JP3323642B2 - Distortion element or vibration device using distortion element - Google Patents
Distortion element or vibration device using distortion elementInfo
- Publication number
- JP3323642B2 JP3323642B2 JP11280294A JP11280294A JP3323642B2 JP 3323642 B2 JP3323642 B2 JP 3323642B2 JP 11280294 A JP11280294 A JP 11280294A JP 11280294 A JP11280294 A JP 11280294A JP 3323642 B2 JP3323642 B2 JP 3323642B2
- Authority
- JP
- Japan
- Prior art keywords
- polarization
- strain
- electrode
- electrodes
- generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波モータ、振動ジ
ャイロ、工作機械などに用いる歪素子又は振動装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a strain element or a vibration device used for an ultrasonic motor, a vibration gyro, a machine tool, and the like.
【０００２】[0002]
【従来の技術】ねじり振動を利用する用途は幅広く、超
音波モータ、振動ジャイロ、工作機械等がある。このよ
うな目的のために、周方向に分極をほどこし、厚み方向
に駆動電圧を印加して周方向にすべり振動を発生させる
電歪素子を用い、この電歪素子をその両側より金属材に
て一体的に挟持して共振振動させるものが提案されてい
る。その従来の電歪素子の一例を図９に基いて説明す
る。即ち、円環状電歪素子１の一方の面から側面をへて
他表面にわたる多数の電極２を周方向にたいして均等に
設け、隣合う電極間に直流高電圧を印加して矢印のごと
くに周方向に順次全ての電極について分極を行い、全周
の分極後、全ての電極を除去し、しかるのちに、両面を
再ラップして分極による面の荒れを修正し、再度両面に
電極を設けて電歪素子を形成しているものである。そし
て、ねじり振動発生体としては、特公昭５０−９１５９
号公報にみられるように、複数枚の電歪素子を電気的に
並列に重ね合せ、その両面に金属材を接合させて中心ボ
ルト等により一体的に締着しているものである。2. Description of the Related Art Applications utilizing torsional vibration are wide, such as ultrasonic motors, vibrating gyroscopes and machine tools. For such a purpose, an electrostrictive element is used which applies polarization in the circumferential direction and applies a driving voltage in the thickness direction to generate slip vibration in the circumferential direction. There has been proposed a device that is integrally held to cause resonance vibration. An example of the conventional electrostrictive element will be described with reference to FIG. That is, a large number of electrodes 2 extending from one surface to the side surface of the toroidal electrostrictive element 1 and extending over the other surface are provided evenly in the circumferential direction, and a high DC voltage is applied between adjacent electrodes so that the circumferential direction is indicated by an arrow. Then, all the electrodes are sequentially polarized, and after the entire circumference is polarized, all the electrodes are removed.After that, both surfaces are wrapped again to correct the roughness of the surface due to the polarization, and the electrodes are provided on both surfaces again. This forms a distortion element. As a torsional vibration generator, Japanese Patent Publication No. 50-9159
As shown in the publication, a plurality of electrostrictive elements are electrically overlapped in parallel, and a metal material is bonded to both surfaces thereof and integrally fastened by a center bolt or the like.
【０００３】[0003]
【発明が解決しようとしている課題】しかしながら、前
述の電歪素子においては、周方向に残留分極を与えるた
めには隣合う電極間の分極処理を分極の数の回数だけ行
わなければならない。しかも、周方向に揃えて分極しよ
うとすれば、分割数が多くなり、その作業は非常に大変
になる。However, in the above-described electrostrictive element, in order to provide remanent polarization in the circumferential direction, the polarization process between adjacent electrodes must be performed by the number of times of polarization. In addition, if the polarization is to be performed in the circumferential direction, the number of divisions increases, and the operation becomes extremely difficult.
