JP3999748B2 - 波長変換素子の製造方法 - Google Patents
波長変換素子の製造方法 Download PDFInfo
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- JP3999748B2 JP3999748B2 JP2004031322A JP2004031322A JP3999748B2 JP 3999748 B2 JP3999748 B2 JP 3999748B2 JP 2004031322 A JP2004031322 A JP 2004031322A JP 2004031322 A JP2004031322 A JP 2004031322A JP 3999748 B2 JP3999748 B2 JP 3999748B2
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- Japan
- Prior art keywords
- substrate
- wavelength conversion
- conversion element
- manufacturing
- thermal expansion
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
- G02F1/377—Non-linear optics for second-harmonic generation in an optical waveguide structure
- G02F1/3775—Non-linear optics for second-harmonic generation in an optical waveguide structure with a periodic structure, e.g. domain inversion, for quasi-phase-matching [QPM]
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
- G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/20—LiNbO3, LiTaO3
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
12 非線形導波路
13 分波器
21 第1基板
22 第2基板
23 第3基板
24 マスク
Claims (5)
- 二次非線形光学効果を有する材料からなり、周期的な分極反転構造を有する第1基板と、該第1基板の熱膨張係数にほぼ一致する熱膨張係数を有する第2基板とを熱処理による拡散接合によって貼り合わせる第1工程と、
前記第1基板を、光導波路を形成するための所定の厚さに研磨する第2工程と、
前記第1基板と、前記第1基板の熱膨張係数にほぼ一致する熱膨張係数を有する第3基板とを熱処理による拡散接合によって貼り合わせる第3工程と、
前記第3基板、前記第1基板および前記第2基板の一部を切削してコアを形成し、リッジ型の光導波路を作製する第4工程と
を備えたことを特徴とする波長変換素子の製造方法。 - 前記第2工程における前記所定の厚さは、20μm以下であることを特徴とする請求項1に記載の波長変換素子の製造方法。
- 前記第2基板および前記第3基板において、前記第1基板と接合する表面層の使用波長領域における屈折率は、前記第1基板の屈折率よりも小さいことを特徴とする請求項1または2に記載の波長変換素子の製造方法。
- 前記第1基板は、LiNbO3、LiTaO3、K(y)Li(1−y)Nb(x)Ta(1−x)O3(0<x<1,0<y<1)、KNbO3、KTiOPO4のいずれかであり、またはこれらにMg、Zn、Sc、Inからなる群から選ばれた少なくとも一種を添加物として含有していることを特徴とする請求項1、2または3に記載の波長変換素子の製造方法。
- 前記第1工程における熱処理は、前記1基板のキュリー温度より低い温度で行うことを特徴とする請求項1ないし4のいずれかに記載の波長変換素子の製造方法。
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JP2004031322A JP3999748B2 (ja) | 2004-02-06 | 2004-02-06 | 波長変換素子の製造方法 |
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JP2004031322A JP3999748B2 (ja) | 2004-02-06 | 2004-02-06 | 波長変換素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005221894A JP2005221894A (ja) | 2005-08-18 |
JP3999748B2 true JP3999748B2 (ja) | 2007-10-31 |
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JP2004031322A Expired - Fee Related JP3999748B2 (ja) | 2004-02-06 | 2004-02-06 | 波長変換素子の製造方法 |
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JP (1) | JP3999748B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220413355A1 (en) * | 2019-12-03 | 2022-12-29 | Nippon Telegraph And Telephone Corporation | Optical Element and Manufacturing Method Thereof |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5194882B2 (ja) * | 2008-02-29 | 2013-05-08 | 沖電気工業株式会社 | 波長変換素子 |
WO2012124830A1 (ja) | 2011-03-17 | 2012-09-20 | 日本碍子株式会社 | 光変調素子 |
JP7138062B2 (ja) * | 2019-02-07 | 2022-09-15 | Nttエレクトロニクス株式会社 | 導波路素子製造方法 |
-
2004
- 2004-02-06 JP JP2004031322A patent/JP3999748B2/ja not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220413355A1 (en) * | 2019-12-03 | 2022-12-29 | Nippon Telegraph And Telephone Corporation | Optical Element and Manufacturing Method Thereof |
US11852953B2 (en) * | 2019-12-03 | 2023-12-26 | Nippon Telegraph And Telephone Corporation | Optical element and manufacturing method thereof |
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JP2005221894A (ja) | 2005-08-18 |
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