JP3281253B2 - Gas seal - Google Patents
Gas sealInfo
- Publication number
- JP3281253B2 JP3281253B2 JP04673496A JP4673496A JP3281253B2 JP 3281253 B2 JP3281253 B2 JP 3281253B2 JP 04673496 A JP04673496 A JP 04673496A JP 4673496 A JP4673496 A JP 4673496A JP 3281253 B2 JP3281253 B2 JP 3281253B2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- carbon
- gas seal
- rotating ring
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Sliding-Contact Bearings (AREA)
- Mechanical Sealing (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、耐摩耗性、低い摩
擦係数が要求されるコンプレッサー等に好適なガスシー
ルに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas seal suitable for a compressor or the like that requires abrasion resistance and a low coefficient of friction.
【０００２】[0002]
【従来の技術】従来から、ポンプ、タービン、コンプレ
ッサー等の流体機械用のガスシールとして、超硬合金、
セラミックのいずれかを基材とする可動部材とカーボン
を主体とする静止部材とを組み合わせた構成のものが多
く使用されている。2. Description of the Related Art Conventionally, cemented carbides, gas seals for fluid machines such as pumps, turbines, compressors, etc.
A structure in which a movable member made of any of ceramics as a base material and a stationary member mainly made of carbon are combined is often used.
【０００３】[0003]
【発明が解決しようとする課題】最近、これら流体機械
の小型、高速、大容量化のニーズに伴い、ガスシールの
使用条件は、高速、大荷重へとますます過酷なものとな
ってきている。そのためガスシールに従来から使用され
ている超硬合金などの材料では、固体間の滑り接触によ
る摩擦熱の繰返しによる熱衝撃破壊や熱疲労割れの発生
等の問題が指摘されている。Recently, with the need for miniaturization, high-speed, and large-capacity of these fluid machines, the use conditions of gas seals are becoming increasingly severe under high-speed and large-load conditions. . Therefore, it has been pointed out that a material such as a cemented carbide conventionally used for a gas seal has problems such as thermal shock fracture and thermal fatigue cracking due to repeated frictional heat due to sliding contact between solids.
【０００４】一方、ＳＩＣなどのセラミックは摺動によ
る熱応力に対しては、超硬合金より優れているが、高速
回転体として利用した場合、耐衝撃性等の機械的性質が
劣る欠点を有している。また、金属材料の表面に、浸
炭、窒化処理などの硬化処理を施して摺動部材に用いて
いるが、これらの表面処理では、改質層自体の硬度、処
理後の基材変形などの点で、十分満足できる摺動面が得
られなかった。[0004] On the other hand, ceramics such as SIC are superior to cemented carbides in thermal stress due to sliding, but when used as a high-speed rotating body, have the disadvantage that mechanical properties such as impact resistance are inferior. are doing. In addition, the surface of a metal material is subjected to a hardening treatment such as carburizing or nitriding, and is used for a sliding member. However, these surface treatments have problems such as the hardness of the modified layer itself and the deformation of the base material after the treatment. Thus, a satisfactory sliding surface could not be obtained.
【０００５】また、ガスシールにおいて、回転側である
回転軸に直接または間接的に固定された回転環が回転軸
に対して回転するのを防止する回り止めの構造に、従来
の脆性材料（超硬合金、セラミックス）を使用した場合
は、次のような問題があった。即ち、機械加工、応力集
中などを避ける設計上の工夫が必要で、セラミックスな
どでは、焼きばめなどのプロセスで固定する。また、こ
れらが破損した場合、他の機械部品への損傷を避ける目
的で、飛散防止カバーで覆う等の対策が必要であった。[0005] Further, in a gas seal, a conventional brittle material (ultra-ultraviolet) is used in a detent structure for preventing a rotating ring fixed directly or indirectly to a rotating shaft on the rotating side from rotating with respect to the rotating shaft. When hard alloys and ceramics are used, there are the following problems. That is, it is necessary to devise a design to avoid machining, stress concentration, and the like. For ceramics and the like, fixing is performed by a process such as shrink fitting. In addition, when these are broken, it is necessary to take measures such as covering with a scattering prevention cover in order to avoid damage to other mechanical parts.
