JP3323482B2 - Metal film defect repair method and metal film defect repair device - Google Patents
Metal film defect repair method and metal film defect repair deviceInfo
- Publication number
- JP3323482B2 JP3323482B2 JP2000267699A JP2000267699A JP3323482B2 JP 3323482 B2 JP3323482 B2 JP 3323482B2 JP 2000267699 A JP2000267699 A JP 2000267699A JP 2000267699 A JP2000267699 A JP 2000267699A JP 3323482 B2 JP3323482 B2 JP 3323482B2
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- metal plate
- defective portion
- liquid
- repair liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【発明の属する技術分野】本発明は、フォトマスクにお
ける金属被膜欠陥修正方法および金属被膜欠陥修正装置
に関する。[0001] 1. Field of the Invention [0002] The present invention relates to a method and apparatus for correcting a metal film defect in a photomask.
【０００２】[0002]
【従来の技術】一般に、半導体や液晶素子の製造用のフ
ォトマスクとして、クロムマスク等、ガラスに金属被膜
を施したものが用いられている。特にクロムマスクは、
クロム被膜が傷つきにくい上、精度が高いというメリッ
トがある。しかし、クロムマスクは、製造時に、必要な
部分にクロム被膜がない欠損部（いわゆる白欠陥）を生
じることがあり、このような欠損部が生じた場合は、ス
パッタリングでこの欠損部を埋めるようにしている。2. Description of the Related Art Generally, as a photomask for manufacturing a semiconductor or a liquid crystal element, a chrome mask or the like provided with a metal coating on glass is used. Especially the chrome mask,
The chromium coating has the advantage that it is not easily damaged and the accuracy is high. However, a chromium mask sometimes has a defect (a so-called white defect) in which a chromium film is not formed at a necessary portion during manufacturing. If such a defect occurs, the defect is filled by sputtering. ing.
【０００３】一方で、大型のプラズマディスプレイ等の
製造用のフォトマスクとして、従来は、銀乳剤を用いた
エマルジョンガラスマスクが用いられている。このエマ
ルジョンガラスマスクは、マスクを構成する被膜がやわ
らかく傷つきやすい上、精度的にあまり良くないという
問題があった。On the other hand, an emulsion glass mask using a silver emulsion is conventionally used as a photomask for manufacturing a large-sized plasma display or the like. This emulsion glass mask has problems that the coating constituting the mask is soft and easily damaged, and the accuracy is not very good.
【０００４】このようなことから、大型のプラズマディ
スプレイ等の製造用のフォトマスクとして、被膜が傷つ
きにくく精度が高いクロムマスクを用いることが望まれ
てきているが、上記のような欠損部が生じた場合に、大
型のクロムマスクの欠損部を修正するためには、非常に
高価な大型のスパッタリング装置が必要になり、コスト
の面から実現が不可能となっている。[0004] For this reason, it has been desired to use a chromium mask having high accuracy with little damage to the coating as a photomask for manufacturing a large-sized plasma display or the like. In such a case, an extremely expensive large-sized sputtering apparatus is required to correct the defective portion of the large-sized chromium mask, which cannot be realized in terms of cost.
【０００５】そこで、大型のクロムマスクの欠損部を修
正するために、欠損部に有機金液等の補修液を滴下さ
せ、この補修液にレーザ光を直接照射して焼成する技術
が考えられている。In order to correct a defective portion of a large chromium mask, a technique of dropping a repairing liquid such as an organic gold solution onto the defective portion and directly irradiating the repairing liquid with a laser beam has been considered. I have.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、補修液
にレーザ光を直接照射して焼成するのでは、レーザ光は
金属被膜部分では温度が上昇するものの欠損部はガラス
であるため温度が十分に上昇しない。このため、焼成後
の修正被膜のガラスへの接着性を十分に得ることができ
ず、剥がれてしまうことがあった。However, when the repair liquid is directly irradiated with the laser beam and baked, the temperature of the laser beam rises in the metal coating portion, but the temperature rises sufficiently because the defective portion is made of glass. do not do. For this reason, the adhesiveness of the corrected coating after firing to glass cannot be sufficiently obtained, and may be peeled off.
