JP3206442U - Holding device - Google Patents
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Abstract
【課題】特に薄型基板を固定して加工を行うための保持装置を提供する。【解決手段】本考案の保持装置は、それぞれ、板状の基板３０をはめ込む開口１１、２１が形成された本体枠１２、２２により構成された２つの保持本体１０、２０を有し、本体枠１２、２２に間隔をおいて複数の磁性部材１３、２３が埋設され、２つの保持本体１０、２０における開口１１、２１及び本体枠１２、２２が互いに対応すると共に、複数の磁性部材１３、２３が互いに吸着することによって、２つの保持本体１０、２０の本体枠１２、２２が組み合わされ、そのため、２つの保持本体１０、２０が基板３０を挟持して固定することができ、露光や、現像、エッチングなどの加工過程において基板３０が変形したり折れたりしてしまう事態を防ぐことができる。【選択図】図２In particular, a holding device for performing processing while fixing a thin substrate is provided. A holding device according to the present invention has two holding bodies 10 and 20 each having a body frame 12 and 22 formed with openings 11 and 21 into which a plate-like substrate 30 is fitted, respectively. A plurality of magnetic members 13, 23 are embedded at intervals between 12, 22, the openings 11, 21 and the body frames 12, 22 in the two holding bodies 10, 20 correspond to each other, and the plurality of magnetic members 13, 23 By adsorbing each other, the main body frames 12 and 22 of the two holding main bodies 10 and 20 are combined, so that the two holding main bodies 10 and 20 can sandwich and fix the substrate 30 for exposure and development. Further, it is possible to prevent the substrate 30 from being deformed or broken during a processing process such as etching. [Selection] Figure 2
Description
本考案は、特に、薄型基板を固定して加工を行うための保持装置に関するものである。 In particular, the present invention relates to a holding device for fixing and processing a thin substrate.
スマートフォンやタブレット端末などの情報機器は、薄型、携帯の利便性などが求められ、技術の躍進に伴い、それらの情報機器の薄型化、小型化がますます進んでいるなか、電子デバイスなどを実装する基板も、そのサイズがますます小さくなっている。 Information devices such as smartphones and tablet devices are required to be thin and convenient to carry. With the advancement of technology, these information devices are becoming thinner and smaller. The size of the board to be used is getting smaller and smaller.
従来の回路基板は、板状、またはフィルム状の部品であり、露光や、現像、エッチングなどの工程を経てその表面に多数の電子部品を固定し、さらにその部品間を配線にて接続して電子回路を構成する。
その基板の製造プロセスにおいて、現像液やエッチング液などに浸して各種の加工を行う必要がある。
A conventional circuit board is a plate-like or film-like component, and a number of electronic components are fixed to the surface through processes such as exposure, development, and etching, and the components are connected by wiring. Configure the electronic circuit.
In the manufacturing process of the substrate, it is necessary to perform various types of processing by immersing in a developing solution or an etching solution.
しかしながら、従来の基板は、薄型の板状またはフィルム状であることから、加工液に浸したり取り出したりする際に、変形したり折れたりすることが起こり易く、それにより、スループットが低下し生産コストが高くなるため、基板の変形や、折り目の発生を防ぐ何らかの手段が望まれていた。 However, since the conventional substrate is a thin plate or film, it is likely to be deformed or broken when immersed in or taken out from the processing liquid, thereby reducing the throughput and the production cost. Therefore, some means for preventing deformation of the substrate and generation of folds has been desired.
本考案は、板状の基板を保持する保持装置であって、板状の基板をはめ込む開口が形成された本体枠により構成された２つの保持本体をそれぞれ有し、本体枠に間隔をおいて複数の磁性部材が埋設され、２つの保持本体における開口及び本体枠が互いに対応すると共に複数の磁性部材が互いに吸着することによって、２つの保持本体の本体枠が組み合わされる。 The present invention is a holding device for holding a plate-like substrate, and has two holding bodies each formed by a body frame in which an opening for fitting the plate-like substrate is formed, and is spaced from the body frame. A plurality of magnetic members are embedded, the openings and the body frames in the two holding bodies correspond to each other, and the plurality of magnetic members attract each other, thereby combining the body frames of the two holding bodies.
かかる保持装置において、保持本体のそれぞれは、本体枠の一面に形成され、２つの保持本体の組み合わせの際に対向するように形成された貼付面と開口の周囲に位置すると共にそれぞれの本体枠の内縁部に凹設された嵌入凹部とを有し、２つの保持本体が貼り合わされたときに嵌入凹部が対向してその間に空間を構成することが好ましい。 In such a holding device, each of the holding main bodies is formed on one surface of the main body frame, and is positioned around a sticking surface and an opening formed so as to face each other when the two holding main bodies are combined. It is preferable to have an insertion recess recessed in the inner edge, and when the two holding main bodies are bonded together, the insertion recess faces each other to form a space therebetween.
