JP4155960B2 - 発振回路が適用された微細質量測定装置及び方法 - Google Patents
発振回路が適用された微細質量測定装置及び方法 Download PDFInfo
- Publication number
- JP4155960B2 JP4155960B2 JP2004311053A JP2004311053A JP4155960B2 JP 4155960 B2 JP4155960 B2 JP 4155960B2 JP 2004311053 A JP2004311053 A JP 2004311053A JP 2004311053 A JP2004311053 A JP 2004311053A JP 4155960 B2 JP4155960 B2 JP 4155960B2
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- mass
- resonance frequency
- fine
- measuring apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
53…圧電体、
57…増幅部、
58…フィードバック部、
59…電源、
60…発振回路、
65…周波数測定器。
Claims (7)
- 被検体が付着されるカンチレバーと、
前記カンチレバー上に備わる圧電体と、
前記被検体が付着される前のカンチレバーの共振周波数で前記カンチレバーを能動的に振動させると共に被検体によるカンチレバーの変化した共振周波数を提供する発振回路と、
前記カンチレバーの共振周波数を測定するための周波数測定器と、を含み、
前記カンチレバーの形状比は、共振周波数の変化Δfを前記被検体による質量変化Δmで除算して得られた敏感度と、前記カンチレバーの最初の共振周波数と2番目の共振周波数との差を最初の共振周波数で除算して得られた分離係数とに基づいて決定されることを特徴とする微細質量測定装置。 - 前記発振回路は、
前記カンチレバーからの出力信号を増幅させる増幅部と、前記増幅部からの信号を前記カンチレバーに入力するフィードバック部と、を備えることを特徴とする請求項1に記載の微細質量測定装置。 - 前記カンチレバーが三角形に形成されることを特徴とする請求項1に記載の微細質量測定装置。
- 前記カンチレバーの形状比が長さ:幅:厚さ=20:6:1〜20:18:1の範囲であることを特徴とする請求項3に記載の微細質量測定装置。
- 前記カンチレバーに被検体が付着される面積がカンチレバーの全体面積の1/15〜1/10範囲内にあることを特徴とする請求項1に記載の微細質量測定装置。
- 前記圧電体の厚さは、カンチレバーの厚さの40〜60%であることを特徴とする請求項1に記載の微細質量測定装置。
- 前記圧電体の長さは、カンチレバーの長さの50〜60%であることを特徴とする請求項1に記載の微細質量測定装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030079898A KR100552696B1 (ko) | 2003-11-12 | 2003-11-12 | 발진회로가 적용된 미세 질량 측정 장치 및 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005148062A JP2005148062A (ja) | 2005-06-09 |
JP4155960B2 true JP4155960B2 (ja) | 2008-09-24 |
Family
ID=34431758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004311053A Expired - Fee Related JP4155960B2 (ja) | 2003-11-12 | 2004-10-26 | 発振回路が適用された微細質量測定装置及び方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7331231B2 (ja) |
EP (1) | EP1533611B1 (ja) |
JP (1) | JP4155960B2 (ja) |
KR (1) | KR100552696B1 (ja) |
CN (1) | CN1616947A (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101014848B (zh) * | 2004-08-11 | 2011-05-18 | 日本电波工业株式会社 | 感知装置 |
AU2007208310B2 (en) | 2006-01-23 | 2012-05-31 | Drexel University | Self-exciting, self-sensing piezoelectric cantilever sensor |
SE531775C2 (sv) * | 2006-04-26 | 2009-08-04 | Nems Ab | Anordning och komponent för parallell detektion i realtid av individuella nanomekaniska rörelser hos en samling/array av individuella och oberoende oscillerande balkar |
CN101490539A (zh) * | 2006-05-10 | 2009-07-22 | 德雷塞尔大学 | 直接在空气中检测空气传播的分析物的自励自感式压电悬臂传感器 |
GB2444510B (en) * | 2006-12-09 | 2010-04-14 | Univ Sheffield | Substance detection system and method |
KR100849466B1 (ko) * | 2007-01-31 | 2008-07-30 | 포항공과대학교 산학협력단 | 미세 압전 외팔보 센서 및 이를 위한 발진회로 |
JP4930941B2 (ja) * | 2007-03-28 | 2012-05-16 | 国立大学法人群馬大学 | カンチレバー型センサ |
JP4959632B2 (ja) * | 2007-06-01 | 2012-06-27 | アオイ電子株式会社 | ナノピンセットおよび把持方法 |
KR20090124789A (ko) * | 2008-05-30 | 2009-12-03 | 주식회사 캔티스 | 캔틸레버 구조체의 공진특성 측정장치 및 그 측정방법 |
KR101243645B1 (ko) * | 2009-08-04 | 2013-03-25 | 한양대학교 산학협력단 | 미세먼지 감지장치 및 이를 이용한 미세먼지 검출방법 |
JP5434648B2 (ja) * | 2010-02-12 | 2014-03-05 | セイコーエプソン株式会社 | インク吐出量測定装置、インク吐出量測定方法 |
JP5419767B2 (ja) * | 2010-03-24 | 2014-02-19 | オリンパス株式会社 | 検出センサ、物質検出方法 |
ITTO20100651A1 (it) | 2010-07-28 | 2012-01-29 | Ist Sperimentale It Lazzaro Spallanza | Procedimento ed apparecchiatura per la caratterizzazione e la separazione di spermatozoi con sensori micrometrici a leva sospesa |
JP2013543127A (ja) * | 2010-11-01 | 2013-11-28 | コチ・ウニヴェルシテシ | 小型で集積化されたマイクロエレクトロメカニカルシステム(メムス)の光学センサアレイ |
