JP3883235B2 - CVD materials made of metal complex compounds - Google Patents
CVD materials made of metal complex compounds Download PDFInfo
- Publication number
- JP3883235B2 JP3883235B2 JP26738796A JP26738796A JP3883235B2 JP 3883235 B2 JP3883235 B2 JP 3883235B2 JP 26738796 A JP26738796 A JP 26738796A JP 26738796 A JP26738796 A JP 26738796A JP 3883235 B2 JP3883235 B2 JP 3883235B2
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- compound
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- propanediol
- cvd
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Links
- 239000000463 material Substances 0.000 title claims description 20
- -1 metal complex compounds Chemical class 0.000 title description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 15
- 229910052719 titanium Inorganic materials 0.000 claims description 15
- 239000010936 titanium Substances 0.000 claims description 15
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims description 11
- AEMRFAOFKBGASW-UHFFFAOYSA-M Glycolate Chemical compound OCC([O-])=O AEMRFAOFKBGASW-UHFFFAOYSA-M 0.000 claims description 11
- 229920000166 polytrimethylene carbonate Polymers 0.000 claims description 11
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical group C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 claims description 10
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 8
- 229910052726 zirconium Inorganic materials 0.000 claims description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- 125000004432 carbon atom Chemical group C* 0.000 claims description 6
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000002947 alkylene group Chemical group 0.000 claims description 3
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 description 35
- 230000015572 biosynthetic process Effects 0.000 description 28
- 238000003786 synthesis reaction Methods 0.000 description 26
- 239000007787 solid Substances 0.000 description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 239000000126 substance Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000004458 analytical method Methods 0.000 description 12
- 238000004821 distillation Methods 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 238000007416 differential thermogravimetric analysis Methods 0.000 description 7
- 239000013585 weight reducing agent Substances 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- 230000009257 reactivity Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000004696 coordination complex Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- YRAJNWYBUCUFBD-UHFFFAOYSA-N 2,2,6,6-tetramethylheptane-3,5-dione Chemical compound CC(C)(C)C(=O)CC(=O)C(C)(C)C YRAJNWYBUCUFBD-UHFFFAOYSA-N 0.000 description 2
- VNAWKNVDKFZFSU-UHFFFAOYSA-N 2-ethyl-2-methylpropane-1,3-diol Chemical compound CCC(C)(CO)CO VNAWKNVDKFZFSU-UHFFFAOYSA-N 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 150000004703 alkoxides Chemical group 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229940125904 compound 1 Drugs 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000004455 differential thermal analysis Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 2
- 230000000269 nucleophilic effect Effects 0.000 description 2
- AICOOMRHRUFYCM-ZRRPKQBOSA-N oxazine, 1 Chemical compound C([C@@H]1[C@H](C(C[C@]2(C)[C@@H]([C@H](C)N(C)C)[C@H](O)C[C@]21C)=O)CC1=CC2)C[C@H]1[C@@]1(C)[C@H]2N=C(C(C)C)OC1 AICOOMRHRUFYCM-ZRRPKQBOSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- GTCCGKPBSJZVRZ-UHFFFAOYSA-N pentane-2,4-diol Chemical compound CC(O)CC(C)O GTCCGKPBSJZVRZ-UHFFFAOYSA-N 0.000 description 2
