (ja) | 反射型液晶表示装置およびその製造方法 | |
JP2008241821A (ja) | 半透過型液晶表示装置 | |
KR101022807B1 (ko) | 반사형 액정표시장치용 어레이기판과 그 제조방법 | |
KR20050117367A (ko) | 횡전계 방식 액정표시장치와 그 제조방법 | |
JP4084630B2 (ja) | 液晶表示装置 | |
KR20050055384A (ko) | 액정표시패널 및 그 제조 방법 | |
JP2005266475A (ja) | 半透過型液晶表示装置 | |
KR20140141247A (ko) | 박막 트랜지스터 어레이 기판 및 그 제조 방법 | |
KR20070019456A (ko) | 좁은 폭의 액티브심을 포함하는 액정 표시 장치용 배선의제조 방법 | |
KR20120075205A (ko) | 에프에프에스 방식 액정표시장치용 어레이기판 제조방법 | |
JP2008102542A (ja) | 液晶表示装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060202 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070406 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080610 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080729 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080909 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080918 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110926 Year of fee payment: 3 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 4191642 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110926 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120926 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130926 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |