JP2559729B2 - Vibration generator - Google Patents
Vibration generatorInfo
- Publication number
- JP2559729B2 JP2559729B2 JP62072088A JP7208887A JP2559729B2 JP 2559729 B2 JP2559729 B2 JP 2559729B2 JP 62072088 A JP62072088 A JP 62072088A JP 7208887 A JP7208887 A JP 7208887A JP 2559729 B2 JP2559729 B2 JP 2559729B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- vibration generator
- rod
- generator
- generating elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 239000012212 insulator Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/0035—Cylindrical vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/106—Langevin motors
Description
【発明の詳細な説明】 ［発明の利用分野］ この発明は棒状の振動発生器に関し、特に、バー型振
動波モーターの振動発生体（すなわちステータ）として
好適な振動発生器に関するものである。TECHNICAL FIELD The present invention relates to a rod-shaped vibration generator, and more particularly to a vibration generator suitable as a vibration generator (that is, a stator) of a bar-type vibration wave motor.
［発明の背景］ 圧電素子等の振動発生素子によって静止部材に高周波
振動を生ぜしめるとともに該静止部材に接触している可
動部材に回転もしくは軸方向運転を生じさせる型式の、
いわゆる振動波モーターが最近実用化されつつある。BACKGROUND OF THE INVENTION A type of device that causes a stationary member to generate high-frequency vibration by a vibration generating element such as a piezoelectric element and causes a movable member in contact with the stationary member to rotate or axially move.
So-called vibration wave motors have recently been put into practical use.
この振動モーターは、振動体としてのステーターの形
状や該ステータスの振動形式等によって数種類のものに
分類するとができ、たとえば、環状円板形ステーターを
有する環状形振動波モーターや棒状形ステーターを有す
るバー型振動波モーター等が知られている。このうち、
前者は既に本出願人等によって実用化されているが、後
者の形式のモーターはまだ実用化されるに至っていな
い。This vibration motor can be classified into several types according to the shape of the stator as a vibrating body and the vibration mode of the status. For example, an annular vibration wave motor having an annular disc stator or a bar having a rod stator. Vibration wave motors and the like are known. this house,
The former has already been put to practical use by the present applicants, but the latter type of motor has not yet been put to practical use.
後者の型式のモーターは本出願人によって開発された
ものであり、前者のモーターにくらべて効率がよいとい
う長所があるが、なお改善すべき次のような問題点のあ
ることがわかっている。The latter type of motor was developed by the present applicant and has the advantage that it is more efficient than the former motor, but it has been found to have the following problems to be improved.
以下には本出願人による既提案のバー型振動波モータ
ーの問題点について説明する。The problems of the bar type vibration wave motor proposed by the present applicant will be described below.
第３図は本出願人の既提案になるバー型振動波モータ
ーの振動発生体を示したものである。この振動発生体17
は図示の如き角棒状の棒状弾性体18の互いに直交する二
面に長さａ、巾ｂ、厚さt1の板状の圧電素子19を接着
し、各圧電素子19に互いに位相の異なる交番電圧を印加
することによって該棒状弾性体18の先端に楕円振動もし
くは円振動を生じさせるように構成されている。各圧電
素子19な交番電圧が印加されるとそれ自身厚さ方向なら
びに面方向に交番的に弾性変形し、これによって棒状弾
性体18は交番曲げモーメントを受け、その結果、棒状弾
性体18の先端には互いに直角に方向の曲げ振動の合成に
よる円振動もしくは楕円振動が発生する。棒状弾性体18
はそれ自身に生じる振動の節の位置で動かぬように定位
置に固定されるとともに棒状弾性体の先端は不図示の筒
状のローターに接しているため、棒状弾性体18の先端が
振動すると該ローターが回転されることになる。FIG. 3 shows a vibration generator of a bar-type vibration wave motor proposed by the applicant. This vibration generator 17
Is a plate-shaped piezoelectric element 19 having a length a, a width b, and a thickness t 1 bonded to two surfaces of a rectangular rod-shaped elastic body 18 orthogonal to each other as shown in the figure. An elliptical vibration or a circular vibration is generated at the tip of the rod-shaped elastic body 18 by applying a voltage. When an alternating voltage is applied to each piezoelectric element 19, the piezoelectric element 19 itself elastically deforms alternately in the thickness direction and the surface direction, whereby the rod-shaped elastic body 18 receives an alternating bending moment, and as a result, the tip of the rod-shaped elastic body 18 is subjected. A circular vibration or an elliptical vibration occurs due to the combination of bending vibrations in directions perpendicular to each other. Rod-shaped elastic body 18
Is fixed in place so that it does not move at the position of the node of vibration generated in itself, and the tip of the rod-shaped elastic body is in contact with a cylindrical rotor (not shown), so if the tip of the rod-shaped elastic body 18 vibrates. The rotor will be rotated.
前記の如き構成の振動発生体17において圧電素子19に
電圧Ｖを印加した時に圧電素子19がその厚み方向に発生
する力F1は、 ここで、CE圧電素子の弾性係数、d31圧電素子の圧電
定数で分極軸（この場合厚み方向）と直角方向のもので
あるが、この力F1はかなり小さなものであるため、前記
の如き振動発生体17によって構成されたバー型振動波モ
ーターの出力はかなり小さなものであり、実用には不適
であった。また、この型式の振動波モーターの出力を大
きくするためには、上記の式から明らかなように、電圧
Ｖと圧電素子の巾ｂを大きくする必要があるが、ロータ
ーの駆動力を実用に適するレベルまで大きくするために
は、圧電素子に対する印加電圧として、数十乃至数百ボ
ルトもの高圧を要するため、該モーターの駆動回路には
高圧電源や高耐圧素子が必要となり、従って駆動回路が
大型化するばかりでなく駆動回路のコストが高価にな
る、という問題点があった。The force F 1 generated in the thickness direction of the piezoelectric element 19 when a voltage V is applied to the piezoelectric element 19 in the vibration generator 17 having the above-described structure is Here, the elastic coefficient of the C E piezoelectric element and the piezoelectric constant of the d 31 piezoelectric element are in the direction perpendicular to the polarization axis (thickness direction in this case), but since this force F 1 is quite small, The output of the bar-type vibration wave motor constituted by the vibration generator 17 as described above was extremely small, and was not suitable for practical use. Further, in order to increase the output of this type of vibration wave motor, it is necessary to increase the voltage V and the width b of the piezoelectric element as is clear from the above formula, but the driving force of the rotor is suitable for practical use. In order to increase the level to a high level, a high voltage of several tens to several hundreds of volts is required as the applied voltage to the piezoelectric element, so a high-voltage power supply and a high-voltage element are required in the drive circuit of the motor, and therefore the drive circuit becomes large. Not only that, but the cost of the drive circuit becomes high.
なお、前記の如き振動発生体として、金属製の棒状弾
性体に圧電セラミックを接着した構造のものでは、セラ
ミックの引張強度が弱く線膨張係数が金属のそれよりも
かなり低いため、大振幅発生時や温度変動が大きい時に
は内部応力により接着層や圧電セラミック自身が破損す
る危険性があるという問題点もあった。In addition, as the vibration generator as described above, in the structure in which the piezoelectric ceramic is bonded to the metal rod-shaped elastic body, the tensile strength of the ceramic is weak and the linear expansion coefficient is much lower than that of the metal. There is also a problem that the adhesive layer or the piezoelectric ceramic itself may be damaged by internal stress when the temperature fluctuation is large.
［発明の目的］ この発明の目的は、前記の如き振動発生体に存する問
題点を解決し、高電圧を要することなく従来の振動発生
体よりも強い振動を発生しうる新規な構造の振動発生器
を提供することである。[Object of the Invention] An object of the present invention is to solve the problems existing in the vibration generator as described above and to generate a vibration having a novel structure capable of generating a stronger vibration than a conventional vibration generator without requiring a high voltage. Is to provide a vessel.
［発明の概要］ 上記の目的を達成するために、本願発明では、厚さ方
向に振動を発生する複数の振動発生素子を棒状体の軸線
方向に積層してはさみ込むことによって該棒状体と該複
数の振動発生素子とを一体化し、各振動発生素子の駆動
用電極を複数領域に分割し、かつこれら複数の振動発生
素子を、各領域が軸線回りにて互いにずれた状態で積層
し、複数の振動発生素子に生じた振動の合成により棒状
体を円振動又は楕円振動させるようにしている。[Summary of the Invention] In order to achieve the above object, in the present invention, a plurality of vibration generating elements that generate vibration in the thickness direction are stacked in the axial direction of a rod-shaped body and sandwiched between the vibration-generating element and the rod-shaped body. Integrating a plurality of vibration generating elements, dividing the drive electrode of each vibration generating element into a plurality of regions, and stacking the plurality of vibration generating elements in a state in which the respective regions are displaced from each other about the axis, The rod-shaped body is caused to vibrate circularly or elliptically by combining the vibrations generated in the vibration generating element.
本発明の振動発生器では、振動発生素子によって該棒
状体に加えられる力は従来の振動発生体のそれにくらべ
て数十倍にもなるため、本発明の振動発生器によって構
成される振動波モーターにおいて従来の振動波モーター
と同じ駆動力を発生させる場合は、従来の駆動波モータ
ーの駆動電圧の数十分の一の駆動電圧で済む。従って、
本発明の振動発生器によって構成された駆動波モーター
では、駆動回路に高圧電源や高耐圧素子が不要となり、
その結果、本発明の振動発生器によれば、実用的なバー
型振動波モーターを構成することができる。In the vibration generator of the present invention, the force applied to the rod-shaped body by the vibration generating element is several tens of times that of the conventional vibration generator, so the vibration wave motor configured by the vibration generator of the present invention is used. In the case of generating the same driving force as that of the conventional vibration wave motor, a driving voltage which is several tenths of the driving voltage of the conventional driving wave motor is sufficient. Therefore,
In the drive wave motor configured by the vibration generator of the present invention, the drive circuit does not require a high-voltage power source or a high-voltage element,
As a result, according to the vibration generator of the present invention, a practical bar-type vibration wave motor can be constructed.
［発明の実施例］ 以下に第１図および第２図を参照して本発明による振
動発生器の実施例について説明する。Embodiments of the Invention Embodiments of the vibration generator according to the present invention will be described below with reference to FIGS. 1 and 2.
第１図は本発明による振動発生器の第１実施例の縦断
面図、第２図は第１図に示された振動発生器に組込まれ
ている振動発生素子の正面図である。1 is a longitudinal sectional view of a first embodiment of a vibration generator according to the present invention, and FIG. 2 is a front view of a vibration generating element incorporated in the vibration generator shown in FIG.
第１図に示した本発明の第１実施例の振動発生器１
は、２本の同径及び同長の棒状体２及び３と、両棒状２
及び３の間に挟み込まれて両棒状体２及び３と一体化さ
る環状円板形の振動発生素子４及び５と、両振動発生素
子４及び５の間に配置されて両振動発生素子４及び５を
互いに隔離且つ絶縁している環状円板形の絶縁体６と、
両棒状体２及び３を互いに機械的に連結するとともに両
棒状体２及び３の間の振動発生素子４及び５と絶縁体６
とを挟圧保持される連結部材７とによって構成されてい
る。The vibration generator 1 of the first embodiment of the present invention shown in FIG.
Is two rod-shaped bodies 2 and 3 having the same diameter and the same length, and two rod-shaped bodies 2
And the vibration generating elements 4 and 5 in the shape of an annular disc which are sandwiched between the vibration generating elements 4 and 5 and integrated with the rod-shaped bodies 2 and 3, and the vibration generating elements 4 and 5 arranged between the vibration generating elements 4 and 5. An annular disk-shaped insulator 6 which isolates and insulates 5 from each other;
The rod-shaped bodies 2 and 3 are mechanically connected to each other, and the vibration-generating elements 4 and 5 and the insulator 6 between the rod-shaped bodies 2 and 3 are connected.