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 125000003548 sec-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 1
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 1
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 1
- 125000003229 2-methylhexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- QWGRWMMWNDWRQN-UHFFFAOYSA-N 2-methylpropane-1,3-diol Chemical compound OCC(C)CO QWGRWMMWNDWRQN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- DGEZNRSVGBDHLK-UHFFFAOYSA-N [1,10]phenanthroline Chemical class C1=CN=C2C3=NC=CC=C3C=CC2=C1 DGEZNRSVGBDHLK-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000003983 crown ethers Chemical class 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 125000003827 glycol group Chemical group 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000004491 isohexyl group Chemical group C(CCC(C)C)* 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 238000004811 liquid chromatography Methods 0.000 description 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- XRVCFZPJAHWYTB-UHFFFAOYSA-N prenderol Chemical compound CCC(CC)(CO)CO XRVCFZPJAHWYTB-UHFFFAOYSA-N 0.000 description 1
- 229950006800 prenderol Drugs 0.000 description 1
- 235000013772 propylene glycol Nutrition 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- DPWYUDXLMNQOOU-UHFFFAOYSA-N strontium;2,2,6,6-tetramethylheptane-3,5-dione Chemical compound [Sr].CC(C)(C)C(=O)CC(=O)C(C)(C)C DPWYUDXLMNQOOU-UHFFFAOYSA-N 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Description
【０００１】
【発明の属する技術分野】
本発明は、金属錯体化合物からなるＣＶＤ材料、詳しくは、β−ジケトン化合物２モルとチタン、ジルコニウム、鉛または錫（以下、「 IV 族金属」という）のグリコラート１モルとの錯体からなるＣＶＤ材料に関する。
【０００２】
【従来の技術及び発明が解決しようとする課題】
チタン、鉛、ジルコニウムなどのIV族金属の錯体は、ＣＶＤ法による金属酸化薄膜を形成する原料（ＣＶＤ材料）として重要である。特に、β−ジケトン化合物との錯体は蒸気圧が高く、酸化反応性に富むので有用性が高いことが知られている。
【０００３】
しかし、ＣＶＤ材料として代表的なβージケトン化合物であるジピバロイルメタンなどの金属錯体は、単独では不安定な化合物で、空気中の水分や炭酸ガスと反応して分解したり、オリゴマー化して揮発特性が変化する欠点を有している。そのため、特開平５−１３２７７６号公報には、テトラヒドロフランやグライム類などの求核性有機物質を付加させることが提案されている。また、特開平５−９８４４４号公報には、より安定性に優れた錯体を与えるものとして、オルトフェナントロリン誘導体やクラウンエーテル類を金属錯体に付加させることが提案されている。しかし、これらの錯体付加物では、高温に曝されると錯体から付加物が解離してしまうため、揮発特性が不安定となり実用上は未だ満足のいく性能は得られていなかった。
【０００４】
このため、上記の求核性有機物質などの錯体安定化剤を必要としない錯形成化合物が望まれていた。
【０００５】
また、特開平５−２７１２５３号公報には、ジピバロイルメタン２モルと１価のアルコール２モルが付加したチタンアルコラート錯体が提案されている。蒸発温度が低く、揮発性が良好であり、酸化反応性が良好で、しかも高純度での合成が可能なものである。
【０００６】
ＣＶＤ法において複合金属酸化膜を形成する際に、バリウム、ストロンチウムおよびジルコニウム等の他の金属錯体と混合物として用いられることから他のＣＶＤ材料と揮発特性、酸化分解性が類似していること、また、他のＣＶＤ材料との反応性が低く、混合物としても揮発特性が変化しない金属錯体化合物が望ましい。
【０００７】
しかし、上記チタンアルコラート錯体は反応活性である１価のアルコキシド基が存在し、ＣＶＤ製膜時に他の金属錯体との反応性が高く、反応物の揮発特性や酸化分解性が反応前の各金属錯体と相違するなど複合金属酸化膜の組成の制御が困難であった。
【０００８】
また、揮発特性の制御において有効成分である金属の含有量が減少する分子量の増加による揮発温度の制御は好ましくなかった。
【０００９】
従って、本発明の目的は、他のＣＶＤ材料との反応性が低く、混合物としても揮発特性が変化しない、金属錯体化合物からなるＣＶＤ材料を提供することにある。
【００１０】
【課題を解決するための手段】
本発明者等は、上記目的を達成すべく鋭意検討を重ねた結果、特定の、β−ジケトン化合物とIV族金属のグリコラートとの錯体が、グリコラートの金属元素への遮蔽効果によりβ−ジケトン化合物とIV族金属のアルコラートとの錯体より他のＣＶＤ材料との反応性が低いこと、また同一分子量においてもグリコールの構造を選択することで揮発温度を制御できることを知見した。
【００１１】
本発明は、上記知見に基づきなされたもので、下記〔化２〕（前記〔化１〕と同じ）の一般式（Ｉ）で表される、β−ジケトン化合物とチタン、ジルコニウム、鉛または錫のグリコラートとの錯体からなるＣＶＤ材料を提供するものである。
【００１２】
【化２】
【００１３】
【発明の実施の形態】
以下、本発明のβ−ジケトン化合物とIV族金属のグリコラートとの錯体からなるＣＶＤ材料について詳述する。
【００１４】
本発明のβ−ジケトン化合物とIV族金属のグリコラートとの錯体（以下、「錯体化合物」という）において、上記一般式（Ｉ）中、R1およびR2で表される炭素原子数４〜８の分岐のアルキル基としては、例えば、イソブチル、第二ブチル、第三ブチル、イソペンチル、第二ペンチル、第三ペンチル、イソヘキシル、第二ヘキシル、第三ヘキシル、イソヘプチル、イソオクチル、第二オクチル、第三オクチル、２−エチルヘキシルなどが挙げられ、またシクロアルキル基としては、シクロヘキシル基などが挙げられる。
【００１５】
また、R3で表される炭素原子数２〜１８の直鎖または分岐のアルキレン基は、グリコール（ジオール）により与えられる基であり、該グリコールとしては、エタンジオール、１，２−プロパンジオール、１，３−プロパンジオール、１，３−ジメチル−１，３−プロパンジオール、２，２−ジメチル−１，３−プロパンジオール、２−メチル−２−エチル−１，３−プロパンジオール、２，２−ジエチル−１，３−プロパンジオール、２−エチル−２−ブチル−１，３−プロパンジオール、１−メチル−１，３−プロパンジオール、２−メチル−１，３−プロパンジオールなどが挙げられ、中でも１，３−プロパンジオールおよびそのアルキル基置換体が本発明の効果を一層向上させるため好ましい。
【００１６】
また、Ｍで表される金属原子は、チタン、ジルコニウム、鉛、錫である。
【００１７】
本発明の錯体化合物としては、より具体的には、下記〔化３〕〜〔化１０〕に示す化合物Ｎｏ．１〜８などがあげられる。ただし、本発明はこれらの化合物によりなんら限定されるものではない。
【００１８】
【化３】
【化４】
【化５】
【化６】
【化７】
【化８】
【化９】
【化１０】
本発明の錯体化合物の合成方法は特に限定されるものではないが、本発明の錯体化合物は、例えば、テトライソプロポキシチタン（以下、「ＴＩＰＴ」ということもある）１モルと、ジピバロイルメタン（以下、「ＤＰＭ」ということもある）２モルとを脂肪族炭化水素溶媒中で還流脱イソプロパノール反応させ、その後更に１，３−プロパンジオール１モルを加えて反応させることにより、得ることができる。
【００２７】
本発明の錯体化合物は、ＣＶＤ材料として熱安定性を満足する化合物としての用途に用いられる。
【００２８】
【実施例】
以下に本発明の錯体化合物の合成例（実施例）を具体的に示す。ただし、本発明は以下の合成例により何ら制限されるものではない。
【００２９】
合成例１（化合物Ｎｏ．１の合成）
ＴＩＰＴ７１ｇ（０．２５モル）とＤＰＭ９２ｇ（０．５モル）とをキシレン１０００ｍｌ中で６０℃で２時間還流脱イソプロパノール後、１，３−プロパンジオール１９ｇ（０．２５モル）を加えて更に１４０℃で３時間還流脱イソプロパノールした。その後、減圧脱溶媒して液体クロマトグラフィー（以下、「ＬＣ」ということもある）による純度９２％の褐色のガラス状固体１２０ｇ（収率９８％）を得た。得られたガラス状固体の窒素気流下での示差熱重量分析における昇温速度１０℃／分、１気圧での重量減少開始温度は２２４℃であった。更に、ガラス状固体を加熱溶融して１５７〜１６３℃／１．５ｍｍＨｇで蒸留精製してＬＣ純度１００％の褐色ガラス状固体１０５ｇ（収率８６％）を得た。
【００３０】
得られた化合物のチタン含有率は、９．８０％であった。また、以下の赤外吸収スペクトル（ＩＲ）分析結果から目的物であるとして同定した。
【００３１】
ＩＲ分析結果は
3448cm-1,3415 cm-1,3382 cm-1,2960 cm-1,2867 cm-1,2362 cm-1,2329 cm-1,
1575cm-1,1533 cm-1,1502 cm-1,1457 cm-1,1382 cm-1,1355 cm-1,1292 cm-1,
1224cm-1,1174 cm-1,1145 cm-1,1087 cm-1, 962 cm-1, 873 cm-1, 767 cm-1,
621cm-1, 507 cm-1, 476 cm-1, 437 cm-1, 432 cm-1, 408 cm-1
に吸収ピークを示した。
【００３２】
合成例２ （化合物Ｎｏ．２の合成）
合成例１で用いた１，３−プロパンジオールを２，２−ジメチル−１，３−プロパンジオール２６ｇ（０．２５モル）に置き換えた以外は合成例１と同様にしてＬＣ純度９３％の褐色のガラス状固体１２６ｇ（収率９８％）を得た。得られたガラス状固体の窒素気流下での示差熱重量分析における１気圧での重量減少開始温度は２４７℃であった。更に、ガラス状固体を加熱溶融して１７０〜１７５℃／１．６ｍｍＨｇで蒸留精製してＬＣ純度１００％の褐色ガラス状固体１１４ｇ（収率８８％）を得た。
【００３３】
得られた化合物のチタン含有率は、９．２７％であった。また、以下のＩＲ分析結果から目的物であるとして同定した。
【００３４】
ＩＲ分析結果は
3434cm-1,2960 cm-1,2871 cm-1,2833 cm-1,1645 cm-1,1577 cm-1,1562 cm-1,
1537cm-1,1504 cm-1,1461 cm-1,1380 cm-1,1357 cm-1,1294 cm-1,1226 cm-1,
1174cm-1,1145 cm-1,1089 cm-1,1016 cm-1, 968 cm-1, 873 cm-1, 796 cm-1,
690cm-1, 649 cm-1, 626 cm-1, 578 cm-1, 511 cm-1, 441 cm-1, 403 cm-1
に吸収ピークを示した。
【００３５】
合成例３ （化合物Ｎｏ．３の合成）
合成例１で用いた１，３−プロパンジオールを２−エチル−２−メチル−１，３−プロパンジオール２９．５ｇ（０．２５モル）に置き換えた以外は合成例１と同様にしてＬＣ純度９４％褐色のガラス状固体１３１ｇ（収率９９％）を得た。得られたガラス状固体の窒素気流下での示差熱重量分析における１気圧での重量減少開始温度は２４４℃であった。更に、ガラス状固体を加熱溶融して１６２〜１６８℃／１．２ｍｍＨｇで蒸留精製してＬＣ純度１００％の褐色ガラス状固体１２３ｇ（収率９３％）を得た。
【００３６】
得られた化合物のチタン含有率は、９．０２％であった。また、以下のＩＲ分析結果から目的物であるとして同定した。
【００３７】
ＩＲ分析結果は
3482cm-1,3452 cm-1,2962 cm-1,2873 cm-1,2364 cm-1,2333 cm-1,1575 cm-1,
1535cm-1,1502 cm-1,1457 cm-1,1382 cm-1,1355 cm-1,1294 cm-1,1224 cm-1,
1176cm-1,1145 cm-1,1089 cm-1,1031 cm-1, 966 cm-1, 873 cm-1, 792 cm-1,
651cm-1, 624 cm-1, 584 cm-1, 507 cm-1, 476 cm-1, 439 cm-1, 406 cm-1
に吸収ピークを示した。
【００３８】
合成例４ （化合物Ｎｏ．４の合成）
合成例１で用いた１，３−プロパンジオールを２，２−ジエチル−１，３−プロパンジオール３３ｇ（０．２５モル）に置き換えた以外は合成例１と同様にしてＬＣ純度９２％の褐色のガラス状固体１３３ｇ（収率９８％）を得た。得られたガラス状固体の窒素気流下での示差熱重量分析における１気圧での重量開始温度は２５０℃であった。更に、ガラス状固体を加熱溶融して１７２〜１８０℃／１．５ｍｍＨｇで蒸留精製してＬＣ純度１００％の褐色ガラス状固体１２５ｇ（収率９２％）を得た。
【００３９】
得られた化合物のチタン含有率は、８．７９％であった。また、以下のＩＲ分析結果から目的物であるとして同定した。
【００４０】
ＩＲ分析結果は
3444cm-1,2962 cm-1,2929 cm-1,2875 cm-1,2362 cm-1,2333 cm-1,1575 cm-1,
1535cm-1,1502 cm-1,1459 cm-1,1382 cm-1,1355 cm-1,1292 cm-1,1224 cm-1,
1174cm-1,1145 cm-1,1091 cm-1, 968 cm-1, 933 cm-1, 871 cm-1, 790 cm-1,
738cm-1, 659 cm-1, 622 cm-1, 584 cm-1, 549 cm-1, 505 cm-1, 472 cm-1
に吸収ピークを示した。
【００４１】
合成例５ （化合物Ｎｏ．７の合成）
合成例１で用いた１，３−プロパンジオールを２，４−ペンタンジオール２６ｇ（０．２５モル）に置き換えた以外は合成例１と同様にしてＬＣ純度９６％の淡黄色透明液体１２６ｇ（収率９８％）を得た。得られたガラス状固体の窒素気流下での示差熱重量分析における１気圧での重量減少開始温度は２１７℃であった。更に、この液体を１３０〜１３２℃／０．２ｍｍＨｇで蒸留精製してＬＣ純度１００％の淡黄色透明液体１２０ｇ（収率９３％）を得た。
【００４２】
合成例６ （化合物Ｎｏ．８の合成）
合成例１で用いた１，３−プロパンジオールを２−メチル−２，４−ペンタンジオール２９．５ｇ（０．２５モル）に置き換えた以外は合成例１と同様にしてＬＣ純度９６％の無色透明液体１３０ｇ（収率９８％）を得た。得られた化合物の窒素気流下での示差熱重量分析における１気圧での重量減少開始温度は２２０℃であった。更に、この液体を加熱溶融して１３４〜１３５℃／０．２ｍｍＨｇで蒸留精製してＬＣ純度１００％の無色透明液体１２１ｇ（収率９１％）を得た。
【００４３】
得られた化合物のチタン含有率は、８．７９％であった。また、以下のＩＲ分析結果から目的物であるとして同定した。
【００４４】
ＩＲ分析結果は
2964cm-1,2927 cm-1,2865 cm-1,1560 cm-1,1537 cm-1,1502 cm-1,1457 cm-1,
1382cm-1,1357 cm-1,1294 cm-1,1222 cm-1,1147 cm-1,1078 cm-1,1045 cm-1,
972cm-1, 945 cm-1, 871 cm-1, 796 cm-1, 761 cm-1, 626 cm-1, 597 cm-1,
549cm-1, 505 cm-1, 480 cm-1, 432 cm-1, 410 cm-1
に吸収ピークを示した。
【００４５】
比較合成例
ＴＩＰＴ７１ｇ（０．２５モル）とＤＰＭ９２ｇ（０．５モル）とをヘキサン１０００ｍｌ中で６０℃、２時間還流脱イソプロパノールした後、ヘキサンで再結晶してＬＣ純度１００％の白色結晶１０９ｇ（収率８２％）を得た。得られた結晶の窒素気流下での示差熱重量分析における１気圧での重量減少開始温度は２０２℃であった。
【００４６】
得られた化合物のチタン含有率は、８．９９％であった。また、この化合物のＩＲ分析結果は以下の通りであり、この化合物を比較化合物１とした。
【００４７】
ＩＲ分析結果は
3741cm-1,3407 cm-1,2996 cm-1,2925 cm-1,2863 cm-1,1645 cm-1,1592 cm-1,
1562cm-1,1533 cm-1,1500 cm-1,1456 cm-1,1384 cm-1,1357 cm-1,1326 cm-1,
1294cm-1,1226 cm-1,1135 cm-1, 997 cm-1, 873 cm-1, 850 cm-1, 792 cm-1,
761cm -1, 626 cm -1, 584 cm -1, 501 cm -1, 453 cm-1,426cm-1
に吸収ピークを示した。
【００４８】
以下に本発明の錯体化合物（前記化合物Ｎｏ．１〜４、７及び８）並びに比較化合物１の分子量、示差熱分析による常圧での重量減少開始温度、精留条件（精製時の蒸留温度と圧力）、外観を下記〔表１〕に示す。
【００４９】
【表１】
また、ＣＶＤ材料としての安定性を、本発明の錯体化合物（化合物Ｎｏ．２及び８）または比較化合物１のトルエン溶液に、ストロンチウムのジピバロイルメタン錯体のトルエン溶液を加えて１／１モル混合物を調製して脱溶媒し、示差熱分析により評価した。評価方法は、窒素気流下３０℃から６００℃まで１０℃／分で昇温して、重量減少を示す温度範囲と５００℃での揮発残量とで評価した。
重量減少は、２種類の金属錯体が各々の揮発特性に従って２段階で重量減少を示す場合は○として、錯体が反応して第三成分を生成して３段階で重量減少を示す場合は×として各段の重量減少を示した温度範囲とともに下記〔表２〕に示す。
また、５００℃での揮発残量が多いとＣＶＤ膜の組成の制御が困難であり、好ましくないことを示す。それらの結果を下記〔表２〕に示す。
【００５１】
【表２】
上記〔表１〕において、実施例１−２と１−５、実施例１−３と１−６から明らかなように、本発明の錯体化合物（グリコラートのβ−ジケトン化合物錯体）は、同一分子量であっても揮発特性の異なる化合物をグリコラートの構造により選択可能である。
【００５３】
また、上記〔表２〕の結果から明らかなように、本発明の錯体化合物は、他の金属錯体からなるＣＶＤ材料と混合物とした際の熱安定性が高く、蒸留精製により純度１００％の金属錯体が容易に得られることからＣＶＤなどの材料としての熱安定性を満足する化合物である。
【００５４】
【発明の効果】
本発明のβ−ジケトン化合物とIV族金属のグリコラートとの錯体からなるＣＶＤ材料は、多成分系の製膜に適したＣＶＤ材料として有用なものである。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a CVD material comprising a metal complex compound, more specifically, a CVD material comprising a complex of 2 mol of a β-diketone compound and 1 mol of glycolate of titanium, zirconium, lead or tin (hereinafter referred to as “ Group IV metal”). About.
[0002]
[Prior art and problems to be solved by the invention]
Group IV metal complexes such as titanium, lead, and zirconium are important as raw materials (CVD materials) for forming metal oxide thin films by CVD. In particular, it is known that a complex with a β-diketone compound has high vapor pressure and high oxidation reactivity, and thus is highly useful.
[0003]
However, a metal complex such as dipivaloylmethane, which is a typical β-diketone compound as a CVD material, is an unstable compound by itself and decomposes or oligomerizes by reacting with moisture or carbon dioxide in the air. It has the disadvantage of changing volatile properties. For this reason, JP-A-5-13276 proposes to add a nucleophilic organic substance such as tetrahydrofuran or glymes. Japanese Patent Application Laid-Open No. 5-98444 proposes that an orthophenanthroline derivative or a crown ether is added to a metal complex to give a complex having more stability. However, in these complex adducts, the adducts dissociate from the complex when exposed to high temperatures, so that the volatilization characteristics become unstable, and satisfactory performance has not yet been obtained in practical use.