【０００４】また、分極形成時においては、部分的に行
われるために分極歪みによる材料の割れが発生して歩止
まりを低下させる。さらに、分割数が少ない場合ほど周
方向の回り込みにより必要な分極を打ち消す形で他の部
分に逆方向に電界を生じ、分極効果を低下させる。例え
ば、図９のように周方向に８分割されている場合、電極
２ａ，２ｂ間に高圧電流電圧を印加して分極を行うと、
２ａ−２ｂ間が矢印の方向に分極されたとき、近似的に
は他の７か所は１／７の強度で逆方向に分極されてしま
う。従って、電圧を印加する箇所を順次変えて同じ操作
をくり返すと、結果として電極間、例えば２ａ〜２ｂ間
の分極の強度は １−１／７×７＝０ のように、０となってしまう。In addition, when the polarization is formed, the material is partially formed, so that the material is cracked due to polarization distortion, and the yield is reduced. Further, as the number of divisions is smaller, an electric field is generated in the other portion in the opposite direction in such a manner that necessary polarization is canceled out by wraparound in the circumferential direction, thereby reducing the polarization effect. For example, when the electrode is divided into eight parts in the circumferential direction as shown in FIG. 9, when a high voltage is applied between the electrodes 2a and 2b to perform polarization,
When the region between 2a and 2b is polarized in the direction of the arrow, approximately the other seven locations are polarized in the opposite direction with 1/7 intensity. Therefore, if the same operation is repeated while sequentially changing the location to which the voltage is applied, the polarization intensity between the electrodes, for example, between 2a and 2b, becomes 0, as in 1-1 / 7 × 7 = 0. I will.
【０００５】また、分極を行った後に電極を除去し、そ
の後に再度電極を設ける必要があるため、工程が複雑と
なる問題があった。In addition, it is necessary to remove the electrode after performing the polarization, and to provide the electrode again after that, so that there is a problem that the process becomes complicated.
【０００６】[0006]
【課題を解決するための手段】本発明は変換素子に複数
の分極用電極を設定し、この複数の分極用電極の間に歪
発生又は歪検出用電極を設定した歪素子及び分極化方法
を基本とするものであり、分極を行った後の電極の除去
の工程を無くすことを可能とし且つ分極時での材料の割
れを防ぐと共に、分極処理の効率を高くすることができ
る。SUMMARY OF THE INVENTION The present invention relates to a distortion element and a polarization method in which a plurality of polarization electrodes are set on a conversion element, and a strain generation or strain detection electrode is set between the plurality of polarization electrodes. Basically, it is possible to eliminate the step of removing the electrode after the polarization is performed, prevent the material from being cracked at the time of polarization, and increase the efficiency of the polarization treatment.
【０００７】[0007]
【実施例】図１に第１の実施例を示す。FIG. 1 shows a first embodiment.
【０００８】図１（ａ）は電気−機械変換素子又は機械
−電気変換素子としての圧電素子（以下省略のためＰＺ
Ｔとよぶ）板の一部分の斜視図、図１（ｂ）は電気−機
械変換素子又は機械−電気変換素子としての圧電素子
（以下省略のためＰＺＴとよぶ）板の一部分の断面図を
用いた分極の模式図、図１（ｃ）は電気−機械変換素子
又は機械−電気変換素子としての圧電素子（以下省略の
ためＰＺＴとよぶ）板の一部分の断面図を用いた使用状
態の模式図、図１（ｄ）は電気−機械変換素子又は機械
−電気変換素子としての圧電素子（以下省略のためＰＺ
Ｔとよぶ）板の一部分の断面図を用いた変位の模式図で
ある。FIG. 1A shows a piezoelectric element as an electro-mechanical conversion element or a mechanical-electric conversion element (PZ for simplicity).
FIG. 1 (b) is a cross-sectional view of a part of a piezoelectric element (hereinafter referred to as PZT for simplicity) plate as an electro-mechanical conversion element or a mechanical-electric conversion element. FIG. 1 (c) is a schematic view of the polarization, FIG. FIG. 1D shows a piezoelectric element as an electro-mechanical conversion element or a mechanical-electric conversion element (PZ for simplicity).
It is a schematic diagram of displacement using a cross-sectional view of a part of a plate (referred to as T).
【０００９】図１（ａ）のように、ＰＺＴ板１の上下面
（表裏面）に帯状に複数の電極２を設ける。このうち電
極２ａと２ａ′の間に電圧を印加すると、図１（ｂ）の
矢印のような電界が生じる。電極２ｂの幅が広いと、電
極２ａ−２ｂ間の電界が大きくなり、ＰＺＴ板１の厚み
方向での中央部付近の電界は小さくなってしまうが、こ
の例のように電極２ｂの幅をせまくすることにより、板
中央部にも、十分な大きさの電界が加わることとなる。As shown in FIG. 1A, a plurality of electrodes 2 are provided on the upper and lower surfaces (front and rear surfaces) of a PZT plate 1 in a strip shape. When a voltage is applied between the electrodes 2a and 2a ', an electric field is generated as shown by an arrow in FIG. If the width of the electrode 2b is large, the electric field between the electrodes 2a and 2b increases, and the electric field near the center in the thickness direction of the PZT plate 1 decreases. However, as in this example, the width of the electrode 2b is reduced. As a result, a sufficiently large electric field is applied also to the central portion of the plate.
【００１０】十分な大きさの電界をある時間、ある温度
で加えると、ＰＺＴ板１は分極強度が飽和するまで分極
される。When a sufficiently large electric field is applied for a certain time at a certain temperature, the PZT plate 1 is polarized until the polarization intensity is saturated.
【００１１】このＰＺＴ板１を振動子に挟持するなどし
て、振動子又は歪検出素子として用いる。この際、表面
と裏面の電極２ｂ間にのみ電圧を印加すると、図１
（ｃ）のような電界が生じる。このとき、電界の方向と
分極方向は略直交している部分が多いため、ＰＺＴ板１
は、図１（ｄ）のようにせん断変形する。逆に、このＰ
ＺＴ板に図１（ｄ）のようなせん断変形を加えれば、電
極２ｂ間には電位差が生じる。The PZT plate 1 is used as a vibrator or a strain detecting element by sandwiching it between vibrators. At this time, when a voltage is applied only between the front and back electrodes 2b,
An electric field as shown in FIG. At this time, since the direction of the electric field and the polarization direction are often substantially orthogonal, the PZT plate 1
Undergoes shear deformation as shown in FIG. Conversely, this P
If a shear deformation as shown in FIG. 1D is applied to the ZT plate, a potential difference occurs between the electrodes 2b.
【００１２】なお、この図では模式的に電極２ａ、２
ｂ、２ａ′を平行に描いてある。この図のように平行で
あれば、板はいわゆる“すべり”変形を発生又は検出す
る。電極が放射状であれば、板は放射線の中心軸まわり
に“ねじり”変形を発生又は検出する。In this figure, the electrodes 2a, 2a
b, 2a 'are drawn in parallel. If parallel, as in this figure, the plate will generate or detect so-called "slip" deformation. If the electrodes are radial, the plate will generate or detect a "twisting" deformation about the central axis of the radiation.
【００１３】図２は第２の実施例である。FIG. 2 shows a second embodiment.
【００１４】この例では、２対の分極用電極２ａ、２
ａ′の間に、歪の発生／検出用電極２ｂを複数個設けて
いる。In this example, two pairs of polarizing electrodes 2a, 2a
A plurality of strain generation / detection electrodes 2b are provided between a '.
【００１５】まず、図２（ａ）に示したように電極２ａ
−２ａ′間に、ＰＺＴ板１内の分極強度が十分飽和する
だけの電圧を一定時間加えて分極を行う。First, as shown in FIG.
Between -2a ', polarization is applied by applying a voltage for a sufficient time to sufficiently saturate the polarization intensity in the PZT plate 1.
【００１６】その後に、図２（ｂ）のように上下面の電
極２ｂ間に電圧を印加すると、電界の方向と分極方向が
略直交する部分が多いため、ＰＺＴ板１は剪断変形す
る。Thereafter, when a voltage is applied between the upper and lower electrodes 2b as shown in FIG. 2 (b), the PZT plate 1 is sheared because there are many portions where the direction of the electric field and the polarization direction are substantially orthogonal.
【００１７】逆に剪断変形を加えれば、電極２ｂ間に電
圧が生じて歪の検出が行える。この例では、分極用電極
の数に比べ、歪の発生／検出用電極の数が多いので、Ｐ
ＺＴを有効に使えるメリットがある。Conversely, if a shear deformation is applied, a voltage is generated between the electrodes 2b, and distortion can be detected. In this example, since the number of strain generation / detection electrodes is larger than the number of polarization electrodes, P
There is a merit that ZT can be used effectively.
【００１８】図３は第３の実施例。図３（ａ）のように
リング状のＰＺＴ板３の上下面に放射状に電極２を設
け、図３（ｂ）のように１個おきの電極２ａ〜２ａ′間
に電圧を加えると、矢印のように分極される。このＰＺ
Ｔ板３の、分極に用いなかった電極２ｂに、順に正負の
電圧を印加すると、ＰＺＴ板３は中心軸まわりにねじれ
る。FIG. 3 shows a third embodiment. Electrodes 2 are provided radially on the upper and lower surfaces of a ring-shaped PZT plate 3 as shown in FIG. 3A, and a voltage is applied between every other electrode 2a to 2a 'as shown in FIG. Polarized as This PZ
When positive and negative voltages are sequentially applied to the electrodes 2b of the T plate 3 not used for polarization, the PZT plate 3 is twisted around the central axis.