かかる保持装置において、保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ欠け凹部がさらに凹設されていることが好ましい。 In such a holding device, it is preferable that a chipped recess is further provided in a portion that is not opposed to the same side portion of the main body frame of each holding main body.
かかる保持装置において、保それぞれ開口との直交方向と平行するように貫通する複数の排出穴が、持本体それぞれの本体枠に形成されていること好ましい。 In such a holding device, it is preferable that a plurality of discharge holes penetrating so as to be parallel to the direction orthogonal to the holding openings are formed in the main body frames of the holding main bodies.
かかる保持装置において、一方の保持本体の複数の排出穴が、それぞれ他方の保持本体の複数の排出穴に対応して連通することが好ましい。 In such a holding device, it is preferable that the plurality of discharge holes of one holding body communicate with each other corresponding to the plurality of discharge holes of the other holding body.
かかる保持装置において、それぞれ間隔をおいて開口に向かう方向に開口と連通するように、複数の排出穴が、保持本体それぞれの本体枠に形成されていることが好ましい。 In such a holding device, it is preferable that a plurality of discharge holes are formed in the main body frame of each holding main body so as to communicate with the opening in a direction toward the opening at intervals.
かかる保持装置において、開口に向かう方向にその一端が嵌入凹部と連通する複数の排出溝が保持本体それぞれの貼付面に凹設され、一方の保持本体と他方の保持本体とを貼り合わせたとき、保持本体それぞれに形成された前記排出溝が対応して組み合わされて穴を形成することが好ましい。 In such a holding device, when a plurality of discharge grooves whose one ends communicate with the insertion recess in the direction toward the opening are recessed in the attaching surface of each holding body, and when one holding body and the other holding body are bonded together, It is preferable that the discharge grooves formed in each holding body are correspondingly combined to form a hole.
また、本考案の保持装置は、以下の記載に基づいて、板状の基板を保持する保持装置であって、
それぞれ、間隔をおいて複数の開口を形成した本体枠と複数の磁性部材と貼付面と嵌入凹部と欠け凹部と複数の排出穴とを有して構成された２つの保持本体を備え、
一方の保持本体の複数の開口と他方の保持本体の複数の開口とは、それぞれ対応して形成され、
複数の磁性部材が、それぞれ間隔をおいて本体枠に埋設されて２つの保持本体の磁性部材が互いに対応して吸着することにより２つの保持本体の本体枠が貼り合わせられ、
貼付面は、本体枠それぞれの、２つの保持本体が貼り合わせられたときに対向する一面に形成され、
嵌入凹部は、開口の周囲に位置すると共に、それぞれの本体枠の内縁部に凹設され、２つの保持本体が貼り合わされたときに嵌入凹部が対向してその間に空間を構成し、
欠け凹部は、保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ凹設され、
複数の排出穴はそれぞれ、保持本体それぞれの本体枠に、それぞれ開口との直交方向と平行するように貫通して形成され、２つの保持本体に形成された複数の排出穴がそれぞれ対応して連通する。
Further, the holding device of the present invention is a holding device for holding a plate-like substrate based on the following description,
Each of the two holding bodies configured to have a main body frame having a plurality of openings at intervals, a plurality of magnetic members, a sticking surface, an insertion recess, a chip recess, and a plurality of discharge holes,
A plurality of openings in one holding body and a plurality of openings in the other holding body are formed corresponding to each other,
A plurality of magnetic members are embedded in the main body frame at intervals, and the magnetic members of the two holding main bodies are attracted corresponding to each other, whereby the main body frames of the two holding main bodies are bonded together,
The affixing surface is formed on one surface facing each other when the two holding main bodies of each main body frame are bonded,
The insertion recess is located around the opening and is recessed in the inner edge portion of each main body frame, and when the two holding main bodies are bonded, the insertion recess faces to constitute a space therebetween,
The chipped recesses are respectively provided in the same side part corresponding to the body frame of each holding body, and are respectively provided in places not facing each other.
Each of the plurality of discharge holes is formed through the main body frame of each holding body so as to be parallel to the direction orthogonal to the opening, and the plurality of discharge holes formed in the two holding bodies correspond to each other and communicate with each other. To do.
