JPS6022479A - Stator of surface wave motor and improvement in movable element - Google Patents
Stator of surface wave motor and improvement in movable elementInfo
- Publication number
- JPS6022479A JPS6022479A JP58130715A JP13071583A JPS6022479A JP S6022479 A JPS6022479 A JP S6022479A JP 58130715 A JP58130715 A JP 58130715A JP 13071583 A JP13071583 A JP 13071583A JP S6022479 A JPS6022479 A JP S6022479A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- rotor
- surface wave
- stator
- mover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims abstract description 5
- 230000033001 locomotion Effects 0.000 claims description 5
- 238000003754 machining Methods 0.000 abstract description 7
- 239000000835 fiber Substances 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 210000004177 elastic tissue Anatomy 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は表面波モータの回転子／移動子に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a rotor/scillator for a surface wave motor.
従来から広く用いられている各種モータ装置は、その駆
動源として電磁力を応用１〜だものが大部分であり、各
種用途に使われている。しかしこれら装置の大きさ、重
量及び回転力などは用いられる材料によって一定の制限
を受けるものである。2. Description of the Related Art Most of the various motor devices that have been widely used in the past utilize electromagnetic force as their driving source, and are used for various purposes. However, the size, weight, rotational force, etc. of these devices are subject to certain limitations depending on the materials used.
なぜならば、これらの因子は用いられる材料の磁気的特
性等によって決められるものであり、これらの特性を超
えた装置は回転駆動を行うことが不可能となるためであ
る。This is because these factors are determined by the magnetic properties of the materials used, and devices that exceed these properties cannot be rotated.
一方、これらの各種モータ装置に代替する装置として、
本出願人によって超音波振動を利用したモータ装置即ち
、超音波振動子の表面において励振される表面波を相互
に加圧接触する位置に配置した動体の一方向運動に変換
する如き装置が開示されている。On the other hand, as an alternative to these various motor devices,
The present applicant has disclosed a motor device that uses ultrasonic vibration, that is, a device that converts surface waves excited on the surface of an ultrasonic vibrator into unidirectional motion of moving objects placed in pressure contact with each other. ing.
これら発明によって超音波の持つ強力な振動エネルギー
を回転又は直進運動に変換することによって小型に（７
て軽−１なモータ装置を実現したものである。These inventions convert the powerful vibrational energy of ultrasonic waves into rotational or linear motion, making it compact (7
This realizes a light and lightweight motor device.
一般に、切削又ｔま研削加工された部品の平面度は約０
．００１１１〜０．１ ｍａｒ程度の誤差がある。この
ような平面をもった固定子表面に剛体に近い素材の回転
子／移動子の表面を加圧接触させても、ミクロ的にみれ
ば各部品の面粗さが、第１図における横振幅ａと近匍し
、均一な圧力で接触することが出来ず、駆動力の伝達効
率が非常に損なわれることとなる。In general, the flatness of parts that have been cut or ground is approximately 0.
．． There is an error of about 00111 to 0.1 mar. Even if the surface of the rotor/scillator made of a nearly rigid material is brought into pressure contact with the stator surface having such a flat surface, from a microscopic perspective, the surface roughness of each component will be reduced by the lateral amplitude in Figure 1. Since the contact point is close to the contact point a, it is not possible to contact the contact point with uniform pressure, and the transmission efficiency of the driving force is greatly impaired.
また、固定子表面上に形成される表面波の振幅は均一と
はならず、加工精度を上げたとしても、回転子表面はす
べての表面波の頂点に接触するとはかぎらないのである
。Furthermore, the amplitude of the surface waves formed on the stator surface is not uniform, and even if the machining accuracy is improved, the rotor surface does not always come into contact with all the peaks of the surface waves.
従って、従来では、所定の伝達効率を維持するため、固
定子表面を回転子表面と共に超精密平面仕上げすること
が必要であった。Therefore, conventionally, in order to maintain a predetermined transmission efficiency, it has been necessary to perform an ultra-precise flat finish on the stator surface and the rotor surface.
