JP3981064B2 - 両面式超音波シャワー洗浄装置 - Google Patents
両面式超音波シャワー洗浄装置 Download PDFInfo
- Publication number
- JP3981064B2 JP3981064B2 JP2003361542A JP2003361542A JP3981064B2 JP 3981064 B2 JP3981064 B2 JP 3981064B2 JP 2003361542 A JP2003361542 A JP 2003361542A JP 2003361542 A JP2003361542 A JP 2003361542A JP 3981064 B2 JP3981064 B2 JP 3981064B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- ultrasonic
- cleaned
- nozzle
- liquid supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims description 102
- 239000007788 liquid Substances 0.000 claims description 53
- 230000007246 mechanism Effects 0.000 claims description 22
- 238000003780 insertion Methods 0.000 claims description 13
- 230000037431 insertion Effects 0.000 claims description 13
- 238000009434 installation Methods 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0288—Ultra or megasonic jets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
図1に本発明に係る両面式超音波シャワー洗浄装置の一実施の形態を示す。(a)は右側面図、b)は正面図である。この実施の形態に係る両面式超音波シャワー洗浄装置10は、前述した先願の超音波シャワー洗浄装置40(図4参照)と同様の構造からなる2つの超音波シャワー洗浄機構12a,12bを1つの筐体11内に一体化して組み込むことにより、被洗浄物Cの表裏両面を同時に洗浄可能とするとともに、小型化も可能としたものである。
11 筐体
12A,12B 超音波シャワー洗浄機構
13 ノズル
13a 吐出孔
14 超音波振動子
15 給液口
16 給液分岐口
17 鍔部(整流機構)
18 超音波振動子の配線
19 被洗浄物挿通溝
20a,20b 配電口
21a,21b 接続ケーブル
22 給液管
C 被洗浄物
W 洗浄液
Claims (1)
- 中心部に吐出孔を形成されたノズルと、該ノズルの後端部に対向配置された円板状の超音波振動子と、ノズルの側面位置に形成された洗浄液の給液口とを有する2つの超音波シャワー洗浄機構をノズル中心軸が所定の角度で交差するように傾斜させて1つの筐体内に一体に組み込むとともに、前記筐体の適宜位置には前記2つの超音波シャワー洗浄機構の給液口につながる1つの給液分岐口を設け、
前記2つのノズルの間には被洗浄物の端縁を挿入可能な所定深さからなる被洗浄物挿通溝を形成するとともに、該被洗浄物挿通溝の溝底の側面視形状を外方へ向かって左右に拡開するV字形とし、
前記1つの給液分岐口を通じて前記2つの超音波シャワー洗浄機構に洗浄液を分配供給するとともに、前記交差配置された2つのノズルの間に形成された被洗浄物挿通溝内に被洗浄物を挿入することにより、被洗浄物の表裏両面を同時に洗浄可能としたことを特徴とする両面式超音波シャワー洗浄装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003361542A JP3981064B2 (ja) | 2003-10-22 | 2003-10-22 | 両面式超音波シャワー洗浄装置 |
US10/909,187 US7422024B2 (en) | 2003-10-22 | 2004-07-30 | Ultrasonic shower cleaning apparatus of double-side cleaning type |
TW093123431A TWI244946B (en) | 2003-10-22 | 2004-08-05 | Ultrasonic shower cleaning apparatus of double-side cleaning type |
SG200406200A SG111262A1 (en) | 2003-10-22 | 2004-10-19 | Ultrasonic shower cleaning apparatus of double-side cleaning type |
CNB200410087733XA CN1319657C (zh) | 2003-10-22 | 2004-10-21 | 双侧清洗型超声波喷射清洗装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003361542A JP3981064B2 (ja) | 2003-10-22 | 2003-10-22 | 両面式超音波シャワー洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005125174A JP2005125174A (ja) | 2005-05-19 |
JP3981064B2 true JP3981064B2 (ja) | 2007-09-26 |
Family
ID=34509945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003361542A Expired - Lifetime JP3981064B2 (ja) | 2003-10-22 | 2003-10-22 | 両面式超音波シャワー洗浄装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7422024B2 (ja) |
JP (1) | JP3981064B2 (ja) |
CN (1) | CN1319657C (ja) |
SG (1) | SG111262A1 (ja) |
TW (1) | TWI244946B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4691638B2 (ja) * | 2005-07-13 | 2011-06-01 | 本多電子株式会社 | 超音波洗浄装置 |
US7942158B2 (en) * | 2005-07-13 | 2011-05-17 | Honda Electronics Co., Ltd. | Ultrasonic edge washing apparatus |
CN101912853B (zh) * | 2010-09-03 | 2011-11-02 | 任保林 | 超声波脉冲水射流管壁除锈清洗装置 |