[0004]
For this reason, a complex-forming compound that does not require a complex stabilizer such as the above-mentioned nucleophilic organic substance has been desired.
[0005]
JP-A-5-271253 proposes a titanium alcoholate complex in which 2 moles of dipivaloylmethane and 2 moles of monohydric alcohol are added. The evaporation temperature is low, the volatility is good, the oxidation reactivity is good, and the synthesis with high purity is possible.
[0006]
When a composite metal oxide film is formed in the CVD method, it is used as a mixture with other metal complexes such as barium, strontium and zirconium, so that the volatile characteristics and oxidative decomposability are similar to other CVD materials. A metal complex compound that has low reactivity with other CVD materials and does not change volatilization characteristics even as a mixture is desirable.
[0007]
However, the above-described titanium alcoholate complex has a monovalent alkoxide group that is reactive and has high reactivity with other metal complexes during CVD film formation. It was difficult to control the composition of the composite metal oxide film because it was different from the complex.
[0008]
In addition, in controlling the volatilization characteristics, it is not preferable to control the volatilization temperature by increasing the molecular weight so that the content of the metal as the active ingredient is decreased.
[0009]
Accordingly, an object of the present invention has a low reactivity with other CVD materials, volatility characteristics do not change even as a mixture, it is to provide a CVD material consisting of metallic complex compound.
[0010]
[Means for Solving the Problems]
As a result of intensive studies to achieve the above object, the present inventors have found that a specific complex of a β-diketone compound and a glycolate of a group IV metal has a β-diketone compound due to the shielding effect of glycolate on a metal element. It has been found that the reactivity with other CVD materials is lower than the complex of alkoxide with a group IV metal alcoholate, and that the volatilization temperature can be controlled by selecting the glycol structure even at the same molecular weight.
[0011]
The present invention has been made on the basis of the above knowledge, and is represented by the following general formula (I) represented by the following [Chemical Formula 2] (same as the above [Chemical Formula 1]) and titanium, zirconium, lead or tin. The present invention provides a CVD material comprising a complex with a glycolate.
[0012]
[Chemical 2]
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a CVD material comprising a complex of the β-diketone compound of the present invention and a glycolate of a group IV metal will be described in detail.
[0014]
In the complex of the β-diketone compound of the present invention and a glycolate of a group IV metal (hereinafter referred to as “complex compound”), 4 to 8 carbon atoms represented by R 1 and R 2 in the general formula (I). As the branched alkyl group, for example, isobutyl, sec-butyl, sec-butyl, isopentyl, sec-pentyl, sec-pentyl, isohexyl, sec-hexyl, tertiary hexyl, isoheptyl, isooctyl, sec-octyl, tertiary Octyl, 2-ethylhexyl and the like can be mentioned, and examples of the cycloalkyl group include a cyclohexyl group.
