JP3241703B2 - Ultrasonic motor and ultrasonic motor manufacturing method - Google Patents
Ultrasonic motor and ultrasonic motor manufacturing methodInfo
- Publication number
- JP3241703B2 JP3241703B2 JP27310599A JP27310599A JP3241703B2 JP 3241703 B2 JP3241703 B2 JP 3241703B2 JP 27310599 A JP27310599 A JP 27310599A JP 27310599 A JP27310599 A JP 27310599A JP 3241703 B2 JP3241703 B2 JP 3241703B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic motor
- sliding surface
- vibrating body
- moving body
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧電素子の伸縮運
動を回転及び直線運動に変換する超音波モータ及びその
製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor for converting the expansion and contraction movement of a piezoelectric element into rotation and linear movement, and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】従来の超音波モータの構造をを第２図に
示す。固定台２０９に固定された中心軸２０８に振動体
２０１を固定する。振動体２０１の下面には分極された
圧電素子２０２が接着されている。振動体２０１の変位
拡大機構部２０５には、摩擦材（図示しない）を介して
移動体２０３が接触する。移動体２０３は中心軸２０８
に組込まれ、加圧バネ２０７により、振動体２０１に押
付けられている。圧電素子２０２に位相の異なる複数の
高周波電圧を印加すると、振動体２０１にたわみ振動が
発生し、圧接された移動体２０３が、摩擦力によって回
転する。このような超音波モータにおいては、摩擦駆動
するから、その接触面の状態がモータの性能に大きく影
響する。そこで、従来は振動体２０１の摺動面と摩擦材
の摺動面は、それぞれ別々に条件を定めて材質の決定、
表面の仕上加工などを行っていた。2. Description of the Related Art FIG. 2 shows the structure of a conventional ultrasonic motor. The vibrating body 201 is fixed to the center shaft 208 fixed to the fixed base 209. A polarized piezoelectric element 202 is adhered to the lower surface of the vibrating body 201. The moving body 203 contacts the displacement magnifying mechanism 205 of the vibrating body 201 via a friction material (not shown). The moving body 203 has a central axis 208.
, And pressed against the vibrating body 201 by a pressure spring 207. When a plurality of high-frequency voltages having different phases are applied to the piezoelectric element 202, a flexural vibration is generated in the vibrating body 201, and the pressed moving body 203 is rotated by a frictional force. Since such an ultrasonic motor is driven by friction, the state of the contact surface greatly affects the performance of the motor. Therefore, conventionally, the sliding surface of the vibrating body 201 and the sliding surface of the friction material are separately determined for the material by determining conditions,
Finishing of the surface was performed.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来のように
振動体あるいは移動体摺動面の表面加工や、材質を個別
に決定したとしても、駆動時に他方の影響を少なからず
受けることになる。その影響の大きさは表面状態及び材
料特性が異なれば異なるほど大きくなる。したがって、
初期的には性能が良くても、駆動時間が増すごとに、そ
の性能が変化するような効率の悪い不安定な超音波モー
タになってしまうという課題があった。However, even if the surface processing of the vibrating body or the sliding surface of the moving body or the material is individually determined as in the prior art, the other side is affected to a considerable extent during driving. The magnitude of the effect increases as the surface state and material properties differ. Therefore,
At the beginning, there is a problem that even if the performance is good, the ultrasonic motor becomes inefficient and unstable so that the performance changes as the driving time increases.
【０００４】そこで、本発明の目的は従来のこのような
課題を解決するために、初期的にも性能が良く、長時間
駆動しても性能が変化しないという効率か良く、安定し
た動作が可能な超音波モータを得ることとしている。[0004] Therefore, an object of the present invention is to solve the above-mentioned problems in the prior art, in which the performance is good even at the initial stage, and the performance does not change even if driven for a long time. To obtain a simple ultrasonic motor.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
に、本発明は振動体に移動体を圧接し、圧電素子の伸縮
運動により発生する波動で摩擦駆動する超音波モータに
おいて、振動体及び移動体のそれぞれの摺動面に、平滑
化手段により仕上加工をほどこすことにより同等の表面
粗さとし、さらに同じ材質を用いることにより、効率が
よく性能の安定した超音波モータを得られるようにし
た。In order to solve the above-mentioned problems, the present invention relates to an ultrasonic motor which frictionally drives a moving body by pressing a moving body against the vibrating body and generates a wave by the expansion and contraction of a piezoelectric element. Each sliding surface of the moving body is subjected to finish processing by smoothing means to achieve the same surface roughness, and by using the same material, an efficient and stable ultrasonic motor can be obtained. did.