本発明は、一般的加工による不完全な平面と不均一な表
面波が形成されている固定子表面に、所定の弾性を有す
るスライダーとして構成された回転子を加圧接触させて
、その回転子を駆動させることにより、これらの欠点を
除去し、高効率化による強い駆動力の発生及び超精密加
工作業の不要化を図るように［また表面波モータ装置に
おける回転子／移動子を提供することを目的とするもの
である。The present invention brings a rotor configured as a slider having a predetermined elasticity into pressure contact with a stator surface on which an imperfect plane and non-uniform surface waves are formed due to general machining. By driving a surface wave motor, these drawbacks can be eliminated, a strong driving force can be generated due to high efficiency, and ultra-precision machining work can be eliminated. The purpose is to
以下図面を参照１．て本発明に係るモータ装置の動作原
理と実施例に関１〜詳細な説明を行う。See drawings below 1. The operating principle and embodiments of the motor device according to the present invention will now be described in detail.
〈１〉動作原理について
第１図は動作原理を説明するための一部拡大斜視図であ
る。ＩＦｉ金属等弾性体であり、その弾性体表面ｌａ上
に横振動と縦振動が合成された表面波が形成された状態
を拡大して示している。<1> Principle of operation FIG. 1 is a partially enlarged perspective view for explaining the principle of operation. It is an elastic body such as IFi metal, and the state in which a surface wave, which is a combination of transverse vibration and longitudinal vibration, is formed on the surface la of the elastic body is shown in an enlarged manner.
第１図は表面波の伝搬状態（振動源は図示せず）のみを
示ｌ〜でいる。即ち、質点Ｂに着目すると、横振巾ａ、
（上下方向）と縦振巾ｂ（左右方向）との合成された欄
内Ｑ上を矢印Ｍの方向に運動しており、その表面波は音
速Ｕのスピードで移動している。この運動は表面ｌａ上
のどの点であっても同様であって、この状態下でフリー
な動体２の表面を弾性体１の表面上に加圧接触させると
、この動体２は弾性体１の表面波の頂点Ａ及びにの部分
でのみ接触しており、かつこれら頂点Ａ、Ａ’は振動速
度Ｖ ＝ ｚｇ＋ｂ （ただし＋は振動数）で矢印Ｍの
方向に運動１−でいるのであるから、フリーな動体２は
弾性体１との摩擦力によって矢印Ｎの方向に駆動される
ことになる。FIG. 1 shows only the propagation state of surface waves (the vibration source is not shown). That is, focusing on mass point B, the lateral swing width a,
It is moving in the direction of arrow M on the field Q which is a combination of vertical vibration width b (vertical direction) and longitudinal vibration width b (horizontal direction), and its surface wave is moving at the speed of sound U. This movement is the same at any point on the surface la, and under this condition, when the surface of the free moving body 2 is brought into pressure contact with the surface of the elastic body 1, this moving body 2 moves onto the surface of the elastic body 1. They are in contact only at the peaks A and A of the surface waves, and these peaks A and A' are in motion 1- in the direction of the arrow M at a vibration velocity V = zg+b (where + is the frequency). , the free moving body 2 is driven in the direction of arrow N by the frictional force with the elastic body 1.
そこで、振動子への電気入力を一定として動体２の機械
的駆動力（回転力または推進力）をより上げるには、先
ず接触圧を上げることによって摩擦力を増大させ、同時
に表面波の多数の頂点が動体面と均一な圧力で接触する
必要がある。Therefore, in order to further increase the mechanical driving force (rotational force or propulsive force) of the moving object 2 while keeping the electrical input to the vibrator constant, first increase the frictional force by increasing the contact pressure, and at the same time increase the number of surface waves. The apex must be in contact with the moving body surface with uniform pressure.
また、動体面にＦ′ｉ弾性体１の表面から高い周波数の
振動圧力を受け、法線方向と接線方向に５−
弾性変形による振動変位が生じる。、特に、動体２の接
線方向の振動変位は動体速度を大きく低下させてしまう
。Further, the moving body surface receives high frequency vibration pressure from the surface of the F'i elastic body 1, and vibration displacement occurs in the normal and tangential directions due to 5- elastic deformation. In particular, vibrational displacement in the tangential direction of the moving object 2 greatly reduces the speed of the moving object.
