WO2012098761A1 - Rail vehicle system - Google Patents

Rail vehicle system Download PDF

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Publication number
WO2012098761A1
WO2012098761A1 PCT/JP2011/076371 JP2011076371W WO2012098761A1 WO 2012098761 A1 WO2012098761 A1 WO 2012098761A1 JP 2011076371 W JP2011076371 W JP 2011076371W WO 2012098761 A1 WO2012098761 A1 WO 2012098761A1
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WIPO (PCT)
Prior art keywords
traveling
track
carriage
mark
cart
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Application number
PCT/JP2011/076371
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French (fr)
Japanese (ja)
Inventor
深谷師康
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村田機械株式会社
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Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2012098761A1 publication Critical patent/WO2012098761A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles

Definitions

  • the present invention relates to a tracked cart system, and more particularly to a tracked cart system that transports a transported object such as a container containing various substrates for manufacturing semiconductor devices along the track.
  • a suspended cart that travels on a ceiling
  • this suspension type carriage transports a transported object such as a FOUP (Front Opening Unified Pod) by traveling on a track laid on the ceiling.
  • a technique has been proposed in which an information recording medium in which position information, control information, and the like are recorded is arranged at a predetermined position on the track, and the various types of information are read by the cart traveling on the track.
  • Patent Document 1 discloses a technique in which a barcode is disposed at a predetermined position on a track, and a barcode reader is provided on a tracked moving body that travels on the track.
  • the barcode reading operation is performed, for example, when a mark indicating the presence of a barcode is detected.
  • chattering may occur in the sensor for detecting the mark, and accurate detection may not be performed. That is, the technique according to Patent Document 1 described above has a technical problem that information cannot be reliably read depending on the condition of the arrangement position of the information recording medium.
  • the present invention has been made in view of the above-described problems, for example, and an object thereof is to provide a tracked cart system that can reliably detect marks arranged on a track.
  • the tracked cart system of the present invention includes a track laid on the ceiling or in the vicinity of the ceiling, and a cart that travels along the track.
  • the track has a running surface portion on both sides of the lower portion, and has a gap between the running surface portions.
  • the cart is provided on any one of a traveling unit that travels on the traveling surface portion of the track, a cart body that is suspended from the traveling unit using the gap, and the traveling unit and the cart body.
  • a detecting means for irradiating light and detecting reflected light, and a reflecting means provided on either one of the traveling part and the carriage main body part for reflecting the light emitted from the detecting means to the detecting means
  • the track has a mark portion that protrudes from the traveling surface portion toward the gap at a predetermined position of the traveling surface portion and can shield an optical path between the detecting means and the reflecting means.
  • the tracked trolley system of the present invention includes a track laid on or near the ceiling and a cart that is supported and guided by the track.
  • the track according to the present invention is particularly configured to have a traveling surface portion on both sides of the lower portion and a gap between the traveling surface portions.
  • the cart according to the present invention has a traveling portion that travels on the traveling surface portion of the track.
  • the traveling unit travels, for example, when a traveling roller rotates on the traveling surface unit.
  • a carriage main body that is suspended by using a gap between the tracks is attached to the traveling unit.
  • the carriage main body is configured to be able to load a conveyed object such as a FOUP or a reticle.
  • the carriage main body is configured to be able to transport the object to be transported as the traveling section travels along the track.
  • the cart according to the present invention further includes detection means provided in one of the traveling part and the carriage main body part, and reflection means provided in either one of the traveling part and the carriage main body part.
  • the detecting means is provided in the traveling part
  • the reflecting means is provided in the cart body part.
  • the detection means is provided in the cart main body
  • the reflection means is provided in the traveling part.
  • Detecting means detects a mark portion to be described later by irradiating light and detecting reflected light.
  • the reflection means reflects the light emitted from the detection means to the detection means.
  • the reflecting means is constituted by, for example, a metallic plate member having a high reflectance.
  • the reflection means may not be made of metal as long as it is a member having a high reflectance.
  • the structure which affixes a reflective tape on resin-made boards may be sufficient.
  • the detection means and the reflection means are provided on each of the traveling unit and the carriage main body so as to face each other with a gap between the tracks. For this reason, if there is nothing that blocks the optical path between the detection means and the reflection means, the detection means continues to detect the light reflected by the reflection means.
  • the orbit according to the present invention is provided with a mark portion capable of shielding the optical path between the detecting means and the reflecting means.
  • the mark portion protrudes from the traveling surface portion toward the gap at a predetermined position of the traveling surface portion.
  • the mark part may be directly attached to the traveling surface part, or may be attached to a member attached to the traveling surface part (for example, a guide wire plate for supporting the guide wire).
  • the mark part is comprised by the member with a low reflectance compared with the reflection means mentioned above. For this reason, at a predetermined position where the mark portion is provided, the light emitted from the detection means does not enter the reflection means, and as a result, the reflected light is not detected by the detection means.
  • the detection means detects the presence of the mark portion when light is not detected in this way. That is, it is detected that the position where the carriage is traveling is a predetermined position.
  • the “predetermined position” of the present invention is set as a position where the traveling position should be detected by the carriage. Specifically, the “predetermined position” is set so as to correspond to a position where the traveling of the carriage is stopped. A plurality of “predetermined positions” are typically set on the trajectory, and as many mark portions are arranged.
  • the detection means and the reflection means are provided in each of the traveling part and the carriage main body part. Therefore, the mark portion can be detected without being affected by the seam in the orbit. That is, the mark portion can be reliably detected regardless of the state of the arrangement position of the mark portion.
  • the cart is provided in one of the traveling unit and the cart body unit, and performs a reading operation using the detection of the mark unit by the detection unit as a trigger.
  • the track further includes an information reading medium, and the track further includes an information recording medium that protrudes toward the gap from a running surface portion in the vicinity of the mark portion to a position where the information reading device can read. Yes.
  • the information reading means is provided in either the traveling unit or the cart main body of the cart.
  • the information reading means performs a reading operation using the detection of the mark portion by the detecting means as a trigger.
  • the track is provided with an information recording medium on which information readable by the information reading means is recorded.
  • the information recording medium is provided so as to protrude toward the gap from the traveling surface portion in the vicinity of the mark portion to a position where the information reading means can read.
  • Specific examples of the information recording medium and the information reading means include a barcode and a barcode reader for reading the barcode.
  • the traveling position of the carriage can be reliably detected with high accuracy.
  • the cart when the cart reads the information recorded on the information recording medium by the information reading device, the cart controls the cart to run in a predetermined running pattern. It has further.
  • the carriage when the information recorded on the information recording medium is read by the information reading means provided on the carriage, the carriage is controlled to run in a predetermined running pattern. That is, the cart that has read the information travels according to a preset travel pattern.
  • the predetermined traveling pattern includes, for example, a traveling stop or a transfer operation after stopping.
  • traveling in a predetermined traveling pattern is realized, so that positioning abnormality or the like hardly occurs, and the carriage is accurately traveled to the target position and stopped. Can do.
  • FIG. 1 is a top view showing the overall configuration of the tracked cart system according to the embodiment.
  • the tracked cart system includes a track 100, a cart 200, and a controller 300.
  • the tracked cart system includes the track 100, the cart 200, and the controller 300.
  • the track 100 is laid on the ceiling, for example.
  • the track 100 is made of a metal such as aluminum or stainless steel.
  • a plurality of carriages 200 are suspended on the track 100.
  • the carriage 200 travels along the track 100 to transport the FOUP that is a transported object.
  • the carriage 200 has an on-board controller 205.
  • the on-board controller 205 receives a conveyance command from the controller 300 and controls the traveling of the carriage 200.
  • the on-board controller 205 not only controls the traveling of the carriage 200 but also has a function of comprehensively controlling each device provided on the carriage 200.
  • the controller 300 is configured to include, for example, an arithmetic circuit and a memory.
  • the controller 300 is configured to give a conveyance command to the carriage 200 via the on-vehicle controller 205.
  • a shelf for example, a buffer or a port for temporarily storing the FOUP and a semiconductor manufacturing apparatus are provided at a predetermined position along the track 100. .
  • FIG. 2 is a front view showing the configuration of the carriage.
  • the carriage 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, an elevating unit 235, an elevating belt 240, and a gripping unit 250.
  • the carriage 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, an elevating unit 235, an elevating belt 240, and a gripping unit 250.
  • illustration of a mark sensor, a barcode reader, etc., which will be described later, is omitted.
  • the traveling roller 215 is rolled.
  • the driving force is generated by, for example, a linear motor.
  • the carriage 200 travels along the track 100.
  • a main body 220 that is an example of the “trolley main body” of the present invention is attached to the lower surface of the traveling unit 210. In other words, the main body 220 is suspended from the traveling unit 210.
  • the moving part 230 is attached to the main body part 220.
  • the moving unit 230 is movable to the side of the track 100 (that is, in the horizontal direction in the drawing).
  • An elevating unit 235 is attached to the lower surface of the moving unit 230.
  • a holding part 250 for holding the FOUP is attached to the lower surface of the elevating part 235 by an elevating belt 240.
  • the gripping part 250 can move up and down with respect to the main body part 220 by unwinding or winding up the lifting belt 240.
  • FIGS. 3 and 4 are perspective views showing a method for transferring the FOUP of the cart according to the embodiment.
  • FIG. 3 shows an example in which the carriage 200 transfers the FOUP 400 on the port 510 located directly below the track 100.
  • the cart 200 first travels on the track 100 and stops above the FOUP 400 installed on the port 510.
  • the elevating belt 240 is wound up, and the grip portion 250 and the gripped FOUP 400 are raised to the position of the main body portion 220. Then, again, the carriage 200 travels on the track 100, and the FOUP 400 is conveyed.
  • FIG. 4 shows an example in which the FOUP 400 is installed in a side buffer (temporary storage shelf) 520 at a position deviated to the side of the track 100.
  • the elevating belt 240 is unwound by the elevating unit 235, and the gripping unit 250 is lowered to the position of the FOUP 400.
  • the FOUP 400 can be laterally transferred from the track 100.
  • FIG. 5 is a cross-sectional view when the periphery of the mark sensor 610 is viewed in the traveling direction of the carriage.
  • FIG. 6 is a cross-sectional view of the periphery of the mark sensor 610 as viewed from above the carriage.
  • FIG. 7 is a cross-sectional view of the periphery of the mark sensor 610 when viewed from the side of the carriage.
  • the cart 200 is provided with a mark sensor 610 at a position facing the traveling unit 210 in the main body 220.
  • the mark sensor 610 is an example of the “detecting means” in the present invention.
  • the mark sensor 610 detects the presence of a mark portion to be described later by irradiating light and detecting reflected light.
  • the mark sensor 610 is connected to a mark sensor amplifier 615 as shown in FIG.
  • the traveling unit 210 is provided with a reflecting plate 620 at a position facing the mark sensor 610.
  • the reflection plate 620 is an example of the “reflection means” in the present invention.
  • the reflection plate 620 includes a metal having a high reflectance such as aluminum or stainless steel, for example.
  • the reflecting plate 620 may not be made of metal as long as it is a member having a high reflectance.
  • the reflection plate 620 may have a configuration in which a reflection tape is attached to a resin plate.
  • the reflector 620 reflects the light emitted from the mark sensor 610 to the mark sensor 610. Therefore, if there is nothing that blocks the optical path between the mark sensor 610 and the reflection plate 620, the mark sensor 610 continues to detect the light reflected by the reflection plate 620.
  • a mark portion 630 is provided at a predetermined position of the track 100 according to the present embodiment.
  • the mark portion 630 is provided at a predetermined position of the track 100 so as to protrude from the traveling surface portion on which the traveling roller 215 of the traveling portion 210 travels toward the mark sensor 610 and the reflection plate 620.
  • the mark unit 630 includes a mark sensor 610 and a reflection from a traveling surface portion (more precisely, a guide wire plate 635 attached to the lower surface side of the traveling surface portion) on which the traveling roller 215 of the traveling portion 210 travels. It protrudes so as to block the optical path between the plates 620.
  • the mark part 630 is configured by a member having a lower reflectance than the above-described reflector 620.
  • the mark sensor 610 detects the presence of the mark portion 630 when the reflected light is not detected in this way.
  • the mark portion 630 is attached to a guide wire plate 635 that supports the guide wire.
  • the guide wire is provided near the branch point and the junction of the track 100 and is used when the carriages 200 communicate with each other.
  • the carriage 200 that has entered the area where the guide line is provided recognizes the presence of another carriage by communicating via the guide line. Thereby, conveyance efficiency can be improved.
  • a guide wire coil 660 for communicating with the guide wire is provided above the main body 220 of the carriage 200.
  • the guide wire coil 660 is attached to the main body part 220 via the attachment part 670.
  • the guide wire coils 660 are provided on the left and right sides of the bogie shaft 281 as shown in FIG. Further, the guide wire coils 660 are provided on the left and right sides of the bogie shaft 282. That is, four induction wire coils 660 are provided around the bogie shafts 281 and 282.
  • the guide wire coil 660 is provided so as to be adjacent to both the left and right sides of the connecting portion 800.
  • the guide wire and the guide wire coil 660 are arranged at positions that do not deviate from each other even during curve driving. At this time, if the guide wire coil 660 is installed closer to the center of the bogie shafts 281 and 282, the range swung during the curve traveling becomes smaller. In addition, since the size of the guide wire coil 660 has a predetermined limit, it is preferable that the range swung around the curve traveling flow is small. Therefore, the induction wire coil 660 is preferably installed closer to the centers of the bogie shafts 281 and 282.
  • the guide wire plate 635 is provided so as to match the installation position of the guide wire coil 660 and the position in the width direction of the guide wire coil 660 (that is, the direction intersecting the extending direction of the track 100). Specifically, as shown in FIG. 5, a part of the track 100 is provided so as to protrude from the lower side to the gap side.
  • the mark part 630 mentioned above is affixed on the lower surface side of the protrusion part of such a guide wire plate 635.
  • a plate having substantially the same shape as that of the guide wire plate 635 may be provided at a location where the guide wire plate 635 does not exist (that is, a location where there is no branch point or merging point and no guide wire needs to be provided). . In this way, the mark portion 630 can be suitably attached at any location on the track 100.
  • the cart 200 according to the present embodiment is further provided with a barcode reader 640 in the vicinity of the mark sensor 610 in the main body 220.
  • the barcode reader 640 is an example of the “information reading unit” in the present invention. Bar code reader 640 performs a reading operation when mark portion 630 is detected by mark sensor 610. As a result, the barcode 650 provided adjacent to the mark portion 630 on the guide wire plate 635 is read.
  • Bar code 650 is an example of the “information recording medium” of the present invention. For example, detailed position information on the track 100 is recorded in the barcode 650. Further, as can be seen from FIGS. 6 and 7, the barcode 650 is provided on the front side as viewed in the traveling direction of the carriage 200 compared to the mark portion 630. As a result, the barcode 650 is detected later than the mark portion 630, and the reading operation corresponding to the detection of the mark portion 630 can be suitably performed.
  • two traveling parts 210 are attached to the main body part 220 of the carriage 200 according to the present embodiment via bogie shafts 281 and 282 and a connecting part 800.
  • the connecting part 800 connects the bogie shafts 281 and 282 and the main body part 220 so as to be relatively rotatable.
  • the connecting portion 800 forms a bogie structure in which the pair of traveling portions 210 can rotate with respect to the main body portion 220.
  • the positions of the mark sensor 610 and the reflection plate 620 may be interchanged. That is, the mark sensor 610 may be provided in the traveling unit 210, and the reflection plate may be provided in the main body unit 220. Further, a barcode reader 640 may be provided in the traveling unit 210. In this case, the barcode 650 is arranged to face the traveling unit side.
  • FIG. 8 is a flowchart showing the operation of the tracked cart system.
  • step S01 when the cart 200 travels, first, irradiation of light by the mark sensor 610 is started (step S01).
  • step S02: NO when the mark sensor 610 does not detect reflected light (step S02: NO), there is something that blocks the optical path between the mark sensor 610 and the reflecting plate 620. Thereby, the mark part 630 is detected (step S03).
  • step S02: YES when there is no mark portion 630 that blocks the optical path between the mark sensor 610 and the reflection plate 620 (step S02: YES), the mark sensor 610 continues to detect the light reflected by the reflection plate 620. That is, when the reflected light is detected, the mark part 630 is not detected.
  • the barcode reader 640 When the mark unit 630 is detected, the barcode reader 640 performs the barcode 650 reading operation (step S04). For example, detailed position information in the track 100 is stored in the barcode 650. Information read by the barcode reader 640 is transmitted to the on-board controller 205 (see FIG. 1). The on-board controller stops the transport vehicle based on the read position information (step S05) and controls to perform the transfer operation (step S06).
  • the on-board controller 205 is an example of the “travel control unit” in the present invention.
  • FIG. 9 is a cross-sectional view illustrating a configuration of the tracked cart system according to the comparative example.
  • the mark sensor 610 is provided so as to face the track 100. That is, the mark sensor 610 uses the surface of the track 100 or the surface of the guide wire plate 635 to which the mark portion 630 is attached as the reflecting plate 620. In this case, chattering may occur at the joint of the track 100 or at a position where various members exist on the track 100. Therefore, the mark portion 630 is erroneously detected. Further, if the shape of the track 100 changes, it is required to change the position of the mark sensor 610 and the light irradiation direction.
  • the mark sensor 610 is provided in the cart main body 220 and the reflector 620 is provided in the traveling unit 210. Therefore, the mark portion 630 can be detected without being affected by the seam or the like in the track 100. Therefore, the mark portion 630 can be detected with high accuracy, and the reading operation of the barcode 650 can be realized with certainty.
  • the information recording medium arranged on the track can be read at a suitable timing. It is. Therefore, it is possible to prevent an abnormality from occurring in the traveling control of the transport vehicle.
  • the present invention can be widely applied to a tracked bogie system.