【０００６】本発明は上述の点に鑑みてなされたもの
で、摩擦係数を低減し、しかも耐摩耗性を向上させたガ
スシールを提供することを目的とする。[0006] The present invention has been made in view of the above points, and has as its object to provide a gas seal having a reduced friction coefficient and improved wear resistance.
【０００７】[0007]
【課題を解決するための手段】上記課題を解決するため
請求項１に記載の発明は、回転側である回転軸に直接又
は間接的に固定された回転環と、固定側に直接又は間接
的に固定され、該回転環に対向摺接する固定環とを具備
し、該回転環と固定環の摺接面に高圧側と低圧側とのガ
スシール機能を持たせるガスシールであって、回転環又
は固定環のいずれか一方の少なくとも摺接面がカーボン
を含む材料からなり、他方の摺接面にビッカース硬さ２
５００以上の窒化チタンの薄膜を形成したことを特徴と
する。[MEANS FOR SOLVING THE PROBLEMS]
The invention according to claim 1 includes a rotating ring fixed directly or indirectly to a rotating shaft that is a rotating side, and a fixed ring fixed directly or indirectly to the fixed side and slidingly facing the rotating ring. A gas seal having a gas sealing function of a high pressure side and a low pressure side on a sliding surface of the rotating ring and the stationary ring, wherein at least one sliding surface of the rotating ring or the stationary ring is made of carbon. Vickers hardness 2 on the other sliding contact surface
A thin film of 500 or more titanium nitride is formed.
【０００８】[0008]
【発明の実施の形態】以下、本発明の実施の形態を図面
に基づいて説明する。図１は本発明のガスシールを遠心
圧縮機に用いた構成例を示す図である。同図において、
シールハウジング１を貫通する回転軸２には軸スリーブ
３が固定されている。該軸スリーブ３の所定位置にはリ
ング状の突出部３ａが一体に設けられ、該突出部３ａの
両側にキー４、４を介して回転環５、５（メイティング
リング）が保持されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration example in which the gas seal of the present invention is used for a centrifugal compressor. In the figure,
A shaft sleeve 3 is fixed to a rotating shaft 2 penetrating the seal housing 1. A ring-shaped protrusion 3a is integrally provided at a predetermined position of the shaft sleeve 3, and rotating rings 5, 5 (a mating ring) are held on both sides of the protrusion 3a via keys 4, 4. .
【０００９】各回転環５に対向して固定環６が配設さ
れ、該固定環６はピン７を介してシールリングテーナ８
に結合されている。該シールリングテーナ８とシールハ
ウジング１との間にはスプリング９を介装している。そ
して該スプリング９及びシールリングテーナ８を介して
各固定環６は回転環５におしつけられている。なお、１
０はロックプレート、１１はシエアリングキー、１２は
遠心圧縮機のケーシングである。また、１３〜２０はそ
れぞれ密封用のＯリングである。A stationary ring 6 is disposed opposite to each rotating ring 5, and the stationary ring 6 is connected to a seal ring retainer 8 via a pin 7.
Is joined to. A spring 9 is interposed between the seal ring retainer 8 and the seal housing 1. Each fixed ring 6 is attached to the rotating ring 5 via the spring 9 and the seal ring retainer 8. In addition, 1
0 is a lock plate, 11 is a shearing key, and 12 is a casing of a centrifugal compressor. Reference numerals 13 to 20 denote O-rings for sealing, respectively.
【００１０】回転環５の摺動面には図２に示すように、
高圧Ｈ側から低圧Ｌ側に向けてスパイラル溝５ａ（深さ
２〜１５μｍ）が形成され、その上に窒化チタン薄膜が
形成されている。該窒化チタン薄膜の形成方法の一例と
して、ダイナミックミキシング法、即ちスパイラル溝５
ａが形成された回転環５の表面に対向してチタン蒸気発
生源及びイオン源を配置し、チタン蒸気発生源からチタ
ン蒸気を回転環５の表面に向けて発すると共に、イオン
源から窒素イオンを主体とするイオンビームを照射する
ことにより、２μｍ以上の窒化チタンの薄膜を形成す
る。[0010] As shown in FIG.
A spiral groove 5a (2 to 15 μm in depth) is formed from the high pressure H side to the low pressure L side, and a titanium nitride thin film is formed thereon. An example of a method for forming the titanium nitride thin film is a dynamic mixing method, that is, a spiral groove 5.
a titanium vapor generating source and an ion source are arranged facing the surface of the rotating ring 5 where a is formed, and titanium vapor is emitted from the titanium vapor generating source toward the surface of the rotating ring 5 and nitrogen ions are generated from the ion source. Irradiation with a main ion beam forms a thin film of titanium nitride of 2 μm or more.