And a connecting member 7 that is held under pressure.
振動発生素子４及び５は圧電セラミックで構成され、
それぞれの両面には蒸着やスパッタリング或いは溶融金
属塗着などの方法によって電極８〜11が形成されてい
る。また、絶縁体６の両面にも電極12及び13が形成さ
れ、電極12と棒状体２とに第１の交番電圧源E1が接続さ
れ、電極13と棒状体３とに第２の交番電圧源E2が接続さ
れている。The vibration generating elements 4 and 5 are made of piezoelectric ceramic,
Electrodes 8 to 11 are formed on both surfaces of each by a method such as vapor deposition, sputtering or molten metal coating. Further, electrodes 12 and 13 are formed on both surfaces of the insulator 6, the first alternating voltage source E 1 is connected to the electrode 12 and the rod 2, and the second alternating voltage is connected to the electrode 13 and the rod 3. Source E 2 is connected.
振動発生素子４は第２図（ａ）に示すように上下に分
割された二つの素子片4a及び4bから構成されており、上
方の素子片4aと下方の素子片4bとは互いに逆極性に形成
されている。また、振動発生素子５も第２図（ｂ）に示
すように左右に分割された二つの素子片5a及び5bから成
り、該素子片5a及び5bも互いに逆極性に形成されてい
る。従って、素子片4aと素子片4bとに同一方向の同電圧
を印加した場合、素子片4aはその厚みを増す方向に歪
み、素子片4bはその厚みを減じる方向に歪むので該振動
発生素子によれば第１図においで棒状体２及び３が上向
きに凸となるような曲げモーメントが発生することにな
る。また、素子片5aと素子片5bとに同一方向の同電圧を
印加した場合は、素子片5aはその厚さを増す方向に歪
み、素子片5bはその厚さを減じる方向に歪むので、該振
動発生素子５によれば、第１図において紙面に直交する
方向の力による曲げモーメントが振動発生器１に作用す
ることになる。As shown in FIG. 2 (a), the vibration generating element 4 is composed of two element pieces 4a and 4b which are vertically divided, and the upper element piece 4a and the lower element piece 4b have opposite polarities. Has been formed. The vibration generating element 5 is also composed of two element pieces 5a and 5b which are divided into left and right as shown in FIG. 2 (b), and the element pieces 5a and 5b are also formed in opposite polarities. Therefore, when the same voltage in the same direction is applied to the element piece 4a and the element piece 4b, the element piece 4a is distorted in the direction of increasing its thickness, and the element piece 4b is distorted in the direction of decreasing its thickness, so that the vibration generating element Therefore, in FIG. 1, a bending moment is generated such that the rod-shaped bodies 2 and 3 are convex upward. Further, when the same voltage in the same direction is applied to the element piece 5a and the element piece 5b, the element piece 5a is distorted in the direction of increasing its thickness, and the element piece 5b is distorted in the direction of decreasing its thickness. According to the vibration generating element 5, a bending moment due to a force in a direction orthogonal to the paper surface in FIG. 1 acts on the vibration generator 1.
それ故、振動発生素子４に交番電圧を印加すると、第
１図において棒状体２の左端と棒状体３と右端とに紙面
に平行で上下方向の力が加えられることになり、該振動
発生器１の両端には第１図で上下方向の振動が生じる。
また、振動発生素子５に交番電圧を印加すると、該振動
発生器１の両端に第１図の紙面に直交する方向の交番力
が作用し、該振動発生器１の両端には紙面に直交する方
向の振動が生じることになる。このため、該振動発生器
１の両端には、両振動の合成による円振動乃至楕円振動
が生じる。Therefore, when an alternating voltage is applied to the vibration generating element 4, a vertical force parallel to the plane of the drawing is applied to the left end, the rod 3 and the right end of the rod-shaped body 2 in FIG. A vertical vibration is generated at both ends of 1 in FIG.
When an alternating voltage is applied to the vibration generating element 5, an alternating force in a direction orthogonal to the paper surface of FIG. 1 acts on both ends of the vibration generator 1, and both ends of the vibration generator 1 are perpendicular to the paper surface. Directional vibration will occur. For this reason, a circular vibration or an elliptical vibration is generated at both ends of the vibration generator 1 due to the combination of both vibrations.
なお、各振動発生素子４及び５の両面に形成されてい
る電極８〜11も各振動検出素子４及び５の構成素子片4
a,4b,5a,5bの形状に合せて互いに分割されている。ま
た、振動発生素子４及び５に印加する交番電圧源E1、E2
の電圧の周期を振動発生器１の曲げ固有振動数に近い値
に制定しておくことにより大きな振幅の振動を発生させ
ることができる。The electrodes 8 to 11 formed on both sides of each of the vibration generating elements 4 and 5 are also the component pieces 4 of the vibration detecting elements 4 and 5.
They are divided from each other according to the shapes of a, 4b, 5a and 5b. In addition, the alternating voltage sources E 1 and E 2 applied to the vibration generating elements 4 and 5
By setting the cycle of the voltage at a value close to the natural bending frequency of the vibration generator 1, it is possible to generate a vibration having a large amplitude.
以上の如き本発明による振動発生器では、振動発生素
子4,5の厚みをt2とし、印加する交番電圧をＶとする
と、振動発生素子が発生する力F2は、 ここでCEは、圧電素子の弾性係数、d33は圧電素子の
圧電定数で分極軸方向（この場合厚み方向）のものであ
る。In the vibration generator according to the present invention as described above, when the thickness of the vibration generating elements 4 and 5 is t 2 and the alternating voltage applied is V, the force F 2 generated by the vibration generating element is Here, C E is the elastic coefficient of the piezoelectric element, and d 33 is the piezoelectric constant of the piezoelectric element in the polarization axis direction (thickness direction in this case).
従って、この力F2を従来の（本出願人が既に提案し
た）バー型振動波モーターの振動発生体（第３図）にお
ける振動発生素子の発生力F1と比較すると、 となる。なお、圧電セラミックの圧電定数は一般的にd
33/d31＝２〜３程度であるから、第３図の棒状弾性体18
の巾寸法ｂを５〜30mmとすると、 となり、また、振動発生素子4,5の厚さt2を0.2〜5mmと
すれば、 となるため、 となる。Accordingly, when compared with the generated force F 1 of the vibration generating element in the force F 2 of the prior art (present applicant has already proposed) vibration generator of the bar type vibration wave motor (FIG. 3), Becomes The piezoelectric constant of a piezoelectric ceramic is generally d
Since 33 / d 31 = 2 to 3 or so, the rod-shaped elastic body 18 of FIG.
If the width b of is 5 to 30 mm, If the thickness t 2 of the vibration generating elements 4 and 5 is 0.2 to 5 mm, Therefore, Becomes
すなわち、第３図の従来の振動発生体と第１図の本発
明の振動発生器に同じ電圧を印加した場合、本発明の振
動発生器では、従来の振動発生体にくらべて２〜450倍
もの力を発生させることができ、逆に、従来の振動発生
体と本発明の振動発生器とに同じ力を発生させる場合に
は、本発明の振動発生器では、従来の振動発生体に印加
する電圧の1/2〜1/450の電圧を印加すればよいことにな
る。That is, when the same voltage is applied to the conventional vibration generator of FIG. 3 and the vibration generator of the present invention of FIG. 1, the vibration generator of the present invention is 2 to 450 times as large as the conventional vibration generator. In the case of generating the same force as the conventional vibration generator and the vibration generator of the present invention, the vibration generator of the present invention applies the force to the conventional vibration generator. It is sufficient to apply a voltage of 1/2 to 1/450 of the applied voltage.
従って、本発明によれば、従来の振動発生体よりもは
るかに低電圧で駆動することができるとともに従来の振
動発生体よりも大きな力を発生させることができる。Therefore, according to the present invention, it is possible to drive at a voltage much lower than that of the conventional vibration generator and generate a larger force than that of the conventional vibration generator.