従って、動体２の具備すべき条件として、１、不完全が
平面を有する弾性体表面に常に追従すること。Therefore, the following conditions must be met for the moving body 2: 1. The imperfections must always follow the surface of the elastic body, which has a flat surface.
２、不均一な表面波の頂点に均一な圧力で接触すること
。2. Contact the peaks of non-uniform surface waves with uniform pressure.
３、表面波の頂点の一部（例えば波長の約に〜２）に密
着し、他に接触しない程度の弾性を有すること。3. It has elasticity to the extent that it comes into close contact with a part of the peak of the surface wave (for example, about 2 wavelengths) and does not come into contact with anything else.
４、高周波振動帯域で弾性が十分な応答性を有すること
。4. The elasticity should have sufficient responsiveness in the high frequency vibration band.
５、動体面の法線方向の弾性率に対１〜で接線方向の弾
性率が大きいこと。5. The elastic modulus in the tangential direction is greater than the elastic modulus in the normal direction of the moving body surface by 1 or more.
６、振動減衰率が小さいこと。6. Low vibration damping rate.
などが考えられる。etc. are possible.
このような観点から、本発明は動体２にスライダーなる
ものを介在させて、このスライダーに、動体２としての
具備すべき条件を満足させ、６−
回転子／移動子として一体化させたものである。From this point of view, the present invention interposes a slider in the moving body 2, makes this slider satisfy the conditions that the moving body 2 should have, and integrates it as a rotor/mover. be.
〈２〉低弾性部材に高弾性繊維がうめ込まれたスライダ
ーについて
第２図において固定子に相当する弾性体１の表面上に形
成された表面波を拡大して示している。支持体３とスラ
イダー４とにより一体的に構成された回転子／移動子が
この面１ａに加圧接触している。<2> Regarding a slider in which high elastic fibers are embedded in a low elastic member, FIG. 2 shows an enlarged view of the surface waves formed on the surface of the elastic body 1 corresponding to the stator. A rotor/mover integrally constituted by the support 3 and the slider 4 is in pressure contact with this surface 1a.
この一体化するという意味は、支持体３によってスライ
ダー ４を弾性体表面１ａ密着させると共に、高周波振
動帯域内での弾性に対する十分な応答性を確保すること
が出来るわけである。This integration means that the slider 4 is brought into close contact with the elastic body surface 1a by the support 3, and sufficient responsiveness to elasticity within the high frequency vibration band can be ensured.
スライダー４は低弾性率の部材４ａの内部に例えば、ピ
アノ線、グラスファイバー、カーボンファイバー等の高
弾性率の繊維４ｂを接線方向であって、なお、かつ表面
波の進行方向に沿って埋め込んで、スライダー自体の弾
性率に異方性を持たせている。換言すれば、スライダー
４の主な構成要素は低弾性率を有する部材４ａと高弾性
率を有する繊維４１）である。このようが構成要素を選
択１〜た理由は、つぎの通りである。即ち、振動圧力に
よって生ぜしめられた法線方向への振動変位に対しては
部材４ａが、接線方向への振動変位に対；−ては繊維４
ｂがそれぞれ対応せ１−めるものである。The slider 4 is constructed by embedding fibers 4b having a high elastic modulus, such as piano wire, glass fiber, or carbon fiber, inside a member 4a having a low elastic modulus in a tangential direction and along the traveling direction of surface waves. , the elastic modulus of the slider itself has anisotropy. In other words, the main components of the slider 4 are the member 4a having a low modulus of elasticity and the fibers 41) having a high modulus of elasticity. The reason why these components were selected is as follows. That is, the member 4a responds to vibrational displacement in the normal direction caused by the vibration pressure, and the fiber 4 responds to vibrational displacement in the tangential direction.
b corresponds to 1-.