さらに、本考案の保持装置は、以下の記載に基づいて、板状の基板を保持する保持装置であって、
それぞれ、間隔をおいて複数の開口が形成された本体枠と、本体枠と、複数の磁性部材と、貼付面と、嵌入凹部と、欠け凹部と、複数の排出穴とを有して構成された２つの保持本体を備え、
一方の保持本体の複数の開口と他方の保持本体の複数の開口とは、それぞれ対応して形成され、
複数の磁性部材が、それぞれ間隔をおいて本体枠に埋設され、２つの保持本体の磁性部材が互いに対応して吸着することによって２つの保持本体の本体枠が貼り合わせられ、
貼付面は、本体枠それぞれの、２つの保持本体が貼り合わせられたときに対向する一面に形成され、
嵌入凹部は、開口の周囲に位置すると共にそれぞれの本体枠の内縁部に凹設された嵌入凹部とを有し、２つの保持本体が貼り合わされたときに嵌入凹部が対向してその間に空間を構成し、
欠け凹部は、保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ凹設され、
複数の排出穴は、それぞれ、保持本体それぞれの本体枠それぞれ開口に向かう方向に平行するように貫通して形成されている。
Furthermore, the holding device of the present invention is a holding device that holds a plate-like substrate based on the following description,
Each includes a main body frame having a plurality of openings formed at intervals, a main body frame, a plurality of magnetic members, a sticking surface, an insertion recess, a notch recess, and a plurality of discharge holes. Two holding bodies,
A plurality of openings in one holding body and a plurality of openings in the other holding body are formed corresponding to each other,
A plurality of magnetic members are embedded in the main body frame at intervals, and the main body frames of the two holding main bodies are bonded together by adsorbing the magnetic members of the two holding main bodies corresponding to each other,
The affixing surface is formed on one surface facing each other when the two holding main bodies of each main body frame are bonded,
The insertion recess is located around the opening and has an insertion recess recessed in the inner edge of each main body frame. When the two holding main bodies are bonded together, the insertion recess faces each other and a space is formed between them. Configure
The chipped recesses are respectively provided in the same side part corresponding to the body frame of each holding body, and are respectively provided in places not facing each other.
Each of the plurality of discharge holes is formed so as to penetrate in parallel to the direction toward the opening of each main body frame of each holding main body.
本考案の保持装置は、以下の記載に基づいて、板状の基板を保持する保持装置であって、
それぞれ、間隔をおいて複数の開口が形成された本体枠と複数の磁性部材と貼付面と嵌入凹部と欠け凹部と複数の排出溝とを有して構成された２つの保持本体を備え、
一方の保持本体の複数の開口と他方の保持本体の複数の開口とはそれぞれ対応して形成され、
複数の磁性部材が、それぞれ間隔をおいて本体枠に埋設され、２つの保持本体の磁性部材が互いに対応して吸着することによって２つの保持本体の本体枠が貼り合わせられ、
貼付面は、本体枠それぞれの、２つの保持本体が貼り合わせられたときに対向する一面に形成され、
嵌入凹部は、開口の周囲に位置すると共に、それぞれの本体枠の内縁部に凹設された嵌入凹部とを有し、２つの保持本体が貼り合わされたときに、嵌入凹部が対向してその間に空間を構成し、
欠け凹部は、保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ凹設され、
複数の排出溝は、それぞれ、保持本体それぞれの貼付面に、開口に向かう方向にその一端が嵌入凹部と連通する複数の排出溝が凹設され、一方の保持本体と他方の保持本体とを貼り合わせたとき、保持本体それぞれに形成された排出溝が対応して組み合わされて穴を形成する。
The holding device of the present invention is a holding device that holds a plate-like substrate based on the following description,
Each includes two holding bodies each having a main body frame formed with a plurality of openings at intervals, a plurality of magnetic members, a sticking surface, an insertion recess, a notch recess, and a plurality of discharge grooves,
A plurality of openings in one holding body and a plurality of openings in the other holding body are formed corresponding to each other,
A plurality of magnetic members are embedded in the main body frame at intervals, and the main body frames of the two holding main bodies are bonded together by adsorbing the magnetic members of the two holding main bodies corresponding to each other,
The affixing surface is formed on one surface facing each other when the two holding main bodies of each main body frame are bonded,
The insertion recess is located around the opening and has an insertion recess recessed in the inner edge of each main body frame. When the two holding main bodies are bonded together, the insertion recesses face each other. Make up space,
The chipped recesses are respectively provided in the same side part corresponding to the body frame of each holding body, and are respectively provided in places not facing each other.
Each of the plurality of discharge grooves is provided with a plurality of discharge grooves, one end of which is in communication with the insertion recess in the direction toward the opening, on the sticking surface of each holding body, and the one holding body and the other holding body are attached to each other. When combined, the discharge grooves formed in each holding body are correspondingly combined to form a hole.
本考案の保持装置は、上述した構造を有することから、以下の効果を奏する。
本考案の保持装置において、２つの保持本体に埋設されている磁性部材の吸着力によって、保持本体の貼付面と保持本体の貼付面とが互いに吸着して貼り合わされることにより、本体枠の嵌入凹部と保持本体の嵌入凹部との間に基板を挟持して固定することができるため、基板を現像液やエッチング液などの加工液に浸したり取り出したりする加工作業は、基板が保護された状態で行われ、従来の加工過程において基板が変形したり折れたりしてしまう事態を防ぐことができる。
Since the holding device of the present invention has the above-described structure, the following effects can be obtained.