[0015]
In addition, the linear or branched alkylene group having 2 to 18 carbon atoms represented by R 3 is a group provided by glycol (diol), and examples of the glycol include ethanediol, 1,2-propanediol, 1,3-propanediol, 1,3-dimethyl-1,3-propanediol, 2,2-dimethyl-1,3-propanediol, 2-methyl-2-ethyl-1,3-propanediol, 2, Examples include 2-diethyl-1,3-propanediol, 2-ethyl-2-butyl-1,3-propanediol, 1-methyl-1,3-propanediol, and 2-methyl-1,3-propanediol. Among them, 1,3-propanediol and its alkyl group-substituted product are preferable because the effects of the present invention are further improved.
[0016]
The metal atom represented by M is titanium, zirconium, lead, tin.
[0017]
More specific examples of the complex compound of the present invention include the compound Nos. Shown in the following [Chemical Formula 3] to [Chemical Formula 10]. 1-8 etc. are mention | raise | lifted. However, the present invention is not limited to these compounds.
[0018]
[Chemical 3]
[Formula 4]
[Chemical formula 5]
[Chemical 6]
[Chemical 7]
[Chemical 8]
[Chemical 9]
[Chemical Formula 10]
The method for synthesizing the complex compound of the present invention is not particularly limited, but the complex compound of the present invention includes, for example, 1 mol of tetraisopropoxytitanium (hereinafter sometimes referred to as “TIPT”) and dipivaloyl. It can be obtained by reacting 2 moles of methane (hereinafter sometimes referred to as “DPM”) with refluxing deisopropanol in an aliphatic hydrocarbon solvent, and then adding 1 mole of 1,3-propanediol to react. it can.
[0027]
Complex compound of the present invention is used for application as a compound which satisfies the thermal stability as C VD material.
[0028]
【Example】
The synthesis example (Example) of the complex compound of this invention is shown concretely below. However, the present invention is not limited by the following synthesis examples.
[0029]
Synthesis Example 1 (Synthesis of Compound No. 1)
71 g (0.25 mol) of TIPT and 92 g (0.5 mol) of DPM were refluxed and depropanoled in 1000 ml of xylene at 60 ° C. for 2 hours, and then 19 g of 1,3-propanediol (0.25 mol) was added to further 140 ° C. At reflux for 3 hours. Thereafter, the solvent was removed under reduced pressure to obtain 120 g (yield 98%) of a brown glassy solid having a purity of 92% by liquid chromatography (hereinafter sometimes referred to as “LC”). In the differential thermogravimetric analysis of the obtained glassy solid under a nitrogen stream, the temperature decrease rate at 10 ° C./min and 1 atm was 224 ° C. Further, the glassy solid was heated and melted and purified by distillation at 157 to 163 ° C./1.5 mmHg to obtain 105 g (yield 86%) of a brown glassy solid having an LC purity of 100%.
[0030]
The resulting compound had a titanium content of 9.80%. Moreover, it identified as a target object from the following infrared absorption spectrum (IR) analysis results.
[0031]
IR analysis results
3448cm -1 , 3415 cm -1 , 3382 cm -1 , 2960 cm -1 , 2867 cm -1 , 2362 cm -1 , 2329 cm -1 ,
1575cm -1 , 1533 cm -1 , 1502 cm -1 , 1457 cm -1 , 1382 cm -1 , 1355 cm -1 , 1292 cm -1 ,
1224cm -1 , 1174 cm -1 , 1145 cm -1 , 1087 cm -1 , 962 cm -1 , 873 cm -1 , 767 cm -1 ,
621cm -1 , 507 cm -1 , 476 cm -1 , 437 cm -1 , 432 cm -1 , 408 cm -1
Shows an absorption peak.
[0032]
Synthesis Example 2 (Synthesis of Compound No. 2)
Brown of 93% LC purity in the same manner as in Synthesis Example 1 except that 1,3-propanediol used in Synthesis Example 1 was replaced with 26 g (0.25 mol) of 2,2-dimethyl-1,3-propanediol. 126 g (yield 98%) of a glassy solid was obtained. In the differential thermogravimetric analysis of the obtained glassy solid under a nitrogen stream, the weight decrease starting temperature at 1 atm was 247 ° C. Further, the glassy solid was heated and melted and purified by distillation at 170 to 175 ° C./1.6 mmHg to obtain 114 g (yield 88%) of a brown glassy solid having an LC purity of 100%.
[0033]
The obtained compound had a titanium content of 9.27%. Moreover, it identified as a target object from the following IR analysis results.
[0034]
IR analysis results
3434cm -1 , 2960 cm -1 , 2871 cm -1 , 2833 cm -1 , 1645 cm -1 , 1577 cm -1 , 1562 cm -1 ,
1537 cm -1 , 1504 cm -1 , 1461 cm -1 , 1380 cm -1 , 1357 cm -1 , 1294 cm -1 , 1226 cm -1 ,
1174cm -1 , 1145 cm -1 , 1089 cm -1 , 1016 cm -1 , 968 cm -1 , 873 cm -1 , 796 cm -1 ,
690cm -1 , 649 cm -1 , 626 cm -1 , 578 cm -1 , 511 cm -1 , 441 cm -1 , 403 cm -1
Shows an absorption peak.