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  • Engineering & Computer Science (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

In this rail vehicle system, the objective is to reliably detect a mark positioned upon a rail. The rail vehicle system is provided with a rail (100) which is laid upon a ceiling or a ceiling vicinity, and a vehicle (200) which travels along the rail. The vehicle has a travel portion (210) for traveling upon a travel surface portion of the rail, a vehicle main body portion (220) which is suspended from the travel portion using a gap of the rail, detection means (610) which is provided upon either the travel portion or the vehicle main body portion, and reflection means (620) which is provided upon the other of either the travel portion or the vehicle main body portion and reflects light emitted from the detection means back to the detection means. The rail has a mark unit (630). The mark unit (630) protrudes from the travel surface portion to the gap side at a predetermined position of the travel surface portion so as to be capable of blocking the optical path between the detection means and the reflection means.

Description

有軌道台車システムTracked cart system
　本発明は、有軌道台車システム、特に、半導体装置製造用の各種基板等が収容された容器などの被搬送物を軌道に沿って搬送する有軌道台車システムに関する。 The present invention relates to a tracked cart system, and more particularly to a tracked cart system that transports a transported object such as a container containing various substrates for manufacturing semiconductor devices along the track.
　従来から、有軌道台車システムでは、例えば、天井を走行する懸垂型の台車（所謂、ＯＨＴ：Overhead Hoist Transfer）が、用いられている。詳細には、この懸垂型の台車は、天井に敷設された軌道を走行することで、ＦＯＵＰ(Front Opening Unified Pod)等の被搬送物を搬送する。
　このような有軌道台車システムでは、軌道の所定位置に位置情報や制御情報等を記録した情報記録媒体を配置し、軌道を走行する台車にこれら各種の情報を読み込ませるという技術が、提案されている。例えば、特許文献１では、軌道の所定位置にバーコードを配置し、軌道を走行する有軌道移動体にバーコードリーダを設けるという技術が開示されている。 Conventionally, in a tracked cart system, for example, a suspended cart (so-called OHT: Overhead Hoist Transfer) that travels on a ceiling is used. More specifically, this suspension type carriage transports a transported object such as a FOUP (Front Opening Unified Pod) by traveling on a track laid on the ceiling.
In such a tracked cart system, a technique has been proposed in which an information recording medium in which position information, control information, and the like are recorded is arranged at a predetermined position on the track, and the various types of information are read by the cart traveling on the track. Yes. For example, Patent Document 1 discloses a technique in which a barcode is disposed at a predetermined position on a track, and a barcode reader is provided on a tracked moving body that travels on the track.
特開２００１－１６６８２５号公報JP 2001-166825 A
　バーコードの読取動作は、例えばバーコードの存在を示すマークを検出した際に行われる。しかしながら、バーコードが軌道の継目や他の部材が介在する位置に配置されている場合には、マークを検出するセンサにおいてチャタリングが発生し、正確な検出が行えなくなるおそれがある。即ち、上述した特許文献１に係る技術では、情報記録媒体の配置位置の条件によっては、情報を確実に読み取れない事態が生じ得るという技術的問題点がある。 The barcode reading operation is performed, for example, when a mark indicating the presence of a barcode is detected. However, when the bar code is arranged at a position where the joint of the track or another member is interposed, chattering may occur in the sensor for detecting the mark, and accurate detection may not be performed. That is, the technique according to Patent Document 1 described above has a technical problem that information cannot be reliably read depending on the condition of the arrangement position of the information recording medium.
　本発明は、例えば上述した問題点に鑑みなされたものであり、軌道に配置されたマークを確実に検出することが可能な有軌道台車システムを提供することを課題とする。 The present invention has been made in view of the above-described problems, for example, and an object thereof is to provide a tracked cart system that can reliably detect marks arranged on a track.
　本発明の有軌道台車システムは、天井又は前記天井の近傍位置に敷設された軌道と、前記軌道に沿って走行する台車とを、備えている。前記軌道は、下部両側に走行面部を有し、前記走行面部間に間隙を有する。前記台車は、前記軌道の前記走行面部上を走行する走行部と、前記走行部から前記間隙を利用して懸垂される台車本体部と、前記走行部及び前記台車本体部のいずれか一方に設けられ、光を照射し且つ反射光を検出する検出手段と、前記走行部及び前記台車本体部のいずれか他方に設けられ、前記検出手段から照射された光を前記検出手段へと反射する反射手段とを、有している。前記軌道は、前記走行面部の所定位置において前記走行面部から前記間隙側に突出し、前記検出手段と前記反射手段との間の光路を遮蔽可能なマーク部を、有している。 The tracked cart system of the present invention includes a track laid on the ceiling or in the vicinity of the ceiling, and a cart that travels along the track. The track has a running surface portion on both sides of the lower portion, and has a gap between the running surface portions. The cart is provided on any one of a traveling unit that travels on the traveling surface portion of the track, a cart body that is suspended from the traveling unit using the gap, and the traveling unit and the cart body. A detecting means for irradiating light and detecting reflected light, and a reflecting means provided on either one of the traveling part and the carriage main body part for reflecting the light emitted from the detecting means to the detecting means And have. The track has a mark portion that protrudes from the traveling surface portion toward the gap at a predetermined position of the traveling surface portion and can shield an optical path between the detecting means and the reflecting means.
　本発明の有軌道台車システムは、天井又は天井近傍に敷設された軌道と、軌道に支持され案内されて走行する台車とを、備えている。尚、本発明に係る軌道は、特に、下部両側に走行面部を有すると共に、走行面部間に間隙を有するように、構成されている。 The tracked trolley system of the present invention includes a track laid on or near the ceiling and a cart that is supported and guided by the track. The track according to the present invention is particularly configured to have a traveling surface portion on both sides of the lower portion and a gap between the traveling surface portions.
　本発明に係る台車は、軌道の走行面部上を走行する走行部を有している。走行部は、例えば、走行ローラが走行面部上で回転することによって走行する。走行部には、軌道の間隙を利用して懸垂される台車本体部が、取り付けられている。台車本体部は、例えばＦＯＵＰやレチクル等の被搬送物を積載可能に構成されている。台車本体部は、走行部が軌道に沿って走行することで、被搬送物を搬送可能に構成されている。 The cart according to the present invention has a traveling portion that travels on the traveling surface portion of the track. The traveling unit travels, for example, when a traveling roller rotates on the traveling surface unit. A carriage main body that is suspended by using a gap between the tracks is attached to the traveling unit. The carriage main body is configured to be able to load a conveyed object such as a FOUP or a reticle. The carriage main body is configured to be able to transport the object to be transported as the traveling section travels along the track.
　本発明に係る台車は、走行部及び台車本体部のいずれか一方に設けられた検出手段と、走行部及び台車本体部のいずれか他方に設けられた反射手段とを、さらに有している。即ち、走行部に検出手段が設けられた場合は、台車本体部に反射手段が設けられる。一方で、台車本体部に検出手段が設けられた場合は、走行部に反射手段が設けられる。 The cart according to the present invention further includes detection means provided in one of the traveling part and the carriage main body part, and reflection means provided in either one of the traveling part and the carriage main body part. In other words, when the detecting means is provided in the traveling part, the reflecting means is provided in the cart body part. On the other hand, when the detection means is provided in the cart main body, the reflection means is provided in the traveling part.
　検出手段は、光を照射すると共に、反射光を検出することで、後述するマーク部を検知する。一方で、反射手段は、検出手段から照射された光を検出手段に反射する。反射手段は、例えば、反射率の高い金属性の板部材によって構成される。但し、反射手段は、高い反射率を有する部材であれば、金属製でなくてもよい。例えば、樹脂製の板に反射テープを貼付けるような構成でもよい。検出手段及び反射手段は、走行部及び台車本体部の各々に、軌道の間隙を介して互いに対向するように設けられている。このため、検出手段と反射手段との間に光路を遮るようなものが存在しなければ、検出手段は反射手段によって反射された光を検出し続ける。 Detecting means detects a mark portion to be described later by irradiating light and detecting reflected light. On the other hand, the reflection means reflects the light emitted from the detection means to the detection means. The reflecting means is constituted by, for example, a metallic plate member having a high reflectance. However, the reflection means may not be made of metal as long as it is a member having a high reflectance. For example, the structure which affixes a reflective tape on resin-made boards may be sufficient. The detection means and the reflection means are provided on each of the traveling unit and the carriage main body so as to face each other with a gap between the tracks. For this reason, if there is nothing that blocks the optical path between the detection means and the reflection means, the detection means continues to detect the light reflected by the reflection means.
