JP2816851B2 - Piezoelectric torsional displacement element, piezoelectric expansion / contraction displacement element, and piezoelectric composite displacement element - Google Patents
Piezoelectric torsional displacement element, piezoelectric expansion / contraction displacement element, and piezoelectric composite displacement elementInfo
- Publication number
- JP2816851B2 JP2816851B2 JP63317632A JP31763288A JP2816851B2 JP 2816851 B2 JP2816851 B2 JP 2816851B2 JP 63317632 A JP63317632 A JP 63317632A JP 31763288 A JP31763288 A JP 31763288A JP 2816851 B2 JP2816851 B2 JP 2816851B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- displacement element
- peripheral surface
- electrodes
- piezoelectric ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明はSTM（走査型トンネル顕微鏡）などの顕微鏡
などの微小位置決め装置に用いられる圧電変位素子や超
音波モータなどに用いられる圧電捩り振動子として利用
される圧電変位素子に関し、特に捩り変位及び伸縮変位
の少なくとも一方を発生させることが可能な圧電変位素
子に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric displacement element used in a micropositioning device such as a microscope such as an STM (scanning tunneling microscope) or a piezoelectric torsional vibrator used in an ultrasonic motor. More particularly, the present invention relates to a piezoelectric displacement element capable of generating at least one of a torsional displacement and a telescopic displacement.
［従来の技術］ 第５図（ａ）は従来の圧電捩り変位素子の構造例であ
り、円板状の圧電捩り変位素子51は、４個の扇型の圧電
セラミックス板52が接合されて構成されている。夫々の
扇型の圧電セラミックス板は、第５図（ｂ）に示すよう
に、夫々の扇の弦の方向に分極処理が施されており、扇
型の圧電セラミックス板の上下面に電極を施し、上下電
極間に直流電圧を印加すると、扇型の圧電セラミックス
板には、板面と平行なすべり歪みが発生する。[Prior Art] FIG. 5 (a) shows an example of the structure of a conventional piezoelectric torsional displacement element, in which a disc-shaped piezoelectric torsional displacement element 51 is formed by joining four fan-shaped piezoelectric ceramic plates 52. Have been. As shown in FIG. 5 (b), each fan-shaped piezoelectric ceramic plate is polarized in the direction of the chord of each fan, and electrodes are formed on the upper and lower surfaces of the fan-shaped piezoelectric ceramic plate. When a DC voltage is applied between the upper and lower electrodes, slip distortion parallel to the plate surface is generated in the fan-shaped piezoelectric ceramics plate.
４個の扇形の圧電セラミックス板52が、円板状に接合
されている場合、夫々の扇形の圧電セラミックス板に発
生するすべり歪みは合成されて、円板の上下面が捩じれ
るような捩り歪みとなる。When the four fan-shaped piezoelectric ceramic plates 52 are joined in a disk shape, the slip distortion generated in each of the fan-shaped piezoelectric ceramic plates is combined, and the torsional distortion such that the upper and lower surfaces of the disk are twisted. Becomes
第５図（ａ）に示した従来の圧電振り変位素子におい
ては、先ず第５図（ｂ）に示すように、幅方向に分極処
理された圧電セラミックス板53から超音波加工により扇
形の圧電セラミックス板を打ち抜いて第５図（ｃ）の矢
印で示すように、幅方向に分極処理された圧電セラミッ
クス板52を作り、これを４個接着して円板状に構成する
か、第６図（ａ）に示すように、厚さ方向に分極された
圧電セラミックスのブロック54から、第６図（ｂ）の分
極方向が対角線の方向になるような正四角柱55を切り出
し、第６図（ｃ）のように４本の正四角柱55を分極方向
が閉じたループとなるように重ねて接着し、第６図
（ｄ）のように、外周を円柱状に研磨した後、第６図
（ｅ）に示すような円板状に切断するなどしている。In the conventional piezoelectric swing displacement element shown in FIG. 5 (a), first, as shown in FIG. 5 (b), a sector-shaped piezoelectric ceramic is formed from a piezoelectric ceramics plate 53 polarized in the width direction by ultrasonic processing. As shown by an arrow in FIG. 5C, a plate is punched out to form a piezoelectric ceramics plate 52 polarized in the width direction, and four of them are bonded to each other to form a disc-like shape. As shown in FIG. 6A, a square prism 55 is cut out from the piezoelectric ceramic block 54 polarized in the thickness direction so that the polarization direction in FIG. 6B becomes a diagonal direction, and FIG. As shown in FIG. 6 (d), four square prisms 55 are overlapped and bonded so as to form a loop having a closed polarization direction, and the outer periphery thereof is polished into a cylindrical shape as shown in FIG. 6 (d). It is cut into a disk shape as shown in FIG.
第７図（ａ）は別の従来の圧電捩り変位素子を示す斜
視図である。この例においては、第７図（ｃ）に示すよ
うに、リング状の圧電セラミックス61を４等分して、第
７図（ｂ）に示すような、弓形の圧電セラミックス62と
し、夫々の弓形圧電セラミックス62の端面の電極を施
し、弓の弧の方向に分極する。つぎに各々の弓形の圧電
セラミックス61の端面の電極を除去し、第７図（ｃ）に
示すように、４個の弓形圧電セラミックス62の分極の向
きを同じ向きにして、リング状に接着して構成してい
る。FIG. 7A is a perspective view showing another conventional piezoelectric torsional displacement element. In this example, as shown in FIG. 7 (c), a ring-shaped piezoelectric ceramic 61 is divided into four equal parts to form bow-shaped piezoelectric ceramics 62 as shown in FIG. 7 (b). An electrode is applied to the end face of the piezoelectric ceramic 62 and polarized in the direction of the arc of the bow. Next, the electrodes on the end faces of each of the bow-shaped piezoelectric ceramics 61 are removed, and the four bow-shaped piezoelectric ceramics 62 are bonded in a ring shape with the same polarization direction as shown in FIG. 7 (c). It is composed.