【００１９】図４は第４の実施例。図３と同様なＰＺＴ
板３に対し、第２の実施例と同様に多数の歪発生／検出
用電極２ｂを設けている。FIG. 4 shows a fourth embodiment. PZT similar to FIG.
A large number of strain generation / detection electrodes 2b are provided on the plate 3 as in the second embodiment.
【００２０】図５は第５の実施例。ねじり変形と、面外
方向の変形を組合せた複合素子の例である。図５（ａ）
のようなパターンの電極２を上下面に設けたＰＺＴ板４
の上下面に、図５（ｂ）のように電極２ｃ−２ｃ′間に
電圧を印加して分極することにより、これまでの実施例
と同様、複数の電極２ｂをねじりの発生／検出用に用い
る。さらに、電極２ｃに、図５（ｃ）のように表裏で極
性が逆の電圧を印加することにより、面外方向に分極
し、電極２ｃを面外方向変形の発生／検出に用いる。例
えば、図８のような振動ジャイロのねじり振動と曲げ振
動の発生／検出用に用いることができる。図８におい
て、１０は図５で示したＰＺＴ板４を重設した状態を示
している。又、１１、１２は振動体であり、ＰＺＴ板４
と接合している。１４は支持棒、１５は支持台を示して
おり、ＰＺＴ板４を振動発生の為に駆動する場合と、角
速度検出の為に用いる。１６はＰＺＴ板４の電極に対し
て電圧を印加するもしくは検出する電気回路装置を示
す。FIG. 5 shows a fifth embodiment. This is an example of a composite element in which torsional deformation and out-of-plane deformation are combined. FIG. 5 (a)
PZT plate 4 provided with electrodes 2 having a pattern like
By applying a voltage between the electrodes 2c-2c 'on the upper and lower surfaces as shown in FIG. 5 (b) to polarize, a plurality of electrodes 2b are used for the generation / detection of torsion as in the previous embodiments. Used. Further, as shown in FIG. 5 (c), by applying voltages having opposite polarities on the front and back sides, the electrode 2c is polarized in an out-of-plane direction, and the electrode 2c is used for occurrence / detection of out-of-plane deformation. For example, it can be used for generating / detecting torsional vibration and bending vibration of a vibration gyro as shown in FIG. 8, reference numeral 10 denotes a state where the PZT plates 4 shown in FIG. 5 are overlapped. Reference numerals 11 and 12 denote vibrators, and the PZT plate 4
And joined. Reference numeral 14 denotes a support rod, and 15 denotes a support base, which is used for driving the PZT plate 4 for generating vibration and for detecting angular velocity. Reference numeral 16 denotes an electric circuit device for applying or detecting a voltage to the electrodes of the PZT plate 4.
【００２１】このような構成とすると、周方向分極用に
用いた電極２ｃを、面外方向の歪発生／検出用にも用い
ることができるため、ＰＺＴをむだなく有効に利用する
ことができる。With such a configuration, the electrode 2c used for circumferential polarization can be used for generating / detecting distortion in the out-of-plane direction, so that PZT can be used effectively without waste.
【００２２】図６は第６の実施例。FIG. 6 shows a sixth embodiment.
【００２３】これまでの例では分極用電極２ａ、２ａ′
をＰＺＴ板１の表裏面（上下面）に設けていたが、この
例では側面に設けて“すべり”変形を得ている。In the above examples, the polarizing electrodes 2a, 2a '
Are provided on the front and back surfaces (upper and lower surfaces) of the PZT plate 1, but in this example, they are provided on the side surfaces to obtain "slip" deformation.
【００２４】図７は第７の実施例。FIG. 7 shows a seventh embodiment.
【００２５】図６と同様、分極用電極を扇状のＰＺＴ板
１の側面に設け“ねじり”変形を得るものである。As in FIG. 6, a polarizing electrode is provided on the side surface of the fan-shaped PZT plate 1 to obtain a "twist" deformation.
【００２６】[0026]
【発明の効果】変換素子の複数の分極用電極の間に歪発
生又は歪検出用電極を設定したので、分極を行った後の
電極の除去の工程を無くすことを可能とし且つ分極工程
時での材料の割れを防ぐと共に、分極処理の効率を高く
することができる。According to the present invention, since a strain generation or strain detection electrode is set between the plurality of polarization electrodes of the conversion element, it is possible to eliminate the step of removing the electrode after the polarization is performed, and to reduce the time required for the polarization step. In addition to preventing cracking of the material, the efficiency of the polarization treatment can be increased.