【００１１】上記イオンビームの投与エネルギーを０．
１Ｗ／ｃｍ2乃至６Ｗ／ｃｍ2の範囲内にすることによ
り、ビッカース硬さ２５００以上の窒化チタンの薄膜が
形成される。該薄膜と回転環５の基材との密着力は２．
８ＧＰａ以上（スクラッチ試験による剪断応力）とな
る。[0011] The administration energy of the ion beam is set to 0.1.
When the thickness is in the range of 1 W / cm 2 to 6 W / cm 2, a titanium nitride thin film having a Vickers hardness of 2500 or more is formed. The adhesion between the thin film and the substrate of the rotating ring 5 is 2.
8 GPa or more (shear stress by a scratch test).
【００１２】上記構成のガスシールにおいて、回転軸２
が回転することにより、回転環５と固定環６とが相対運
動し、これにより回転環５の摺動面に形成されたスパイ
ラル溝５ａが高圧側のガスを巻き込んで、該摺動面に密
封流体膜を形成する。この密封流体膜により摺動面は非
接触状態となり、回転環５と固定環６との間に密封さ
れ、高圧Ｈ側から低圧Ｌ側へのガスの漏れが制限され
る。In the gas seal having the above structure, the rotating shaft 2
Rotates, the rotating ring 5 and the stationary ring 6 move relative to each other, whereby the spiral groove 5a formed on the sliding surface of the rotating ring 5 entrains the gas on the high pressure side and seals the sliding surface. Form a fluid film. The sliding surface is brought into a non-contact state by the sealed fluid film, is sealed between the rotating ring 5 and the fixed ring 6, and gas leakage from the high pressure H side to the low pressure L side is restricted.
【００１３】なお、上記例では回転環５の摺動面に動圧
発生用のスパイラル溝５ａを形成する例を示したが、動
圧発生用の溝はスパイラル溝に限定されるものではない
ことは当然である。また、動圧による非接触摺動に限定
されるものではなく、静圧により非接触摺動であっても
よい。In the above example, the spiral groove 5a for generating dynamic pressure is formed on the sliding surface of the rotary ring 5, but the groove for generating dynamic pressure is not limited to the spiral groove. Is natural. Further, the present invention is not limited to non-contact sliding by dynamic pressure, but may be non-contact sliding by static pressure.
【００１４】上記のように回転環（メインティングリン
グ）５の摺動面に窒化チタン薄膜を形成し、カーボン製
の固定環（静止リング）とを組み合わせ、起動・停止繰
り返し実験したときの起動トルクの測定結果を図３に示
す。同図において、曲線Ａは本発明の実施形態を、曲線
Ｃは回転環５に超硬合金を用いた比較例を示し、共に密
封差圧が３ＭＰａの場合を示す。また、曲線Ｂは本発明
の実施形態を、曲線Ｄは回転環５に超硬合金を用いた比
較例を示し、共に密封差圧が２ＭＰａの場合を示す。As described above, a titanium nitride thin film is formed on the sliding surface of the rotating ring (mainting ring) 5 and is combined with a carbon fixed ring (stationary ring) to start and stop when the starting and stopping are repeated. 3 shows the measurement results. In the same figure, a curve A shows the embodiment of the present invention, and a curve C shows a comparative example using a cemented carbide for the rotating ring 5, both showing the case where the sealing differential pressure is 3 MPa. Curve B shows the embodiment of the present invention, and curve D shows a comparative example in which a cemented carbide is used for the rotating ring 5, both showing the case where the sealing differential pressure is 2 MPa.
【００１５】図３から明らかなように、多数回の起動繰
返しに対して、本発明の実施形態（曲線Ａ、Ｂ）では回
転環の起動トルクが、比較例（曲線Ｃ、Ｄ）と比べて小
さく、優れた摺動特性を有する。As is apparent from FIG. 3, the starting torque of the rotating ring in the embodiment of the present invention (curves A and B) is larger than that in the comparative example (curves C and D) for a large number of repetitions of starting. Small and has excellent sliding characteristics.