DE202010016908U1 (de) * | 2010-12-22 | 2011-12-29 | Trützschler Nonwovens Gmbh | Vorrichtung zum Reinigen eines Düsenstreifens für Wasserstrahlvernadelungsanlagen |
CN102041795B (zh) * | 2011-01-17 | 2012-06-20 | 任保林 | 超声波脉冲射流交通标志线清洗车 |
CN104128285B (zh) * | 2014-07-16 | 2016-08-24 | 深圳市华星光电技术有限公司 | 一种喷嘴清洁装置及其清洁方法 |
US9737914B2 (en) | 2014-07-16 | 2017-08-22 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Nozzle cleaning device and method of using the same |
CN106733920A (zh) * | 2017-03-14 | 2017-05-31 | 江苏伟建工具科技有限公司 | 一种用于高速钢清洁烘干一体的超声波清洗机 |
CN108620239A (zh) * | 2017-03-24 | 2018-10-09 | 北京淘氪科技有限公司 | 喷嘴及应用其的自清洗免维护静电净化*** |
JP7364322B2 (ja) | 2018-02-23 | 2023-10-18 | 株式会社荏原製作所 | 基板洗浄装置および基板洗浄方法 |
CN108993980A (zh) * | 2018-10-29 | 2018-12-14 | 昆山裕磊机械设备有限公司 | 隧道式高效超声波清洗机 |
CN109107968A (zh) * | 2018-10-29 | 2019-01-01 | 昆山裕磊机械设备有限公司 | 高效节水式超声波清洗方法 |
DE102020103292A1 (de) * | 2020-02-10 | 2021-08-12 | Umicore Ag & Co. Kg | Verwendung von Ultraschall zur Reinigung von Wandflussfiltersubstraten |
CN115533628A (zh) * | 2022-09-09 | 2022-12-30 | 天津大学 | 基于液柱耦合方式的聚焦超声表面强化*** |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE405259B (sv) | 1975-03-25 | 1978-11-27 | Wennberg Ab C J | Sett vid avstrykning, tvettning i motstrom och torkning av i nagot medium ytbehandlade foremal av material i langa lengder samt anordning for genomforande av forfarandet |
US4326553A (en) | 1980-08-28 | 1982-04-27 | Rca Corporation | Megasonic jet cleaner apparatus |
DK157608C (da) | 1986-08-14 | 1990-06-18 | Ove Jensen | Aggregat til rensning af fiskegarn |
US4834124A (en) | 1987-01-09 | 1989-05-30 | Honda Electronics Co., Ltd. | Ultrasonic cleaning device |
JPH02246115A (ja) * | 1989-03-17 | 1990-10-01 | Hitachi Ltd | 精密洗浄方法およびそれに用いる洗浄液ならびに乾燥方法 |
JPH05134398A (ja) | 1991-11-15 | 1993-05-28 | Seiko Epson Corp | フオトマスクの洗浄装置及びフオトマスクの製造方法及び半導体装置の製造方法 |
CN1030043C (zh) * | 1992-02-12 | 1995-10-18 | 住友特殊金属株式会社 | 超声波连续清洗装置 |
JPH07159980A (ja) * | 1993-12-06 | 1995-06-23 | Nikon Corp | 基板洗浄装置 |
EP0688607A1 (en) | 1993-12-24 | 1995-12-27 | Toto Ltd. | Washing water injection machine and dish washing device provided with said washing water injection machine |
JP3369418B2 (ja) | 1996-11-25 | 2003-01-20 | 大日本スクリーン製造株式会社 | 超音波振動子、超音波洗浄ノズル、超音波洗浄装置、基板洗浄装置、基板洗浄処理システムおよび超音波洗浄ノズル製造方法 |
JP3256198B2 (ja) | 1999-06-23 | 2002-02-12 | 株式会社カイジョー | 超音波シャワー洗浄装置 |
JP4481394B2 (ja) | 1999-08-13 | 2010-06-16 | 株式会社荏原製作所 | 半導体基板の洗浄装置及びその洗浄方法 |
US6904637B2 (en) * | 2001-10-03 | 2005-06-14 | Applied Materials, Inc. | Scrubber with sonic nozzle |
-
2003
- 2003-10-22 JP JP2003361542A patent/JP3981064B2/ja not_active Expired - Lifetime
-
2004
- 2004-07-30 US US10/909,187 patent/US7422024B2/en active Active
- 2004-08-05 TW TW093123431A patent/TWI244946B/zh active
- 2004-10-19 SG SG200406200A patent/SG111262A1/en unknown
- 2004-10-21 CN CNB200410087733XA patent/CN1319657C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN1319657C (zh) | 2007-06-06 |
TW200514630A (en) | 2005-05-01 |
CN1608749A (zh) | 2005-04-27 |
JP2005125174A (ja) | 2005-05-19 |
TWI244946B (en) | 2005-12-11 |
SG111262A1 (en) | 2005-05-30 |
US20050087219A1 (en) | 2005-04-28 |
US7422024B2 (en) | 2008-09-09 |
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