　ここで、特に、本発明に係る軌道には、検出手段と前記反射手段との間の光路を遮蔽可能なマーク部が、設けられている。マーク部は、走行面部の所定位置において、走行面部から間隙側に突出している。マーク部は、走行面部に直接的に取付けられていてもよいし、走行面部に取付けられた部材（例えば、誘導線を支持するための誘導線プレート）に取付けられていてもよい。マーク部は、上述した反射手段と比べて反射率の低い部材によって構成されている。このため、マーク部が設けられる所定位置では、検出手段から照射された光が反射手段には入射せず、結果として検出手段では反射した光が検出されない。検出手段は、このように光が検出されない場合に、マーク部の存在を検知する。即ち、台車が走行している位置が、所定位置であることを検知する。 Here, in particular, the orbit according to the present invention is provided with a mark portion capable of shielding the optical path between the detecting means and the reflecting means. The mark portion protrudes from the traveling surface portion toward the gap at a predetermined position of the traveling surface portion. The mark part may be directly attached to the traveling surface part, or may be attached to a member attached to the traveling surface part (for example, a guide wire plate for supporting the guide wire). The mark part is comprised by the member with a low reflectance compared with the reflection means mentioned above. For this reason, at a predetermined position where the mark portion is provided, the light emitted from the detection means does not enter the reflection means, and as a result, the reflected light is not detected by the detection means. The detection means detects the presence of the mark portion when light is not detected in this way. That is, it is detected that the position where the carriage is traveling is a predetermined position.
　尚、本発明の「所定位置」とは、台車に対して走行位置を検出させるべき位置として設定される。具体的には、「所定位置」とは、台車の走行を停止させる位置等に対応するように、設定される。「所定位置」は、典型的には軌道上に複数設定され、その数だけマーク部が配置される。 The “predetermined position” of the present invention is set as a position where the traveling position should be detected by the carriage. Specifically, the “predetermined position” is set so as to correspond to a position where the traveling of the carriage is stopped. A plurality of “predetermined positions” are typically set on the trajectory, and as many mark portions are arranged.
　上述した反射手段には、反射率の高いアルミやステンレス等で形成された軌道自体を利用する（即ち、検出手段からの光を軌道に向けて照射する）ことも考えられる。しかしながら、この場合には、軌道の継目や軌道上に各種部材が存在すると、この各種部材の存在位置においてチャタリングが発生し、誤検出の原因となってしまう。また、軌道の形状が変化してしまうと、検出手段の位置を変更する必要がある。 For the reflection means described above, it is conceivable to use a track itself made of aluminum, stainless steel or the like having a high reflectance (that is, irradiate light from the detection means toward the track). However, in this case, if various members exist on the joint of the track or on the track, chattering occurs at the position where the various members exist, which may cause erroneous detection. Further, if the shape of the trajectory changes, it is necessary to change the position of the detection means.
　これに対して、本発明では、上述したように、検出手段及び反射手段が、走行部及び台車本体部の各々に設けられる。従って、軌道における継目等の影響を受けることなく、マーク部を検出することができる。即ち、マーク部の配置位置の状態によらずに、確実にマーク部を検出することができる。 On the other hand, in the present invention, as described above, the detection means and the reflection means are provided in each of the traveling part and the carriage main body part. Therefore, the mark portion can be detected without being affected by the seam in the orbit. That is, the mark portion can be reliably detected regardless of the state of the arrangement position of the mark portion.
　本発明の有軌道台車システムの一態様では、前記台車は、前記走行部及び前記台車本体部のいずれか一方に設けられ、且つ、前記検出手段による前記マーク部の検出をトリガとして読取動作を行う情報読取手段を更に有しており、前記軌道は、前記マーク部の近傍位置における走行面部から、前記情報読取手段が読取可能な位置まで前記間隙側に突出する情報記録媒体を、さらに有している。 In one aspect of the tracked cart system according to the present invention, the cart is provided in one of the traveling unit and the cart body unit, and performs a reading operation using the detection of the mark unit by the detection unit as a trigger. The track further includes an information reading medium, and the track further includes an information recording medium that protrudes toward the gap from a running surface portion in the vicinity of the mark portion to a position where the information reading device can read. Yes.
　この態様によれば、台車における走行部及び台車本体部のいずれか一方に、情報読取手段が設けられている。情報読取手段は、検出手段によるマーク部の検出をトリガとして、読取動作を行う。一方、軌道には、情報読取手段によって読取可能な情報を記録した情報記録媒体が、設けられている。情報記録媒体は、マーク部の近傍位置における走行面部から、情報読取手段が読取可能な位置まで、間隙側に突出するように、設けられている。尚、情報記録媒体及び情報読取手段の具体例としては、例えばバーコード及びそれを読み取るバーコードリーダ等が、挙げられる。 According to this aspect, the information reading means is provided in either the traveling unit or the cart main body of the cart. The information reading means performs a reading operation using the detection of the mark portion by the detecting means as a trigger. On the other hand, the track is provided with an information recording medium on which information readable by the information reading means is recorded. The information recording medium is provided so as to protrude toward the gap from the traveling surface portion in the vicinity of the mark portion to a position where the information reading means can read. Specific examples of the information recording medium and the information reading means include a barcode and a barcode reader for reading the barcode.
　上述した構成によれば、検出手段によってマーク部が検出された際に、情報読取手段によって情報記録媒体に記録された情報が、読み取られる。従って、適切なタイミングで情報の読取動作を行うことが可能である。尚、情報記録媒体には、例えば詳細な位置情報等が記録されている。この場合、台車の走行位置を高い精度で確実に検出することが可能である。 According to the configuration described above, when the mark portion is detected by the detection means, the information recorded on the information recording medium is read by the information reading means. Therefore, it is possible to perform an information reading operation at an appropriate timing. For example, detailed position information is recorded on the information recording medium. In this case, the traveling position of the carriage can be reliably detected with high accuracy.
　本発明の有軌道台車システムの他の態様では、前記台車は、前記情報読取手段によって前記情報記録媒体に記録された情報を読み取った場合に、前記台車を所定の走行パターンで走行させる走行制御手段を、さらに有している。 In another aspect of the tracked cart system according to the present invention, when the cart reads the information recorded on the information recording medium by the information reading device, the cart controls the cart to run in a predetermined running pattern. It has further.
　この態様によれば、台車に設けられた情報読取手段によって、情報記録媒体に記録された情報が読み取られると、台車は所定の走行パターンで走行するように制御される。即ち、情報を読み取った台車は、予め設定された走行パターンに従って走行する。 According to this aspect, when the information recorded on the information recording medium is read by the information reading means provided on the carriage, the carriage is controlled to run in a predetermined running pattern. That is, the cart that has read the information travels according to a preset travel pattern.
　所定の走行パターンとしては、例えば走行停止や停止した後での移載動作等が、含まれている。本態様では、特に、所定の情報を読み取った後に、所定の走行パターンでの走行が実現されるため、位置決め異常等が発生することが殆どなく、台車を目標位置まで的確に走行させ停止させることができる。 The predetermined traveling pattern includes, for example, a traveling stop or a transfer operation after stopping. In this aspect, in particular, after predetermined information is read, traveling in a predetermined traveling pattern is realized, so that positioning abnormality or the like hardly occurs, and the carriage is accurately traveled to the target position and stopped. Can do.
　本発明の作用及び他の効果は、次に説明する発明を実施するための形態から、明らかにされる。 The operation and other effects of the present invention will be clarified from embodiments for carrying out the invention described below.
　本発明では、軌道に配置されたマークを確実に検出することが可能な有軌道台車システムを提供することができる。 In the present invention, it is possible to provide a tracked cart system that can reliably detect marks arranged on a track.