In the holding device of the present invention, the attachment of the main body frame is achieved by adhering the adhering surface of the holding main body and the adhering surface of the holding main body to each other by the adsorption force of the magnetic members embedded in the two holding main bodies. Since the substrate can be sandwiched and fixed between the recessed portion and the insertion recessed portion of the holding body, the processing operation in which the substrate is immersed in or removed from a processing solution such as a developing solution or an etching solution is a state in which the substrate is protected. Thus, it is possible to prevent the substrate from being deformed or broken in the conventional processing process.
また、保持本体は、複数の排出穴または複数の排出溝を有することから、保持本体及び基板に付着している加工液、例えば、基板を現像液から取り出したら現像液を素早く排出させることができ、それにより、加工の効果を向上させることができる。 In addition, since the holding body has a plurality of discharge holes or a plurality of discharge grooves, the processing liquid adhering to the holding body and the substrate, for example, the substrate can be quickly discharged when the substrate is taken out from the developer. Thereby, the processing effect can be improved.
さらに、本考案の保持装置は、必要に応じて加工液に耐えられる材質からなり、或いは、そのような材質を表面に被覆してもよく、それにより、基板をさらに安定に保持することができる。 Furthermore, the holding device of the present invention is made of a material that can withstand the machining liquid as necessary, or such a material may be coated on the surface, whereby the substrate can be held more stably. .
図１及び図２に示すように、本考案に係る保持装置の第一実施例は、２つの保持本体１０、２０を有する。 As shown in FIGS. 1 and 2, the first embodiment of the holding device according to the present invention has two holding bodies 10 and 20.
図１乃至図３に示すように、保持本体１０のそれぞれは、板状の基板をはめ込む開口１１が形成された本体枠１２と、複数の磁性部材１３と、欠け凹部１４と、貼付面１５と、嵌入凹部１６と、複数の排出穴１７とを有し、その内、複数の磁性部材１３は、それぞれ間隔をおいて本体枠１２に埋設され、欠け凹部１４は、本体枠１２の側部に凹設され、本実施例の欠け凹部１４は、本体枠１２の上側部に凹設され、貼付面１５は、本体枠１２の一面に形成され、嵌入凹部１６は、開口１１の周囲に位置すると共に、開口１１と連通するように、本体枠１２の貼付面１５の内縁部に凹設され、複数の排出穴１７は、それぞれ、開口１１と直交方向と平行するように、本体枠１２を貫通するように形成される。 As shown in FIGS. 1 to 3, each of the holding main bodies 10 includes a main body frame 12 having an opening 11 into which a plate-like substrate is fitted, a plurality of magnetic members 13, a chipped recess 14, and a pasting surface 15. The insertion recess 16 and the plurality of discharge holes 17, of which the plurality of magnetic members 13 are embedded in the main body frame 12 at intervals, and the notch recess 14 is formed on the side of the main body frame 12. The notched recess 14 of this embodiment is recessed in the upper part of the main body frame 12, the sticking surface 15 is formed on one surface of the main body frame 12, and the fitting recess 16 is located around the opening 11. At the same time, it is recessed in the inner edge of the sticking surface 15 of the main body frame 12 so as to communicate with the opening 11, and each of the plurality of discharge holes 17 penetrates the main body frame 12 so as to be parallel to the direction orthogonal to the opening 11. To be formed.
図１及び図２に示すように、保持本体２０は、保持本体１０と同様に、開口２１が形成された本体枠２２と、複数の磁性部材２３と、欠け凹部２４と、貼付面２５と、嵌入凹部２６と、複数の排出穴２７とを有することから、その詳細な説明を省略する。 As shown in FIGS. 1 and 2, the holding body 20, similar to the holding body 10, has a body frame 22 in which an opening 21 is formed, a plurality of magnetic members 23, a chipped recess 24, a pasting surface 25, Since it has the insertion recessed part 26 and the some discharge hole 27, the detailed description is abbreviate | omitted.
図１及び図２に示すように、本考案の第一実施例を実施する時、一方の保持本体１０と他方の保持本体２０とをそれぞれの本体枠１２が対応するように貼り合わせるようにすれば、保持本体１０の磁性部材１３が、保持本体２０の磁性部材２３に対応して互いに吸着されることから、保持本体１０の本体枠１２と保持本体２０の本体枠２２とが組み合わされ、すなわち、保持本体１０の貼付面１５と保持本体２０の貼付面２５が、磁性部材１３、２３によって互いに吸着して貼り合わされる。 As shown in FIGS. 1 and 2, when the first embodiment of the present invention is carried out, one holding body 10 and the other holding body 20 are bonded together so that each body frame 12 corresponds. For example, since the magnetic member 13 of the holding body 10 is attracted to each other corresponding to the magnetic member 23 of the holding body 20, the body frame 12 of the holding body 10 and the body frame 22 of the holding body 20 are combined. The sticking surface 15 of the holding main body 10 and the sticking surface 25 of the holding main body 20 are adsorbed and bonded to each other by the magnetic members 13 and 23.