【０００７】したがって、本発明は、金属被膜の欠損部
を補修液を焼成することで修正する際に、修正被膜のガ
ラスへの接着を確実に行うことができる金属被膜欠陥修
正方法および金属被膜欠陥修正装置の提供を目的とす
る。Accordingly, the present invention provides a metal film defect repairing method and a metal film defect which can reliably adhere a repaired film to glass when repairing a defective portion of a metal film by baking a repair liquid. It is intended to provide a correction device.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するため
に、本発明の金属被膜欠陥修正方法は、フォトマスクに
形成された金属被膜の欠損部に補修液を滴下させるとと
もに、前記欠損部に滴下された補修液に対向して金属板
を配置し、該金属板にレーザ光を照射して前記補修液を
焼成することを特徴としている。In order to achieve the above object, a method for repairing a metal film defect according to the present invention comprises dropping a repairing liquid onto a defective portion of a metal film formed on a photomask, and applying a repair liquid to the defective portion. A metal plate is arranged to face the dropped repair liquid, and the metal plate is irradiated with laser light to bake the repair liquid.
【０００９】このように欠損部に滴下された補修液に対
向して金属板を配置し、該金属板にレーザ光を照射し該
金属板を加熱して補修液を焼成するため、欠損部のガラ
ス部分に滴下された補修液であっても温度を十分に上昇
させることができ、ガラスへの接着性を高めることがで
きる。A metal plate is arranged opposite to the repair liquid dropped on the defective portion as described above, and the metal plate is irradiated with a laser beam to heat the metal plate and burn the repair liquid. Even with the repair liquid dropped on the glass portion, the temperature can be sufficiently raised, and the adhesiveness to glass can be enhanced.
【００１０】本発明の金属被膜欠陥修正装置は、フォト
マスクに形成された金属被膜の欠損部に補修液を滴下さ
せる補修液滴下手段と、前記欠損部に滴下された補修液
に対向して配置される金属板と、該金属板にレーザ光を
照射して前記補修液を焼成する焼成手段とを有すること
を特徴としている。According to the present invention, there is provided a repair apparatus for repairing a metal film defect, comprising: a repair liquid dropping means for dropping a repair liquid onto a defective portion of a metal film formed on a photomask; And a firing means for firing the repair liquid by irradiating the metal plate with a laser beam.
【００１１】これにより、補修液滴下手段で欠損部に補
修液を滴下させ、この滴下された補修液に対向して金属
板を配置して、焼成手段で該金属板にレーザ光を照射し
該金属板を加熱して補修液を焼成するため、欠損部のガ
ラス部分に滴下された補修液であっても温度を十分に上
昇させることができ、ガラスへの接着性を高めることが
できる。With this arrangement, the repair liquid is dropped on the defective portion by the repair liquid dropping means, the metal plate is arranged to face the dropped repair liquid, and the metal plate is irradiated with laser light by the firing means. Since the repair liquid is fired by heating the metal plate, the temperature of the repair liquid dropped on the glass portion of the defective portion can be sufficiently increased, and the adhesiveness to glass can be improved.
【００１２】[0012]
【発明の実施の形態】本発明の一実施形態を図面を参照
して以下に説明する。図１および図５に示すように、金
属被膜欠陥修正装置１０は、ガラス１１の表面にクロム
被膜（金属被膜）１２が形成されたクロムマスク（フォ
トマスク）１３をスペーサ１４を介して載置させるテー
ブル１５と、該テーブル１５上のクロムマスク１３のク
ロム被膜１２が欠損しガラス１１が露出する欠損部（い
わゆる白欠陥）１７を検出し、その位置を割り出す欠損
部位置検出装置１８と、欠損部位置検出装置１８の検出
結果に基づき、欠損部１７に補修液としての有機金液２
０を滴下させる補修液滴下装置（補修液滴下手段）２１
と、金属板２３と、欠損部位置検出装置１８の検出結果
に基づき、欠損部１７に滴下された有機金液２０に対向
して金属板２３を配置する金属板配設装置２４と、欠損
部位置検出装置１８の検出結果に基づき、該金属板２３
にレーザ光を照射して有機金液２０を焼成する焼成装置
（焼成手段）２６とを有している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 5, the metal film defect correcting apparatus 10 places, via a spacer 14, a chrome mask (photomask) 13 in which a chromium film (metal film) 12 is formed on the surface of a glass 11. A table 15, a defective part position detecting device 18 for detecting a defective part (a so-called white defect) 17 in which the chromium film 12 of the chrome mask 13 on the table 15 is lost and the glass 11 is exposed, and determining the position thereof; Based on the detection result of the position detecting device 18, the organic gold solution 2
Repair droplet dropping device for dropping 0 (repair droplet dropping means) 21
A metal plate 23; a metal plate disposing device 24 for disposing the metal plate 23 in opposition to the organic gold liquid 20 dropped on the defective portion 17 based on the detection result of the defective portion position detecting device 18; Based on the detection result of the position detecting device 18, the metal plate 23
And a firing device (firing unit) 26 for firing the organic gold liquid 20 by irradiating the organic gold liquid 20 with the laser beam.