有軌道台車システムの全体構成を示す上面図である。It is a top view which shows the whole structure of a tracked bogie system. 台車の構成を示す正面図である。It is a front view which shows the structure of a trolley | bogie. 台車の移載動作を示す斜視図である。It is a perspective view which shows the transfer operation | movement of a trolley | bogie. 台車の横移載動作を示す斜視図である。It is a perspective view which shows the horizontal transfer operation | movement of a trolley | bogie. マークセンサ周辺を台車の進行方向で見た場合の断面図である。It is sectional drawing at the time of seeing a mark sensor periphery in the advancing direction of a trolley | bogie. マークセンサ周辺を台車の上方から見た場合の断面図である。It is sectional drawing at the time of seeing a mark sensor periphery from the upper direction of a trolley | bogie. マークセンサ周辺を台車の側方から見た場合の断面図である。It is sectional drawing at the time of seeing a mark sensor periphery from the side of a trolley | bogie. 有軌道台車システムの動作を示すフローチャートである。It is a flowchart which shows operation | movement of a tracked bogie system. 比較例に係る有軌道台車システムの構成を示す断面図である。It is sectional drawing which shows the structure of a tracked bogie system which concerns on a comparative example.
　以下では、本発明の実施形態について図を参照しつつ説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　先ず、本実施形態に係る有軌道台車システムの全体構成について、図１を参照して説明する。図１は、実施形態に係る有軌道台車システムの全体構成を示す上面図である。 First, the overall configuration of the tracked cart system according to the present embodiment will be described with reference to FIG. FIG. 1 is a top view showing the overall configuration of the tracked cart system according to the embodiment.
　図１において、本実施形態に係る有軌道台車システムは、軌道１００と、台車２００と、コントローラ３００とを、備えている。言い換えると、有軌道台車システムは、軌道１００と、台車２００と、コントローラ３００とから、構成されている。 1, the tracked cart system according to the present embodiment includes a track 100, a cart 200, and a controller 300. In other words, the tracked cart system includes the track 100, the cart 200, and the controller 300.
　軌道１００は、例えば天井に敷設されている。軌道１００は、アルミニウムやステンレス等の金属から、構成される。 The track 100 is laid on the ceiling, for example. The track 100 is made of a metal such as aluminum or stainless steel.
　軌道１００には、複数の台車２００が懸垂されている。台車２００は、軌道１００に沿って走行することで、被搬送物であるＦＯＵＰを搬送する。 A plurality of carriages 200 are suspended on the track 100. The carriage 200 travels along the track 100 to transport the FOUP that is a transported object.
　また、台車２００は、車上コントローラ２０５を有している。車上コントローラ２０５は、コントローラ３００から搬送指令を受け取り、台車２００の走行を制御する。尚、車上コントローラ２０５は、台車２００の走行を制御するだけでなく、台車２００に備えられた各機器を総括的に制御する機能も有している。 In addition, the carriage 200 has an on-board controller 205. The on-board controller 205 receives a conveyance command from the controller 300 and controls the traveling of the carriage 200. The on-board controller 205 not only controls the traveling of the carriage 200 but also has a function of comprehensively controlling each device provided on the carriage 200.
　コントローラ３００は、例えば演算回路やメモリ等を含むように構成されている。コントローラ３００は、車上コントローラ２０５を介して、台車２００に搬送指令を与えるように構成されている。 The controller 300 is configured to include, for example, an arithmetic circuit and a memory. The controller 300 is configured to give a conveyance command to the carriage 200 via the on-vehicle controller 205.
　尚、ここでの図示は省略しているが、軌道１００に沿った所定の位置には、ＦＯＵＰを一時的に保管する棚（例えば、バッファやポート等）及び半導体製造装置が、設けられている。 Although not shown here, a shelf (for example, a buffer or a port) for temporarily storing the FOUP and a semiconductor manufacturing apparatus are provided at a predetermined position along the track 100. .
　次に、台車２００のより具体的な構成について、図２を参照して説明する。図２は、台車の構成を示す正面図である。 Next, a more specific configuration of the carriage 200 will be described with reference to FIG. FIG. 2 is a front view showing the configuration of the carriage.
　図２において、台車２００は、走行部２１０、本体部２２０、移動部２３０、昇降部２３５、昇降ベルト２４０及び把持部２５０を備えている。言い換えると、台車２００は、走行部２１０、本体部２２０、移動部２３０、昇降部２３５、昇降ベルト２４０及び把持部２５０から、構成されている。尚、図２では、説明の便宜上、後述するマークセンサやバーコードリーダ等の図示を省略している。 In FIG. 2, the carriage 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, an elevating unit 235, an elevating belt 240, and a gripping unit 250. In other words, the carriage 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, an elevating unit 235, an elevating belt 240, and a gripping unit 250. In FIG. 2, for convenience of explanation, illustration of a mark sensor, a barcode reader, etc., which will be described later, is omitted.
　台車２００では、走行部２１０に推進力が発生すると、走行ローラ２１５が転動される。推進力は、例えばリニアモータ等によって発生させられる。これにより、台車２００は、軌道１００に沿って走行する。走行部２１０の下面には、本発明の「台車本体部」の一例である本体部２２０が、取り付けられている。言い換えると、走行部２１０には、本体部２２０が吊り下げられている。 In the cart 200, when a driving force is generated in the traveling unit 210, the traveling roller 215 is rolled. The driving force is generated by, for example, a linear motor. Thereby, the carriage 200 travels along the track 100. A main body 220 that is an example of the “trolley main body” of the present invention is attached to the lower surface of the traveling unit 210. In other words, the main body 220 is suspended from the traveling unit 210.
　本体部２２０には、移動部２３０が取り付けられている。移動部２３０は、軌道１００の側方（即ち、図における左右方向）に移動可能である。移動部２３０の下面には、昇降部２３５が取り付けられている。 The moving part 230 is attached to the main body part 220. The moving unit 230 is movable to the side of the track 100 (that is, in the horizontal direction in the drawing). An elevating unit 235 is attached to the lower surface of the moving unit 230.
　昇降部２３５の下面には、ＦＯＵＰを把持する把持部２５０が、昇降ベルト２４０によって取り付けられている。把持部２５０は、昇降ベルト２４０を巻き出す或いは巻き取ることで、本体部２２０に対して昇降可能である。 A holding part 250 for holding the FOUP is attached to the lower surface of the elevating part 235 by an elevating belt 240. The gripping part 250 can move up and down with respect to the main body part 220 by unwinding or winding up the lifting belt 240.
　次に、台車によるＦＯＵＰの移載方法について、図３及び図４を参照して説明する。図３及び図４は、実施形態に係る台車のＦＯＵＰの移載方法を示す斜視図である。 Next, a FOUP transfer method using a carriage will be described with reference to FIGS. 3 and 4 are perspective views showing a method for transferring the FOUP of the cart according to the embodiment.
　図３は、台車２００が、軌道１００の真下に位置するポート５１０上のＦＯＵＰ４００を、移載する場合の例である。この場合、先ず台車２００が軌道１００上を走行して、ポート５１０上に設置されたＦＯＵＰ４００の上方に、停止する。 FIG. 3 shows an example in which the carriage 200 transfers the FOUP 400 on the port 510 located directly below the track 100. In this case, the cart 200 first travels on the track 100 and stops above the FOUP 400 installed on the port 510.
　続いて、図３に示すように、昇降部２３５によって昇降ベルト２４０が巻き出されることで、把持部２５０がＦＯＵＰ４００の位置まで降下する。そして、把持部２５０とＦＯＵＰ４００との位置が微調整され、ＦＯＵＰ４００が把持される。 Subsequently, as shown in FIG. 3, when the elevating belt 240 is unwound by the elevating part 235, the gripping part 250 is lowered to the position of the FOUP 400. Then, the positions of the grip portion 250 and the FOUP 400 are finely adjusted, and the FOUP 400 is gripped.
　ＦＯＵＰ４００が把持されると、昇降ベルト２４０が巻き取られ、把持部２５０及び把持されたＦＯＵＰ４００が、本体部２２０の位置まで上昇する。そして、再び、台車２００が軌道１００上を走行して、ＦＯＵＰ４００が搬送される。 When the FOUP 400 is gripped, the elevating belt 240 is wound up, and the grip portion 250 and the gripped FOUP 400 are raised to the position of the main body portion 220. Then, again, the carriage 200 travels on the track 100, and the FOUP 400 is conveyed.
　図４は、ＦＯＵＰ４００が、軌道１００の側方にそれた位置にあるサイドバッファ（一時保管棚）５２０に設置されている場合の例である。この場合には、移動部２３０が軌道１００の側方に移動した後に、昇降部２３５によって昇降ベルト２４０が巻き出され、把持部２５０がＦＯＵＰ４００の位置まで降下する。このように動作することで、軌道１００からＦＯＵＰ４００の横移載を行うことが可能となる。 FIG. 4 shows an example in which the FOUP 400 is installed in a side buffer (temporary storage shelf) 520 at a position deviated to the side of the track 100. In this case, after the moving unit 230 moves to the side of the track 100, the elevating belt 240 is unwound by the elevating unit 235, and the gripping unit 250 is lowered to the position of the FOUP 400. By operating in this way, the FOUP 400 can be laterally transferred from the track 100.
　次に、台車２００における走行部２１０周辺の具体的な構成について、図５から図７を参照して詳細に説明する。図５は、マークセンサ６１０の周辺を、台車の進行方向に見た場合の断面図である。図６は、マークセンサ６１０の周辺を、台車の上方から見た場合の断面図である。図７は、マークセンサ６１０の周辺を、台車の側方から見た場合の断面図である。 Next, a specific configuration around the traveling unit 210 in the carriage 200 will be described in detail with reference to FIGS. FIG. 5 is a cross-sectional view when the periphery of the mark sensor 610 is viewed in the traveling direction of the carriage. FIG. 6 is a cross-sectional view of the periphery of the mark sensor 610 as viewed from above the carriage. FIG. 7 is a cross-sectional view of the periphery of the mark sensor 610 when viewed from the side of the carriage.