【００１６】図４及び図５は、回転環５の基板に用いら
れる各種材料の熱膨張係数と基板変形量及び漏れ量との
関係を示す図である。但し、図４の基板変形量は、各種
材料から形成された基板が図６に示す寸法を有し、この
基板上に図２に示すスパイラル溝５ａ（深さ２〜１５μ
ｍ）を有し、この基板に表裏の摺動過熱による温度差が
１０℃である場合の変形量を熱解析プログラムによる数
値計算から求めた結果である。FIGS. 4 and 5 are diagrams showing the relationship between the coefficients of thermal expansion of various materials used for the substrate of the rotating ring 5 and the amounts of substrate deformation and leakage. However, the substrate deformation amount shown in FIG. 4 is such that the substrate formed from various materials has the dimensions shown in FIG. 6, and the spiral groove 5a (depth 2 to 15 μm) shown in FIG.
m), and is a result obtained by numerical calculation using a thermal analysis program when the substrate has a temperature difference of 10 ° C. due to overheating caused by sliding over the substrate.
【００１７】図５の漏れ量は、実際に図６の寸法及び図
２のスパイラル溝５ａを有する基板を形成し、このスパ
イラル溝５ａの形成面に窒化チタン薄膜をダイナミック
ミキシング法により膜厚が３μｍになるまで形成して回
転環５とし、これを硬質カーボンからなる固定環６と共
に、図１の遠心圧縮機に組み込み、密封差厚を３ＭＰ
ａ、回転速度を１２０００ｒｐｍとした時の高圧Ｈ側か
ら低圧Ｌ側への流体（ガス）の漏れ量を測定したもので
ある。The amount of leakage shown in FIG. 5 is determined by actually forming a substrate having the dimensions shown in FIG. 6 and the spiral groove 5a shown in FIG. To form a rotating ring 5 together with a stationary ring 6 made of hard carbon into the centrifugal compressor shown in FIG.
a, The amount of fluid (gas) leakage from the high pressure H side to the low pressure L side when the rotation speed is 12000 rpm is measured.
【００１８】図４及び図５より明らかなように、基板材
料として超硬合金、耐熱インバー合金、ＳＵＳ４２０Ｊ
２鋼等の低熱膨張材料を用いたとき、変形量及び漏れ量
とも小さく、優れたシール性能及び耐摩耗性が得られる
ことが分かる。なお、低熱膨張材料としては、これらの
材料に限定されるものではなく、熱膨張係数が１０×１
／１０6℃以下のものであれば、チタン合金等他の材料
でもよい。更に変形量及び漏れ量の点をある程度許容す
れば、必ずしも低熱膨張材料でなくともよい。As is clear from FIGS. 4 and 5, the substrate material is a cemented carbide, a heat-resistant invar alloy, SUS420J.
It is understood that when a low thermal expansion material such as steel 2 is used, both the amount of deformation and the amount of leakage are small, and excellent sealing performance and wear resistance can be obtained. The low thermal expansion material is not limited to these materials, and has a thermal expansion coefficient of 10 × 1.
Other materials such as a titanium alloy may be used as long as they are / 10 6 ° C or less. Further, the material may not necessarily be a low thermal expansion material as long as the deformation amount and the leakage amount are allowed to some extent.
【００１９】なお、上記実施形態では、回転環５に低熱
膨張材料を用いその摺動面に窒化チタン薄膜を形成し、
固定環６に硬質カーボン等のカーボンを含む材料を用い
る例を示したが、固定環６に低熱膨張材料を用いその摺
動面に窒化チタン薄膜を形成して、回転環５に硬質カー
ボン等のカーボンを含む材料を用いてもよいことは当然
である。In the above embodiment, a low thermal expansion material is used for the rotating ring 5 and a titanium nitride thin film is formed on its sliding surface.
Although an example in which a material containing carbon such as hard carbon is used for the stationary ring 6 has been described, a titanium nitride thin film is formed on the sliding surface of the stationary ring 6 using a low thermal expansion material, and the rotating ring 5 is made of a material such as hard carbon. Naturally, a material containing carbon may be used.
【００２０】また、上記実施形態では窒化チタンの薄膜
を形成する回転環５又は固定環６の基材に金属材料を用
いたが、本発明はそれに限定されるものではなく、超硬
合金、セラミックスを用いても全く同様な効果が得られ
る。In the above embodiment, a metal material is used as the base material of the rotating ring 5 or the stationary ring 6 for forming a thin film of titanium nitride. However, the present invention is not limited to this, and may be a cemented carbide, The same effect can be obtained by using.