第８図は従来の圧電伸縮変位素子の構造例であり、
（ａ）は両面に電極が施され、矢印79で示される厚さ方
向に分極された圧電セラミックス円板に電圧を印加し厚
さ方向の伸縮変位を得るものである。低い印加電圧で大
きな変位を得るために、薄い圧電セラミックス円板77を
複数個積層して、第８図（ｂ）の76′のように構成され
ている場合がある。尚、78および78′は電圧を印加する
ための接続線である。FIG. 8 is a structural example of a conventional piezoelectric expansion / contraction element.
(A) is a method in which electrodes are applied to both surfaces and a voltage is applied to a piezoelectric ceramic disk polarized in the thickness direction indicated by an arrow 79 to obtain expansion and contraction displacement in the thickness direction. In order to obtain a large displacement with a low applied voltage, a plurality of thin piezoelectric ceramic disks 77 may be stacked to form a structure 76 'in FIG. 8B. Incidentally, reference numerals 78 and 78 'are connection lines for applying a voltage.
［発明が解決しようとする課題］ 第５図（ａ）及び第７図（ａ）に示した従来の圧電捩
り変位素子、第８図（ｂ）に示した圧電伸縮変位素子に
おいては、複数個の圧電セラミックスが接着されて構成
されているため、接着による特性のばらつきが大きい。
また、第５図、第６図及び第７図に示した円板あるいは
リングを得るための加工が複雑で、コスト的にも非常に
費用が掛かるものであった。[Problems to be Solved by the Invention] In the conventional piezoelectric torsional displacement element shown in FIGS. 5 (a) and 7 (a) and the piezoelectric expansion / contraction displacement element shown in FIG. The piezoelectric ceramics are bonded to each other, so that the characteristics are greatly varied due to the bonding.
Processing for obtaining the disk or ring shown in FIGS. 5, 6, and 7 was complicated and very costly.
さらに、捩り変位と伸縮変位を同時に得ようとした場
合は第５図（ａ）に示した圧電捩り変位素子51と、第８
図（ｂ）に示した圧電伸縮変位素子76を接着して構成す
るために、やはり接着による特性のばらつきと接着コス
トがかかるという問題があった。Further, when the torsional displacement and the expansion / contraction displacement are to be simultaneously obtained, the piezoelectric torsional displacement element 51 shown in FIG.
Since the piezoelectric expansion / contraction displacement element 76 shown in FIG. 8B is bonded, the characteristics are disadvantageously affected by the bonding and the bonding cost is high.
そこで、本発明の技術課題は、以上に示した従来の圧
電捩り変位素子及び圧電伸縮変位素子の欠点を除去し、
加工が簡単で、接着工程のないためにばらつきの少ない
圧電変位素子を提供することにある。Therefore, the technical problem of the present invention is to eliminate the disadvantages of the conventional piezoelectric torsional displacement element and piezoelectric expansion and contraction displacement element described above,
An object of the present invention is to provide a piezoelectric displacement element which is easy to process and has little variation because there is no bonding step.
さらに本発明の別の技術課題は、圧電捩り変位部と圧
電伸縮変位部とを有する圧電複合変位素子を提供するこ
とにある。Still another object of the present invention is to provide a piezoelectric composite displacement element having a piezoelectric torsion displacement portion and a piezoelectric expansion / contraction displacement portion.
［課題を解決するための手段］ 本発明によれば、一軸方向の両端面と、前記両端面間
に形成された外周面とを有する圧電セラミックスと、前
記外周面に形成され前記一軸方向に対して交差する方向
に延在するとともに、前記一軸の周囲に離間して交互に
配された複数の第１の斜め電極及び複数の第２の斜め電
極とを有することを特徴とする圧電捩り変位素子が得ら
れる。[Means for Solving the Problems] According to the present invention, there is provided a piezoelectric ceramic having both end surfaces in a uniaxial direction and an outer peripheral surface formed between the both end surfaces, and a piezoelectric ceramic formed on the outer peripheral surface with respect to the uniaxial direction. A plurality of first diagonal electrodes and a plurality of second diagonal electrodes alternately arranged at intervals around the one axis while extending in a direction intersecting with the piezoelectric torsion displacement element. Is obtained.
また、本発明によれば、前記圧電捩り変位素子におい
て、前記圧電セラミックスは、前記外周面と、前記両端
面間で、且つ前記外周面の内側に形成された内周面とを
有し、前記内周面は、第１の内面電極を有することを特
徴とする圧電捩り変位素子が得られる。According to the invention, in the piezoelectric torsional displacement element, the piezoelectric ceramic has the outer peripheral surface, and an inner peripheral surface formed between the both end surfaces and inside the outer peripheral surface. A piezoelectric torsional displacement element characterized in that the inner peripheral surface has a first inner surface electrode is obtained.
また、本発明によれば、前記いずれかの圧電捩り変位
素子において、少なくとも前記第１及び第２の斜め電極
により分極及び駆動を行うことを特徴とする圧電捩り変
位素子が得られる。According to the invention, there is provided a piezoelectric torsional displacement element characterized in that, in any of the piezoelectric torsional displacement elements, polarization and driving are performed by at least the first and second oblique electrodes.
