JP3197145B2 - Dynamic gas bearing - Google Patents
Dynamic gas bearingInfo
- Publication number
- JP3197145B2 JP3197145B2 JP06704194A JP6704194A JP3197145B2 JP 3197145 B2 JP3197145 B2 JP 3197145B2 JP 06704194 A JP06704194 A JP 06704194A JP 6704194 A JP6704194 A JP 6704194A JP 3197145 B2 JP3197145 B2 JP 3197145B2
- Authority
- JP
- Japan
- Prior art keywords
- pad
- gas bearing
- rotating shaft
- sliding member
- sliding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Sliding-Contact Bearings (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ターボ機械等に適用さ
れる動圧気体軸受に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrodynamic gas bearing applied to a turbo machine or the like.
【０００２】[0002]
【従来の技術】図２に、従来の動圧気体軸受を示す。回
転軸０４が起動、停止を繰り返す際の回転軸０４とパッ
ド０３との接触摩耗対策として、それらの表面にTiN ，
TiC ，Al2O3 等の表面処理０４Ｂ，０３Ｂが施工されて
いる。2. Description of the Related Art FIG. 2 shows a conventional hydrodynamic gas bearing. As a countermeasure against contact abrasion between the rotating shaft 04 and the pad 03 when the rotating shaft 04 repeatedly starts and stops, TiN,
Surface treatments 04B and 03B such as TiC and Al 2 O 3 are applied.
【０００３】[0003]
【発明が解決しようとする課題】前記従来の動圧気体軸
受では、気体膜が十分形成されるまで回転軸０４はパッ
ド０３と接触しながら回転する。そのため、起動及び停
止時に回転軸０４及びパッド０３の表面が摩耗するた
め、TiN ，TiC ，Al2O3 等の表面処理０４Ｂ，０３Ｂが
それらの双方に施工されていた。In the conventional dynamic pressure gas bearing, the rotating shaft 04 rotates while being in contact with the pad 03 until a gas film is sufficiently formed. Therefore, the surfaces of the rotating shaft 04 and the pad 03 are worn at the time of starting and stopping, so that surface treatments 04B and 03B such as TiN, TiC, and Al 2 O 3 are applied to both of them.
【０００４】しかしながら、これらの表面処理は摩耗対
策には有効であるが、起動時の摩擦抵抗が大きく、大き
な駆動トルクが必要であった。特に、重くて大きい横置
きのロータを動圧気体軸受で支承する場合、駆動トルク
が過大になるという欠点があった。[0004] However, these surface treatments are effective for measures against abrasion, but they have a large frictional resistance at the time of startup and require a large driving torque. In particular, when a heavy and large horizontally placed rotor is supported by a hydrodynamic gas bearing, there is a disadvantage that the driving torque becomes excessive.
【０００５】起動時の摩擦抵抗を減らすために、パッド
０３の表面処理０３Ｂの表面に固体潤滑剤を被覆又は塗
付することが特開平３−１２１３０６号公報において提
案されているが、起動及び停止を繰り返す間に劣化した
り、高速回転中に短時間の接触で機能を失ってしまうと
いう問題点があった。In order to reduce frictional resistance at the time of starting, it has been proposed in JP-A-3-121306 to coat or apply a solid lubricant on the surface of the surface treatment 03B of the pad 03. However, there is a problem that the function is deteriorated during the repetition of the operation, or the function is lost due to a short contact during the high-speed rotation.
【０００６】本発明は、以上の問題点を解決することが
できる動圧気体軸受を提供しようとするものである。An object of the present invention is to provide a hydrodynamic gas bearing which can solve the above problems.
【０００７】[0007]
【課題を解決するための手段】（１）本発明は、軸受ハ
ウジングにピボットを介して周方向に３個以上のパッド
を取り付けて回転軸を支承する動圧気体軸受において、
パッドの回転軸側表面にカーボン摺動材を取り付け、か
つ、回転軸のパッド側表面にタングステンカーバイトま
たは酸化クロムからなるセラミック摺動材を取り付けた
ことを特徴とする。(1) The present invention relates to a hydrodynamic gas bearing which supports a rotary shaft by mounting three or more pads in a circumferential direction on a bearing housing via a pivot.