　図５から図７において、本実施形態に係る台車２００には、マークセンサ６１０が、本体部２２０における走行部２１０と対向する位置に、設けられている。マークセンサ６１０は、本発明の「検出手段」の一例である。マークセンサ６１０は、光を照射すると共に反射光を検出することによって、後述するマーク部の存在を検出する。マークセンサ６１０は、図６に示すように、マークセンサアンプ６１５に接続されている。 5 to 7, the cart 200 according to this embodiment is provided with a mark sensor 610 at a position facing the traveling unit 210 in the main body 220. The mark sensor 610 is an example of the “detecting means” in the present invention. The mark sensor 610 detects the presence of a mark portion to be described later by irradiating light and detecting reflected light. The mark sensor 610 is connected to a mark sensor amplifier 615 as shown in FIG.
　一方、走行部２１０には、マークセンサ６１０と対向する位置には、反射板６２０が設けられている。反射板６２０は、本発明の「反射手段」の一例である。反射板６２０は、例えば、アルミやステンレス等の反射率の高い金属を含んで構成されている。但し、反射板６２０は、高い反射率を有する部材であれば、金属製でなくともよい。反射板６２０は、例えば、樹脂製の板に反射テープを貼付けるような構成でもよい。反射板６２０は、マークセンサ６１０から照射された光を、マークセンサ６１０へと反射させる。よって、マークセンサ６１０及び反射板６２０間に光路を遮るようなものが存在しなければ、マークセンサ６１０は、反射板６２０によって反射された光を、検出し続ける。 On the other hand, the traveling unit 210 is provided with a reflecting plate 620 at a position facing the mark sensor 610. The reflection plate 620 is an example of the “reflection means” in the present invention. The reflection plate 620 includes a metal having a high reflectance such as aluminum or stainless steel, for example. However, the reflecting plate 620 may not be made of metal as long as it is a member having a high reflectance. For example, the reflection plate 620 may have a configuration in which a reflection tape is attached to a resin plate. The reflector 620 reflects the light emitted from the mark sensor 610 to the mark sensor 610. Therefore, if there is nothing that blocks the optical path between the mark sensor 610 and the reflection plate 620, the mark sensor 610 continues to detect the light reflected by the reflection plate 620.
　特に、本実施形態に係る軌道１００の所定位置には、マーク部６３０が設けられている。マーク部６３０は、走行部２１０の走行ローラ２１５が走行する走行面部から、マークセンサ６１０及び反射板６２０間に向けて、突出するように、軌道１００の所定位置に設けられている。より具体的には、マーク部６３０は、走行部２１０の走行ローラ２１５が走行する走行面部（より正確には、走行面部の下面側に取付けられた誘導線プレート６３５）から、マークセンサ６１０及び反射板６２０間の光路を遮るように突出している。マーク部６３０は、上述した反射板６２０と比べて反射率の低い部材によって構成されている。このため、マーク部６３０が設けられる所定位置では、マークセンサ６１０から照射された光が反射板６２０には入射せず、結果としてマークセンサ６１０では反射光が検出されない。マークセンサ６１０は、このように反射光が検出されない場合に、マーク部６３０の存在を検知する。 In particular, a mark portion 630 is provided at a predetermined position of the track 100 according to the present embodiment. The mark portion 630 is provided at a predetermined position of the track 100 so as to protrude from the traveling surface portion on which the traveling roller 215 of the traveling portion 210 travels toward the mark sensor 610 and the reflection plate 620. More specifically, the mark unit 630 includes a mark sensor 610 and a reflection from a traveling surface portion (more precisely, a guide wire plate 635 attached to the lower surface side of the traveling surface portion) on which the traveling roller 215 of the traveling portion 210 travels. It protrudes so as to block the optical path between the plates 620. The mark part 630 is configured by a member having a lower reflectance than the above-described reflector 620. For this reason, at a predetermined position where the mark portion 630 is provided, the light emitted from the mark sensor 610 does not enter the reflecting plate 620, and as a result, the reflected light is not detected by the mark sensor 610. The mark sensor 610 detects the presence of the mark portion 630 when the reflected light is not detected in this way.
　マーク部６３０は、誘導線を支持する誘導線プレート６３５に取り付けられている。誘導線は、軌道１００の分岐点及び合流点付近に設けられ、台車２００同士が通信を行う際に用いられる。誘導線が設けられた領域に進入した台車２００は、誘導線を介して通信を行うことで、他の台車の存在を認識する。これにより、搬送効率を高めることができる。 The mark portion 630 is attached to a guide wire plate 635 that supports the guide wire. The guide wire is provided near the branch point and the junction of the track 100 and is used when the carriages 200 communicate with each other. The carriage 200 that has entered the area where the guide line is provided recognizes the presence of another carriage by communicating via the guide line. Thereby, conveyance efficiency can be improved.
　台車２００における本体部２２０の上側には、誘導線と通信を行う（具体的には、誘導線に信号を送信する、或いは誘導線から信号を受信する）ための誘導線コイル６６０が設けられる。誘導線コイル６６０は、取付部６７０を介して、本体部２２０に取り付けられている。誘導線コイル６６０は、図６に示すように、ボギー軸２８１の左右に設けられている。また、誘導線コイル６６０は、ボギー軸２８２の左右に設けられている。すなわち、４個の誘導線コイル６６０が、ボギー軸２８１及び２８２の周りに、設けられている。ここでは、誘導線コイル６６０が、連結部８００の左右両側に隣接するように設けられる。これは、カーブ走行中でも、誘導線と誘導線コイル６６０とを互いに外れないような位置に配置するためである。この際、誘導線コイル６６０は、ボギー軸２８１及び２８２の中心により近く設置された方が、カーブ走行中に振り回される範囲が小さくなる。また、誘導線コイル６６０の大きさには所定の制限があるため、カーブ走行流に振り回される範囲は小さい方がよい。よって、誘導線コイル６６０は、ボギー軸２８１及び２８２の中心により近く設置された方が好ましい。 A guide wire coil 660 for communicating with the guide wire (specifically, transmitting a signal to the guide wire or receiving a signal from the guide wire) is provided above the main body 220 of the carriage 200. The guide wire coil 660 is attached to the main body part 220 via the attachment part 670. The guide wire coils 660 are provided on the left and right sides of the bogie shaft 281 as shown in FIG. Further, the guide wire coils 660 are provided on the left and right sides of the bogie shaft 282. That is, four induction wire coils 660 are provided around the bogie shafts 281 and 282. Here, the guide wire coil 660 is provided so as to be adjacent to both the left and right sides of the connecting portion 800. This is because the guide wire and the guide wire coil 660 are arranged at positions that do not deviate from each other even during curve driving. At this time, if the guide wire coil 660 is installed closer to the center of the bogie shafts 281 and 282, the range swung during the curve traveling becomes smaller. In addition, since the size of the guide wire coil 660 has a predetermined limit, it is preferable that the range swung around the curve traveling flow is small. Therefore, the induction wire coil 660 is preferably installed closer to the centers of the bogie shafts 281 and 282.
　一方、誘導線プレート６３５は、誘導線コイル６６０の設置位置と誘導線コイル６６０の幅方向（即ち、軌道１００の延在方向に交わる方向）の位置とに合うように、設けられる。具体的には、図５に示すように、軌道１００の下側から間隙側に一部が突出するように設けられる。上述したマーク部６３０は、こうした誘導線プレート６３５の突出部分の下面側に貼付けられる。尚、誘導線プレート６３５の存在しない箇所（即ち、分岐点や合流点が存在せず、誘導線を設ける必要のない箇所）においては、誘導線プレート６３５と概ね同じ形状のプレートを設ければよい。このようにすれば、軌道１００のどのような箇所においても、好適にマーク部６３０を取付けることができる。 On the other hand, the guide wire plate 635 is provided so as to match the installation position of the guide wire coil 660 and the position in the width direction of the guide wire coil 660 (that is, the direction intersecting the extending direction of the track 100). Specifically, as shown in FIG. 5, a part of the track 100 is provided so as to protrude from the lower side to the gap side. The mark part 630 mentioned above is affixed on the lower surface side of the protrusion part of such a guide wire plate 635. FIG. It should be noted that a plate having substantially the same shape as that of the guide wire plate 635 may be provided at a location where the guide wire plate 635 does not exist (that is, a location where there is no branch point or merging point and no guide wire needs to be provided). . In this way, the mark portion 630 can be suitably attached at any location on the track 100.
　本実施形態に係る台車２００には、更に、本体部２２０におけるマークセンサ６１０近傍にバーコードリーダ６４０が設けられている。バーコードリーダ６４０は、本発明の「情報読取手段」の一例である。バーコードリーダ６４０は、マークセンサ６１０においてマーク部６３０が検出された際に読取動作を行う。これにより、誘導線プレート６３５上のマーク部６３０に隣り合うように設けられたバーコード６５０が読み取られる。 The cart 200 according to the present embodiment is further provided with a barcode reader 640 in the vicinity of the mark sensor 610 in the main body 220. The barcode reader 640 is an example of the “information reading unit” in the present invention. Bar code reader 640 performs a reading operation when mark portion 630 is detected by mark sensor 610. As a result, the barcode 650 provided adjacent to the mark portion 630 on the guide wire plate 635 is read.
　バーコード６５０は、本発明の「情報記録媒体」の一例である。バーコード６５０には、例えば、軌道１００における詳細な位置情報が、記録されている。また、図６及び図７からも分かるように、バーコード６５０は、マーク部６３０と比べて、台車２００の進行方向で見て前方側に設けられている。これにより、バーコード６５０は、マーク部６３０より遅れて検出されることになり、マーク部６３０の検出に応じた読取動作を好適に行うことが可能となる。 Bar code 650 is an example of the “information recording medium” of the present invention. For example, detailed position information on the track 100 is recorded in the barcode 650. Further, as can be seen from FIGS. 6 and 7, the barcode 650 is provided on the front side as viewed in the traveling direction of the carriage 200 compared to the mark portion 630. As a result, the barcode 650 is detected later than the mark portion 630, and the reading operation corresponding to the detection of the mark portion 630 can be suitably performed.