さらに、保持本体１０の嵌入凹部１６が保持本体２０の嵌入凹部２６に対応していることから、２つの保持本体１０、２０の間に空間が形成され、そのため、基板３０を保持本体１０の嵌入凹部１６と保持本体２０の嵌入凹部２６との間に嵌め込むことができる。
また、保持本体１０の嵌入凹部１６の底面と保持本体２０の嵌入凹部２６の底面との距離が基板３０の厚さよりも小さいことから、保持本体１０と保持本体２０とが互いに吸着して貼り合わされることによって、基板３０を嵌入凹部１６と嵌入凹部２６との間に挟持し保持して加工を行うことができる。
Furthermore, since the insertion recess 16 of the holding body 10 corresponds to the insertion recess 26 of the holding body 20, a space is formed between the two holding bodies 10, 20, so that the substrate 30 is inserted into the holding body 10. It can be fitted between the recess 16 and the insertion recess 26 of the holding body 20.
Further, since the distance between the bottom surface of the insertion recess 16 of the holding body 10 and the bottom surface of the insertion recess 26 of the holding body 20 is smaller than the thickness of the substrate 30, the holding body 10 and the holding body 20 are adsorbed and bonded together. Thus, the substrate 30 can be processed while being sandwiched and held between the insertion recess 16 and the insertion recess 26.
具体的に言えば、その基板３０は、薄型の基板であり、本考案の保持装置を用いて固定して露光や、現像、エッチングなどの加工作業を行うことができる。
本考案の保持装置が基板３０を固定して現像液やエッチング液などの加工液に浸すと、その加工液により保持本体１０の開口１１及び保持本体２０の開口２１を介して基板３０の表面を加工する。
その加工作業が終了すると、加工液から保持装置を取り出し、付着している加工液を排出する必要であるが、この時、保持本体１０の排出穴１７及び保持本体２０の排出穴２７が、それぞれ連通していることから、現像液やエッチング液などの加工液を排出穴１７及び排出穴２７を介して素早く排出することができる。
Specifically, the substrate 30 is a thin substrate, and can be fixed by using the holding device of the present invention to perform processing operations such as exposure, development, and etching.
When the holding device of the present invention fixes the substrate 30 and immerses it in a processing solution such as a developing solution or an etching solution, the processing solution causes the surface of the substrate 30 to pass through the opening 11 of the holding body 10 and the opening 21 of the holding body 20. Process.
When the processing operation is completed, it is necessary to take out the holding device from the processing liquid and discharge the adhering processing liquid. At this time, the discharge hole 17 of the holding body 10 and the discharge hole 27 of the holding body 20 respectively Because of the communication, the processing liquid such as the developer and the etching liquid can be quickly discharged through the discharge hole 17 and the discharge hole 27.
また、保持本体１０の欠け凹部１４及び保持本体２０の欠け凹部２４が、それぞれ本体枠１２及び本体枠２２の対応する同一の上側部に形成されているが、それぞれの欠け凹部１４が、対向しない箇所に形成しているため、その欠け凹部１４、２４から磁性部材１３と磁性部材２３との吸着力を抵抗して保持本体１０と保持本体２０とを離間させることが簡単にでき、基板３０を取り外すことができる。 Further, the chipped recesses 14 of the holding body 10 and the chipped recesses 24 of the holding body 20 are formed on the same corresponding upper portions of the main body frame 12 and the main body frame 22, respectively, but the respective chipped recesses 14 do not face each other. Therefore, it is possible to easily separate the holding body 10 and the holding body 20 from the chipped recesses 14 and 24 by resisting the adsorption force between the magnetic member 13 and the magnetic member 23, thereby Can be removed.
図４に示すように、本考案の第二実施例では、その保持本体１０Ａの複数の排出穴１７Ａは、それぞれ間隔をおいて開口１１Ａに向かう方向に開口１１Ａと連通するように本体枠１２Ａに形成され、その複数の磁性部材１３Ａが、それぞれ本体枠１２Ａの４つの隅に埋設される点を除いて、第一実施例と同一である。 As shown in FIG. 4, in the second embodiment of the present invention, the plurality of discharge holes 17A of the holding body 10A are connected to the body frame 12A so as to communicate with the opening 11A in the direction toward the opening 11A at intervals. The plurality of magnetic members 13A are the same as in the first embodiment except that the plurality of magnetic members 13A are embedded in the four corners of the main body frame 12A.
図５に示すように、本考案の第三実施例では、その保持本体１０Ｂに排出穴１７を形成する代わりに、複数の排出溝１８が開口１１に向かう方向に、その一端が嵌入凹部１６Ｂと連通するように貼付面１５Ｂに凹設され、また、２つの保持本体１０Ｂにある複数の排出溝１８が対応するように形成されていることから、２つの保持本体１０Ｂを貼り合わせると、一方の保持本体１０Ｂの排出溝１８が他方の保持本体１０Ｂの排出溝１８に組み合せて加工液を排出可能な穴となる点を除いて、第一実施例と同一であり、それらの穴を介して現像液やエッチング液などの加工液を素早く排出することができる。 As shown in FIG. 5, in the third embodiment of the present invention, instead of forming the discharge hole 17 in the holding body 10B, a plurality of discharge grooves 18 are directed in the direction toward the opening 11 and one end thereof is fitted with the insertion recess 16B. Since the plurality of discharge grooves 18 in the two holding main bodies 10B are formed so as to correspond to each other, when the two holding main bodies 10B are bonded together, Except for the point that the discharge groove 18 of the holding body 10B is combined with the discharge groove 18 of the other holding body 10B to form a hole that can discharge the machining liquid, development is performed via these holes. The processing liquid such as the liquid and the etching liquid can be quickly discharged.
以上の第一実施例乃至三実施例は、本考案の好ましい実施形態の説明に過ぎず、本考案を限定するものではない。
本考案の保持装置は、基板の加工作業に応じて、保持本体１０、２０の中央部に開口１１、２１が形成された枠の形状にするだけではなく、保持本体を日字形や、田字形、井字形、Ｘ字形などの形状にすることも可能であり、いずれの形状でも、本体枠に複数の開口を、間隔をおいて形成するとよい。
その他の構造では、前記実施例と同一であるので、詳細な説明を省略する。
The above first to third examples are merely descriptions of preferred embodiments of the present invention, and do not limit the present invention.
The holding device of the present invention not only makes the shape of the frame in which the openings 11 and 21 are formed in the central portions of the holding main bodies 10 and 20 according to the processing operation of the substrate, It is also possible to have a shape such as a well shape or an X shape. In any shape, a plurality of openings may be formed in the main body frame at intervals.
Since other structures are the same as those in the above embodiment, detailed description thereof is omitted.
本考案の保持装置は、２つの保持本体１０、２０に埋設されている磁性部材１３、２３の吸着力によって、保持本体１０の貼付面１５と保持本体２０の貼付面２５とが、互いに吸着して貼り合わされることにより、本体枠１２の嵌入凹部１６と保持本体２０の嵌入凹部２６との間に基板３０を挟持して固定することができるため、基板３０を現像液やエッチング液などの加工液に浸したり取り出したりする加工作業は、基板が保護された状態で行われ、従来の加工過程において基板が変形したり折れたりしてしまう事態を防ぐことができる。
さらに、保持本体１０、１０Ｂは、排出穴１７、１７Ａまたは排出溝１８を有すれば、保持本体１０、１０Ｂ及び基板３０に付着している加工液、例えば、基板３０を現像液から取り出したら現像液を素早く排出させることができ、それにより、加工の効果を向上させることができる。
In the holding device of the present invention, the sticking surface 15 of the holding body 10 and the sticking surface 25 of the holding body 20 are attracted to each other by the attracting force of the magnetic members 13 and 23 embedded in the two holding bodies 10 and 20. Since the substrate 30 can be sandwiched and fixed between the insertion recess 16 of the main body frame 12 and the insertion recess 26 of the holding main body 20, the substrate 30 can be processed with a developer or an etching solution. Processing operations that are immersed in or taken out of the liquid are performed in a state where the substrate is protected, and a situation in which the substrate is deformed or broken in a conventional processing process can be prevented.
Further, if the holding main bodies 10 and 10B have the discharge holes 17 and 17A or the discharge grooves 18, the processing liquid adhering to the holding main bodies 10 and 10B and the substrate 30, for example, the substrate 30 is taken out from the developer and developed. The liquid can be quickly discharged, and thereby the processing effect can be improved.
本考案の保持装置は、必要に応じて加工液に耐えられる材質からなり、或いは、そのような材質を表面に被覆してもよく、例えば、エポキン（ｅｐｏｘｙ）を保持本体１０、２０の表面に被覆することが好ましく、それにより、基板をさらに安定に保持することができる。 The holding device of the present invention is made of a material that can withstand the machining fluid as required, or such a material may be coated on the surface. For example, epkin is attached to the surfaces of the holding bodies 10 and 20. It is preferable to coat, so that the substrate can be held more stably.