[0035]
Synthesis Example 3 (Synthesis of Compound No. 3)
LC purity as in Synthesis Example 1 except that 1,3-propanediol used in Synthesis Example 1 was replaced with 29.5 g (0.25 mol) of 2-ethyl-2-methyl-1,3-propanediol. A 94% brown glassy solid 131 g (99% yield) was obtained. In the differential thermogravimetric analysis of the obtained glassy solid under a nitrogen stream, the weight decrease starting temperature at 1 atm was 244 ° C. Further, the glassy solid was heated and melted and purified by distillation at 162 to 168 ° C./1.2 mmHg to obtain 123 g (yield 93%) of a brown glassy solid having an LC purity of 100%.
[0036]
The obtained compound had a titanium content of 9.02%. Moreover, it identified as a target object from the following IR analysis results.
[0037]
IR analysis results
3482cm -1 , 3452 cm -1 , 2962 cm -1 , 2873 cm -1 , 2364 cm -1 , 2333 cm -1 , 1575 cm -1 ,
1535cm -1 , 1502 cm -1 , 1457 cm -1 , 1382 cm -1 , 1355 cm -1 , 1294 cm -1 , 1224 cm -1 ,
1176cm -1 , 1145 cm -1 , 1089 cm -1 , 1031 cm -1 , 966 cm -1 , 873 cm -1 , 792 cm -1 ,
651cm -1 , 624 cm -1 , 584 cm -1 , 507 cm -1 , 476 cm -1 , 439 cm -1 , 406 cm -1
Shows an absorption peak.
[0038]
Synthesis Example 4 (Synthesis of Compound No. 4)
Brown having an LC purity of 92% in the same manner as in Synthesis Example 1 except that 1,3-propanediol used in Synthesis Example 1 was replaced with 33 g (0.25 mol) of 2,2-diethyl-1,3-propanediol. 133 g (98% yield) of a glassy solid was obtained. The weight onset temperature at 1 atm in differential thermogravimetric analysis of the obtained glassy solid under a nitrogen stream was 250 ° C. Further, the glassy solid was heated and melted and purified by distillation at 172 to 180 ° C./1.5 mmHg to obtain 125 g of a brown glassy solid having a LC purity of 100% (yield 92%).
[0039]
The obtained compound had a titanium content of 8.79%. Moreover, it identified as a target object from the following IR analysis results.
[0040]
IR analysis results
3444cm -1 , 2962 cm -1 , 2929 cm -1 , 2875 cm -1 , 2362 cm -1 , 2333 cm -1 , 1575 cm -1 ,
1535cm -1 , 1502 cm -1 , 1459 cm -1 , 1382 cm -1 , 1355 cm -1 , 1292 cm -1 , 1224 cm -1 ,
1174cm -1, 1145 cm -1, 1091 cm -1, 968 cm -1, 933 cm -1, 871 cm -1, 790 cm -1,
738cm -1 , 659 cm -1 , 622 cm -1 , 584 cm -1 , 549 cm -1 , 505 cm -1 , 472 cm -1
Shows an absorption peak.
[0041]
Synthesis Example 5 (Synthesis of Compound No. 7)
The same procedure as in Synthesis Example 1 except that 1,3-propanediol used in Synthesis Example 1 was replaced with 26 g (0.25 mol) of 2,4-pentanediol. 98%) was obtained. In the differential thermogravimetric analysis of the obtained glassy solid under a nitrogen stream, the weight decrease starting temperature at 1 atm was 217 ° C. Further, this liquid was purified by distillation at 130 to 132 ° C./0.2 mmHg to obtain 120 g of a pale yellow transparent liquid having a LC purity of 100% (yield 93%).
[0042]
Synthesis Example 6 (Synthesis of Compound No. 8)
A colorless colorless liquid with a purity of 96% was prepared in the same manner as in Synthesis Example 1 except that 1,3-propanediol used in Synthesis Example 1 was replaced with 29.5 g (0.25 mol) of 2-methyl-2,4-pentanediol. 130 g (yield 98%) of a transparent liquid was obtained. The weight reduction starting temperature at 1 atm in differential thermogravimetric analysis of the obtained compound under a nitrogen stream was 220 ° C. Further, this liquid was heated and melted and purified by distillation at 134 to 135 ° C./0.2 mmHg to obtain 121 g (yield 91%) of a colorless transparent liquid having an LC purity of 100%.
[0043]
The obtained compound had a titanium content of 8.79%. Moreover, it identified as a target object from the following IR analysis results.
[0044]
IR analysis results
2964cm -1 , 2927 cm -1 , 2865 cm -1 , 1560 cm -1 , 1537 cm -1 , 1502 cm -1 , 1457 cm -1 ,
1382cm -1 , 1357 cm -1 , 1294 cm -1 , 1222 cm -1 , 1147 cm -1 , 1078 cm -1 , 1045 cm -1 ,
972cm -1 , 945 cm -1 , 871 cm -1 , 796 cm -1 , 761 cm -1 , 626 cm -1 , 597 cm -1 ,
549cm -1 , 505 cm -1 , 480 cm -1 , 432 cm -1 , 410 cm -1
Shows an absorption peak.