スライダー４は加圧力により表面波の頂点の一部（例え
ば波長の約４−）／４）に接触し得るようにそのスライ
ダー５の厚さと長さとが決められている。The thickness and length of the slider 5 are determined so that the slider 4 can come into contact with a part of the peak of the surface wave (for example, about 4-4 wavelength) by applying pressure.
〈３〉低弾性部材に高弾性板が固定支持されたスライダ
ーについて
第３図において、固定子に相当する弾性体１の表面上に
形成された表面波を拡大して示している。この面１ａに
支持体３とスライダー４で、一体的に構成された移動子
が加圧接触１−でいる。<3> About a slider in which a high elastic plate is fixedly supported by a low elastic member In FIG. 3, surface waves formed on the surface of the elastic body 1 corresponding to the stator are shown in an enlarged scale. On this surface 1a, a slider integrally formed of a support 3 and a slider 4 is in pressure contact 1-.
スライダー４は低弾性率の部材４ａの表面に高弾性率、
例えば金属板等の板状部材５が固定支持された実施例で
ある。The slider 4 has a high elastic modulus on the surface of the low elastic modulus member 4a.
For example, this is an embodiment in which a plate-like member 5 such as a metal plate is fixedly supported.
〈４〉可撓性を有する板状部材で構成されたスライダー
について
一７＝
第４図において、固定子に相当する弾性体１の表面上に
形成された表面波を拡大して示している。この面１ａに
金属等の支持体３と一体的に構成された板状部材６が加
圧接触１．ている。この板状部材６は弾性体表面１ａの
法線方向に対して可撓性を有１−１表面波の頂点の一部
（例えば波長の約に〜）／４）に接触１−得るように、
その板状部材６の厚さと長さが決められている。また高
周波振動帯域での弾性は高い応答性を必要とするため、
その板状部材６の厚さと長さの割合は考慮１−なければ
表らない。<4> Regarding the slider composed of a flexible plate-like member -7= In FIG. 4, surface waves formed on the surface of the elastic body 1 corresponding to the stator are shown in an enlarged scale. A plate-like member 6 integrally formed with a support 3 made of metal or the like comes into pressure contact with this surface 1a. ing. This plate-like member 6 is flexible in the normal direction of the elastic body surface 1a, and is designed to come into contact with a part of the peak of the surface wave (for example, about the wavelength of ~/4). ,
The thickness and length of the plate member 6 are determined. In addition, since elasticity in the high frequency vibration band requires high responsiveness,
The ratio between the thickness and length of the plate member 6 cannot be determined without consideration.
〈５〉可撓性を有する板状部材で構成されたスライダー
の他の実施例について
第５図は支持体３に固定支持された円弧状の板状部材７
で構成されたスライダー４の断面図である。この板状部
材７も第４図の実施例と同様の性質を有していなければ
ならない。<5> Regarding another embodiment of the slider composed of a flexible plate-like member, FIG.
FIG. 4 is a cross-sectional view of a slider 4 constructed of. This plate member 7 must also have properties similar to those of the embodiment shown in FIG.
〈６〉複数配列したスライダー
第６図は第５図の板状部材６を複数配列したスライダー
の断面図である。<6> Slider with a plurality of arrays FIG. 6 is a sectional view of a slider with a plurality of plate members 6 of FIG. 5 arranged.
８−
特に、第４図および第６図において、板状部材６の先端
は線接触に近く、接触方向と移動方向が同一であると固
定子表面１ａの特定の場所が摩耗する。8- In particular, in FIGS. 4 and 6, the tip of the plate member 6 is close to line contact, and if the contact direction and the moving direction are the same, a specific location on the stator surface 1a will wear out.
そこで、移動方向に対し、接触方向を斜けることにより
固定子表面上は万逼無く接触する事と力る。回転子の場
合は非同心円とすることにより構成することが出来る。Therefore, by making the contact direction oblique with respect to the moving direction, it is possible to ensure perfect contact on the stator surface. In the case of a rotor, it can be constructed by making it a non-concentric circle.