また、本発明によれば、一軸方向の両端面と、前記両
端面間に形成された外周面とを有する圧電セラミックス
と、前記外周面に周方向に延在するとともに前記一軸方
向に夫々交互に互いに離間して、交差指状に配置された
複数の第１の周電極及び複数の第２の周電極とを有する
ことを特徴とする圧電伸縮変位素子が得られる。Further, according to the present invention, a piezoelectric ceramic having both end surfaces in a uniaxial direction and an outer peripheral surface formed between the both end surfaces, and a piezoelectric ceramic extending in the peripheral direction on the outer peripheral surface and alternately extending in the uniaxial direction, respectively. A piezoelectric expansion / contraction displacement element having a plurality of first peripheral electrodes and a plurality of second peripheral electrodes arranged in an interdigital manner so as to be separated from each other is obtained.
また、本発明によれば、前記圧電伸縮変位素子におい
て、前記圧電セラミックスは、前記外周面と、前記両端
面間で且つ前記外周面の内側に配置された内周面とを有
し、前記内周面は、第２の内面電極を有することを特徴
とする圧電伸縮変位素子が得られる。According to the invention, in the piezoelectric expansion-contraction displacement element, the piezoelectric ceramic has the outer peripheral surface and an inner peripheral surface disposed between the both end surfaces and inside the outer peripheral surface. The peripheral surface has a second inner surface electrode to obtain a piezoelectric expansion / contraction displacement element.
また、本発明によれば、前記いずれかの圧電伸縮変位
素子において、少なくとも前記第１及び第２の周電極に
より分極及び駆動を行うことを特徴とする圧電伸縮変位
素子が得られる。Further, according to the present invention, in any one of the piezoelectric expansion / contraction displacement elements, a piezoelectric expansion / contraction displacement element characterized in that polarization and driving are performed by at least the first and second peripheral electrodes.
さらに、本発明によれば、前記いずれかの圧電捩り変
位素子よりなる第１の駆動部と、前記いずれかの圧電伸
縮変位素子よりなる第２の駆動部とを一つの圧電セラミ
ックスに有することを特徴とする圧電複合変位素子が得
られる。Further, according to the present invention, it is preferable that one piezoelectric ceramic includes a first drive unit including any one of the piezoelectric torsion displacement elements and a second drive unit including any one of the piezoelectric expansion / contraction displacement elements. A characteristic piezoelectric composite displacement element is obtained.
ここで、本発明においては、前記圧電セラミックスの
内周面の第１及び第２の内面電極は、前記内周面全体に
配されるか、又は前記外周面の第１及び第２の斜め電
極、又は第１及び第２の周電極に対向して配されること
が好ましい。Here, in the present invention, the first and second inner electrodes on the inner peripheral surface of the piezoelectric ceramic are disposed on the entire inner peripheral surface or the first and second oblique electrodes on the outer peripheral surface are provided. Or, it is preferable to be disposed so as to face the first and second peripheral electrodes.
［作用］ 本発明の圧電捩り変位素子においては、まず圧電セラ
ミックスの外周面に該円柱の長さ方向に対して交差する
方向（好ましくは45°）に複数の第１の斜め電極と複数
の第２の斜め電極を配して二端子とし、つぎに第１及び
第２の斜め電極を用いて前記圧電セラミックスに分極処
理を施すと分極方向は、前記第１及び第２の斜め電極の
長さ方向と直角な方向となる。この状態で前記第１及び
第２の斜め電極間に電圧を印加すると、電圧の極性が分
極時の電圧の極性と同じ場合は分極の方向に伸び歪みが
発生し、電圧の極性が分極時の電圧の極性と逆の場合は
分極の方向に縮み歪みが発生する。分極方向に伸び縮み
が発生した場合は、分極方向と直角な方向には夫々これ
らと反対に縮みあるいは伸び歪みが発生する。以上の結
果として、前記圧電セラミックス円柱に捩り変位が発生
する。[Operation] In the piezoelectric torsional displacement element of the present invention, first, the plurality of first oblique electrodes and the plurality of first oblique electrodes are arranged on the outer peripheral surface of the piezoelectric ceramic in a direction (preferably 45 °) intersecting the length direction of the column. When two diagonal electrodes are arranged to form two terminals, and then the piezoelectric ceramic is subjected to polarization using the first and second diagonal electrodes, the polarization direction becomes the length of the first and second diagonal electrodes. The direction is perpendicular to the direction. When a voltage is applied between the first and second oblique electrodes in this state, if the polarity of the voltage is the same as the polarity of the voltage at the time of polarization, stretching strain occurs in the direction of polarization, and the polarity of the voltage at the time of polarization is changed. When the polarity is opposite to the polarity of the voltage, shrinkage distortion occurs in the direction of polarization. When expansion and contraction occur in the polarization direction, contraction or elongation distortion occurs in the direction perpendicular to the polarization direction, opposite to these. As a result, torsional displacement occurs in the piezoelectric ceramic cylinder.
