JP4133655B2 - ナノカーボン材料の製造方法、及び配線構造の製造方法 - Google Patents

ナノカーボン材料の製造方法、及び配線構造の製造方法 Download PDF

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Publication number
JP4133655B2
JP4133655B2 JP2003270361A JP2003270361A JP4133655B2 JP 4133655 B2 JP4133655 B2 JP 4133655B2 JP 2003270361 A JP2003270361 A JP 2003270361A JP 2003270361 A JP2003270361 A JP 2003270361A JP 4133655 B2 JP4133655 B2 JP 4133655B2
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JP
Japan
Prior art keywords
nanocarbon material
semiconductor
catalyst metal
carbon
electrolysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003270361A
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English (en)
Japanese (ja)
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JP2005023408A (ja
Inventor
治男 横道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
Original Assignee
Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Agency, National Institute of Japan Science and Technology Agency filed Critical Japan Science and Technology Agency
Priority to JP2003270361A priority Critical patent/JP4133655B2/ja
Priority to US10/563,018 priority patent/US20060163077A1/en
Priority to CA002530976A priority patent/CA2530976A1/fr
Priority to PCT/JP2003/016831 priority patent/WO2005003409A1/fr
Publication of JP2005023408A publication Critical patent/JP2005023408A/ja
Application granted granted Critical
Publication of JP4133655B2 publication Critical patent/JP4133655B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/18—Nanoonions; Nanoscrolls; Nanohorns; Nanocones; Nanowalls
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D9/00—Electrolytic coating other than with metals
    • C25D9/04—Electrolytic coating other than with metals with inorganic materials
    • C25D9/08—Electrolytic coating other than with metals with inorganic materials by cathodic processes
JP2003270361A 2003-07-02 2003-07-02 ナノカーボン材料の製造方法、及び配線構造の製造方法 Expired - Fee Related JP4133655B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003270361A JP4133655B2 (ja) 2003-07-02 2003-07-02 ナノカーボン材料の製造方法、及び配線構造の製造方法
US10/563,018 US20060163077A1 (en) 2003-07-02 2003-12-25 Method for producing nanocarbon material and method for manufacturing wiring structure
CA002530976A CA2530976A1 (fr) 2003-07-02 2003-12-25 Procede de production d'un materiau de nanocarbone et procede de fabrication d'une structure filaire
PCT/JP2003/016831 WO2005003409A1 (fr) 2003-07-02 2003-12-25 Procede de production d'un materiau de nanocarbone et procede de fabrication d'une structure filaire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003270361A JP4133655B2 (ja) 2003-07-02 2003-07-02 ナノカーボン材料の製造方法、及び配線構造の製造方法

Publications (2)

Publication Number Publication Date
JP2005023408A JP2005023408A (ja) 2005-01-27
JP4133655B2 true JP4133655B2 (ja) 2008-08-13

Family

ID=33562613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003270361A Expired - Fee Related JP4133655B2 (ja) 2003-07-02 2003-07-02 ナノカーボン材料の製造方法、及び配線構造の製造方法

Country Status (4)

Country Link
US (1) US20060163077A1 (fr)
JP (1) JP4133655B2 (fr)
CA (1) CA2530976A1 (fr)
WO (1) WO2005003409A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4625955B2 (ja) * 2005-08-23 2011-02-02 国立大学法人電気通信大学 カーボンチューブ及びカーボンチューブの製造方法
TWI363367B (en) * 2007-12-26 2012-05-01 Tatung Co Composite field emission source and method of fabricating the same
JPWO2011111791A1 (ja) * 2010-03-11 2013-06-27 国立大学法人北海道大学 カーボンナノチューブの製造方法
US9075148B2 (en) * 2011-03-22 2015-07-07 Savannah River Nuclear Solutions, Llc Nano structural anodes for radiation detectors
CN104591855B (zh) * 2013-10-31 2017-07-25 刘广安 制备用于肥料的纳米碳粉的方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627647A (en) * 1969-05-19 1971-12-14 Cogar Corp Fabrication method for semiconductor devices
JPH10167714A (ja) * 1996-12-16 1998-06-23 Osaka Gas Co Ltd 炭素材料の製法
JP3713561B2 (ja) * 2001-06-26 2005-11-09 独立行政法人科学技術振興機構 有機液体による高配向整列カーボンナノチューブの合成方法及びその合成装置
JP2003115259A (ja) * 2001-10-03 2003-04-18 Sony Corp 電子放出装置及びその製造方法、冷陰極電界電子放出素子及びその製造方法、冷陰極電界電子放出表示装置及びその製造方法、並びに、薄膜のエッチング方法
US7351313B2 (en) * 2002-03-08 2008-04-01 National Institute Of Information And Communications Technology, Incorporated Administrative Agency Production device and production method for conductive nano-wire
JP3877302B2 (ja) * 2002-06-24 2007-02-07 本田技研工業株式会社 カーボンナノチューブの形成方法
JP4338948B2 (ja) * 2002-08-01 2009-10-07 株式会社半導体エネルギー研究所 カーボンナノチューブ半導体素子の作製方法

Also Published As

Publication number Publication date
CA2530976A1 (fr) 2005-01-13
WO2005003409A1 (fr) 2005-01-13
US20060163077A1 (en) 2006-07-27
JP2005023408A (ja) 2005-01-27

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