【０００６】超音波モ一タか駆動している場合、振動体
と移動体の摺動面の接触状態は、拡大すると第３図のよ
うになっている。すなわち、変位拡大機構部３０５の一
部が摩擦材３０４と接している。さらに、微視的に見た
場合、第５図のように一定の表面粗さを持った摩擦材５
０４と振動体５０１の不連続な面同志が不均一に接触し
ていると考えられる。この場合、互いの摺動面の表面状
態、すわなち、表面粗さが極端に異なり、表面粗さの粗
い物を用いると摩耗し易いものとなる。When the ultrasonic motor is driven, the state of contact between the vibrating body and the sliding surface of the moving body is enlarged as shown in FIG. That is, a part of the displacement magnifying mechanism 305 is in contact with the friction material 304. Further, when viewed microscopically, the friction material 5 having a constant surface roughness as shown in FIG.
It is considered that the discontinuous surfaces of 04 and the vibrating body 501 are in non-uniform contact. In this case, the surface condition of the sliding surfaces of each other, that is, the surface roughness is extremely different, and if a material having a large surface roughness is used, the sliding surface is easily worn.
【０００７】ところが、本発明のように振動体及び移動
体のそれぞれの摺動面に、平滑化手段により仕上加工を
ほどこし両者の表面粗さを同等とした場合、それぞれの
表面状態がはぼ等しくなり、微視的に見た場合において
も、第４図に示すように、より均一な接触状態を得るこ
とができる。また、それぞれの摺動面の材質を同じにす
ることによって、摩耗の仕方が等しくなり、表面状態の
変化が少なくなる。However, when the respective sliding surfaces of the vibrating body and the moving body are subjected to a finishing process by a smoothing means to have the same surface roughness as in the present invention, the respective surface conditions are almost equal. In other words, even when viewed microscopically, a more uniform contact state can be obtained as shown in FIG. In addition, by making the material of each sliding surface the same, the manner of wear becomes equal, and the change in the surface condition is reduced.
【０００８】以上の作用から表面状態が安定し、効率の
良い特性の安定した超音波モータが得られる。[0008] From the above operation, the surface state is stabilized, and an ultrasonic motor having stable characteristics with high efficiency can be obtained.
【０００９】[0009]
【発明の実施の形態】以下に、本発明の実施例を図面に
基づいて説明する。第１図は本発明による超音波モータ
の基本構造を示す。実際に本発明構造を実施した振動体
１０１の体部１０６の径がφ１０ｍｍの超音波モータを
製作した。振動体１０１の材質はＡl、摩擦材１０４の
材質はカーボンファイバを含有した複合プラスチックを
用いた。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows the basic structure of an ultrasonic motor according to the present invention. An ultrasonic motor in which the diameter of the body 106 of the vibrating body 101 in which the structure of the present invention was actually implemented was 10 mm was manufactured. The material of the vibrating body 101 was Al, and the material of the friction material 104 was a composite plastic containing carbon fiber.
【００１０】振動体１０１はＡｌの丸棒原料からＮＣ旋
盤により形状を加工し、摺動面も切削加工で仕上げた。
摩擦材１０４は射出成形により外形を形成し、移動体１
０３に接着固定した後、摺動面を切削加工により仕上げ
た。この超音波モータを駆動させ、性能及び耐久性を調
査した。超音波モータの性能を示す効率の測定結果は第
６図（ａ）、耐久性については第７図（ａ）に示すよう
な結果になった。The shape of the vibrating body 101 was processed from an Al round bar raw material by an NC lathe, and the sliding surface was finished by cutting.
The outer shape of the friction material 104 is formed by injection molding.
After bonding and fixing to No. 03, the sliding surface was finished by cutting. The ultrasonic motor was driven to investigate the performance and durability. The measurement results of the efficiency indicating the performance of the ultrasonic motor were as shown in FIG. 6 (a), and the durability was as shown in FIG. 7 (a).
【００１１】次に、この超音波モータの摩擦材１０４の
摺動面を１５００♯の砥粒によりラッピングして、性能
及び耐久性を調査したところ、効率については第６図
（ｂ）、耐久性については第７図（ｂ）に示すような結
果になった。さらに、振動体１０１の摺動面を摩擦材１
０４と同様に１５００♯の砥粒によりラッピングし、効
率及び耐久性を調査した。効率については第６図
（ｃ）、耐久性については第７図（ｃ）に示すような結
果になった。Next, the sliding surface of the friction material 104 of the ultrasonic motor was wrapped with 1500 ° abrasive grains, and its performance and durability were examined. The efficiency was shown in FIG. 6 (b). The result was as shown in FIG. 7 (b). Further, the sliding surface of the vibrating body 101 is
As in the case of Example No. 04, lapping was carried out with 1500 ° abrasive grains, and the efficiency and durability were examined. The results are as shown in FIG. 6 (c) for the efficiency and FIG. 7 (c) for the durability.