KR101147849B1 (ko) | 2011-07-22 | 2012-05-24 | 전남대학교산학협력단 | 약물 검사 장치 |
CN102305658B (zh) * | 2011-07-31 | 2012-11-14 | 大连理工大学 | 一种静电吸附式微质量传感器 |
KR101294359B1 (ko) | 2012-06-19 | 2013-08-08 | 전남대학교산학협력단 | 양단 고정형 압전박막 구조체 |
CN103453969B (zh) * | 2013-09-11 | 2015-05-20 | 北华航天工业学院 | 一种太空质量测量仪 |
ES2642640B1 (es) * | 2016-04-11 | 2018-10-26 | Nanodreams, S.L. | Procedimiento para obtener la posición de adsorción, la masa y la rigidez de una partícula |
CN106918380B (zh) * | 2017-02-17 | 2019-10-29 | 大连理工大学 | 一种高灵敏度微质量测试方法及便携式质量测试装置 |
CN107290240B (zh) * | 2017-07-27 | 2019-12-10 | 江苏集萃有机光电技术研究所有限公司 | 石英晶体微天平及检测方法 |
Family Cites Families (16)
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CA1180914A (en) | 1981-08-17 | 1985-01-15 | James M. O'connor | Micromechanical chemical sensor |
US4623030A (en) * | 1985-10-21 | 1986-11-18 | Alcor, Inc. | Piezoelectric ratio weighing device |
US5719324A (en) * | 1995-06-16 | 1998-02-17 | Lockheed Martin Energy Systems, Inc. | Microcantilever sensor |
GB9801286D0 (en) * | 1998-01-21 | 1998-03-18 | Univ Cambridge Tech | Sensor |
US6080939A (en) | 1998-06-12 | 2000-06-27 | Rupprecht & Pataschnick Company, Inc. | Mass determination device having counterbalanced normalized temperature coefficients |
US6126311A (en) * | 1998-11-02 | 2000-10-03 | Claud S. Gordon Company | Dew point sensor using mems |
DE60023917T2 (de) | 1999-05-03 | 2006-07-27 | Nanonord A/S | Sensor für ein mikrofluidisches bearbeitungssystem |
JP2001056278A (ja) | 1999-08-20 | 2001-02-27 | Stanley Electric Co Ltd | 質量検出型ガスセンサ |
AU2001253153A1 (en) | 2000-04-05 | 2001-10-23 | The Charles Stark Draper Laboratory, Inc. | Apparatus and method for measuring the mass of a substance |
JP3764853B2 (ja) | 2001-05-28 | 2006-04-12 | 喜萬 中山 | ナノ物質の質量計測方法及びその装置 |
US6797631B2 (en) * | 2001-08-07 | 2004-09-28 | Korea Institute Of Science And Technology | High sensitive micro-cantilever sensor and fabricating method thereof |
AU2002351273A1 (en) | 2001-12-06 | 2003-07-09 | University Of Pittsburgh | Tunable piezoelectric micro-mechanical resonator |
DE10209245B4 (de) * | 2002-03-04 | 2005-12-22 | Concentris Gmbh | Vorrichtung und Verfahren zur Detektion von Mikroorganismen |
US20040208788A1 (en) * | 2003-04-15 | 2004-10-21 | Colton Jonathan S. | Polymer micro-cantilevers and their methods of manufacture |
US20030209058A1 (en) * | 2002-05-07 | 2003-11-13 | Merrill John H. | MIP microcantilever sensor and a method of using thereof |
US7521257B2 (en) * | 2003-02-11 | 2009-04-21 | The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno | Chemical sensor with oscillating cantilevered probe and mechanical stop |
-
2003
- 2003-11-12 KR KR1020030079898A patent/KR100552696B1/ko active IP Right Grant
-
2004
- 2004-10-26 JP JP2004311053A patent/JP4155960B2/ja not_active Expired - Fee Related
- 2004-10-27 US US10/974,455 patent/US7331231B2/en not_active Expired - Fee Related
- 2004-11-03 EP EP04026084.6A patent/EP1533611B1/en not_active Expired - Fee Related
- 2004-11-11 CN CNA2004100946594A patent/CN1616947A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1533611B1 (en) | 2015-01-07 |
JP2005148062A (ja) | 2005-06-09 |
EP1533611A1 (en) | 2005-05-25 |
US20050097962A1 (en) | 2005-05-12 |
KR20050045728A (ko) | 2005-05-17 |
US7331231B2 (en) | 2008-02-19 |
CN1616947A (zh) | 2005-05-18 |
KR100552696B1 (ko) | 2006-02-20 |
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