JP4072622B2 - 単結晶β型窒化珪素ナノリボンの製造方法 - Google Patents
単結晶β型窒化珪素ナノリボンの製造方法 Download PDFInfo
- Publication number
- JP4072622B2 JP4072622B2 JP2003409759A JP2003409759A JP4072622B2 JP 4072622 B2 JP4072622 B2 JP 4072622B2 JP 2003409759 A JP2003409759 A JP 2003409759A JP 2003409759 A JP2003409759 A JP 2003409759A JP 4072622 B2 JP4072622 B2 JP 4072622B2
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- Prior art keywords
- silicon nitride
- type silicon
- single crystal
- nanoribbons
- nanoribbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 33
- 239000002074 nanoribbon Substances 0.000 title claims description 24
- 239000013078 crystal Substances 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title description 29
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 230000006698 induction Effects 0.000 description 6
- 239000010439 graphite Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005136 cathodoluminescence Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000000295 emission spectrum Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000012779 reinforcing material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005802 health problem Effects 0.000 description 1
- -1 imide compound Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
H.G.Jeong,ほか、「アクタ・マテリアリア」(ActaMater.)46巻、6009頁、1998年 Y.MiZuhara,ほか、「ジャーナル・オブ・アメリカン・セラミック・ソサイエティ」(J.Am.Ceram.Soc.)78巻、109頁、1995年 Y.L.Li,ほか、「ジャーナル・オブ・マテリアル・サイエンス」(J.Mater.Sci.)31巻、2677頁、1996年 S.Shimada,ほか、「ジャーナル・オブ・セラミック・ソサイエティ・オブ・ジャパン」(J.Ceram.Soc.Jpn.)106巻、935頁、1998年
結晶β型窒化珪素ナノリボンの製造方法を提供することを
解決すべき課題としている。
Claims (1)
- 窒素気流中で、一酸化ケイ素粉末を1550〜 1600℃ に、1〜 2時間加熱することを特徴とする単結晶β 型窒化珪素ナノリボンの製造方法。
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JP2003409759A JP4072622B2 (ja) | 2003-12-09 | 2003-12-09 | 単結晶β型窒化珪素ナノリボンの製造方法 |
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JP2003409759A JP4072622B2 (ja) | 2003-12-09 | 2003-12-09 | 単結晶β型窒化珪素ナノリボンの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005170701A JP2005170701A (ja) | 2005-06-30 |
JP4072622B2 true JP4072622B2 (ja) | 2008-04-09 |
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JP2003409759A Expired - Lifetime JP4072622B2 (ja) | 2003-12-09 | 2003-12-09 | 単結晶β型窒化珪素ナノリボンの製造方法 |
Country Status (1)
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JP (1) | JP4072622B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100753114B1 (ko) | 2005-07-26 | 2007-08-29 | 한국원자력연구원 | 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹나노와이어의 제조방법 |
CN104891456B (zh) * | 2015-06-04 | 2017-06-30 | 中国人民解放军国防科学技术大学 | 一种一维α‑Si3N4纳米材料及其制备方法 |
CN112047742B (zh) * | 2020-09-03 | 2022-03-15 | 中钢南京环境工程技术研究院有限公司 | 一种大尺寸氮化硅纳米带气凝胶的低成本制备方法 |
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2003
- 2003-12-09 JP JP2003409759A patent/JP4072622B2/ja not_active Expired - Lifetime
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JP2005170701A (ja) | 2005-06-30 |
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