【００１２】以上の，３つの加工方法を比較してみる
と、振動体１０１、摩擦材１０４両方の摺動面を同じよ
うにラッピングした場合が最も良いものとなっている。
すなわち、第６図に示すように超音波モータの効率は、
摩擦材の摺動面および振動体の摺動面の両方をラッピン
グ加工したものが一番高く（第６図（ｃ））、次が摩擦
材のみラッピング加工したものである（同図（ｂ））。Comparing the above three working methods, the best one is obtained when the sliding surfaces of both the vibrating body 101 and the friction material 104 are wrapped in the same manner.
That is, as shown in FIG. 6, the efficiency of the ultrasonic motor is
The one obtained by lapping both the sliding surface of the friction material and the sliding surface of the vibrating body is the highest (FIG. 6 (c)), and the second one is obtained by lapping only the friction material (FIG. 6 (b)). ).
【００１３】また、第７図に示すように超音波モータの
耐久性も、摩擦材の摺動面および振動体の摺動面の両方
をラッピング加工したものが一番安定しており（第７図
（ｃ））、次が摩擦材のみラッピング加工したものであ
る（同図（ｂ））。そして、本発明の平滑化手段として
は、ラッピングだけでなく研削加工、ホーニング加工、
バフ研磨加工、化学研磨加工、電解研磨加工、バレル加
工及びショットピーニング加工などか適用できる。Further, as shown in FIG. 7, the durability of the ultrasonic motor is most stable when both the sliding surface of the friction material and the sliding surface of the vibrating body are wrapped (FIG. 7). FIG. (C)), and the next is the result of lapping only the friction material (FIG. (B)). And as the smoothing means of the present invention, not only lapping but also grinding, honing,
Buffing, chemical polishing, electrolytic polishing, barrel processing, shot peening, and the like can be applied.
【００１４】このように振動体、摩擦材両方の摺動面を
平滑化手段により同等の表面粗さとなるように仕上げ加
工すると、性能及び耐久性が向上する。他の実施例とし
て、振動体外径がφ３０ｍｍ程度のモータで振動体の外
形をダイカスト加工で形成し、摺動面を研削仕上げを行
い、摩擦材は移動体にアウトサート成形し同様の条件で
研削仕上げを行った。この本発明を実施した超音波モー
タの実験結果によっても性能及び耐久性の向上がみられ
た。When the sliding surfaces of both the vibrating body and the friction material are finished by the smoothing means so as to have the same surface roughness, the performance and durability are improved. In another embodiment, the outer shape of the vibrating body is formed by die-casting using a motor having an outer diameter of about 30 mm, and the sliding surface is ground, and the friction material is outsert-molded on the moving body and ground under the same conditions. Finished. The performance and durability of the ultrasonic motor according to the present invention were also improved by the experimental results.
【００１５】次に振動体の摺動面に摩擦材と同じ材質の
複合プラスチックを接着し、その摺動面を摩擦材と同等
の表面粗さとなるように仕上加工を行った。この振動体
に先の移動体を組み合わせて性能及び耐久性を調査した
ところ、振動体がＡｌの場合と比較して耐久性は向上し
た。Next, a composite plastic of the same material as the friction material was adhered to the sliding surface of the vibrator, and the sliding surface was finished to have the same surface roughness as the friction material. When the performance and durability were examined by combining the vibrating body with the preceding moving body, the durability was improved as compared with the case where the vibrating body was Al.
【００１６】[0016]
【発明の効果】本発明は以上説明したように、振動体及
び移動体の摺動面に平滑化手段により同等の表面粗さと
なるように、仕上加工をほどこすこと、さらに同じ材質
を用いることにより、初期的にも経時的にも均一な接触
状態が得られ、効率が良く耐久性の優れた超音波モータ
を得ることができるという効果がある。As described above, according to the present invention, the smoothing means is used to finish the sliding surfaces of the vibrating body and the moving body so as to have the same surface roughness, and to use the same material. Accordingly, a uniform contact state can be obtained both initially and over time, and there is an effect that an ultrasonic motor having high efficiency and excellent durability can be obtained.
【図１】本発明の超音波モータの基本構造を示す断面図
である。FIG. 1 is a sectional view showing a basic structure of an ultrasonic motor according to the present invention.
【図２】超音波モータの基本構造を示す斜視図である。FIG. 2 is a perspective view showing a basic structure of an ultrasonic motor.