〈７〉本発明の効果について
本発明は以上説明したように、不完全な平面を有する固
定子表面に、均一な圧力で接触する回転子／移動子を採
用することにより、高い効率を得て、さらに強い駆動力
の発生を図るという点で、極めて有用である。<7> Effects of the present invention As explained above, the present invention achieves high efficiency by employing a rotor/mover that contacts the stator surface with an imperfect plane with uniform pressure. This is extremely useful in terms of generating even stronger driving force.
さらに、固定子の表面の平面加工精度が超精密加工を必
要とせず、一般的な加工条件で充分であり、大きな費用
負担を回避することが出来るという副次的々効果をも併
せ有する極めて有用な発明というべきものである。Furthermore, the plane machining accuracy of the stator surface does not require ultra-precision machining, and general machining conditions are sufficient, making it extremely useful as it also has the secondary effect of avoiding large costs. It can be called a great invention.
１０−
第１図は表面波モータの動作原理の一部拡大斜視図、第
２〜６図は本発明の実施例を示す説明図である。
１・・・弾性体（固定子）、２・・・動体（回転子／移
動子）、３・・・支持体、４・・・スライダー、５．６
．・７・・・板状部材
１１−10- FIG. 1 is a partially enlarged perspective view of the operating principle of a surface wave motor, and FIGS. 2 to 6 are explanatory diagrams showing embodiments of the present invention. 1... Elastic body (stator), 2... Moving body (rotor/mover), 3... Support body, 4... Slider, 5.6
．．・7...Plate member 11-
Claims (1)
の表面に加圧接触する回転子／移動子において、 回転子／移動子の摺動体が所定の弾性を有することを特
徴とする表面波モータの回転子／移動子の改良。 ２、 この回転子／移動子の摺動体の弾性率がその表面
の法線方向と接線方内圧異方性を有することを特徴とす
る特許請求の範囲第１項記載の表面波モータの回転子／
移動子。 ３、回転子／移動子の摺動体が金属等の弾性体であって
、固定子に接触する表面の法線方向に可撓性を有し、接
線方向に弾性率を有することを特徴とする特許請求の範
囲第１項記載の表面波モータの回転子／移動子。 ４、回転子／移動子の摺動体において、固定子に接触す
る部分がその移動方向に対し、斜めに配置されているこ
とを特徴とする特許請求の範囲第３項記載の表面波モー
タの回転子／移動子。[Claims] 1. In a rotor/mover that presses into contact with the surface of a stator that generates a surface wave that is a combination of transverse waves and longitudinal waves, the sliding body of the rotor/mover has a predetermined elasticity. An improvement in a rotor/mover for a surface wave motor, characterized by having the following. 2. The rotor of a surface wave motor according to claim 1, wherein the elastic modulus of the sliding body of the rotor/slider has an internal pressure anisotropy in the normal direction and tangential direction of the surface thereof. /
moving child. 3. The sliding body of the rotor/mover is an elastic body such as metal, and is characterized by having flexibility in the normal direction of the surface that contacts the stator and having elastic modulus in the tangential direction. A rotor/mover for a surface wave motor according to claim 1. 4. Rotation of a surface wave motor according to claim 3, characterized in that, in the sliding body of the rotor/mover, a portion that contacts the stator is arranged obliquely with respect to the direction of movement thereof. child/mobile child.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58130715A JPS6022479A (en) | 1983-07-18 | 1983-07-18 | Stator of surface wave motor and improvement in movable element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58130715A JPS6022479A (en) | 1983-07-18 | 1983-07-18 | Stator of surface wave motor and improvement in movable element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6022479A true JPS6022479A (en) | 1985-02-04 |
| JPH0532994B2 JPH0532994B2 (en) | 1993-05-18 |
Family