【００２１】上記カーボンを含む材料とは、例えばカー
ボン系複合材料（カーボン繊維強化型複合材料、カーボ
ン複合材料等）、炭素鋼、鋳鉄、炭化物（ＳｉＣ、Ｃｒ
3Ｃ4、ＴｉＣ等）、カーボン系コーティング材料（ＤＬ
Ｃ〔ダイヤモンドライクカーボン〕膜、ＴｉＣ膜）など
を含む。The carbon-containing material includes, for example, carbon-based composite materials (carbon fiber reinforced composite materials, carbon composite materials, etc.), carbon steel, cast iron, and carbides (SiC, Cr).
3 C 4 , TiC, etc.), carbon-based coating materials (DL
C (diamond-like carbon) film, TiC film) and the like.
【００２２】なお、図１に示すガスシールにおいては、
回転環５を軸スリーブ３を介して間接的に回転軸２に取
り付ける構成としているが、これに限定されるものでは
なく、回転環５は直接回転軸２に取り付ける構成として
もよいことは当然である。In the gas seal shown in FIG.
Although the configuration is such that the rotating ring 5 is indirectly attached to the rotating shaft 2 via the shaft sleeve 3, the present invention is not limited to this, and the rotating ring 5 may be directly attached to the rotating shaft 2. is there.
【００２３】[0023]
【発明の効果】以上説明したように本願発明によれば、
ガスシールを構成する回転環又は固定環のいずれか一方
の少なくとも摺接面がカーボンを含む材料とし、他方の
摺動面にビッカース硬さ２５００以上の窒化チタンの薄
膜を形成したので、優れたシール性を有し、且つ低摩擦
係数と優れた耐摩耗性を有するガスシールが提供でき
る。According to the present gun invention as described above, according to the present invention,
At least one of the rotating ring and the stationary ring constituting the gas seal was made of a material containing carbon, and a thin film of titanium nitride having a Vickers hardness of 2500 or more was formed on the other sliding surface. Therefore, a gas seal having excellent sealing properties, a low coefficient of friction, and excellent wear resistance can be provided.
【図１】本発明のガスシールを遠心圧縮機に用いた構成
例を示す図である。FIG. 1 is a diagram showing a configuration example in which a gas seal of the present invention is used in a centrifugal compressor.
【図２】回転環の摺動面に形成されるスパイラル溝５ａ
を示す図である。FIG. 2 shows a spiral groove 5a formed on a sliding surface of a rotating ring.
FIG.
【図３】本発明のガスシールが摺動回転したときの起動
トルクの測定結果を示す図である。FIG. 3 is a diagram showing a measurement result of a starting torque when the gas seal of the present invention slides and rotates.
【図４】回転環の基板に用いられる各種材料の熱膨張係
数と基板の変形量を示す図である。FIG. 4 is a diagram showing thermal expansion coefficients of various materials used for a substrate of a rotating ring and a deformation amount of the substrate.
【図５】回転環の基板に用いられる各種材料と漏れ量と
の関係を示す図である。FIG. 5 is a diagram showing the relationship between various materials used for the substrate of the rotating ring and the amount of leakage.
【図６】回転環の基板の形状及び変形量を示す図であ
る。FIG. 6 is a diagram showing a shape and a deformation amount of a substrate of a rotating ring.