　図６及び図７に示すように、本実施形態に係る台車２００の本体部２２０には、ボギー軸２８１及び２８２と、連結部８００とを介して、２つの走行部２１０が取り付けられている。連結部８００は、ボギー軸２８１及び２８２と本体部２２０とを相対回動可能に、連結している。この連結部８００によって、一対の走行部２１０が本体部２２０に対して回動可能なボギー構造が、構成される。このように、１台の台車２００に複数の走行部２１０が設けられる場合には、上述した台車２００に設けられる各部材（即ち、マークセンサ６１０、反射板６２０及びバーコードリーダ６４０）は、１つの走行部２１０に設けられていればよい。 As shown in FIGS. 6 and 7, two traveling parts 210 are attached to the main body part 220 of the carriage 200 according to the present embodiment via bogie shafts 281 and 282 and a connecting part 800. The connecting part 800 connects the bogie shafts 281 and 282 and the main body part 220 so as to be relatively rotatable. The connecting portion 800 forms a bogie structure in which the pair of traveling portions 210 can rotate with respect to the main body portion 220. As described above, when a plurality of traveling units 210 are provided in one carriage 200, each member (that is, the mark sensor 610, the reflection plate 620, and the barcode reader 640) provided in the carriage 200 described above is 1 What is necessary is just to be provided in the one traveling part 210. FIG.
　また、マークセンサ６１０及び反射板６２０の位置は互いに入れ替わってもよい。即ち、マークセンサ６１０が走行部２１０に設けられ、反射板が本体部２２０に設けられてもよい。更に、バーコードリーダ６４０が走行部２１０に設けられてもよい。この場合、バーコード６５０は走行部側を向くように配置される。 Further, the positions of the mark sensor 610 and the reflection plate 620 may be interchanged. That is, the mark sensor 610 may be provided in the traveling unit 210, and the reflection plate may be provided in the main body unit 220. Further, a barcode reader 640 may be provided in the traveling unit 210. In this case, the barcode 650 is arranged to face the traveling unit side.
　次に、本実施形態に係る有軌道台車システムの動作について、図８を参照して説明する。図８は、有軌道台車システムの動作を示すフローチャートである。 Next, the operation of the tracked cart system according to this embodiment will be described with reference to FIG. FIG. 8 is a flowchart showing the operation of the tracked cart system.
　図８において、本実施形態に係る有軌道台車システムでは、台車２００の走行時において、先ずマークセンサ６１０による光の照射が開始される（ステップＳ０１）。ここで、マークセンサ６１０が反射光を検出しない場合（ステップＳ０２：ＮＯ）、マークセンサ６１０と反射板６２０との間に光路を遮るようなものが存在することになる。これにより、マーク部６３０が、検出される（ステップＳ０３）。一方で、マークセンサ６１０と反射板６２０との間に光路を遮るマーク部６３０が存在しない場合（ステップＳ０２：ＹＥＳ）、マークセンサ６１０は、反射板６２０によって反射された光を、検出し続ける。すなわち、反射光が検出されている場合は、マーク部６３０は検出されない。 Referring to FIG. 8, in the tracked cart system according to the present embodiment, when the cart 200 travels, first, irradiation of light by the mark sensor 610 is started (step S01). Here, when the mark sensor 610 does not detect reflected light (step S02: NO), there is something that blocks the optical path between the mark sensor 610 and the reflecting plate 620. Thereby, the mark part 630 is detected (step S03). On the other hand, when there is no mark portion 630 that blocks the optical path between the mark sensor 610 and the reflection plate 620 (step S02: YES), the mark sensor 610 continues to detect the light reflected by the reflection plate 620. That is, when the reflected light is detected, the mark part 630 is not detected.
　マーク部６３０が検出されると、バーコードリーダ６４０によるバーコード６５０の読取動作が行われる（ステップＳ０４）。バーコード６５０には、例えば軌道１００における詳細な位置情報が記憶されている。バーコードリーダ６４０によって読み取られた情報は、車上コントローラ２０５（図１参照）に伝達される。車上コントローラは、読み取られた位置情報に基づいて、搬送車を停止させ（ステップＳ０５）、移載動作を行うように制御する（ステップＳ０６）。なお、車上コントローラ２０５は、本発明の「走行制御手段」の一例である。 When the mark unit 630 is detected, the barcode reader 640 performs the barcode 650 reading operation (step S04). For example, detailed position information in the track 100 is stored in the barcode 650. Information read by the barcode reader 640 is transmitted to the on-board controller 205 (see FIG. 1). The on-board controller stops the transport vehicle based on the read position information (step S05) and controls to perform the transfer operation (step S06). The on-board controller 205 is an example of the “travel control unit” in the present invention.
　上述した一連の制御によれば、バーコード６５０から詳細な位置情報が読み取れるため、台車２００における停止位置の異常や搬送動作の異常等が発生してしまうことを防止できる。よって、システムにおける搬送効率を高めることができる。 According to the series of controls described above, since detailed position information can be read from the barcode 650, it is possible to prevent the stop position abnormality or the conveyance operation abnormality in the carriage 200 from occurring. Therefore, the conveyance efficiency in the system can be increased.
　ここで、本実施形態に係る有軌道台車システムによって得られる特に有益な効果について、図９に示す比較例との違いを見ながら説明する。図９は、比較例に係る有軌道台車システムの構成を示す断面図である。 Here, a particularly beneficial effect obtained by the tracked cart system according to the present embodiment will be described with reference to the difference from the comparative example shown in FIG. FIG. 9 is a cross-sectional view illustrating a configuration of the tracked cart system according to the comparative example.
　図９において、比較例に係る台車２００では、マークセンサ６１０が軌道１００を向くように設けられている。即ち、マークセンサ６１０は、軌道１００の表面、或いはマーク部６３０を貼付けている誘導線プレート６３５の表面を反射板６２０として利用している。この場合、軌道１００の継目や軌道１００上に各種部材が存在している位置では、チャタリングが発生してしまうおそれがある。よって、マーク部６３０を誤検出する原因となってしまう。また、軌道１００の形状が変化してしまうと、マークセンサ６１０の位置や光の照射方向を変更することが求められる。 In FIG. 9, in the cart 200 according to the comparative example, the mark sensor 610 is provided so as to face the track 100. That is, the mark sensor 610 uses the surface of the track 100 or the surface of the guide wire plate 635 to which the mark portion 630 is attached as the reflecting plate 620. In this case, chattering may occur at the joint of the track 100 or at a position where various members exist on the track 100. Therefore, the mark portion 630 is erroneously detected. Further, if the shape of the track 100 changes, it is required to change the position of the mark sensor 610 and the light irradiation direction.
　これに対して、本実施形態では、上述したように、マークセンサ６１０が台車本体部２２０に設けられ、反射板６２０が走行部２１０に設けられる。従って、軌道１００における継目等の影響を受けずにマーク部６３０を検出することができる。よって、高い精度でマーク部６３０を検出し、確実にバーコード６５０の読取動作を実現することができる。 On the other hand, in the present embodiment, as described above, the mark sensor 610 is provided in the cart main body 220 and the reflector 620 is provided in the traveling unit 210. Therefore, the mark portion 630 can be detected without being affected by the seam or the like in the track 100. Therefore, the mark portion 630 can be detected with high accuracy, and the reading operation of the barcode 650 can be realized with certainty.
　以上説明したように、本実施形態に係る有軌道台車システムによれば、軌道に配置されたマークを確実に検出できるため、好適なタイミングで軌道上に配置された情報記録媒体を読み取ることが可能である。従って、搬送車の走行制御において異常が発生してしまうことを防止できる。 As described above, according to the tracked cart system according to the present embodiment, since the mark arranged on the track can be detected with certainty, the information recording medium arranged on the track can be read at a suitable timing. It is. Therefore, it is possible to prevent an abnormality from occurring in the traveling control of the transport vehicle.
　本発明は、上述した実施形態に限られるものではなく、特許請求の範囲及び明細書全体から読み取れる発明の要旨或いは思想に反しない範囲で適宜変更可能であり、そのような変更を伴う有軌道台車システムもまた本発明の技術的範囲に含まれるものである。 The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit or concept of the invention that can be read from the claims and the entire specification, and a tracked carriage with such a change. The system is also included in the technical scope of the present invention.
　本発明は、有軌道台車システムに広く適用できる。 The present invention can be widely applied to a tracked bogie system.
　１００　軌道
　２００　台車
　２０５　車上コントローラ
　２１０　走行部
　２１５　走行ローラ
　２２０　本体部
　２３０　移動部
　２３５　昇降部
　２４０　昇降ベルト
　２５０　把持部
　２８１，２８２　ボギー軸
　３００　コントローラ
　４００　ＦＯＵＰ
　５１０　ポート
　５２０　サイドバッファ
　６１０　マークセンサ
　６１５　マークセンサアンプ
　６２０　反射板
　６３０　マーク部
　６３５　誘導線プレート
　６４０　バーコードリーダ
　６５０　バーコード
　６６０　誘導線コイル
　６７０　取付部
　８００　連結部 DESCRIPTION OF SYMBOLS 100 Track 200 Bogie 205 On-board controller 210 Traveling part 215 Traveling roller 220 Main part 230 Moving part 235 Lifting part 240 Lifting belt 250 Gripping part 281,282 Bogie shaft 300 Controller 400 FOUP
510 Port 520 Side buffer 610 Mark sensor 615 Mark sensor amplifier 620 Reflector 630 Mark part 635 Guide wire plate 640 Bar code reader 650 Bar code 660 Guide wire coil 670 Mounting part 800 Connecting part