ID=15040888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58130715A Granted JPS6022479A (en) | 1983-07-18 | 1983-07-18 | Stator of surface wave motor and improvement in movable element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022479A (en) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3610304A1 (en) | 1985-03-29 | 1986-10-02 | Canon K.K., Tokio/Tokyo | VIBRATION SHAFT MOTOR |
| JPS61224884A (en) * | 1985-03-29 | 1986-10-06 | Canon Inc | Vibration wave motor |
| EP0198183A2 (en) * | 1985-04-19 | 1986-10-22 | Hitachi Maxell Ltd. | Ultrasonic motor |
| JPS6218903U (en) * | 1985-07-19 | 1987-02-04 | ||
| JPS62195391U (en) * | 1986-05-29 | 1987-12-11 | ||
| JPS6311073A (en) * | 1986-06-30 | 1988-01-18 | Canon Inc | Vibrating wave motor |
| JPH01138977A (en) * | 1987-11-26 | 1989-05-31 | Matsushita Electric Ind Co Ltd | Ultrasonic wave motor |
| JPH01138979A (en) * | 1987-11-26 | 1989-05-31 | Matsushita Electric Ind Co Ltd | Ultrasonic wave motor |
| US4939404A (en) * | 1988-04-22 | 1990-07-03 | Aisin Seiki Kabushiki Kaisha | Vibration wave motor |
| JPH02269485A (en) * | 1989-04-10 | 1990-11-02 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
| US5028832A (en) * | 1989-05-25 | 1991-07-02 | Brother Kogyo Kabushiki Kaisha | Ultrasonic motor having anisotropic properties |
| US5059849A (en) * | 1987-11-26 | 1991-10-22 | Matsushita Electrical Industrial Co., Ltd. | Ultrasonic motor |
| US5204577A (en) * | 1989-05-15 | 1993-04-20 | Nikon Corporation | Ultrasonic motor improved in driving efficiency |
| US5352950A (en) * | 1990-03-30 | 1994-10-04 | Canon Kabushiki Kaisha | Vibration wave driven motor |
| JP2012039848A (en) * | 2010-04-06 | 2012-02-23 | Panasonic Corp | Driver |
| JP2012139080A (en) * | 2010-12-28 | 2012-07-19 | Canon Inc | Vibration type drive device |
| JP2012223031A (en) * | 2011-04-13 | 2012-11-12 | Canon Inc | Ring-type vibration wave actuator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5229192A (en) * | 1975-09-01 | 1977-03-04 | Ki Porichiefunichiesukii I Im | Piezooelectric motor |
| JPS5966392U (en) * | 1982-10-25 | 1984-05-04 | ソニー株式会社 | Surface wave type ultrasonic motor |
| JPS59101608A (en) * | 1982-12-03 | 1984-06-12 | Canon Inc | Lens driving device using oscillatory wave motor |
| JPH0532991A (en) * | 1991-07-30 | 1993-02-09 | Kao Corp | Production of lubricating oil additive and lubricating oil composition containing the same |
-
1983
- 1983-07-18 JP JP58130715A patent/JPS6022479A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5229192A (en) * | 1975-09-01 | 1977-03-04 | Ki Porichiefunichiesukii I Im | Piezooelectric motor |
| JPS5966392U (en) * | 1982-10-25 | 1984-05-04 | ソニー株式会社 | Surface wave type ultrasonic motor |
| JPS59101608A (en) * | 1982-12-03 | 1984-06-12 | Canon Inc | Lens driving device using oscillatory wave motor |
| JPH0532991A (en) * | 1991-07-30 | 1993-02-09 | Kao Corp | Production of lubricating oil additive and lubricating oil composition containing the same |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61224882A (en) * | 1985-03-29 | 1986-10-06 | Canon Inc | Vibration wave motor |
| JPS61224884A (en) * | 1985-03-29 | 1986-10-06 | Canon Inc | Vibration wave motor |
| JPH0534910B2 (en) * | 1985-03-29 | 1993-05-25 | Canon Kk | |
| DE3610304A1 (en) | 1985-03-29 | 1986-10-02 | Canon K.K., Tokio/Tokyo | VIBRATION SHAFT MOTOR |