１ シールハウジング ２ 回転軸 ３ 軸スリーブ ４ キー ５ 回転環 ６ 固定環 ７ ピン ８ シールリングテーナ ９ スプリング １０ ロックプレート １１ シエアリングキー DESCRIPTION OF SYMBOLS 1 Seal housing 2 Rotating shaft 3 Shaft sleeve 4 Key 5 Rotating ring 6 Fixed ring 7 Pin 8 Seal ring retainer 9 Spring 10 Lock plate 11 Shear ring key
───────────────────────────────────────────────────── フロントページの続き (72)発明者 長坂 浩志 神奈川県藤沢市本藤沢４丁目２番１号 株式会社荏原総合研究所内 (72)発明者 木村 芳一 神奈川県藤沢市本藤沢４丁目２番１号 株式会社荏原総合研究所内 (72)発明者 土屋 直樹 東京都大田区羽田旭町11番１号 株式会 社荏原製作所内 (72)発明者 片岡 匡史 東京都大田区羽田旭町11番１号 株式会 社荏原製作所内 審査官 田合 弘幸 (56)参考文献 特開 平５−65963（ＪＰ，Ａ) 特開 昭55−166589（ＪＰ，Ａ) 実開 昭63−15369（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) F16J 15/34 F16C 17/00 - 17/26 F16C 33/00 - 33/28 ──────────────────────────────────────────────────続 き Continuation of front page (72) Inventor Hiroshi Nagasaka 4-2-1 Motofujisawa, Fujisawa-shi, Kanagawa Prefecture Ebara Research Institute, Inc. (72) Inventor Yoshikazu Kimura 4-2-2 Motofujisawa, Fujisawa-shi, Kanagawa Prefecture 1 Ebara Research Institute, Inc. (72) Inventor Naoki Tsuchiya 11-1, Haneda Asahimachi, Ota-ku, Tokyo Inside Ebara Corporation (72) Inventor Masafumi Kataoka 11-1, Haneda Asahi-cho, Ota-ku, Tokyo Examiner, Hiroyuki Tadai, EBARA CORPORATION (56) References JP-A-5-65963 (JP, A) JP-A 55-166589 (JP, A) JP-A 63-15369 (JP, U) ( 58) Investigated field (Int.Cl. 7 , DB name) F16J 15/34 F16C 17/00-17/26 F16C 33/00-33/28
Claims (4)
固定された回転環と、固定側に直接又は間接的に固定さ
れ、該回転環に対向摺接する固定環とを具備し、該回転
環と固定環の摺接面に高圧側と低圧側とのガスシール機
能を持たせるガスシールであって、 前記回転環又は固定環のいずれか一方の少なくとも摺接
面がカーボンを含む材料からなり、他方の摺接面にビッ
カース硬さ２５００以上の窒化チタンの薄膜を形成した
ことを特徴とするガスシール。A rotating ring fixed directly or indirectly to a rotating shaft that is a rotating side; and a fixed ring fixed directly or indirectly to a fixed side and slidingly opposed to the rotating ring. A gas seal in which a sliding surface of a rotating ring and a stationary ring has a gas sealing function of a high pressure side and a low pressure side, wherein at least one sliding surface of the rotating ring or the stationary ring is made of a material containing carbon. becomes, bits on the other sliding surface
Gas seal, characterized in that to form a thin film of curse hardness 2500 or more titanium nitride.
主体とする材料又はカーボンを含浸する材料からなるこ
とを特徴とする請求項１に記載のガスシール。2. The gas seal according to claim 1, wherein the material containing carbon is made of a material mainly composed of carbon or a material impregnated with carbon.
複合材料、炭素鋼、鋳鉄、炭化物、カーボン系コーティ
ング材料、高分子材料のいずれかであることを特徴とす
る請求項１に記載のガスシール。3. The gas seal according to claim 1, wherein the material containing carbon is any of a carbon-based composite material, carbon steel, cast iron, carbide, a carbon-based coating material, and a polymer material. .
であることを特徴とする請求項１乃至３のいずれか１に
記載のガスシール。4. The gas seal according to claim 1, wherein the titanium nitride thin film has a thickness of 2 μm or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04673496A JP3281253B2 (en) | 1994-05-30 | 1996-02-07 | Gas seal |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6-139431 | 1994-05-30 | ||
| JP13943194 | 1994-05-30 | ||
| JP04673496A JP3281253B2 (en) | 1994-05-30 | 1996-02-07 | Gas seal |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12840895A Division JP3291552B2 (en) | 1994-05-30 | 1995-05-26 | Seal or bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0968228A JPH0968228A (en) | 1997-03-11 |
| JP3281253B2 true JP3281253B2 (en) | 2002-05-13 |
Family
ID=26386849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04673496A Expired - Lifetime JP3281253B2 (en) | 1994-05-30 | 1996-02-07 | Gas seal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3281253B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6744160B2 (en) * | 2016-07-13 | 2020-08-19 | 日本ピラー工業株式会社 | mechanical seal |
-
1996
- 1996-02-07 JP JP04673496A patent/JP3281253B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0968228A (en) | 1997-03-11 |
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