Claims (3)

  1. 　有軌道台車システムであって、
    　天井又は前記天井の近傍位置に敷設され、下部両側に走行面部を有し、前記走行面部間に間隙を有する軌道と、
    　前記軌道の前記走行面部上を走行する走行部と、前記走行部から前記間隙を利用して懸垂される台車本体部と、前記走行部及び前記台車本体部のいずれか一方に設けられ、光を照射し且つ反射光を検出する検出手段と、前記走行部及び前記台車本体部のいずれか他方に設けられ、前記検出手段から照射された光を前記検出手段へと反射する反射手段とを、有し、前記軌道に沿って走行する台車と、
    を備え、
    　前記軌道は、前記走行面部の所定位置において前記走行面部から前記間隙側に突出し、前記検出手段と前記反射手段との間の光路を遮蔽可能なマーク部を、有している、
    有軌道台車システム。     A tracked bogie system,
    A track laid on the ceiling or in the vicinity of the ceiling, having a traveling surface portion on both sides of the lower portion, and having a gap between the traveling surface portions;
    A traveling unit that travels on the traveling surface portion of the track, a cart body that is suspended from the traveling unit using the gap, and is provided on any one of the traveling unit and the cart body. A detection means for irradiating and detecting reflected light; and a reflection means provided on one of the other of the traveling part and the carriage main body part and reflecting the light emitted from the detection means to the detection means. And a carriage traveling along the track,
    With
    The track has a mark portion that protrudes from the traveling surface portion to the gap side at a predetermined position of the traveling surface portion, and that can shield an optical path between the detecting means and the reflecting means.
    Tracked bogie system.
  2. 　前記台車は、前記走行部及び前記台車本体部のいずれか一方に設けられ、且つ前記検出手段による前記マーク部の検出をトリガとして読取動作を行う情報読取手段を、さらに有しており、
    　前記軌道は、前記マーク部の近傍位置における走行面部から、前記情報読取手段が読取可能な位置まで、前記間隙側に突出する情報記録媒体を、さらに有している、
    請求項１に記載の有軌道台車システム。     The carriage further includes information reading means that is provided in any one of the traveling part and the carriage main body part, and that performs a reading operation using the detection of the mark part by the detection means as a trigger,
    The track further includes an information recording medium that protrudes toward the gap from a running surface portion in the vicinity of the mark portion to a position where the information reading means can read.
    The tracked cart system according to claim 1.
  3. 　前記台車は、前記情報読取手段によって前記情報記録媒体に記録された情報を読み取った場合に、前記台車を所定の走行パターンで走行させる走行制御手段を、さらに有している、
    請求項２に記載の有軌道台車システム。     The carriage further includes travel control means for causing the carriage to travel in a predetermined traveling pattern when the information recorded on the information recording medium is read by the information reading means.
    The tracked cart system according to claim 2.
PCT/JP2011/076371 2011-01-18 2011-11-16 Rail vehicle system WO2012098761A1 (en)