| EP0198183A2 (en) * | 1985-04-19 | 1986-10-22 | Hitachi Maxell Ltd. | Ultrasonic motor |
| EP0198183A3 (en) * | 1985-04-19 | 1988-07-20 | Hitachi Maxell Ltd. | Ultrasonic motor |
| JPH0226086Y2 (en) * | 1985-07-19 | 1990-07-17 | ||
| JPS6218903U (en) * | 1985-07-19 | 1987-02-04 | ||
| JPS62195391U (en) * | 1986-05-29 | 1987-12-11 | ||
| JPH0537673Y2 (en) * | 1986-05-29 | 1993-09-22 | ||
| JPH0516274B2 (en) * | 1986-06-30 | 1993-03-03 | Canon Kk | |
| JPS6311073A (en) * | 1986-06-30 | 1988-01-18 | Canon Inc | Vibrating wave motor |
| US5059849A (en) * | 1987-11-26 | 1991-10-22 | Matsushita Electrical Industrial Co., Ltd. | Ultrasonic motor |
| JPH01138979A (en) * | 1987-11-26 | 1989-05-31 | Matsushita Electric Ind Co Ltd | Ultrasonic wave motor |
| JPH01138977A (en) * | 1987-11-26 | 1989-05-31 | Matsushita Electric Ind Co Ltd | Ultrasonic wave motor |
| US4939404A (en) * | 1988-04-22 | 1990-07-03 | Aisin Seiki Kabushiki Kaisha | Vibration wave motor |
| JPH02269485A (en) * | 1989-04-10 | 1990-11-02 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
| US5204577A (en) * | 1989-05-15 | 1993-04-20 | Nikon Corporation | Ultrasonic motor improved in driving efficiency |
| US5028832A (en) * | 1989-05-25 | 1991-07-02 | Brother Kogyo Kabushiki Kaisha | Ultrasonic motor having anisotropic properties |
| US5352950A (en) * | 1990-03-30 | 1994-10-04 | Canon Kabushiki Kaisha | Vibration wave driven motor |
| JP2012039848A (en) * | 2010-04-06 | 2012-02-23 | Panasonic Corp | Driver |
| JP2012139080A (en) * | 2010-12-28 | 2012-07-19 | Canon Inc | Vibration type drive device |
| JP2012223031A (en) * | 2011-04-13 | 2012-11-12 | Canon Inc | Ring-type vibration wave actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0532994B2 (en) | 1993-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6022479A (en) | Stator of surface wave motor and improvement in movable element | |
| Kurosawa et al. | Ultrasonic linear motor using surface acoustic waves | |
| JPS59201685A (en) | Vibration wave motor | |
| US5101132A (en) | Linear ultrasonic motor | |
| JPS61224881A (en) | Vibration wave motor | |
| JPS61224882A (en) | Vibration wave motor | |
| JPS59201684A (en) | Vibration wave motor | |
| KR20040027753A (en) | small piezoelectric or electrostrictive linear motor | |
| JPS59188381A (en) | Improvement in rotor/movable element of surface wave motor | |
| JPS6311073A (en) | Vibrating wave motor | |
| JPS59185180A (en) | Supersonic motor | |
| KR100376137B1 (en) | Ring-type Piezoelectric Ultrasonic Motor | |
| JPS59185179A (en) | Supersonic motor | |
| JPH02159982A (en) | Piezoelectric actuator | |
| JPS61102177A (en) | Surface wave drive motor | |
| JPS60174074A (en) | Vibration wave motor | |
| JPH05252767A (en) | Ultrasonic motor | |
| JPS5937673B2 (en) | Unidirectional drive device using ultrasonic vibration | |
| JPH0315278A (en) | Elastic vibrator in traveling bending vibration motor | |
| KR100443639B1 (en) | small piezoelectric or electrostrictive linear motor | |
| JPS61295882A (en) | Vibration wave motor | |
| JP2582145B2 (en) | Ultrasonic linear motor and driving method thereof | |
| JP2971971B2 (en) | Ultrasonic actuator | |
| JPS61173683A (en) | Supersonic drive motor | |
| JPS6135176A (en) | Piezoelectric motor |