Attach carbon sliding material to the surface of the pad on the rotating shaft side, and attach tungsten carbide to the pad surface of the rotating shaft.
Or a ceramic sliding member made of chromium oxide .
【０００８】[0008]
【０００９】[0009]
【作用】本発明では、回転軸のパッド側表面のセラミッ
ク摺動材とパッドの回転軸側表面のカーボン摺動材とを
組み合せ、また前記セラミック摺動材をタングステンカ
ーバイトまたは酸化クロムからなるセラミックとするこ
とにより、高硬度、超硬質のセラミック摺動材と、これ
との摺動特性に優れているカーボン摺動材とが表面接触
することゝなり、摩擦係数が大幅に軽減される。したが
って、起動時の摩擦抵抗が小さくなると共に高速回転時
に回転軸とパッドが接触した際も摺動が可能となる。According to the present invention, a combination of carbon sliding material of the ceramic sliding member and the pad rotation axis side surface of the pad side surface of the rotary shaft, also consisting of the ceramic sliding member of tungsten carbide or chromium oxide ceramic By doing so, the high hardness and super hard ceramic sliding material comes into surface contact with the carbon sliding material having excellent sliding characteristics with the ceramic sliding material, and the friction coefficient is greatly reduced. Therefore, the frictional resistance at the time of starting is reduced, and the sliding can be performed even when the rotating shaft and the pad come into contact with each other during high-speed rotation.
【００１０】[0010]
【実施例】本発明の一実施例に係る動圧気体軸受を、図
１によって説明する。ターボ機械のロータ（図示せず）
の両端部にある回転軸４を取り囲むように軸受ハウジン
グ１が設けられ、周方向３ヶ所にピボット２が装着され
ている。各ピボット２には、パッド３が傾斜自由に保持
されていて、３個のパッド３が軸受ハウジング１内の周
方向に回転軸４を取り囲むように配置されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A hydrodynamic gas bearing according to an embodiment of the present invention will be described with reference to FIG. Turbomachine rotor (not shown)
The bearing housing 1 is provided so as to surround the rotating shafts 4 at both ends of the shaft, and pivots 2 are mounted at three locations in the circumferential direction. Pads 3 are held at each pivot 2 so as to be free to tilt, and three pads 3 are arranged so as to surround the rotating shaft 4 in the circumferential direction inside the bearing housing 1.
【００１１】パッド３の回転軸４側表面にはカーボン摺
動材３Ａを接着剤で取りつけ、回転軸４のパッド側表面
には、タングステンカーバイトまたは酸化クロムからな
る高強度、超硬質のセラミック摺動材４Ａを全周にばね
板４Ｂをはさんでかん合する。また、セラミック摺動材
４Ａは、回転軸４に溶射で直接に形成してもよい。[0011] The rotation shaft 4 side surface of the pad 3 attached to the carbon sliding materials 3A with an adhesive, the pad side surface of the rotary shaft 4, tungsten carbide or chromium oxide Tona
That high strength, mates across the spring plate 4B ultrahard ceramic sliding member 4A the entire circumference. The ceramic sliding member 4A may be formed directly on the rotating shaft 4 by thermal spraying.
【００１２】なお、前記カーボン摺動材３Ａ及びセラミ
ック摺動材４Ａは、パッド３及び回転軸４に物理蒸着法
（ＰＶＤ）や化学蒸着法（ＣＶＤ）等で直接に表面処理
して形成してもよい。The carbon sliding member 3A and the ceramic sliding member 4A are formed by directly surface-treating the pad 3 and the rotating shaft 4 by physical vapor deposition (PVD) or chemical vapor deposition (CVD). Is also good.
【００１３】本実施例は以上のように構成されているの
で、回転軸４のパッド側表面の硬度の高いセラミック摺
動材４Ａとパッド３の回転軸側表面のセラミック摺動材
４Ａとの摺動特性に優れているカーボン摺動材３Ａが表
面接触を行い摩擦係数が大幅に軽減される。Since the present embodiment is constructed as described above, the sliding between the ceramic sliding member 4A having a high hardness on the pad side surface of the rotating shaft 4 and the ceramic sliding member 4A on the rotating shaft side surface of the pad 3 is performed. The carbon sliding material 3A having excellent dynamic characteristics makes surface contact and the friction coefficient is greatly reduced.
【００１４】発明者らが本実施例と同様な試験条件の下
で比較した摩擦係数の代表例を、図３に示す。図３にお
いては、本実施例に用いられるタングステンカーバイ
ト、酸化クロムの摺動材とカーボン摺動材を用いた場
合、従来のＴｉＮ摺動材を組合せて用いた場合に比して
摩擦係数が大幅に軽減されたことを示している。図３に
おいて、摺動速度比とは横軸値１が実験での摺動速度約
３ｍ／ｓに相当するものであり、一方縦軸の摩擦係数比
とは従来（ＴｉＮ／ＴｉＮ：＊印）の摩擦係数を図示し
た値とした際の本実施例に用いられるタングステンカー
バイト、酸化クロムの摺動材とカーボン摺動材を用いた
場合の摩擦係数である。 FIG. 3 shows a typical example of the friction coefficient compared by the inventors under the same test conditions as in the present embodiment. In FIG. 3, if the tungsten carbide used in the present embodiment, the sliding member and the carbon sliding member acids chromium used, the friction coefficient in comparison with the case of using a combination of conventional TiN sliding member This indicates that was greatly reduced. In FIG. 3, the sliding speed ratio means that the value 1 on the horizontal axis corresponds to the sliding speed of about 3 m / s in the experiment, while the friction coefficient ratio on the vertical axis means the conventional value (TiN / TiN: * mark). tungsten carbide <br/> bytes used in this embodiment when used as a value illustrating the coefficient of friction, Ru friction coefficient der in the case of using the sliding member and the carbon sliding member of chromium oxide.
【００１５】したがって、起動時の摩擦抵抗を小さくす
ることができると共に、高速回転時に回転軸４とパッド
３が接触した際にも円滑な摺動を行うことができ、か
つ、この状態を長期間にわたって保持することができ
る。Therefore, it is possible to reduce the frictional resistance at the time of starting, and to perform smooth sliding even when the rotating shaft 4 and the pad 3 come into contact with each other at the time of high-speed rotation. Can be held over.
【００１６】[0016]
【発明の効果】本発明は、軸受ハウジングにピボットを
介して周方向に３個以上のパッドを取り付けて回転軸を
支承する動圧気体軸受の回転軸のパッド側表面にタング
ステンカーバイトまたは酸化クロムからなるセラミック
摺動材を取り付け、パッド表面の回転軸側表面にカーボ
ン摺動材を取り付けたことにより、これらの組み合せに
よる摺動特性が優れていることから、摩擦係数を従来よ
りも大幅に軽減することができる。そのため、起動時の
摩擦抵抗が小さくなり、従来のように起動トルクの大き
な駆動機を使用したり、定常運転時に必要な駆動力より
もはるかに大きな容量の駆動機を使用する必要がない。
さらに、摺動特性が優れているため、起動及び停止の繰
り返しによる劣化がなく、また、万一高速回転中に接触
しても軸受の機能を失うことがない。According to the present invention, tungsten carbide or chromium oxide is provided on the pad side surface of a rotating shaft of a dynamic pressure gas bearing in which three or more pads are circumferentially mounted on a bearing housing via a pivot to support the rotating shaft. The ceramic sliding material is made of, and the carbon sliding material is attached to the rotating shaft side surface of the pad surface, and the sliding characteristics are excellent due to the combination of these materials. can do. For this reason, the frictional resistance at the time of start-up is small, and it is not necessary to use a drive unit having a large start-up torque as in the related art, or to use a drive unit having a much larger driving force than that required during a steady operation.