さらに、本発明の圧電伸縮変位素子においては、圧電
セラミックスの外周面にこの円柱の円周方向に複数の第
１の周電極及び複数の第４の周電極を配すと分極方向は
前記第１及び第２の周電極の長さ方向と直角な方向即ち
圧電セラミックスの長さ方向となる。この状態で前記第
１及び第２の周電極に電圧を印加すると、電圧の極性が
分極時の電圧の極性と同じ場合は、分極の方向に伸び歪
みが発生し、電圧の極性が分極時の電圧と極性が逆の場
合は分極方向に縮み歪みが発生する。Further, in the piezoelectric expansion-contraction displacement element of the present invention, when a plurality of first circumferential electrodes and a plurality of fourth circumferential electrodes are arranged on the outer peripheral surface of the piezoelectric ceramic in the circumferential direction of the column, the polarization direction is the first direction. And the direction perpendicular to the length direction of the second peripheral electrode, that is, the length direction of the piezoelectric ceramic. When a voltage is applied to the first and second peripheral electrodes in this state, if the polarity of the voltage is the same as the polarity of the voltage at the time of polarization, stretching strain occurs in the direction of polarization, and the polarity of the voltage at the time of polarization is changed. When the voltage and the polarity are opposite, shrinkage distortion occurs in the polarization direction.
また、本発明においては、圧電セラミックスに圧電捩
り変位素子を第１の駆動部、圧電伸縮変位素子を第２の
駆動部として設けると第１の駆動部による捩り変位と第
２の駆動部による伸縮変位とを有する圧電複合変位素子
が得られる。Further, in the present invention, when the piezoelectric ceramic is provided with the piezoelectric torsional displacement element as the first drive unit and the piezoelectric expansion and contraction displacement element as the second drive unit, the torsional displacement by the first drive unit and the expansion and contraction by the second drive unit are provided. Thus, a piezoelectric composite displacement element having a displacement is obtained.
［実施例］ 以下本発明について図面を用いて詳しく説明する。EXAMPLES Hereinafter, the present invention will be described in detail with reference to the drawings.
本発明の第１の実施例について説明する。 A first embodiment of the present invention will be described.
第１図は本発明の第１の実施例に係る圧電捩り変位素
子の構造を示す斜視図であり、リング状圧電セラミック
ス10の外周面に長さ方向に対して45°の角度となるよう
に、互いに交差する複数の第１の斜め電極11及び第２の
斜め電極12が形成され、外周面の端面近傍の第１の共通
電極11′及び第２の共通電極12′に夫々接続されてい
る。FIG. 1 is a perspective view showing a structure of a piezoelectric torsional displacement element according to a first embodiment of the present invention. A plurality of first oblique electrodes 11 and second oblique electrodes 12 that intersect with each other are formed, and are connected to the first common electrode 11 'and the second common electrode 12' near the end face of the outer peripheral surface, respectively. .
第２図は本発明の実施例に係る圧電捩り変位素子の動
作原理の説明図であり、第２図（ａ）の斜視図におい
て、圧電セラミックス板20の一方の面には横方向に交互
に短冊状の第１及び第２の指電極21a,21b,・・及び22a,
22b,・・が形成され、第１及び第２の接続電極21′及び
22′に夫々接続されて、一対の交差指電極を形成してい
る。第２図（ｂ）において、破線の矢印は一対の交差指
電極を用いて分極処理を施したときの分極の向きを示し
ており、第１の指電極21a,21b,・・から第２の指電極21
a,21b,・・方向に分極されている。FIG. 2 is an explanatory view of the operation principle of the piezoelectric torsional displacement element according to the embodiment of the present invention. In the perspective view of FIG. 2 (a), one surface of the piezoelectric ceramic plate 20 is alternately arranged in the lateral direction. The first and second strip-shaped finger electrodes 21a, 21b,... And 22a,
Are formed, and the first and second connection electrodes 21 'and 22b are formed.
22 'are connected to each other to form a pair of interdigital electrodes. In FIG. 2 (b), the dashed arrow indicates the direction of polarization when the polarization process is performed using a pair of interdigital electrodes, and the direction of the second finger from the first finger electrodes 21a, 21b,. Finger electrode 21
a, 21b,...
第２図（ｃ），（ｄ）は、第２図（ｂ）において、分
極処理された圧電セラミックス板20に直流電圧を印加し
た場合に発生する歪みの状態を示しており、第２図
（ｃ），（ｄ）から分かるように破線24で示される電圧
の極性が、実線23で示される分極時の電圧の極性と同じ
場合は分極の方向に伸び歪みが、破線25で示される電圧
の極性が、実線23で示される分極時の電圧の極性と逆の
場合は分極の方向に縮み歪みが発生する。FIGS. 2 (c) and 2 (d) show the states of distortion generated when a DC voltage is applied to the polarized piezoelectric ceramic plate 20 in FIG. 2 (b). As can be seen from c) and (d), when the polarity of the voltage indicated by the broken line 24 is the same as the polarity of the voltage at the time of polarization indicated by the solid line 23, the elongation strain is increased in the direction of the polarization, and If the polarity is opposite to the polarity of the voltage at the time of polarization shown by the solid line 23, contraction distortion occurs in the direction of polarization.
第３図は圧電セラミックス円柱10′の両端面が図の矢
印のように、捩じれている場合に、円柱10′の外周面に
発生する歪みの状態を示しており、円柱10′の中心軸方
向に対して45°の角度の方向で、しかも捩じれの矢印の
向きに伸び歪みが発生し、これと直角な方向に縮み歪み
が発生している。FIG. 3 shows a state of distortion generated on the outer peripheral surface of the cylindrical column 10 'when both end surfaces of the cylindrical column 10' are twisted as shown by arrows in the figure. , An elongation distortion occurs in the direction of an angle of 45 ° and in the direction of the torsion arrow, and a contraction distortion occurs in a direction perpendicular to the direction.