【図３】本発明による超音波モータの接触状態を示す断
面図である。FIG. 3 is a sectional view showing a contact state of the ultrasonic motor according to the present invention.
【図４】本発明による超音波モータの接触状態を微視的
に見た場合の断面図である。FIG. 4 is a sectional view when the contact state of the ultrasonic motor according to the present invention is viewed microscopically.
【図５】従来の超音波モータの接触状態を微視的に見た
場合の断面図である。FIG. 5 is a cross-sectional view when the contact state of a conventional ultrasonic motor is viewed microscopically.
【図６】本発明による超音波モータと従来の超音波モー
タの効率を比較した図である。FIG. 6 is a diagram comparing the efficiency of an ultrasonic motor according to the present invention with that of a conventional ultrasonic motor.
【図７】本発明による超音波モータと従来の超音波モー
タの耐久性を比較した図である。FIG. 7 is a diagram comparing the durability of an ultrasonic motor according to the present invention and a conventional ultrasonic motor.
１０１、２０１、３０１、４０１、５０１ 振動体 １０２、２０２、３０２ 圧電素子 １０３、２０３、３０３ 移動体 １０４、２０４、３０４、４０４、５０４ 摩擦材 １０５、２０５、３０５ 変位拡大機構部 １０６、２０６、３０６ 体部 １０７、２０７ 加圧バネ １０８、２０８ 中心軸 １０９、２０９ 固定台 101, 201, 301, 401, 501 Vibration body 102, 202, 302 Piezoelectric element 103, 203, 303 Moving body 104, 204, 304, 404, 504 Friction material 105, 205, 305 Displacement enlargement mechanism section 106, 206, 306 Body part 107, 207 Pressing spring 108, 208 Center axis 109, 209 Fixed base
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H02N 2/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) H02N 2/00
Claims (3)
摩擦駆動する移動体とを有する超音波モータにおいて、 前記振動体の摺動面を切削加工により仕上げ、 前記移動体の摺動面をラッピングにより仕上げた ことを
特徴とする超音波モータ。And 1. A vibrator having a piezoelectric element, is pressed against the vibration member, the ultrasonic motor and a moving body frictionally driven by the expansion and contraction motion of the piezoelectric element, cutting the sliding surface of the vibrating member ultrasonic motor for finishing, characterized in that finished by lapping the sliding surface of the movable body by.
うち、いずれか一方がアルミニウム合金であり、他方が
カーボンファイバーを含有した複合プラスチック材であ
ることを特徴とする請求項１に記載の超音波モータ。2. The material of the sliding surface of the vibrating body and the moving body
One of them is aluminum alloy and the other is
Composite plastic material containing carbon fiber
Ultrasonic motor according to claim 1, characterized in that that.
摩擦駆動する移動体とを有する超音波モータにおいて、 前記振動体及び移動体の摺動面の材質のうち、いずれか
一方がアルミニウム合金であり、他方がカーボンファイ
バーを含有した複合プラスチック材であり、 前記振動体の摺動面と、前記移動体の摺動面を、同じ平
滑化手段により仕上げ加工を施したことを特徴とする超
音波モータ。 3. A vibrating body having a piezoelectric element, which is pressed against said vibrating body, and is expanded and contracted by said piezoelectric element.
In the ultrasonic motor and a moving body frictionally driven out of the material of the sliding surface of the vibrating body and moving body, either is aluminum alloy and the other Ri composite plastic material der containing carbon fibers the sliding surface of the vibrator, the sliding surface of the movable body, the same Rights
Super characterized by having been finished by means of lubrication
Sound wave motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27310599A JP3241703B2 (en) | 1999-09-27 | 1999-09-27 | Ultrasonic motor and ultrasonic motor manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27310599A JP3241703B2 (en) | 1999-09-27 | 1999-09-27 | Ultrasonic motor and ultrasonic motor manufacturing method |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2245075A Division JPH04125084A (en) | 1990-09-13 | 1990-09-13 | Ultrasonic wave motor and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000139089A JP2000139089A (en) | 2000-05-16 |
| JP3241703B2 true JP3241703B2 (en) | 2001-12-25 |
Family
ID=17523215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27310599A Expired - Lifetime JP3241703B2 (en) | 1999-09-27 | 1999-09-27 | Ultrasonic motor and ultrasonic motor manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3241703B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4751076B2 (en) * | 2005-02-18 | 2011-08-17 | セイコーインスツル株式会社 | Ultrasonic motor and electronic device using the same |
-
1999
- 1999-09-27 JP JP27310599A patent/JP3241703B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000139089A (en) | 2000-05-16 |
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