Furthermore, since the sliding characteristics are excellent, there is no deterioration due to repeated start-up and stop, and the function of the bearing is not lost even in the event of contact during high-speed rotation.
【図１】本発明の一実施例に係る動圧気体軸受の断面図
である。FIG. 1 is a sectional view of a dynamic pressure gas bearing according to an embodiment of the present invention.
【図２】従来の動圧気体軸受の断面図である。FIG. 2 is a sectional view of a conventional dynamic pressure gas bearing.
【図３】本発明の前記実施例に用いられるセラミック摺
動材とカーボン摺動材を用いた場合と従来のＴｉＮ摺動
材を組合せて用いた場合の摩擦係数の比較代表例を示す
グラフである。FIG. 3 is a graph showing a comparative example of a friction coefficient between a case where a ceramic sliding material and a carbon sliding material used in the embodiment of the present invention are used and a case where a conventional TiN sliding material is used in combination. is there.
１ 軸受ハウジング ２ ピボット ３ パッド ３Ａ カーボン摺動材 ４ 回転軸 ４Ａ セラミック摺動材 DESCRIPTION OF SYMBOLS 1 Bearing housing 2 Pivot 3 Pad 3A Carbon sliding material 4 Rotating shaft 4A Ceramic sliding material
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) F16C 17/00 - 17/26 F16C 33/00 - 33/28 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) F16C 17/00-17/26 F16C 33/00-33/28
Claims (1)
向に３個以上のパッドを取り付けて回転軸を支承する動
圧気体軸受において、パッドの回転軸側表面にカーボン
摺動材を取り付け、かつ、回転軸のパッド側表面にタン
グステンカーバイトまたは酸化クロムからなるセラミッ
ク摺動材を取り付けたことを特徴とする動圧気体軸受。1. A dynamic pressure gas bearing in which three or more pads are circumferentially mounted on a bearing housing via a pivot to support a rotary shaft, and a carbon sliding material is mounted on a rotary shaft side surface of the pad, and Touch the surface of the rotating shaft on the pad side.
A hydrodynamic gas bearing to which a ceramic sliding member made of gustene carbide or chromium oxide is attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06704194A JP3197145B2 (en) | 1993-04-08 | 1994-04-05 | Dynamic gas bearing |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-81937 | 1993-04-08 | ||
| JP8193793 | 1993-04-08 | ||
| JP06704194A JP3197145B2 (en) | 1993-04-08 | 1994-04-05 | Dynamic gas bearing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06341429A JPH06341429A (en) | 1994-12-13 |
| JP3197145B2 true JP3197145B2 (en) | 2001-08-13 |
Family
ID=26408246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06704194A Expired - Fee Related JP3197145B2 (en) | 1993-04-08 | 1994-04-05 | Dynamic gas bearing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3197145B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3930734B2 (en) * | 2001-12-28 | 2007-06-13 | 株式会社荏原製作所 | Vertical shaft pump |
| KR100428301B1 (en) * | 2002-05-15 | 2004-04-28 | 현대자동차주식회사 | Press mold |
| JP4992986B2 (en) * | 2010-01-22 | 2012-08-08 | 新東工業株式会社 | Hydrostatic bearing device and stage with hydrostatic bearing device |
| JP6709061B2 (en) * | 2016-02-04 | 2020-06-10 | 三菱重工コンプレッサ株式会社 | Tilting pad gas bearing |
-
1994
- 1994-04-05 JP JP06704194A patent/JP3197145B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06341429A (en) | 1994-12-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20010501 |
|
| LAPS | Cancellation because of no payment of annual fees |