JP4190374B2 - 洗浄装置 - Google Patents
洗浄装置 Download PDFInfo
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- JP4190374B2 JP4190374B2 JP2003307834A JP2003307834A JP4190374B2 JP 4190374 B2 JP4190374 B2 JP 4190374B2 JP 2003307834 A JP2003307834 A JP 2003307834A JP 2003307834 A JP2003307834 A JP 2003307834A JP 4190374 B2 JP4190374 B2 JP 4190374B2
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Description
Claims (2)
- 被洗浄物を搬送する搬送手段と、該搬送手段に並設された洗浄処理部を備え、前記搬送手段にて搬送される被洗浄物を洗浄処理部へ移送して洗浄処理を実施するように構成するとともに、洗浄処理後の被洗浄物を前記搬送手段へ戻すように構成し、かつ前記洗浄処理部は、被洗浄物を受取位置にて前記搬送手段から受取り、洗浄位置を経由して前記受取位置とは異なる位置の取出位置へ移動する移動機構を備え、前記搬送手段は、洗浄処理後の被洗浄物が該搬送手段へ戻る間に、その被洗浄物が洗浄処理部への移送前に置かれていた位置が、洗浄処理後の被洗浄物が搬送手段上に戻される位置へ前進するように駆動され、洗浄処理後の被洗浄物が搬送手段上の移送前に置かれていた位置へ戻るように構成したことを特徴とする洗浄装置。
- 前記移動機構は回転テーブルからなり、該回転テーブルは、少なくとも被洗浄物の受取位置及び取出位置に停止するように構成するとともに、該回転テーブルの回転時に同時に前記搬送手段を駆動するように構成した請求項1に記載の洗浄装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003307834A JP4190374B2 (ja) | 2003-08-29 | 2003-08-29 | 洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003307834A JP4190374B2 (ja) | 2003-08-29 | 2003-08-29 | 洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005074313A JP2005074313A (ja) | 2005-03-24 |
JP4190374B2 true JP4190374B2 (ja) | 2008-12-03 |
Family
ID=34410500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003307834A Expired - Fee Related JP4190374B2 (ja) | 2003-08-29 | 2003-08-29 | 洗浄装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4190374B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4697964B2 (ja) | 2006-02-24 | 2011-06-08 | 日東電工株式会社 | 偏光子の製造方法および洗浄装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2802783B2 (ja) * | 1989-09-04 | 1998-09-24 | システム精工株式会社 | ハードディスク基板の洗浄・乾燥装置 |
JPH1176954A (ja) * | 1997-08-29 | 1999-03-23 | Mitsuboshi Belting Ltd | ルーフラックの洗浄装置とその方法 |
JP2000070876A (ja) * | 1998-09-02 | 2000-03-07 | Farukomu:Kk | 洗浄装置 |
JP2002368066A (ja) * | 2001-06-06 | 2002-12-20 | Tokyo Electron Ltd | 処理装置 |
JP2003100688A (ja) * | 2001-09-25 | 2003-04-04 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
-
2003
- 2003-08-29 JP JP2003307834A patent/JP4190374B2/ja not_active Expired - Fee Related
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JP2005074313A (ja) | 2005-03-24 |
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