[0045]
Comparative Synthesis Example TIPT 71 g (0.25 mol) and DPM 92 g (0.5 mol) were subjected to reflux deisopropanol at 1000 ° C. for 2 hours in 1000 ml of hexane, and then recrystallized with hexane to give 109 g of white crystals having an LC purity of 100% ( Yield 82%). In the differential thermogravimetric analysis of the obtained crystals under a nitrogen stream, the weight decrease starting temperature at 1 atm was 202 ° C.
[0046]
The obtained compound had a titanium content of 8.9%. Moreover, the IR analysis result of this compound is as follows, and this compound was designated as Comparative Compound 1.
[0047]
IR analysis results
3741cm -1 , 3407 cm -1 , 2996 cm -1 , 2925 cm -1 , 2863 cm -1 , 1645 cm -1 , 1592 cm -1 ,
1562cm -1 , 1533 cm -1 , 1500 cm -1 , 1456 cm -1 , 1384 cm -1 , 1357 cm -1 , 1326 cm -1 ,
1294cm -1 , 1226 cm -1 , 1135 cm -1 , 997 cm -1 , 873 cm -1 , 850 cm -1 , 792 cm -1 ,
761cm -1 , 626 cm -1 , 584 cm -1 , 501 cm -1 , 453 cm -1 , 426cm -1
Shows an absorption peak.
[0048]
Hereinafter, the molecular weight of the complex compound of the present invention (compounds Nos. 1 to 4, 7 and 8) and comparative compound 1, the weight reduction starting temperature at normal pressure by differential thermal analysis, rectification conditions (distillation temperature and Pressure) and appearance are shown in the following [Table 1].
[0049]
[Table 1]
In addition, the stability as a CVD material is improved by adding 1/1 mol of a strontium dipivaloylmethane complex to a toluene solution of the complex compounds of the present invention (compounds No. 2 and 8) or comparative compound 1 Mixtures were prepared, desolvated and evaluated by differential thermal analysis. In the evaluation method, the temperature was increased from 30 ° C. to 600 ° C. at a rate of 10 ° C./min in a nitrogen stream, and the temperature range showing weight reduction and the volatile remaining amount at 500 ° C. were evaluated.
The weight reduction is indicated as ◯ when two kinds of metal complexes show weight reduction in two stages according to their volatilization characteristics, and × when the complex reacts to generate a third component and shows weight reduction in three stages. It is shown in the following [Table 2] together with the temperature range showing the weight reduction of each stage.
Also, if the remaining amount of volatile at 500 ° C. is large, it is difficult to control the composition of the CVD film, which is not preferable. The results are shown in [Table 2] below.
[0051]
[Table 2]
In the above [Table 1], as is clear from Examples 1-2 and 1-5 and Examples 1-3 and 1-6, the complex compound of the present invention (glycolate β-diketone compound complex) has the same molecular weight. Even so, compounds having different volatilization characteristics can be selected depending on the structure of glycolate.
[0053]
Further, as is apparent from the results of [Table 2] above, the complex compound of the present invention has high thermal stability when mixed with a CVD material comprising another metal complex, and is 100% pure by distillation purification. Since the complex can be easily obtained, the compound satisfies the thermal stability as a material such as CVD.
[0054]
【The invention's effect】
The CVD material comprising the complex of the β-diketone compound of the present invention and a glycolate of a group IV metal is useful as a CVD material suitable for multi-component film formation.
Claims (2)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26738796A JP3883235B2 (en) | 1996-10-08 | 1996-10-08 | CVD materials made of metal complex compounds |
| TW87105105A TW462970B (en) | 1996-10-08 | 1998-04-03 | Complex of β-diketone compound and group IV metal glycolate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26738796A JP3883235B2 (en) | 1996-10-08 | 1996-10-08 | CVD materials made of metal complex compounds |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10114781A JPH10114781A (en) | 1998-05-06 |
| JP3883235B2 true JP3883235B2 (en) | 2007-02-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP26738796A Expired - Lifetime JP3883235B2 (en) | 1996-10-08 | 1996-10-08 | CVD materials made of metal complex compounds |
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|---|---|---|---|---|
| KR100548979B1 (en) * | 1997-05-14 | 2006-02-03 | 키네티큐 리미티드 | Chemical vapour deposition precursors |
| US6603033B2 (en) | 2001-01-19 | 2003-08-05 | Korea Institute Of Science And Technology | Organotitanium precursors for chemical vapor deposition and manufacturing method thereof |
| JP2003155566A (en) | 2001-11-15 | 2003-05-30 | Asahi Denka Kogyo Kk | Method of producing thin film, and raw material for chemical vapor deposition |
| US8471049B2 (en) | 2008-12-10 | 2013-06-25 | Air Product And Chemicals, Inc. | Precursors for depositing group 4 metal-containing films |
| US8952188B2 (en) | 2009-10-23 | 2015-02-10 | Air Products And Chemicals, Inc. | Group 4 metal precursors for metal-containing films |
| US20110256314A1 (en) | 2009-10-23 | 2011-10-20 | Air Products And Chemicals, Inc. | Methods for deposition of group 4 metal containing films |
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1996
- 1996-10-08 JP JP26738796A patent/JP3883235B2/en not_active Expired - Lifetime
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| JPH10114781A (en) | 1998-05-06 |
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