【００１３】金属板２３は、図２に示すように、所定直
径（例えば７ｍｍ）の円盤状の主板部３０と、該主板部
３０の外周部から側方に突出する少なくとも三つの脚部
３１とを有するステンレス鋼材等からなるもので、脚部
３１においてクロムマスク１３上に載置されることで、
主板部３０をクロムマスク１３の表面に対し所定の隙間
（例えば０．５ｍｍ）をあけて平行に配置する。As shown in FIG. 2, the metal plate 23 has a disk-shaped main plate portion 30 having a predetermined diameter (for example, 7 mm), and at least three leg portions 31 projecting laterally from an outer peripheral portion of the main plate portion 30. It is made of a stainless steel material or the like having
The main plate portion 30 is arranged parallel to the surface of the chrome mask 13 with a predetermined gap (for example, 0.5 mm).
【００１４】補修液滴下装置２１は、針部材２８を有し
ている。この針部材２８は、図３に示すように、下端部
に、その鉛直方向に沿う中心軸線に対し直交せずに傾斜
する傾斜平面２８ａが、平面としては一つのみ形成され
ている。補修液滴下装置２１は、まず、この針部材２８
を、有機金液が貯留された図示せぬ補修液貯留部に挿入
後に引き抜くことにより、図３に示すように、この針部
材２８の下端に微少量の有機金液２０を残留させ、この
状態で針部材２８をクロムマスク１３の欠損部１７の近
傍まで移動させる。そして、図４に示すように、針部材
２８の下端をクロムマスク１３の欠損部１７に近接させ
ることで、該針部材２８の下端に残留していた有機金液
２０を欠損部１７に接触させ該欠損部１７側に移動させ
る。The repair liquid dropping device 21 has a needle member 28. As shown in FIG. 3, the needle member 28 has, at the lower end, only one inclined plane 28a that is inclined without being orthogonal to the center axis along the vertical direction. The repair liquid dropping device 21 firstly includes the needle member 28
Is inserted into a repair liquid storage section (not shown) in which the organic gold liquid is stored, and then pulled out, so that a small amount of the organic gold liquid 20 remains at the lower end of the needle member 28 as shown in FIG. The needle member 28 is moved to the vicinity of the defective portion 17 of the chrome mask 13 with. Then, as shown in FIG. 4, by bringing the lower end of the needle member 28 close to the defective portion 17 of the chrome mask 13, the organic gold solution 20 remaining at the lower end of the needle member 28 is brought into contact with the defective portion 17. It is moved to the defective portion 17 side.
【００１５】次に、以上の金属被膜欠陥修正装置１０を
用いた金属被膜欠陥修正方法について説明する。テーブ
ル１５上にスペーサ１４を介してクロムマスク１３を水
平に配置すると、まず、欠損部位置検出装置１８が、該
テーブル１５上のクロムマスク１３のクロム被膜１２の
欠損部１７を検出しその位置を割り出して、該位置情報
を補修液滴下装置２１と金属板配設装置２４と焼成装置
２６とに出力する。Next, a method for correcting a metal film defect using the above-described metal film defect correcting apparatus 10 will be described. When the chrome mask 13 is horizontally arranged on the table 15 with the spacer 14 interposed therebetween, first, the defect position detecting device 18 detects the defect 17 of the chrome coating 12 of the chrome mask 13 on the table 15 and determines the position. Then, the position information is output to the repairing liquid dropping device 21, the metal plate disposing device 24, and the firing device 26.
【００１６】次に、補修液滴下装置２１が、針部材２８
を図示せぬ補修液貯留部に挿入後に引き抜き、図３〜図
４に示すように、上記位置情報に基づきクロムマスク１
３の欠損部１７に近接させることにより有機金液２０を
該欠損部１７に接触させて滴下させる。Next, the repair liquid dropping device 21 is connected to the needle member 28.
3 is inserted into a repair liquid storage unit (not shown) and then pulled out. As shown in FIGS.
The organic gold solution 20 is dropped by bringing the organic gold solution 20 into contact with the defective portion 17 by approaching the defective portion 17.