圧電セラミックス円柱10′の外周面に、第２図と同様
な一対の交差指電極を第１の斜め電極及び第２の斜め電
極の交差指の方向が圧電セラミックス円柱10′の長さ方
向に対して45°となるように形成し、この一対の交差指
電極を用いて分極処理を行い、同じ交差指電極に直流電
圧を印加すると、電圧の極性が分極時の電極の極性と同
じ場合に円柱は一方向に捩じれ、電圧の極性が分極時の
逆の場合は逆方向に捩じれる。On the outer peripheral surface of the piezoelectric ceramic cylinder 10 ', a pair of interdigital electrodes similar to those shown in FIG. 2 is provided so that the direction of the intersecting fingers of the first oblique electrode and the second oblique electrode is in relation to the length direction of the piezoelectric ceramic cylinder 10'. When a DC voltage is applied to the same interdigital electrode, a column is formed when the polarity of the voltage is the same as the polarity of the electrode at the time of polarization. Are twisted in one direction, and are twisted in the opposite direction if the polarity of the voltage is opposite to that during polarization.
従って、第１図の本発明の実施例に係る圧電捩り変位
素子においては、第１及び第２の共通電極21′及び22′
間に直流電圧を印加して分極処理を施した後、電圧を印
加すれば、前述したようにリング状圧電セラミックス10
には、両端部が捩じれるような歪みが発生する。Accordingly, in the piezoelectric torsional displacement element according to the embodiment of the present invention shown in FIG. 1, the first and second common electrodes 21 'and 22' are provided.
After applying a DC voltage during the polarization process and then applying a voltage, the ring-shaped piezoelectric ceramic 10
Causes distortion such that both ends are twisted.
次に、本発明の第２の実施例について説明する。 Next, a second embodiment of the present invention will be described.
第４図は本発明の第２の実施例に係る圧電複合変位素
子の構造を示す斜視図である。この図において、リング
状圧電セラミックス30の略半分の部分をしめる第１の駆
動部30aの外周面に長さ方向に対して45゜の角度となる
ように、複数の第１の斜め電極31及び第２の斜め電極32
が形成され、それぞれ第１の共通電極31′及び第２の共
通電極32′に接続されている。さらに、残りの略半分の
部分をしめる第２の駆動部30bの外周面に円周方向と平
行に互いに交差する複数の第１の周電極33及び第２の周
電極34が形成され、夫々、長さ方向に形成された第３及
び第４の共通電極33′及び34′により電気的に接続され
ている。第２及び第３の共通電極32′及び33′は電気的
に接続されている。FIG. 4 is a perspective view showing the structure of a piezoelectric composite displacement element according to a second embodiment of the present invention. In this figure, a plurality of first oblique electrodes 31 and a plurality of first oblique electrodes 31 are formed on the outer peripheral surface of a first driving portion 30a which forms a substantially half portion of the ring-shaped piezoelectric ceramic 30 at an angle of 45 ° with respect to the length direction. Second oblique electrode 32
Are formed and connected to the first common electrode 31 'and the second common electrode 32', respectively. Further, a plurality of first peripheral electrodes 33 and second peripheral electrodes 34 that intersect with each other in parallel with the circumferential direction are formed on the outer peripheral surface of the second driving unit 30b that occupies the remaining approximately half part. It is electrically connected by third and fourth common electrodes 33 'and 34' formed in the length direction. The second and third common electrodes 32 'and 33' are electrically connected.
本発明の第２の実施例に係る圧電複合変位素子の第１
の駆動部は、第２図及び第３図で示した第１の実施例に
係る圧電捩り変位素子と同様の動作原理により駆動す
る。 第２の駆動部は、リング状圧電セラミックス30の
外周面に、第２図に示したものと同様な構造の交差指電
極を第１及び第２の周電極と、第３及び第４の共通電極
とよりなる一対の交差指電極として交差指の方向が圧電
セラミックスの円周方向と平行に形成したものであると
考えることができる。第２図及び第３図で示した動作原
理と同様に、この一対の交差指電極を用いて分極処理を
行い、同じ交差指電極に直流電圧を印加すると、電圧の
極性が分極時の電圧の極性と同じ場合に円柱は伸び、電
圧の極性が分極時の電圧の極性と逆の場合は逆に長さ方
向に縮む歪みを生ずる。First Example of Piezoelectric Composite Displacement Element According to Second Example of Present Invention
Is driven by the same operating principle as the piezoelectric torsional displacement element according to the first embodiment shown in FIGS. 2 and 3. The second drive unit includes an interdigital electrode having the same structure as that shown in FIG. 2 on the outer peripheral surface of the ring-shaped piezoelectric ceramic 30 and the third and fourth common electrodes with the first and second peripheral electrodes. It can be considered that a pair of interdigital electrodes composed of electrodes are formed so that the direction of the interdigital finger is parallel to the circumferential direction of the piezoelectric ceramic. Similar to the operation principle shown in FIGS. 2 and 3, when a polarization process is performed using this pair of interdigital electrodes and a DC voltage is applied to the same interdigital electrode, the polarity of the voltage is the voltage of the voltage at the time of polarization. When the polarity is the same, the cylinder expands, and when the polarity of the voltage is opposite to the polarity of the voltage at the time of polarization, the cylinder contracts in the length direction.