以上は、本考案の好ましい実施形態の説明に過ぎず、本考案を限定するものではない。
通常の知識を有する当該分野の者が、本考案の技術要旨を逸脱しない範囲で、以上に開示された技術内容に基づいてなされた同等効果を有する如何なる簡単な修正或いは変更は、いずれも本考案の保護範囲内に含まれるものとする。
The above is only description of preferable embodiment of this invention, and this invention is not limited.
Any simple modification or change having equivalent effects made based on the technical contents disclosed above can be devised by those skilled in the art having ordinary knowledge without departing from the technical scope of the present invention. Within the scope of protection.
１０、１０Ａ、１０Ｂ、２０ ・・・保持本体
１１、１１Ａ、２１ ・・・開口
１２、１２Ａ、２２ ・・・本体枠
１３、１３Ａ、２３ ・・・磁性部材
１４、１４Ａ、１４Ｂ、２４ ・・・欠け凹部
１５、１５Ｂ、２５ ・・・貼付面
１６、１６Ｂ、２６ ・・・嵌入凹部
１７、１７Ａ、２７ ・・・排出穴
１８ ・・・排出溝
３０ ・・・基板
10, 10A, 10B, 20 ... holding body 11, 11A, 21 ... opening 12, 12A, 22 ... body frame 13, 13A, 23 ... magnetic members 14, 14A, 14B, 24 ...・ Chip recesses 15, 15B, 25... Pasting surfaces 16, 16B, 26... Insertion recesses 17, 17A, 27... Discharge hole 18.
Claims (10)
前記板状の基板をはめ込む開口が形成された本体枠により構成された２つの保持本体をそれぞれ有し、
前記本体枠に間隔をおいて複数の磁性部材が埋設され、
前記２つの保持本体における開口及び本体枠が互いに対応すると共に前記複数の磁性部材が互いに吸着することによって、前記２つの保持本体の本体枠が組み合わされることを特徴とする保持装置。 A holding device for holding a plate-shaped substrate,
Each having two holding bodies each constituted by a body frame in which an opening for fitting the plate-like substrate is formed;
A plurality of magnetic members are embedded at intervals in the main body frame,
An opening and a main body frame in the two holding main bodies correspond to each other, and the main body frames of the two holding main bodies are combined by the plurality of magnetic members adsorbing to each other.
複数の開口が間隔をおいて形成された本体枠と複数の磁性部材と貼付面と嵌入凹部と欠け凹部と複数の排出穴とを有して構成された２つの保持本体をそれぞれ備え、
前記一方の保持本体の複数の開口と前記他方の保持本体の複数の開口とは、それぞれ対応して形成され、
前記複数の磁性部材が、本体枠にそれぞれ間隔をおいて埋設され、
前記２つの保持本体の磁性部材が互いに対応して吸着することによって、前記２つの保持本体の本体枠が貼り合わせられ、
前記貼付面は、前記２つの保持本体が貼り合わせられたときに前記本体枠それぞれの対向する一面に形成され、
前記嵌入凹部は、前記開口の周囲に位置すると共に前記それぞれの本体枠の内縁部に凹設され、前記２つの保持本体が貼り合わされたときに嵌入凹部が対向してその間に空間を構成し、
前記欠け凹部は、前記保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ凹設され、
前記複数の排出穴は、前記保持本体それぞれの本体枠に、それぞれ開口との直交方向と平行するように貫通してそれぞれ形成され、前記２つの保持本体に形成された複数の排出穴がそれぞれ対応して連通することを特徴とする保持装置。 A holding device for holding a plate-shaped substrate,
A plurality of openings each having two main bodies each having a body frame, a plurality of magnetic members, a sticking surface, an insertion recess, a chip recess, and a plurality of discharge holes;
The plurality of openings of the one holding body and the plurality of openings of the other holding body are formed corresponding to each other,
The plurality of magnetic members are embedded in the main body frame at intervals,
When the magnetic members of the two holding main bodies are attracted corresponding to each other, the main body frames of the two holding main bodies are bonded together,
The affixing surface is formed on one opposing surface of each of the main body frames when the two holding main bodies are bonded together,
The insertion recess is located around the opening and is recessed in the inner edge of each main body frame, and when the two holding main bodies are bonded together, the insertion recess faces and forms a space therebetween,
The chipped recesses are respectively recessed at locations that do not face each other on the same corresponding side of the main body frame of the holding body,
The plurality of discharge holes are respectively formed through the body frames of the holding main bodies so as to be parallel to the direction orthogonal to the openings, respectively, and the plurality of discharge holes formed in the two holding main bodies respectively correspond to the plurality of discharge holes. A holding device that communicates with each other.