【００１７】この補修液滴下装置２１による有機金液２
０の滴下の完了の後、金属板配設装置２４が上記位置情
報に基づいて、図５に示すように、欠損部１７に滴下さ
れた有機金液２０にその主板部３０を上側から近接対向
させるように、金属板２３をクロムマスク１３上に載置
させる。The organic gold liquid 2 by the repair liquid dropping device 21
After the completion of the dropping of 0, the metal plate disposing device 24 closes the main plate portion 30 to the organic gold liquid 20 dropped on the defective portion 17 from above based on the position information, as shown in FIG. The metal plate 23 is placed on the chrome mask 13 so as to perform the above operation.
【００１８】この金属板配設装置２４による金属板２３
の配設の完了後、焼成装置２６が上記位置情報に基づい
て、金属板２３の主板部３０にレーザ光Ｂを照射し、該
金属板２３を加熱することにより有機金液２０を焼成し
て、図６に示すように、欠損部１７を補う修正被膜３３
を形成する。The metal plate 23 by the metal plate disposing device 24
Is completed, the baking device 26 irradiates the main plate portion 30 of the metal plate 23 with the laser beam B based on the position information and heats the metal plate 23 to bake the organic gold liquid 20. As shown in FIG.
To form
【００１９】以上に述べた実施形態によれば、欠損部１
７に滴下された有機金液２０に対向して金属板２３を配
置し、該金属板２３にレーザ光を照射し該金属板２３を
加熱して有機金液２０を焼成するため、欠損部１７のガ
ラス１１上に滴下された有機金液２０であっても温度を
十分に上昇させることができ、ガラス１１への接着性を
高めることができる。したがって、修正被膜３３のガラ
ス１１への接着を確実に行うことができる。According to the embodiment described above, the defective portion 1
7, a metal plate 23 is arranged so as to face the organic gold liquid 20 dropped on the metal plate 7, and the metal plate 23 is irradiated with a laser beam to heat the metal plate 23 and bake the organic gold liquid 20. The temperature of the organic gold liquid 20 dropped on the glass 11 can be sufficiently increased, and the adhesion to the glass 11 can be improved. Therefore, the correction coating 33 can be securely adhered to the glass 11.
【００２０】また、補修液滴下装置２１の針部材２８が
下端部に傾斜平面２８ａを有しているため、下端部が円
錐状をなすものに比して、保持した有機金液２０を良好
に欠損部１７に滴下させることができる。Further, since the needle member 28 of the repairing liquid dropping device 21 has an inclined flat surface 28a at the lower end, the held organic gold liquid 20 can be removed more favorably than that having a conical lower end. It can be dropped on the defective portion 17.
【００２１】[0021]
【発明の効果】以上詳細に説明したように、本発明の金
属被膜欠陥修正方法によれば、欠損部に滴下された補修
液に対向して金属板を配置し、該金属板にレーザ光を照
射し該金属板を加熱して補修液を焼成するため、欠損部
のガラス部分に滴下された補修液であっても温度を十分
に上昇させることができ、ガラスへの接着性を高めるこ
とができる。したがって、修正被膜のガラスへの接着を
確実に行うことができる。As described above in detail, according to the metal film defect repairing method of the present invention, a metal plate is arranged so as to face a repair solution dropped on a defective portion, and a laser beam is applied to the metal plate. Since the repair liquid is baked by irradiating and heating the metal plate, the temperature of the repair liquid dropped on the glass portion of the defective portion can be sufficiently increased, and the adhesiveness to glass can be increased. it can. Therefore, the correction coating can be securely bonded to the glass.
【００２２】また、本発明の金属被膜欠陥修正装置によ
れば、補修液滴下手段で欠損部に補修液を滴下させ、こ
の滴下された補修液に対向して金属板を配置して、焼成
手段で該金属板にレーザ光を照射し該金属板を加熱して
補修液を焼成するため、欠損部のガラス部分に滴下され
た補修液であっても温度を十分に上昇させることがで
き、ガラスへの接着性を高めることができる。したがっ
て、修正被膜のガラスへの接着を確実に行うことができ
る。Further, according to the metal film defect correcting apparatus of the present invention, the repair liquid is dropped on the defective portion by the repair liquid dropping means, and the metal plate is arranged so as to face the dropped repair liquid. Since the metal plate is irradiated with laser light to heat the metal plate and sinter the repair liquid, the temperature of the repair liquid dropped on the glass portion of the defective portion can be sufficiently increased, and the glass can be sufficiently heated. Adhesiveness to the surface. Therefore, the correction coating can be securely bonded to the glass.
【図１】 本発明の一実施形態における金属被膜欠陥修
正装置の全体構成を概略的に示す側面図である。FIG. 1 is a side view schematically showing an overall configuration of a metal film defect repairing apparatus according to an embodiment of the present invention.
【図２】 本発明の一実施形態で用いられる金属板を示
すもので、（ａ）は平面図、（ｂ）は側断面図である。FIGS. 2A and 2B show a metal plate used in an embodiment of the present invention, wherein FIG. 2A is a plan view and FIG.
【図３】 本発明の一実施形態における金属被膜欠陥修
正方法を説明する側断面図である。FIG. 3 is a side sectional view for explaining a metal film defect correcting method according to an embodiment of the present invention.
【図４】 本発明の一実施形態における金属被膜欠陥修
正方法を説明する側断面図である。FIG. 4 is a side sectional view illustrating a metal film defect repairing method according to an embodiment of the present invention.
【図５】 本発明の一実施形態における金属被膜欠陥修
正方法を説明する側断面図である。FIG. 5 is a side sectional view illustrating a metal film defect correcting method according to an embodiment of the present invention.
【図６】 本発明の一実施形態における金属被膜欠陥修
正方法を説明する側断面図である。FIG. 6 is a side sectional view for explaining a metal film defect correcting method according to an embodiment of the present invention.
１０ 金属被膜欠陥修正装置 １１ ガラス １２ クロム被膜（金属被膜） １３ クロムマスク（フォトマスク） １７ 欠損部 ２０ 有機金液（補修液） ２１ 補修液滴下装置（補修液滴下手段） ２３ 金属板 ２４ 焼成装置（焼成手段） Ｂ レーザ光 REFERENCE SIGNS LIST 10 metal film defect correcting device 11 glass 12 chrome film (metal film) 13 chrome mask (photomask) 17 defective portion 20 organic gold solution (repair solution) 21 repair droplet dropping device (repair droplet dropping device) 23 metal plate 24 firing device (Firing means) B Laser light
Claims (2)
損部に補修液を滴下させるとともに、 前記欠損部に滴下された補修液に対向して金属板を配置
し、 該金属板にレーザ光を照射して前記補修液を焼成するこ
とを特徴とする金属被膜欠陥修正方法。1. A repair liquid is dropped on a defective portion of a metal film formed on a photomask, and a metal plate is arranged facing the repair liquid dropped on the defective portion, and a laser beam is applied to the metal plate. A method for repairing a defect in a metal coating, comprising irradiating the repair liquid with irradiation.
損部に補修液を滴下させる補修液滴下手段と、 前記欠損部に滴下された補修液に対向して配置される金
属板と、 該金属板にレーザ光を照射して前記補修液を焼成する焼
成手段とを有することを特徴とする金属被膜欠陥修正装
置。2. A repair liquid dropping means for dropping a repair liquid onto a defective portion of a metal film formed on a photomask, a metal plate arranged opposite to the repair liquid dropped on the defective portion, Baking means for irradiating the plate with a laser beam to bake the repairing liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000267699A JP3323482B2 (en) | 2000-09-04 | 2000-09-04 | Metal film defect repair method and metal film defect repair device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000267699A JP3323482B2 (en) | 2000-09-04 | 2000-09-04 | Metal film defect repair method and metal film defect repair device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002072449A JP2002072449A (en) | 2002-03-12 |
| JP3323482B2 true JP3323482B2 (en) | 2002-09-09 |
Family
ID=18754578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000267699A Expired - Fee Related JP3323482B2 (en) | 2000-09-04 | 2000-09-04 | Metal film defect repair method and metal film defect repair device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3323482B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169285A (en) * | 2011-04-21 | 2011-08-31 | 深圳市科利德光电材料股份有限公司 | Method for repairing redundant chromium points of chromium plate |
-
2000
- 2000-09-04 JP JP2000267699A patent/JP3323482B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102169285A (en) * | 2011-04-21 | 2011-08-31 | 深圳市科利德光电材料股份有限公司 | Method for repairing redundant chromium points of chromium plate |
| CN102169285B (en) * | 2011-04-21 | 2013-01-09 | 深圳市科利德光电材料股份有限公司 | Method for repairing redundant chromium points of chromium plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002072449A (en) | 2002-03-12 |
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