従って、第４図の本発明の第２の実施例に係る圧電複
合変位素子においては、第１及び第２の共通電極31′及
び32′間に直流電圧を印加して分極処理を施した後、電
圧を印加すれば、前述したようにリング状圧電セラミッ
クス30は、両端部が捩じれるような歪みが発生する。同
様にして、第１及び第２の周電極に第３及び第４の共通
電極を夫々接続することよりなる一対の交差指電極間に
直流高電圧を印加して、分極処理を施した後、電圧を印
加すれば前述した様にリング状圧電セラミックス30は長
さ方向に伸縮する。Therefore, in the piezoelectric composite displacement element according to the second embodiment of the present invention shown in FIG. 4, after applying a DC voltage between the first and second common electrodes 31 'and 32' to perform a polarization process. When a voltage is applied, the ring-shaped piezoelectric ceramic 30 is distorted such that both ends are twisted as described above. Similarly, after applying a DC high voltage between a pair of interdigital electrodes formed by connecting the third and fourth common electrodes to the first and second peripheral electrodes, respectively, and performing a polarization process, When a voltage is applied, the ring-shaped piezoelectric ceramics 30 expands and contracts in the length direction as described above.
以上の説明では、印加電圧として、直流電圧を印加し
た場合に発生する捩じれ歪み及び伸縮歪みについて述べ
たが、交流電圧を印加しても何等差し支えなく、捩り振
動と縦運動を同時に行う圧電複合振動子として超音波モ
ータなどに使用できる。In the above description, the torsional distortion and the stretching distortion that occur when a DC voltage is applied as the applied voltage have been described. However, there is no problem even if an AC voltage is applied. It can be used for ultrasonic motors and the like as a child.
また、本発明の実施例には示さなかったが、円筒又は
円柱形状の圧電セラミックスの外周面にこの圧電セラミ
ックスの円周方向に交互に配された複数の第１の周電極
及び複数の第２の周電極を交互に配した場合には、縦運
動のみを行う伸縮変位素子が得られることは容易に想到
できるものである。Although not shown in the embodiment of the present invention, a plurality of first circumferential electrodes and a plurality of second circumferential electrodes alternately arranged on the outer peripheral surface of the cylindrical or cylindrical piezoelectric ceramic in the circumferential direction of the piezoelectric ceramic are provided. When the circumferential electrodes are alternately arranged, it can be easily conceived that a telescopic displacement element that performs only a vertical motion can be obtained.
更に、本実施例以外にも円筒形状の圧電セラミックス
の内周面に全面電極を施したり、外周面に施された電極
と対向する電極を施すなど種々の変形が考えられるが、
これらは本発明の範囲に属することは、明らかである。In addition to the present embodiment, various modifications such as applying an entire surface electrode to the inner peripheral surface of the cylindrical piezoelectric ceramic or applying an electrode opposed to the electrode applied to the outer peripheral surface can be considered.
It is clear that these belong to the scope of the present invention.
［発明の効果］ 以上示した様に、本発明によれば、通常一般的に適用
されているプレス成型技術により容易に製造することが
可能な一軸方向の両端面と前記両端面間に形成された外
周面とを備えた圧電セラミックス、例えば、圧電セラミ
ックス円柱あるいは圧電セラミックスリングを用いて、
これらの外周面及び内周面等にこれも一般的な技術であ
る電極印刷を施すことにより圧電捩り変位素子及び圧電
伸縮変位素子等が得られるため、製造が容易で、接着工
程や複雑な加工工程による特性のばらつきの少なく、捩
り変位又は伸縮変位が可能な圧電変位素子が得られる。[Effects of the Invention] As described above, according to the present invention, there is formed between the both end surfaces in the uniaxial direction, which can be easily manufactured by a generally applied press molding technique, and the both end surfaces. Using a piezoelectric ceramic having an outer peripheral surface, for example, a piezoelectric ceramic cylinder or a piezoelectric ceramic ring,
By applying electrode printing, which is also a common technique, to these outer and inner peripheral surfaces, a piezoelectric torsional displacement element and a piezoelectric expansion and contraction displacement element can be obtained. A piezoelectric displacement element capable of torsional displacement or expansion-contraction displacement with little variation in characteristics due to the process can be obtained.
更に、本発明によれば、上記した圧電変位素子と同様
に、通常一般的に適用されているプレス成型技術により
容易に製造することが可能な一軸方向の両端面と前記両
端面間に形成された外周面とを備えた圧電セラミック
ス、例えば、圧電セラミックス円柱あるいは圧電セラミ
ックスリングを用いて、これらの外周面及び内周面等に
これも一般的な技術である電極印刷を施すことにより圧
電捩り変位素子及び圧電伸縮変位素子が一体形状として
得られるため、製造が容易で、接着工程や複雑な加工工
程による特性のばらつきの少ない、捩り変位及び伸縮変
位を同時に行うことが可能な圧電複合変位素子が得られ
る。Further, according to the present invention, similarly to the above-described piezoelectric displacement element, the piezoelectric displacement element is formed between both end faces in the uniaxial direction and can be easily manufactured by a generally applied press molding technique. Using a piezoelectric ceramic having an outer peripheral surface, for example, a piezoelectric ceramic cylinder or a piezoelectric ceramic ring, these outer peripheral surfaces and inner peripheral surfaces are subjected to electrode printing, which is also a common technique, to thereby produce a piezoelectric torsional displacement. Since the element and the piezoelectric expansion and contraction displacement element are obtained as an integral shape, the piezoelectric composite displacement element that is easy to manufacture, has small variations in characteristics due to the bonding process and complicated processing steps, and can simultaneously perform torsional displacement and expansion and contraction displacement. can get.