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JP2011007700A JP2012150588A (en) 2011-01-18 2011-01-18 Rail-guided truck system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102897538A (en) * 2012-09-18 2013-01-30 上海集成电路研发中心有限公司 Automatic material conveying system and automatic material conveying method

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6052416B2 (en) * 2013-07-23 2016-12-27 村田機械株式会社 Traveling vehicle and traveling method of traveling vehicle
SG11202104302QA (en) * 2018-10-29 2021-05-28 Murata Machinery Ltd Ceiling traveling vehicle, ceiling traveling vehicle system, and method for detecting obstacle
JP2024053932A (en) 2022-10-04 2024-04-16 株式会社ダイフク TRANSPORTATION APPARATUS AND CONTROL METHOD FOR TRANSPORTATION APPARATUS

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0268260A (en) * 1988-09-01 1990-03-07 Daifuku Co Ltd Travel control system for electric carrier
JP2001166825A (en) * 1999-12-07 2001-06-22 Tsubakimoto Chain Co Method and device for judging abnormality of track moving object
JP2008197705A (en) * 2007-02-08 2008-08-28 Asyst Technologies Japan Inc Carrier truck, method for determination of stop position, and program

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0268260A (en) * 1988-09-01 1990-03-07 Daifuku Co Ltd Travel control system for electric carrier
JP2001166825A (en) * 1999-12-07 2001-06-22 Tsubakimoto Chain Co Method and device for judging abnormality of track moving object
JP2008197705A (en) * 2007-02-08 2008-08-28 Asyst Technologies Japan Inc Carrier truck, method for determination of stop position, and program

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102897538A (en) * 2012-09-18 2013-01-30 上海集成电路研发中心有限公司 Automatic material conveying system and automatic material conveying method

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