【００２７】又、分極用電極に比べて歪発生又は歪検出
用電極の幅をせまくしたことにより、より分極処理の効
率を高くすることができる。In addition, by increasing the width of the strain generation or strain detection electrode as compared with the polarization electrode, the efficiency of the polarization process can be increased.
【図１】第１実施例としての歪素子の説明図。FIG. 1 is an explanatory diagram of a distortion element as a first embodiment.
【図２】第２実施例としての歪素子の説明図。FIG. 2 is an explanatory diagram of a distortion element as a second embodiment.
【図３】第３実施例としての歪素子の説明図。FIG. 3 is an explanatory diagram of a distortion element as a third embodiment.
【図４】第４実施例としての歪素子の説明図。FIG. 4 is an explanatory diagram of a distortion element as a fourth embodiment.
【図５】第５実施例としての歪素子の説明図。FIG. 5 is an explanatory diagram of a distortion element as a fifth embodiment.
【図６】第６実施例としての歪素子の説明図。FIG. 6 is an explanatory diagram of a distortion element as a sixth embodiment.
【図７】第７実施例としての歪素子の説明図。FIG. 7 is an explanatory diagram of a distortion element as a seventh embodiment.
【図８】図５の実施例の歪素子を組込んだ振動ジャイロ
の説明図。FIG. 8 is an explanatory view of a vibrating gyroscope incorporating the strain element of the embodiment of FIG. 5;
【図９】従来の歪素子の説明図。FIG. 9 is an explanatory view of a conventional strain element.
１ 圧電素子板 ２ 電極 1 piezoelectric element plate 2 electrodes
Claims (9)
数の分極用電極を設け、前記複数の分極用電極の間に歪
発生又は歪検出用電極を設け、前記分極用電極を用いた
分極の際の電界の方向と、前記歪発生 又は歪検出用電
極を用いた歪発生又は歪検出の際の電界の方向と、を異
ならせたことを特徴とする歪素子。1. A electric - use the only setting a plurality of electrode for polarization to electrical conversion element, set only, the electrode for polarization distortion generation or strain detection electrodes between the plurality of electrode for polarization - Machine or machine Was
The direction of the electric field during polarization and the
The direction of the electric field at the time of strain generation or strain detection using poles is different.
Strain elements, characterized in that was not.
方面と他方面に複数の分極用電極を設け、前記複数の分
極用電極の間に、一対又は複数対の歪発生又は歪検出用
電極を設け、前記複数の分極用電極を用いた分極の際の
電界の方向と、前記歪発生又は歪検出用電極を用いた歪
発生又は歪検出の際の電界の方向と、を異ならせたこと
を特徴とする歪素子。Wherein electro - mechanical or mechanical - only setting a plurality of polarizing electrodes on one surface and the other surface of the electromechanical transducer, between said plurality of polarizing electrodes, one or more pairs of the distortion generation or strain detection only set the use electrodes, when polarization with a plurality of electrode for polarization
The direction of the electric field and the strain using the strain generation or strain detection electrode
A strain element wherein the direction of an electric field at the time of generation or strain detection is made different .
数の分極用電極を設け、前記複数の分極用電極の間に歪
発生又は歪検出用電極を設け、前記分極用電極を用いた
分極の際の電界の方向と、前記歪発生又は歪検出用電極
を用いた歪発生又は歪検出の際の電界の方向と、を異な
らせた歪素子と、 前記歪素子と接合された振動体と、 前記歪素子への電気信号の供給又は受給を行う手段と、
を有することを特徴とする振動装置。3. The electro - use the only setting a plurality of electrode for polarization to electrical conversion element, set only, the electrode for polarization distortion generation or strain detection electrodes between the plurality of electrode for polarization - Machine or machine Was
The direction of the electric field during polarization and the electrode for strain generation or strain detection
The direction of the electric field at the time of strain generation or strain detection using
The distorted element, a vibrating body joined to the distorted element, a unit for supplying or receiving an electric signal to the distorted element,
A vibration device, comprising:
方面と他方面に複数の分極用電極を設け、前記複数の分
極用電極の間に、一対又は複数対の歪発生又は歪検出用
電極を設け、前記複数の分極用電極を用いた分極の際の
電界の方向と、前記歪発生又は歪検出用電極を用いた歪
発生又は歪検出の際の電界の方向と、を異ならせた歪素
子と、 前記歪素子と接合された振動体と、 前記歪素子への電気信号の供給又は受給を行う手段と、
を有することを特徴とする振動装置。4. electro - mechanical or mechanical - only setting a plurality of polarizing electrodes on one surface and the other surface of the electromechanical transducer, between said plurality of polarizing electrodes, one or more pairs of the distortion generation or strain detection only set the use electrodes, when polarization with a plurality of electrode for polarization
The direction of the electric field and the strain using the strain generation or strain detection electrode
The direction of the electric field at the time of generation or strain detection, a strain element having different directions, a vibrating body joined to the strain element, and a means for supplying or receiving an electric signal to the strain element,
A vibration device, comprising:
とを特徴とする請求項１又は２記載の歪素子。5. A magnetostrictive element according to claim 1 or 2, wherein the digits set substantially parallel to the plurality of electrode for polarization.
ことを特徴とする請求項３又は４記載の振動装置。6. The vibration device according to claim 3 or 4, characterized in that said plurality of electrode for polarization digits set substantially radially.
数の分極用電極を設け、前記複数の分極用電極の間に歪
発生又は歪検出用電極を設け、前記分極用電極を用いた
分極の際の電界の方向と、前記歪発生 又は歪検出用電
極を用いた歪発生又は歪検出の際の電界の方向と、を異
ならせ、前記複数の分極用電極に電圧を印加して分極を
行うことを特徴とする歪素子分極化方法。7. The electro - use the only setting a plurality of electrode for polarization to electrical conversion element, set only, the electrode for polarization distortion generation or strain detection electrodes between the plurality of electrode for polarization - Machine or machine Was
The direction of the electric field during polarization and the
The direction of the electric field at the time of strain generation or strain detection using poles is different.
A method for polarizing a strain element , comprising: applying a voltage to the plurality of electrodes for polarization to perform polarization.
方面と他方面に複数の分極用電極を設け、前記複数の分
極用電極の間に、一対又は複数対の歪発生又は歪検出用
電極を設け、前記複数の分極用電極を用いた分極の際の
電界の方向と、前記歪発生又は歪検出用電極を用いた歪
発生又は歪検出の際の電界の方向と、を異ならせ、前記
複数の分極用電極に電圧を印加して分極を行うことを特
徴とする歪素子分極化方法。8. electro - mechanical or mechanical - only setting a plurality of polarizing electrodes on one surface and the other surface of the electromechanical transducer, between said plurality of polarizing electrodes, one or more pairs of the distortion generation or strain detection only set the use electrodes, when polarization with a plurality of electrode for polarization
The direction of the electric field and the strain using the strain generation or strain detection electrode
A method of polarizing a strain element , wherein the direction of an electric field at the time of generation or strain detection is made different and polarization is performed by applying a voltage to the plurality of polarization electrodes.
歪検出用電極の幅を狭くしたことを特徴とする請求項
１，２又は５記載の歪素子。9. The strain element according to claim 1, wherein the width of the strain generation or strain detection electrode is smaller than that of the polarization electrode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11280294A JP3323642B2 (en) | 1994-05-26 | 1994-05-26 | Distortion element or vibration device using distortion element |
| US08/797,889 US5786655A (en) | 1994-05-26 | 1997-02-10 | Strain element and vibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11280294A JP3323642B2 (en) | 1994-05-26 | 1994-05-26 | Distortion element or vibration device using distortion element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07321384A JPH07321384A (en) | 1995-12-08 |
| JP3323642B2 true JP3323642B2 (en) | 2002-09-09 |
Family
ID=14595900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11280294A Expired - Fee Related JP3323642B2 (en) | 1994-05-26 | 1994-05-26 | Distortion element or vibration device using distortion element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3323642B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5914355B2 (en) | 2010-11-30 | 2016-05-11 | オリンパス株式会社 | Piezoelectric actuator |
| DE102016119529A1 (en) * | 2016-10-13 | 2018-05-03 | Physik Instrumente (Pi) Gmbh & Co. Kg | ultrasonic motor |
| CN110971140B (en) * | 2019-11-28 | 2022-08-16 | 上海应用技术大学 | Piezoelectric device based on MEMS and preparation method thereof |
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1994
- 1994-05-26 JP JP11280294A patent/JP3323642B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07321384A (en) | 1995-12-08 |
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