第１図は本発明の第１の実施例に係る圧電捩り変位素子
の構造を示す斜視図、第２図（ａ），（ｂ），（ｃ），
及び（ｄ）は交差指電極を用いて分極及び電圧印加を行
った場合の歪みの発生状態の説明図、第３図は円柱状弾
性体を捩ったときの歪みの発生状態の説明図、第４図は
本発明の第２の実施例に係る圧電複合変位素子の構造を
示す斜視図、第５図（ａ），（ｂ），及び（ｃ）は従来
例に係る捩り変位素子の構造及び製造工程の説明図、第
６図（ａ），（ｂ），（ｃ），（ｄ），及び（ｅ）は従
来の捩り変位素子の製造工程の説明図、第７図（ａ），
（ｂ），及び（ｃ）は別の従来例に係る捩り変位素子の
構造例を示す斜視図、第８図（ａ），（ｂ）は従来の圧
電伸縮変位素子の構造例を示す斜視図である。 図中10はリング状圧電セラミックス、11は第１の斜め電
極、12は第２の斜め電極、11′は第１の共通電極、12′
は第２の共通電極、20は圧電セラミックス板、21a,21b,
・・は第１の指電極、22a,22b,・・は第２の指電極、2
1′は第１の接続電極、22′は第２の接続電極、30はリ
ング状圧電セラミックス、31は第１の斜め電極、32は第
２の斜め電極、31′は第１の共通電極、32′は第２の共
通電極、33は第１の周電極、34は第２の周電極、33′は
第３の共通電極、34′は第４の共通電極、51は円板状の
圧電捩り変位素子、52は扇型の圧電セラミックス板、53
は圧電セラミックス板材、54は圧電セラミックスのブロ
ック、55は正四角柱、61はリング状の圧電セラミック
ス、62は弓形の圧電セラミックス、76,76′は圧電伸縮
変位素子、77は圧電セラミックス円板、78,78′は接続
線、79は矢印である。FIG. 1 is a perspective view showing the structure of a piezoelectric torsional displacement element according to a first embodiment of the present invention, and FIGS. 2 (a), (b), (c),
(D) is an explanatory view of the state of occurrence of distortion when polarization and voltage are applied using the interdigital electrode, FIG. 3 is an explanatory view of the state of occurrence of distortion when the columnar elastic body is twisted, FIG. 4 is a perspective view showing the structure of a piezoelectric composite displacement element according to a second embodiment of the present invention, and FIGS. 5 (a), (b) and (c) show the structure of a conventional torsional displacement element. 6 (a), (b), (c), (d), and (e) are explanatory diagrams of a manufacturing process of a conventional torsional displacement element, and FIGS.
(B) and (c) are perspective views showing a structural example of a torsional displacement element according to another conventional example, and FIGS. 8 (a) and (b) are perspective views showing a structural example of a conventional piezoelectric telescopic displacement element. It is. In the figure, 10 is a ring-shaped piezoelectric ceramic, 11 is a first oblique electrode, 12 is a second oblique electrode, 11 'is a first common electrode, 12'
Is a second common electrode, 20 is a piezoelectric ceramic plate, 21a, 21b,
.. is a first finger electrode, 22a, 22b,... Is a second finger electrode, 2
1 'is a first connection electrode, 22' is a second connection electrode, 30 is a ring-shaped piezoelectric ceramic, 31 is a first oblique electrode, 32 is a second oblique electrode, 31 'is a first common electrode, 32 'is a second common electrode, 33 is a first circumferential electrode, 34 is a second circumferential electrode, 33' is a third common electrode, 34 'is a fourth common electrode, and 51 is a disk-shaped piezoelectric element. Torsional displacement element, 52 is fan-shaped piezoelectric ceramics plate, 53
Is a piezoelectric ceramic plate, 54 is a block of piezoelectric ceramic, 55 is a square prism, 61 is a ring-shaped piezoelectric ceramic, 62 is an arcuate piezoelectric ceramic, 76 and 76 'are piezoelectric expansion and contraction elements, 77 is a piezoelectric ceramic disk, 78 , 78 'are connection lines, and 79 is an arrow.
フロントページの続き (56)参考文献 特開 昭63−236992（ＪＰ，Ａ) 特開 昭62−97677（ＪＰ，Ａ) 特開 昭62−291080（ＪＰ，Ａ) 実開 昭58−40928（ＪＰ，Ｕ) 実開 昭58−158463（ＪＰ，Ｕ)Continuation of the front page (56) References JP-A-63-2396992 (JP, A) JP-A-62-97677 (JP, A) JP-A-62-291080 (JP, A) , U) Japanese Utility Model Showa 58-158463 (JP, U)
Claims (7)
された外周面とを有する圧電セラミックスと、前記外周
面に形成され前記一軸方向に対して交差する方向に延在
するとともに、前記一軸の周囲に離間して交互に配され
た複数の第１の斜め電極及び複数の第２の斜め電極とを
有することを特徴とする圧電捩り変位素子。A piezoelectric ceramic having both end surfaces in a uniaxial direction and an outer peripheral surface formed between the both end surfaces; a piezoelectric ceramic formed on the outer peripheral surface and extending in a direction intersecting the uniaxial direction; A piezoelectric torsional displacement element comprising: a plurality of first oblique electrodes and a plurality of second oblique electrodes alternately arranged at intervals around the one axis.
前記両端面間で、且つ前記外周面の内側に形成された内
周面とを有し、前記内周面は、第１の内面電極を有する
ことを特徴とする請求項１記載の圧電捩り変位素子。2. The piezoelectric ceramic according to claim 1, wherein:
The piezoelectric torsional displacement according to claim 1, further comprising an inner peripheral surface formed between the both end surfaces and inside the outer peripheral surface, wherein the inner peripheral surface has a first inner surface electrode. element.
より分極及び駆動を行うことを特徴とする請求項１又は
２記載の圧電捩り変位素子。3. The piezoelectric torsional displacement element according to claim 1, wherein polarization and driving are performed by at least the first and second oblique electrodes.