複数の開口が間隔をおいて形成された本体枠と複数の磁性部材と貼付面と嵌入凹部と欠け凹部と複数の排出穴とを有して構成された２つの保持本体をそれぞれ備え、
前記一方の保持本体の複数の開口と前記他方の保持本体の複数の開口とは、それぞれ対応して形成され、
前記複数の磁性部材が、前記本体枠にそれぞれ間隔をおいて埋設され、
前記２つの保持本体の磁性部材が互いに対応して吸着することによって、前記２つの保持本体の本体枠が貼り合わせられ、
前記貼付面は、前記本体枠それぞれの、前記２つの保持本体が貼り合わせられたときに対向する一面に形成され、
前記嵌入凹部は、前記開口の周囲に位置すると共に前記それぞれの本体枠の内縁部に凹設された嵌入凹部とを有し、２つの保持本体が貼り合わされたときに前記嵌入凹部が対向してその間に空間を構成し、
前記欠け凹部は、前記保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ凹設され、
前記複数の排出穴は、前記保持本体それぞれの本体枠に、それぞれ開口に向かう方向に平行するように貫通してそれぞれ形成されていることを特徴とする保持装置。 A holding device for holding a plate-shaped substrate,
A plurality of openings each having two main bodies each having a body frame, a plurality of magnetic members, a sticking surface, an insertion recess, a chip recess, and a plurality of discharge holes;
The plurality of openings of the one holding body and the plurality of openings of the other holding body are formed corresponding to each other,
The plurality of magnetic members are embedded in the main body frame at intervals,
When the magnetic members of the two holding main bodies are attracted corresponding to each other, the main body frames of the two holding main bodies are bonded together,
The affixing surface is formed on one surface of each of the main body frames facing each other when the two holding main bodies are bonded together,
The insertion recess is located around the opening and has an insertion recess formed in the inner edge of each main body frame. When the two holding main bodies are bonded together, the insertion recess faces each other. During that time, we created a space
The chipped recesses are respectively recessed at locations that do not face each other on the same corresponding side of the main body frame of the holding body,
The plurality of discharge holes are respectively formed through the main body frames of the holding main bodies so as to be parallel to the direction toward the opening.
複数の開口が間隔をおいて形成された本体枠と複数の磁性部材と貼付面と嵌入凹部と、欠け凹部と複数の排出溝とを有して構成された２つの保持本体をそれぞれ備え、
前記一方の保持本体の複数の開口と前記他方の保持本体の複数の開口とは、それぞれ対応して形成され、
前記複数の磁性部材が、本体枠にそれぞれ間隔をおいて埋設され、
前記２つの保持本体の磁性部材が互いに対応して吸着することによって、前記２つの保持本体の本体枠が貼り合わせられ、
前記貼付面は、前記２つの保持本体が貼り合わせられたときに前記本体枠それぞれの対向する一面に形成され、
前記嵌入凹部は、前記開口の周囲に位置すると共にそれぞれの本体枠の内縁部に凹設された嵌入凹部とを有し、前記２つの保持本体が貼り合わされたときに前記嵌入凹部が対向してその間に空間を構成し、
前記欠け凹部は、前記保持本体それぞれの本体枠の対応する同一の側部に、対向しない箇所にそれぞれ凹設され、
前記複数の排出溝は、前記開口に向かう方向にその一端が嵌入凹部と連通する複数の排出溝が前記保持本体それぞれの貼付面にそれぞれ凹設され、一方の保持本体と他方の保持本体とを貼り合わせたとき、前記保持本体それぞれに形成された前記排出溝が対応して組み合わされて穴を形成することを特徴とする保持装置。 A holding device for holding a plate-shaped substrate,
A plurality of openings each having two main bodies each having a body frame, a plurality of magnetic members, a sticking surface, a fitting recess, a chipped recess and a plurality of discharge grooves;
The plurality of openings of the one holding body and the plurality of openings of the other holding body are formed corresponding to each other,
The plurality of magnetic members are embedded in the main body frame at intervals,
When the magnetic members of the two holding main bodies are attracted corresponding to each other, the main body frames of the two holding main bodies are bonded together,
The affixing surface is formed on one opposing surface of each of the main body frames when the two holding main bodies are bonded together,
The insertion recess is located around the opening and has an insertion recess recessed in the inner edge of each main body frame. When the two holding bodies are bonded, the insertion recess faces each other. During that time, we created a space
The chipped recesses are respectively recessed at locations that do not face each other on the same corresponding side of the main body frame of the holding body,
The plurality of discharge grooves have a plurality of discharge grooves whose one ends communicate with the insertion recesses in a direction toward the opening, respectively, and are recessed in the sticking surfaces of the holding main bodies, respectively. The holding device, wherein when bonded together, the discharge grooves formed in each of the holding main bodies are correspondingly combined to form a hole.
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