また、本発明の振動発生器では、接着剤等を使用せず
にスタッドやボルト等の締結部材によって振動発生素子
を棒状体に固定し、圧電セラミックにあらかじめ圧縮応
力を与えて内部応力が引張応力になりにくくしてある。
このため、温度変動が大きい時や大振幅発生時によ、破
損を生じる危険性は極めて小さい。Further, in the vibration generator of the present invention, the vibration generating element is fixed to the rod-like body by a fastening member such as a stud or a bolt without using an adhesive or the like, and a compressive stress is applied to the piezoelectric ceramic in advance so that the internal stress is a tensile stress. It is hard to become.
Therefore, the risk of damage is extremely small when the temperature fluctuation is large or a large amplitude is generated.
［発明の効果］ 以上に説明したように、本発明によれば、本出願人が
すでに提案した振動波モーターに装備されている振動発
生体よりも低電圧で駆動することができるとともに、該
振動発生体よりも大きな力を発生させることができる振
動発生器を提供することができる。このため、本振動発
生器を用いれば、電圧の駆動回路を要さず、実用可能な
大トルクを発生することができ、しかも、製造コストの
安価なバー型振動波モーターを実現することができる。
また、本発明の振動発生器は、大きな温度変動を受けた
場合や大振幅発生時にも破損しにくいため、本振動発生
器を用いれば、破損しにくく、信頼性の高いバー型振動
波モーターを実現することができる。[Effects of the Invention] As described above, according to the present invention, it is possible to drive at a lower voltage than the vibration generator equipped in the vibration wave motor already proposed by the applicant, and the vibration is generated. It is possible to provide a vibration generator that can generate a force larger than that of the generator. Therefore, if this vibration generator is used, a bar-type vibration wave motor that can generate a practical large torque without requiring a voltage drive circuit and is inexpensive to manufacture can be realized. .
Further, the vibration generator of the present invention is less likely to be damaged even when subjected to a large temperature change or when a large amplitude is generated. Can be realized.
また、本発明の振動発生器は、複数の電極領域をそれ
ぞれ有した複数の振動発生素子を各電極領域の軸線回り
の位置をずらして積層した構成となっているため、各振
動発生素子に交番信号を印加して発生させた振動の合成
により棒状体を円又は楕円振動させることができ、特に
モーターの駆動源として用いた場合には、大きなトルク
を効率良く出力することができる。Further, since the vibration generator of the present invention has a configuration in which a plurality of vibration generating elements each having a plurality of electrode regions are stacked by shifting the positions around the axis of each electrode region, the vibration generating elements are alternately arranged. The rod-shaped body can be caused to vibrate in a circular or elliptical manner by combining the vibrations generated by applying a signal, and particularly when used as a drive source for a motor, a large torque can be efficiently output.
なお、本発明の振動発生器は特に、バー型振動波モー
ターのステーターとして好適であるが、本発明の振動発
生器が該モーター以外の用途に使用できることは当然で
ある。The vibration generator of the present invention is particularly suitable as a stator of a bar-type vibration wave motor, but it goes without saying that the vibration generator of the present invention can be used for applications other than the motor.
また、振動発生素子としては圧電セラミックのほか、
圧電結晶やPLZTなどの電歪素子等、種々の振動発生体を
使用することができる。In addition to the piezoelectric ceramics as the vibration generating element,
Various vibration generators such as a piezoelectric crystal and an electrostrictive element such as PLZT can be used.
さらに、先に説明した第２図の実施例では、圧電素子
４を4aおよび4bの半円形の２素子構成としているが、こ
れは4aの部分と4bの膨分が逆極性に分極処理された円形
の１素子としてもよい。同様に圧電素子５も１素子とし
ても良い。Further, in the embodiment shown in FIG. 2 described above, the piezoelectric element 4 has a semicircular two-element structure of 4a and 4b, but this is such that the portion of 4a and the bulge of 4b are polarized to opposite polarities. It may be one circular element. Similarly, the piezoelectric element 5 may be one element.
第１図は本発明の振動発生器の第１実施例の縦断面図、
第２図（ａ）は第１図のＡ−Ａ矢視断面図、第２図
（ｂ）は第１図のＢ−Ｂ矢視断面図、第３図は本出願人
がすでに提案した振動波モーター用いられている振動発
生体の斜視図、である。 １……振動発生器 2,3……棒状体 4,5……振動発生素子 ６……絶縁体 ８〜13……電極 17……振動発生体 18……棒状弾性体 19……圧電素子FIG. 1 is a longitudinal sectional view of a first embodiment of a vibration generator of the present invention,
2 (a) is a sectional view taken along the line AA of FIG. 1, FIG. 2 (b) is a sectional view taken along the line BB of FIG. 1, and FIG. 3 is the vibration already proposed by the applicant. FIG. 3 is a perspective view of a vibration generator used in a wave motor. 1 ... Vibration generator 2, 3 ... Rod-shaped body 4,5 ... Vibration-generating element 6 ... Insulator 8-13 ... Electrode 17 ... Vibration-generating body 18 ... Rod-shaped elastic body 19 ... Piezoelectric element
Claims (1)
素子を棒状体の軸線方向に積層してはさみ込むことによ
って該棒状体と該複数の振動発生素子とを一体化した振
動発生器であって、 前記各振動発生素子の駆動用電極が複数領域に分割さ
れ、かつこれら複数の振動発生素子が、前記各領域を前
記軸線回りにて互いにずらして積層されており、 前記複数の振動発生素子に生じた振動の合成により前記
棒状体を円振動又は楕円振動させることを特徴とする振
動発生器。1. A vibration generator in which a plurality of vibration generating elements that generate vibrations in the thickness direction are laminated in the axial direction of a rod-shaped body and sandwiched between the vibration-generating elements so that the rod-shaped body and the plurality of vibration generating elements are integrated. The driving electrode of each of the vibration generating elements is divided into a plurality of regions, and the plurality of vibration generating elements are laminated by shifting each of the regions around the axis with respect to each other, the plurality of vibrations A vibration generator characterized in that the rod-shaped body is caused to vibrate in a circular or elliptical manner by combining vibrations generated in a generating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62072088A JP2559729B2 (en) | 1987-03-26 | 1987-03-26 | Vibration generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62072088A JP2559729B2 (en) | 1987-03-26 | 1987-03-26 | Vibration generator |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8084927A Division JP2716423B2 (en) | 1996-04-08 | 1996-04-08 | Vibration generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63240380A JPS63240380A (en) | 1988-10-06 |
| JP2559729B2 true JP2559729B2 (en) | 1996-12-04 |
Family
ID=13479298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62072088A Expired - Lifetime JP2559729B2 (en) | 1987-03-26 | 1987-03-26 | Vibration generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2559729B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0744856B2 (en) * | 1988-12-16 | 1995-05-15 | 株式会社トーキン | Ultrasonic motor |
| JP2874762B2 (en) * | 1989-06-05 | 1999-03-24 | キヤノン株式会社 | Motor drive |
| JP2996483B2 (en) * | 1990-04-05 | 1999-12-27 | キヤノン株式会社 | Vibration type motor |
| EP0469883B1 (en) * | 1990-08-03 | 1999-01-13 | Canon Kabushiki Kaisha | Vibration driven motor |
| US5440190A (en) * | 1992-09-25 | 1995-08-08 | Olympus Optical Co., Ltd. | Ultrasonic motor |
| JP3107946B2 (en) * | 1993-05-07 | 2000-11-13 | キヤノン株式会社 | Vibration wave drive |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6154883A (en) * | 1984-08-24 | 1986-03-19 | Hitachi Maxell Ltd | Both-end face rotary type piezoelectric motor |
| JP2507707B2 (en) * | 1985-09-12 | 1996-06-19 | 株式会社ニコン | Ultrasonic motor |
-
1987
- 1987-03-26 JP JP62072088A patent/JP2559729B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63240380A (en) | 1988-10-06 |
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