された外周面とを有する圧電セラミックスと、前記外周
面に周方向に延在するとともに前記一軸方向に夫々交互
に互いに離間して、交差指状に配置された複数の第１の
周電極及び複数の第２の周電極とを有することを特徴と
する圧電伸縮変位素子。4. A piezoelectric ceramic having both end surfaces in a uniaxial direction and an outer peripheral surface formed between the both end surfaces, and a piezoelectric ceramic extending circumferentially on the outer peripheral surface and alternately separated from each other in the uniaxial direction. And a plurality of first circumferential electrodes and a plurality of second circumferential electrodes arranged in a cross-finger shape.
前記両端面間で且つ前記外周面の内側に配置された内周
面とを有し、前記内周面は、第２の内面電極を有するこ
とを特徴とする請求項４記載の圧電伸縮変位素子。5. The piezoelectric ceramic according to claim 1, wherein:
5. The piezoelectric expansion / contraction displacement element according to claim 4, further comprising an inner peripheral surface disposed between the both end surfaces and inside the outer peripheral surface, wherein the inner peripheral surface has a second inner surface electrode. 6. .
り分極及び駆動を行うことを特徴とする請求項４又は５
記載の圧電伸縮変位素子。6. The polarization and driving performed by at least the first and second peripheral electrodes.
The piezoelectric expansion-contraction displacement element according to claim 1.
電捩り変位素子よりなる第１の駆動部と、請求項４乃至
６の内のいずれかに記載の圧電伸縮変位素子よりなる第
２の駆動部とを一つの圧電セラミックスに有することを
特徴とする圧電複合変位素子。7. A first drive section comprising the piezoelectric torsional displacement element according to any one of claims 1 to 3, and a piezoelectric expansion / contraction displacement element according to any one of claims 4 to 6. A piezoelectric composite displacement element comprising: a piezoelectric actuator having a second drive section and a piezoelectric actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63317632A JP2816851B2 (en) | 1988-12-17 | 1988-12-17 | Piezoelectric torsional displacement element, piezoelectric expansion / contraction displacement element, and piezoelectric composite displacement element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63317632A JP2816851B2 (en) | 1988-12-17 | 1988-12-17 | Piezoelectric torsional displacement element, piezoelectric expansion / contraction displacement element, and piezoelectric composite displacement element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02163982A JPH02163982A (en) | 1990-06-25 |
| JP2816851B2 true JP2816851B2 (en) | 1998-10-27 |
Family
ID=18090326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63317632A Expired - Fee Related JP2816851B2 (en) | 1988-12-17 | 1988-12-17 | Piezoelectric torsional displacement element, piezoelectric expansion / contraction displacement element, and piezoelectric composite displacement element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2816851B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0520026U (en) * | 1991-08-23 | 1993-03-12 | 大日本スクリーン製造株式会社 | Mirror actuator |
| JP2885183B2 (en) * | 1996-05-30 | 1999-04-19 | 日本電気株式会社 | Piezoelectric transformer and its supporting structure |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5840928U (en) * | 1981-09-10 | 1983-03-17 | 株式会社東芝 | surface acoustic wave filter |
| JPS58158463U (en) * | 1982-04-17 | 1983-10-22 | 株式会社トーキン | Torsion type laminated piezoelectric displacement element |
| JPS6297677A (en) * | 1985-10-24 | 1987-05-07 | 多賀電気株式会社 | Twist vibrator |
| JPS62291080A (en) * | 1986-06-11 | 1987-12-17 | Toyota Motor Corp | Piezoelectric element and its manufacture |
| JPH067042B2 (en) * | 1987-03-25 | 1994-01-26 | 工業技術院長 | Piezoelectric element fine movement mechanism |
-
1988
- 1988-12-17 JP JP63317632A patent/JP2816851B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02163982A (en) | 1990-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH04190684A (en) | Device and method for driving ultrasonic wave | |
| JP2816851B2 (en) | Piezoelectric torsional displacement element, piezoelectric expansion / contraction displacement element, and piezoelectric composite displacement element | |
| JP2867269B2 (en) | Piezoelectric composite vibrator | |
| JP3122882B2 (en) | Ultrasonic motor | |
| JP3122881B2 (en) | Ultrasonic motor | |
| JP2729828B2 (en) | Ultrasonic motor | |
| JP2903425B2 (en) | Ultrasonic motor | |
| JP2729829B2 (en) | Ultrasonic motor | |
| JP3168430B2 (en) | Ultrasonic motor | |
| JP2832613B2 (en) | Ultrasonic motor | |
| JP2832614B2 (en) | Ultrasonic motor | |
| JPH03112376A (en) | Torsional piezoelectric element and polarizing method thereof | |
| JP2995665B2 (en) | Ultrasonic motor | |
| JP2691617B2 (en) | Ultrasonic motor | |
| JPS6365708A (en) | Different direction double bending type vibrator | |
| JP2826674B2 (en) | Ultrasonic torsional vibrator | |
| JPH0340765A (en) | Ultrasonic motor | |
| JP2574675B2 (en) | Rotary drive | |
| JP3141209B2 (en) | Ultrasonic motor | |
| JPH0628951Y2 (en) | Piezoelectric actuator | |
| JPH072033B2 (en) | Ultrasonic motor | |
| JPH04125076A (en) | Ultrasonic wave motor | |
| JPH02172577A (en) | Piezoelectric ceramic element for torsion type vibrator | |
| JPH0575172A (en) | Anisotropic composite bending type vibrator | |
| JPH0522965A (en) | Ultrasonic motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |