JP3158470B2 - Parts with rolling or sliding - Google Patents
Parts with rolling or slidingInfo
- Publication number
- JP3158470B2 JP3158470B2 JP07141691A JP7141691A JP3158470B2 JP 3158470 B2 JP3158470 B2 JP 3158470B2 JP 07141691 A JP07141691 A JP 07141691A JP 7141691 A JP7141691 A JP 7141691A JP 3158470 B2 JP3158470 B2 JP 3158470B2
- Authority
- JP
- Japan
- Prior art keywords
- hardened
- bearing
- sliding
- rolling
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Rolling Contact Bearings (AREA)
- Heat Treatment Of Articles (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、転がり又は滑りを伴う
部品に係り、特に、転がり軸受，滑り軸受，転がり案
内，滑り案内等に使用される転がり又は滑りを伴う部品
の精度及び耐摩耗性向上に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rolling or sliding part, and more particularly to the precision and wear resistance of a rolling or sliding part used in a rolling bearing, a sliding bearing, a rolling guide, a sliding guide, and the like. Regarding improvement.
【０００２】[0002]
【従来の技術】従来、転がり軸受，滑り軸受，転がり案
内，滑り案内等に使用される転がり又は滑りを伴う部
品、例えば、ピボット軸受の球面受け，転がり軸受の保
持器，転がり案内及び滑り案内の案内面等のように、曲
面を有する転がり又は滑りを伴う部品は、素材ブランク
を切り出して当該ブランクに塑性加工を施し、所望の曲
面形状にプレス加工を行った後、このブランクに熱処理
を行い当該ブランクの全体又は表面を硬化して耐摩耗性
を付与し、さらに、前記熱処理により生じる前記ブラン
ク表面の変形，表面粗さ不良，表面の黒色変色等の問題
を解決するために曲面部分や取り付け基準面部等に切削
加工やラップ加工を行って製造している。2. Description of the Related Art Conventionally, rolling or sliding components used in rolling bearings, sliding bearings, rolling guides, sliding guides, etc., such as spherical bearings for pivot bearings, cages for rolling bearings, rolling guides and sliding guides. Rolling or sliding parts having a curved surface, such as guide surfaces, are cut out of a material blank, subjected to plastic working on the blank, pressed into a desired curved shape, and then subjected to heat treatment on the blank. Cured surfaces and mounting standards are used to harden the whole or surface of the blank to provide abrasion resistance, and to solve problems such as deformation of the blank surface, poor surface roughness, and discoloration of black surface caused by the heat treatment. Manufactured by cutting and lapping the surface.
【０００３】また、前記熱処理として、レーザビーム等
の高エネルギービームを用いて前記ブランクの所望部分
を硬化する場合も同様に、当該ブランクの変形，表面粗
さ不良，表面の黒色変色等の問題を解決するために曲面
部分や取り付け基準面部等に研削加工やラップ加工を行
って製造している。Similarly, when the desired portion of the blank is cured by using a high energy beam such as a laser beam as the heat treatment, problems such as deformation of the blank, poor surface roughness, and discoloration of black on the surface are similarly caused. In order to solve the problem, grinding and lapping are performed on a curved surface portion, a mounting reference surface portion, and the like.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前記方
法のように、曲面部分や取り付け基準面部等に研削加工
やラップ加工を行うには、特殊な治具を使い長時間かけ
て１個づつ行わなければならないため、手間がかかり、
生産性を向上することができないため、コストアップの
原因となるという問題があった。However, in order to grind or lap a curved surface portion or a reference mounting surface portion as in the above method, a special jig must be used one by one over a long period of time. It takes time and effort,
Since the productivity cannot be improved, there is a problem that the cost is increased.
【０００５】そこで、特開昭５８−３９７２８号及び特
開昭６１−９２７３４号に開示されているように、被加
工物にレーザビーム等の高エネルギービームを照射して
硬化処理を行った後に、成型加工（塑性加工）を施す従
来例が存在する。Therefore, as disclosed in JP-A-58-39728 and JP-A-61-92734, after a workpiece is irradiated with a high energy beam such as a laser beam to perform a curing treatment, There is a conventional example in which molding (plastic working) is performed.
【０００６】しかしながら、特開昭５８−３９７２８号
及び特開昭６１−９２７３４号に開示されている従来例
は、被加工物に高エネルギービームによる部分焼入れを
行った後、当該被加工物の非硬化部分に塑性変形を行う
ものであり、硬化部分の塑性変形に関する教示がされて
いないため、適度な表面硬さ（例えば、ＨＲＣ５８以
上）が必要な軸受，案内等の部品の部材として応用でき
るものではなかった。However, in the conventional examples disclosed in JP-A-58-39728 and JP-A-61-92734, after a workpiece is partially quenched by a high energy beam, the workpiece is not quenched. The plastic deformation of the hardened part is performed, and since there is no teaching about the plastic deformation of the hardened part, it can be applied as a member for parts such as bearings and guides that require an appropriate surface hardness (for example, HRC 58 or more). Was not.
【０００７】そこで、本発明は、このような問題を解決
することを課題とするものであり、被加工物に高エネル
ギービームを照射して焼入れ硬化し、当該被加工物に最
適な表面硬さを付与した後、当該焼入れ硬化処理面を圧
縮応力領域にして成型加工することで、クラックの発生
を防ぎ精度及び耐摩耗性を向上した転がり又は滑りを伴
う部品を提供することを目的とする。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve such a problem. The object is irradiated with a high-energy beam, quenched and hardened, and has an optimum surface hardness. After imparting, the object of the present invention is to provide a part with rolling or slippage in which the occurrence of cracks is prevented and the precision and wear resistance are improved by forming the quenched and hardened surface into a compression stress region and performing molding.
【０００８】[0008]
【課題を解決するための手段】この目的を達成するため
に請求項１の発明は、被加工物の所望部分にエネルギー
ビームを照射して焼入れ硬化した後、前記被加工物を所
望の形状に成型加工した部材からなる転がり又は滑りを
伴う部品において、前記被加工物の軌道面又は摺動面と
なる部位にエネルギービームを照射して前記部位が焼入
硬化された板状，環状体の少なくとも１つから選ばれる
部品予備体が、前記焼入硬化された部位を凹面側にして
成型されてなる軌道面又は摺動面を有する部品を提供す
るものである。また、請求項２の発明は、前記部品の軌
道面又は摺動面は、焼入硬化された部位に隣接して非硬
化部位を有する請求項１に記載の軌道面又は摺動面を有
する部品としている。 さらに、請求項３の発明は、前記
被加工物が、ピボット軸受の球面受け，転がり軸受の保
持器，リニアスライドのインナウエイ又はアウタウエ
イ，ニードル軸受の外輪，薄型玉軸受の外輪の少なくと
も１つから選ばれる請求項１又は２に記載の軌道面又は
摺動面を有する部品である。In order to achieve this object, an object of the present invention is to irradiate a desired portion of an object with an energy beam to quench and harden the object, and then to shape the object into a desired shape. In a rolling or sliding part made of a molded member , the track surface or the sliding surface of the workpiece
Irradiates an energy beam to the part to be quenched
Selected from at least one of hardened plate and ring
Component spare body, with the quenched and hardened part concave side
An object of the present invention is to provide a molded part having a raceway surface or a sliding surface . The invention according to claim 2 is characterized in that the gauge of the component is
Road or sliding surfaces should be non-hardened adjacent to the hardened
The raceway surface or the sliding surface according to claim 1, which has a roughened portion.
Parts to be used. Further, in the invention according to claim 3, the workpiece is selected from at least one of a spherical bearing of a pivot bearing, a cage of a rolling bearing, an inner or outer way of a linear slide, an outer ring of a needle bearing, and an outer ring of a thin ball bearing. The track surface according to claim 1 or 2, or
It is a component having a sliding surface .
【０００９】[0009]
【作用】素材の所望部分を簡単に焼入れ硬化するには、
当該所望部分にエネルギービーム、特に、高エネルギー
ビームを照射することが効果的である。そして、転がり
又は滑りを伴う部品に過酷な使用にも十分に耐え得る耐
摩耗性を付与するには、焼入れ硬化処理等により当該部
品の軌道面又は摺動面（転がり又は滑りを伴って他の部
品と接触する接触面）に最適な表面硬度を持たせること
が重要である。[Action] To easily quench and harden the desired part of the material,
It is effective to irradiate the desired portion with an energy beam, particularly a high energy beam. Then, in order to impart abrasion resistance enough to withstand severe use to a part that involves rolling or slipping, a raceway surface or a sliding surface of the part (by rolling or slipping, other parts may be used) by quench hardening treatment or the like. It is important that the contact surface that comes into contact with the part) has an optimum surface hardness.
【００１０】そこで、前記転がり又は滑りを伴う部品の
素材の段階で、所望部分にエネルギービームを照射して
焼入れ硬化し、当該部品に必要な表面硬さを付与した
後、所望の形状に成型加工することを試みた。Therefore, at the stage of the material of the rolling or slipping component, a desired portion is irradiated with an energy beam to be quenched and hardened to give a necessary surface hardness to the component and then formed into a desired shape. Tried to do.
【００１１】一般的に、成型加工時に前記素材を曲げる
と、曲がった外側（凸側）には引っ張り応力が、反対の
凹側には圧縮応力が生じる。この両応力に着目し、前記
成型加工時に、前記素材（被加工物）の焼入れ硬化処理
面を圧縮応力領域（硬化領域を凹側に、非硬化領域を凸
側）として所望の形状に成型加工する。即ち、硬化領域
と非硬化領域とを素材の肉厚方向に共存させた状態と
し、表面硬度の低い非硬化領域に塑性変形を受持たせし
め、以て、引っ張り応力を緩和し、また、後に軌道面又
は摺動面となる凹側には、残留圧縮応力が付与されるの
で、高精度で、耐摩耗性が向上した転がり又は滑りを伴
う部品を提供することができる。In general, when the material is bent during molding, a tensile stress is generated on the outer side (convex side) and a compressive stress is generated on the opposite concave side. Focusing on these two stresses, at the time of the molding process, the quenching and hardening surface of the material (workpiece) is formed into a desired shape with the compression stress region (the hardened region is on the concave side, and the non-cured region is the convex side). I do. That is, the hardened region and the non-hardened region are made to coexist in the thickness direction of the material, and the non-hardened region having a low surface hardness is subjected to plastic deformation, so that the tensile stress is reduced, and the track Since a residual compressive stress is applied to the concave side serving as the surface or the sliding surface, it is possible to provide a component with high accuracy and improved rolling resistance or sliding with improved wear resistance.
【００１２】[0012]
【実施例】次に、本発明に係る実施例について、図面を
参照して説明する。 （第１実施例）先ず、第１実施例として、本発明に係る
転がり又は滑りを伴う部品として、ピボット軸受の球面
受けを作製する。Next, embodiments of the present invention will be described with reference to the drawings. (First Embodiment) First, as a first embodiment, a spherical bearing of a pivot bearing is manufactured as a part with rolling or sliding according to the present invention.
【００１３】図１は、ピボット軸受の球面受けの製造工
程を示す部分断面図であり、図２は、図１に示す球面受
けを使用したピボット軸受の断面図である。図１（１）
に示す工程では、被加工物１として板厚２ｍｍのＳ５５
Ｃを切り出した。FIG. 1 is a partial sectional view showing a manufacturing process of the spherical bearing of the pivot bearing. FIG. 2 is a sectional view of the pivot bearing using the spherical bearing shown in FIG. Fig. 1 (1)
In the process shown in FIG.
C was cut out.
【００１４】次いで、図１（２）に示す工程では、図１
（１）に示す工程で切り出した板状素材１の中央部分、
即ち、ピボット軸受の球面受け１１に成型された際に、
軌道面となる部分（軸１２と転がり接触する部分）に高
エネルギービーム２としてＹＡＧレーザを照射して焼入
れ硬化する。この時の焼入れ方法は、図３に示す装置を
用い、被加工物１を回転テーブル２１上にセットした
後、高エネルギービーム２の焦点を被加工物１の上にず
らして高エネルギービーム２の径を広げた状態とし、回
転テーブル２１及びＸ−Ｙテーブル２２を動かして、被
加工物１上を高エネルギービーム２が螺旋状に照射され
るようにし、硬化部分３を得る。この時、焼入れ性を向
上するために、冷却用のあて金２０を使用し、熱の拡散
速度を向上した。尚、高エネルギービーム２の条件を表
１に示す。また、硬化部分３の表面からの深さと硬度と
の関係を図４に示す。尚、図３は、高エネルギービーム
２による焼入れ硬化処理を示す概要図である。Next, in the step shown in FIG.
A central portion of the plate-shaped material 1 cut out in the process shown in (1),
That is, when molded into the spherical bearing 11 of the pivot bearing,
The portion serving as the raceway surface (the portion in rolling contact with the shaft 12) is irradiated with a YAG laser as the high energy beam 2 to quench and harden. The quenching method at this time is as follows. After setting the workpiece 1 on the rotary table 21 using the apparatus shown in FIG. 3, the focus of the high energy beam 2 is shifted onto the workpiece 1 so that the high energy beam 2 With the diameter increased, the rotary table 21 and the XY table 22 are moved so that the high-energy beam 2 is helically irradiated on the workpiece 1 to obtain the hardened portion 3. At this time, in order to improve the quenchability, a cooling metal 20 was used to improve the heat diffusion rate. Table 1 shows the conditions of the high energy beam 2. FIG. 4 shows the relationship between the depth from the surface of the hardened portion 3 and the hardness. FIG. 3 is a schematic diagram showing a quench hardening process using the high energy beam 2.
【００１５】前記高エネルギービーム２の照射は平面状
態の被加工物１に行うため、照射位置や照射条件の設定
が簡単である。尚、高エネルギービーム２のオーバーラ
ップ部には、心配された軟化部分は認められなかった。Since the irradiation of the high energy beam 2 is performed on the workpiece 1 in a flat state, the setting of the irradiation position and the irradiation conditions is simple. In the overlap portion of the high energy beam 2, no worried softened portion was found.
【００１６】[0016]
【表１】 次に、図１（３）に示す工程では、図１（２）に示す工
程で得た硬化部分３を有する被加工物１の硬化面側を研
削加工する。この研削加工は、図４に示す硬度分布を参
考にして、硬化部分３の表面硬度及び硬化深さが最適値
となるように適宜設定して行う。その後、表面状態をさ
らに良くしたい時は、ラップ加工を行う。このように、
平面状態の被加工物１に研削加工及びラップ加工を行う
ため、連続的に短時間で、しかも簡単に所望の板厚寸法
や表面状態（表面粗さ等）を得ることができる。[Table 1] Next, in the step shown in FIG. 1 (3), the hardened surface side of the workpiece 1 having the hardened portion 3 obtained in the step shown in FIG. 1 (2) is ground. This grinding process is performed with reference to the hardness distribution shown in FIG. 4 and appropriately set so that the surface hardness and the hardening depth of the hardened portion 3 become optimal values. Thereafter, when it is desired to further improve the surface condition, lapping is performed. in this way,
Since the workpiece 1 in a flat state is subjected to grinding and lapping, a desired plate thickness dimension and surface state (surface roughness and the like) can be easily obtained in a short time and easily.
【００１７】このように、前記板厚が所定の寸法に仕上
がるため、前記焼入れ硬化処理により被加工物１に反り
等の変形が生じていても後のプレス加工工程に悪影響を
及ぼすことはない。As described above, since the plate thickness is finished to a predetermined size, even if the workpiece 1 is deformed such as warpage due to the quenching and hardening treatment, it does not adversely affect the subsequent press working process.
【００１８】次いで、図１（４）に示す工程では、図１
（３）に示す工程で得た被加工物１の硬化面側が凹側
（軌道面側）となるようにプレス加工し、図１（５）に
示すピボット軸受の球面受け１１を得た。この球面受け
１１は、表面硬度の低い非硬化部分が塑性変形を受持つ
ため、引っ張り応力を緩和し、且つ、後のプレス加工に
より軌道面となる部分には、最適な表面硬さ及び残留圧
縮応力が付与されるため、寸法精度，耐摩耗性を向上す
ることができる。Next, in the step shown in FIG.
Press work was performed so that the hardened surface side of the workpiece 1 obtained in the step shown in (3) was concave (the raceway surface side) to obtain the spherical bearing 11 of the pivot bearing shown in FIG. 1 (5). Since the non-cured portion having a low surface hardness is responsible for plastic deformation, the spherical support 11 reduces the tensile stress, and has an optimal surface hardness and residual compression in a portion which becomes a raceway surface by a subsequent press working. Since the stress is applied, dimensional accuracy and wear resistance can be improved.
【００１９】尚、前記プレス加工を行う際、被加工物１
の硬化部分３の変形能がその周辺の非硬化部分の変形能
より悪い場合が生じても、硬化層の厚さを薄くすること
で周辺の非硬化部分の変形にならって塑性変形を起こす
ことが可能なため問題はない。また、硬化部分３と非硬
化部分との境界が塑性変形能の急激な変化により、塑性
変形後、当該境界表面にわずかな表面形状の不連続を生
じる場合があっても、製品設計時及び金型設計時にこれ
を考慮して設計すれば問題はない。When performing the press working, the work 1
Even if the deformability of the hardened portion 3 is worse than the deformability of the surrounding non-hardened portion, the thickness of the hardened layer can be reduced to cause plastic deformation following the deformation of the surrounding non-hardened portion. There is no problem because it is possible. Further, even if the boundary between the hardened portion 3 and the non-hardened portion may have a slight surface shape discontinuity on the boundary surface after plastic deformation due to a sudden change in plastic deformation ability, the product design time and metallurgy may be reduced. There is no problem if this is taken into account when designing the mold.
【００２０】以上の工程で得た球面受け１１は、研削加
工やラップ加工等の表面仕上げ加工を行った後、プレス
加工等の塑性加工をしてもその表面粗さを良好なまま維
持できるため、塑性加工後の仕上げ加工を必要とせず直
ちに最終製品形状とすることができる。この結果、高精
度で耐摩耗性に優れた球面受け１１を量産的に効率良く
製造できる。 （第２実施例）次に、本発明に係る第２実施例として、
本発明に係る転がり又は滑りを伴う部品としてリニアス
ライドの内外のレール（インナウエイ及びアウタウエ
イ）を作製する。The spherical receiver 11 obtained by the above process can maintain its surface roughness in good condition even after plastic working such as pressing after surface finishing such as grinding and lapping. The final product shape can be obtained immediately without the need for finishing work after plastic working. As a result, the spherical receiver 11 having high accuracy and excellent wear resistance can be efficiently manufactured in mass production. Second Embodiment Next, as a second embodiment according to the present invention,
The inner and outer rails (inner way and outer way) of the linear slide are manufactured as the rolling or sliding parts according to the present invention.
【００２１】図５（１）は、リニアスライド（転がり案
内）の概念図であり、図５（２）は、図５（１）のＡ−
Ａ断面図である。図５に示すように、このリニアスライ
ドは、可動するインナウエイ３１及び固定されたアウタ
ウエイ３２の間にプラスチック保持器３３により保持さ
れたボール３０が位置し、このインナウエイ３１及びア
ウタウエイ３２の両端には、ばれ止めのプラスチックキ
ャップ３４が設けられた構造をしている。FIG. 5A is a conceptual diagram of a linear slide (rolling guide), and FIG.
It is A sectional drawing. As shown in FIG. 5, in this linear slide, a ball 30 held by a plastic retainer 33 is located between a movable inner way 31 and a fixed outer way 32. At both ends of the inner way 31 and the outer way 32, It has a structure in which a plastic cap 34 for preventing burrs is provided.
【００２２】第１実施例と同様の被加工物１を用い、リ
ニアスライドのインナウエイ３１及びアウタウエイ３２
の軌道面となる部分（即ち、インナウエイ３１及びアウ
タウエイ３２に成型された際に、ボール３０と転がり接
触する部分）にそれぞれ高エネルギービーム２としてＹ
ＡＧレーザを照射して焼入れ硬化する。この焼入れ方法
は、図６に示す装置を用い、第１実施例と同様に、被加
工物１をＸ−Ｙテーブル２２上にセットした後、高エネ
ルギービーム２の焦点を被加工物１の上にずらして高エ
ネルギービーム２の径を広げた状態とし、Ｘ−Ｙテーブ
ル２２を動かして、高エネルギービーム２が軌道面とな
る部分に照射されるようにし、硬化部分３を得る。この
時も焼入れ性を向上するために、第１実施例と同様にあ
て金をあてて熱の拡散速度を向上した。この高エネルギ
ービーム２（ＹＡＧレーザ）の条件を表２に示す。尚、
図６は、高エネルギービーム２による焼入れ硬化処理を
示す概要図である。Using the same workpiece 1 as in the first embodiment, the inner way 31 and the outer way 32 of the linear slide are used.
(I.e., the parts that are in rolling contact with the ball 30 when molded into the inner way 31 and the outer way 32) as the high energy beams 2 respectively.
Irradiation with an AG laser hardens and hardens. This quenching method uses the apparatus shown in FIG. 6 and sets the workpiece 1 on the XY table 22 and then focuses the high-energy beam 2 on the workpiece 1 as in the first embodiment. Then, the XY table 22 is moved so that the high energy beam 2 is irradiated on the portion to be the orbital surface, and the hardened portion 3 is obtained. At this time, in order to improve the hardenability, a metal was applied to increase the heat diffusion speed in the same manner as in the first embodiment. Table 2 shows the conditions of the high energy beam 2 (YAG laser). still,
FIG. 6 is a schematic diagram showing a quench hardening process using the high energy beam 2.
【００２３】[0023]
【表２】 その後、第１実施例と同様の研削加工及びラップ加工を
行った後、プレス加工して、精度及び耐摩耗性が向上し
たインナウエイ３１及びアウタウエイ３２を得た。[Table 2] Thereafter, after performing the same grinding and lapping as in the first example, the inner and outer ways 31 and 32 with improved accuracy and wear resistance were obtained by pressing.
【００２４】以上の工程で得たインナウエイ３１及びア
ウタウエイ３２は、研削加工やラップ加工等の表面仕上
げ加工を行った後、プレス加工等の塑性加工をしてもそ
の表面粗さを良好なまま維持できるため、塑性加工後の
仕上げ加工を必要とせず直ちに最終製品形状とすること
ができる。この結果、高精度で耐摩耗性に優れたインナ
ウエイ３１及びアウタウエイ３２を量産的に効率良く製
造できる。 （第３実施例）次に、本発明に係る第３実施例として、
本発明に係る転がり又は滑りを伴う部品として転がり軸
受の保持器を作製する。The inner way 31 and the outer way 32 obtained by the above-mentioned processes maintain their surface roughness in good condition even after plastic working such as pressing after surface finishing such as grinding and lapping. Therefore, the final product shape can be obtained immediately without the need for finishing work after plastic working. As a result, the inner way 31 and the outer way 32 which are highly accurate and have excellent wear resistance can be efficiently manufactured in mass production. Third Embodiment Next, as a third embodiment according to the present invention,
A retainer for a rolling bearing is manufactured as a component involving rolling or sliding according to the present invention.
【００２５】図７（１）は、波型保持器の平面図、図７
（２）は、一部側面図、図７（３）は、波型保持器を使
用した転がり軸受の概念図である。被加工物１として、
焼入れ硬化又は急速加熱急速冷却による溶融硬化が可能
な円盤形状の板厚０．４ｍｍのＳＵＳ４２０Ｊ２を使用
し、前記実施例と同様軸受を回転した時に、波型保持器
３５がボール３０と接触する部分（軌道面）に高エネル
ギービーム２を照射して焼入れ硬化処理を行う。この時
の高エネルギービーム２として使用した電子ビームの条
件を表３に示す。また、硬化部分３の表面からの深さと
硬度との関係を図８に示す。その後、円盤状板材のまま
研削加工，ラップ加工を行い、必要に応じてバレル加工
を行う。次に、被加工物１にプレス加工を行い転がり軸
受の波型保持器３５を作製する。FIG. 7A is a plan view of the wave type cage, and FIG.
(2) is a partial side view, and FIG. 7 (3) is a conceptual diagram of a rolling bearing using a corrugated cage. As the workpiece 1,
A disk-shaped SUS420J2 having a thickness of 0.4 mm, which can be melt-hardened by quenching hardening or rapid heating and rapid cooling, is used. As in the above-described embodiment, when the bearing is rotated, the portion where the corrugated cage 35 comes into contact with the ball 30 is used. The (orbital surface) is irradiated with the high energy beam 2 to perform quench hardening treatment. Table 3 shows the conditions of the electron beam used as the high energy beam 2 at this time. FIG. 8 shows the relationship between the depth from the surface of the hardened portion 3 and the hardness. Thereafter, grinding and lapping are performed on the disc-shaped plate material, and barreling is performed as necessary. Next, the workpiece 1 is subjected to press working to produce a corrugated retainer 35 of a rolling bearing.
【００２６】[0026]
【表３】 この波型保持器３５は、ボール３０との接触部分を硬化
しているため、波型保持器３５の摩耗を防ぐ効果を有す
る。このため、例えば、高温，真空中のような厳しい条
件下で使用される半導体製造装置等に用いる軸受の保持
器として使用することも可能である。即ち、半導体製造
装置等に用いる軸受の潤滑は、無潤滑（ドライ）であっ
たり、固体潤滑剤が使用されることが多く、潤滑条件と
しては油潤滑と比較して摩耗が生じ易い。特に、半導体
製造装置用の軸受は、発塵が嫌われるため、保持器の摩
耗を極力少なくすることが要求されている。このため、
本発明に係る部材を使用した保持器は、半導体製造装置
等に用いる軸受の保持器としても有効である。[Table 3] The corrugated retainer 35 has an effect of preventing the corrugated retainer 35 from being worn since the contact portion with the ball 30 is hardened. For this reason, for example, it can be used as a retainer of a bearing used in a semiconductor manufacturing apparatus used under severe conditions such as high temperature and vacuum. That is, lubrication of a bearing used in a semiconductor manufacturing apparatus or the like is often non-lubricated (dry) or a solid lubricant is used, and as a lubrication condition, wear is more likely to occur than in oil lubrication. In particular, since bearings for semiconductor manufacturing devices do not like dust generation, it is required to minimize wear of the cage. For this reason,
The cage using the member according to the present invention is also effective as a cage for a bearing used in a semiconductor manufacturing apparatus or the like.
【００２７】半導体製造装置等に用いる軸受の内輪及び
外輪，ボール及び保持器の素材としてステンレスが多く
使用されているが、特に、本発明の場合、マルテンサイ
ト系ステンレス鋼を使用することが好適である。また、
他の種類のステンレス鋼を使用する場合は、その表面の
所望位置に高エネルギービームを照射し、急速加熱によ
り表面を溶融させた後、急冷して表面硬化させることで
対応することができる。 （第４実施例）次に、本発明に係る第４実施例として、
本発明に係る転がり又は滑りを伴う部品としてニードル
軸受の外輪を作製する。Stainless steel is often used as the material of the inner and outer rings, balls and retainers of the bearings used in semiconductor manufacturing equipment and the like. Particularly, in the case of the present invention, it is preferable to use martensitic stainless steel. is there. Also,
When another type of stainless steel is used, it can be dealt with by irradiating a high-energy beam to a desired position on the surface, melting the surface by rapid heating, and rapidly cooling to harden the surface. (Fourth Embodiment) Next, as a fourth embodiment according to the present invention,
An outer ring of a needle bearing is manufactured as a rolling or sliding component according to the present invention.
【００２８】図９は、ニードル軸受の断面図である。被
加工物１として、板厚１ｍｍのＳ５５Ｃ材を用い、これ
を円盤状に打ち抜いた後、バレル加工を行いバリを取り
除く。次に、この円盤状のブランク１Ａを用い、外輪３
６の軌道面となる部分（即ち、軸受を回転した時に外輪
３６がニードル３８（転動体）と接触する部分）に高エ
ネルギービーム２を照射して焼入れ硬化処理を行い、図
１０に示す硬化部分３を有する円盤状のブランク１Ａを
得た。次いで、硬化面側を研削加工，ラップ加工して表
面仕上げを行った後、図１１に示す絞り加工方法で円筒
状に加工しながら片側端面をほぼ直角に曲げ加工する。
次いで、ニードル３８と保持器３３とを組み込み、その
後、他方の端面をほぼ直角に曲げ加工する。前記焼入れ
硬化処理は、所望部分のみに行うことが可能であり、前
記のようにほぼ直角に曲げ加工（塑性加工）する部分に
は、焼入れ硬化処理を施さないようにできるため、加工
が容易に行える。このようにして、図１２に示す円筒状
の外輪３６を得た。FIG. 9 is a sectional view of the needle bearing. As the workpiece 1, an S55C material having a thickness of 1 mm is used, and after punching it into a disk shape, barrel processing is performed to remove burrs. Next, using this disc-shaped blank 1A,
6 (that is, a portion where the outer ring 36 comes into contact with the needle 38 (rolling element) when the bearing is rotated) is irradiated with the high-energy beam 2 to perform quenching and hardening treatment, and a hardened portion shown in FIG. 3 having a disk-shaped blank 1A. Next, after the hardened surface side is subjected to grinding and lapping to finish the surface, one end face is bent at a substantially right angle while being processed into a cylindrical shape by the drawing method shown in FIG.
Next, the needle 38 and the retainer 33 are assembled, and then the other end face is bent at a substantially right angle. The quenching and hardening treatment can be performed only on a desired portion, and as described above, the quenching and hardening treatment can not be performed on a portion that is bent at approximately a right angle (plastic working). I can do it. Thus, a cylindrical outer ring 36 shown in FIG. 12 was obtained.
【００２９】この外輪３６を使用したニードル軸受は、
ニードル３８が常に外輪３６の硬化部分３上を転がり接
触しながら回転するため摩耗が少ない。そして、安価な
ニードル軸受を提供することができる。The needle bearing using the outer ring 36 is as follows.
Since the needle 38 always rotates while rolling on the hardened portion 3 of the outer ring 36, the wear is small. And an inexpensive needle bearing can be provided.
【００３０】また、端面部ニードル側にも前記同様、硬
化部分３を形成することで、外輪３６がニードル端面や
保持器３３と接触しても摩耗を防ぐことができる。ま
た、図１３に示す保持器付きシェル型軸受のように、外
輪３６の厚さ（肉厚）が、例えば、１ｍｍ以下と薄い場
合は、高エネルギービーム２の照射条件により、硬化部
分３の裏側表面まで硬化することができる。この場合、
当該裏側表面の表面硬度がＨｖ３００〜４００となるよ
うに焼戻し処理を行うことが好的である。この後、表面
仕上げ加工を行った後、プレス加工を行う。当該焼戻し
処理によりプレス加工での割れを防ぎ、さらに軸受とし
て完成した時に、外輪３６の外径部分にも硬化部分３が
形成されているため、この軸受をハウジングに組み込む
際に、かじりが生じにくく有利である。尚、図１３
（１）は、開放形，図１３（２）は、一端密閉形を示
す。 （第５実施例）次に、本発明に係る第５実施例として、
本発明に係る転がり又は滑りを伴う部品として薄型玉軸
受の外輪を作成する。Also, by forming the hardened portion 3 on the end face portion needle side in the same manner as described above, wear can be prevented even if the outer ring 36 comes into contact with the needle end face or the retainer 33. When the thickness (wall thickness) of the outer ring 36 is as thin as 1 mm or less, for example, as in a shell-type bearing with a retainer shown in FIG. Can cure to the surface. in this case,
It is preferable to perform a tempering treatment so that the surface hardness of the back surface becomes Hv300 to 400. Then, after finishing the surface, press working is performed. The tempering process prevents cracks in the press working, and furthermore, when the bearing is completed, the hardened portion 3 is also formed on the outer diameter portion of the outer ring 36. Therefore, when this bearing is incorporated in the housing, galling hardly occurs. It is advantageous. Note that FIG.
(1) shows an open type, and FIG. 13 (2) shows a one-end closed type. (Fifth Embodiment) Next, as a fifth embodiment according to the present invention,
An outer ring of a thin ball bearing is prepared as a rolling or sliding component according to the present invention.
【００３１】被加工物１として、板厚０．５ｍｍのＳ５
５Ｃを用い、第４実施例と同様に円盤状のブランク１Ａ
を作製した後、外輪３６の軌道面となる部分（即ち、軸
受を回転した時に外輪３６がボール３０と接触する部
分）に高エネルギービーム２を照射して焼入れ硬化処理
を行い、図１４に示す硬化部分３を有する円盤状のブラ
ンク１Ａを得た。次いで、硬化部分３の表面硬度がＨｖ
４００〜５００となるように焼戻し処理を行う。次い
で、硬化面側を研削加工，ラップ加工して表面仕上げを
行った後、第４実施例と同様のプレス加工（絞り加工）
を行う。この時、前記焼戻し処理を行ったことで、円盤
状のブランク１Ａの変形能が増し、加工が容易となるた
め、円盤状のブランク１Ａが図１４に示すようにリング
状に硬化されていても割れが発生することなく図１５に
示す円筒状の外輪３６を得ることができる。As the workpiece 1, S5 having a thickness of 0.5 mm was used.
5C and a disc-shaped blank 1A as in the fourth embodiment.
Then, a high-energy beam 2 is applied to a portion serving as a raceway surface of the outer ring 36 (that is, a portion where the outer ring 36 comes into contact with the ball 30 when the bearing is rotated) to perform quenching and hardening treatment, as shown in FIG. A disk-shaped blank 1A having a hardened portion 3 was obtained. Next, the surface hardness of the hardened portion 3 is Hv
A tempering process is performed so as to be 400 to 500. Next, after the hardened side is subjected to grinding and lapping to finish the surface, the same pressing (drawing) as in the fourth embodiment is performed.
I do. At this time, by performing the tempering process, the deformability of the disc-shaped blank 1A is increased, and the processing is facilitated. Therefore, even if the disc-shaped blank 1A is hardened in a ring shape as shown in FIG. A cylindrical outer ring 36 shown in FIG. 15 can be obtained without cracking.
【００３２】図１６は、この外輪３６を使用した薄型玉
軸受の製品断面図であり、この薄型玉軸受は、事務機等
の軽荷重を支えラジアル回転するものであるため、外輪
３６の軌道面の表面硬度は、Ｈｖ４００〜５００で十分
である。尚、前記焼戻し処理は、図１７に示す焼戻し条
件（温度，時間）とビッカース硬さとの関係により、外
輪３６の軌道面が所望の硬さとなるように行った。FIG. 16 is a cross-sectional view of a product of a thin ball bearing using the outer ring 36. Since the thin ball bearing supports a light load of an office machine or the like and radially rotates, the raceway surface of the outer ring 36 is used. Hv 400 to 500 is sufficient. The tempering treatment was performed so that the raceway surface of the outer ring 36 had a desired hardness based on the relationship between the tempering conditions (temperature and time) and the Vickers hardness shown in FIG.
【００３３】この外輪３６を使用した薄型玉軸受は、ボ
ール３０が常に外輪３６の硬化部分３上を転がり接触し
ながら回転するため摩耗が少ない。そして、安価な薄型
玉軸受を提供することができる。In the thin ball bearing using the outer ring 36, the ball 30 always rotates while rolling and contacting on the hardened portion 3 of the outer ring 36, so that the wear is small. And an inexpensive thin ball bearing can be provided.
【００３４】尚、本実施例では、素材の軌道面となる部
分にエネルギービームを照射して焼入れ硬化する場合に
ついて説明したが、素材の摺動面となる部分、例えば，
滑り軸受の内外輪の摺動面，滑り案内のレールの摺動面
となる部分等に焼入れ硬化しても、同様の硬化を有する
部品を得ることができることは勿論である。In the present embodiment, the case where the part to be the raceway surface of the material is irradiated with the energy beam and quenched and hardened has been described, but the part to be the sliding surface of the material, for example,
Even if quenching and hardening the sliding surfaces of the inner and outer races of the sliding bearing and the sliding surfaces of the sliding guide rails, parts having the same hardening can be obtained.
【００３５】そして、被加工物としては、Ｓ５５Ｃ，Ｓ
ＵＳ４２０Ｊ２等に限らず、他の高炭素クロム軸受鋼，
ステンレス鋼等を用いることができることは勿論であ
る。また、本実施例の高エネルギービームは、電子ビー
ムやＹＡＧレーザに限らず、ＣＯ2 レーザ等、他のビー
ムを使用してもよい。As the workpiece, S55C, S55C
Not only US420J2 etc. but also other high carbon chromium bearing steel,
Of course, stainless steel or the like can be used. Further, the high energy beam of the present embodiment is not limited to the electron beam or the YAG laser, and another beam such as a CO 2 laser may be used.
【００３６】[0036]
【発明の効果】以上説明したように、請求項１の発明に
よれば、表面硬度の低い非硬化領域に塑性変形を受持た
せ、以て、引張応力を緩和し、また、後に軌道面又は摺
動面となる凹側には、残留圧縮応力が付与される。この
結果、過酷な使用にも十分耐え得る耐摩耗性を有する高
精度で安価な軌道面又は摺動面を有する部品を提供する
ことができる。さらに、請求項２に記載の発明によれ
ば、非硬化部位が硬化部位に隣接しているので変形能が
高くなり、破断やクラックを防止することができる。ま
た、請求項３の発明によれば、前記転がり又は滑りを伴
う部品を具体化したものであり、請求項１又は２の発明
の効果を具体化し得る。As described in the foregoing, according to the invention of claim 1, thereby Ukemochita plastic deformation in the non-hardened areas of low front surface hardness, than Te, the tensile stress is relaxed, and the raceway surfaces after Alternatively, a residual compressive stress is applied to the concave side serving as the sliding surface. As a result, it is possible to provide a high-precision and inexpensive part having a raceway surface or a sliding surface having abrasion resistance enough to withstand severe use. Further, according to the invention described in claim 2,
If the non-cured part is adjacent to the cured part,
It becomes high, and breakage and cracks can be prevented. According to the third aspect of the present invention, the rolling or sliding parts are embodied, and the effects of the first or second aspect of the present invention can be embodied.
【図１】第１実施例に係る転がり又は滑りを伴う部品の
製造工程を示す部分断面図である。FIG. 1 is a partial cross-sectional view showing a manufacturing process of a part with rolling or sliding according to a first embodiment.
【図２】第１実施例に係るピボット軸受の断面図であ
る。FIG. 2 is a sectional view of the pivot bearing according to the first embodiment.
【図３】第１実施例に係る高エネルギービームによる焼
入れ硬化処理を示す概要図である。FIG. 3 is a schematic diagram illustrating a quench hardening process using a high energy beam according to the first embodiment.
【図４】第１実施例に係る硬化部分の表面からの深さと
硬度との関係を示す図である。FIG. 4 is a diagram showing the relationship between the depth from the surface of the cured portion and the hardness according to the first embodiment.
【図５】第２実施例に係るリニアスライドの概要図であ
る。FIG. 5 is a schematic view of a linear slide according to a second embodiment.
【図６】第２実施例に係る高エネルギービームによる焼
入れ硬化処理を示す概要図である。FIG. 6 is a schematic diagram showing a quench hardening process using a high energy beam according to a second embodiment.
【図７】第３実施例に係る保持器の平面図，側面図，概
要図である。FIG. 7 is a plan view, a side view, and a schematic view of a cage according to a third embodiment.
【図８】第３実施例に係る硬化部分の表面からの深さと
硬度との関係を示す図である。FIG. 8 is a diagram showing the relationship between the depth from the surface of the cured portion and the hardness according to the third embodiment.
【図９】第４実施例に係るニードル軸受の断面図であ
る。FIG. 9 is a sectional view of a needle bearing according to a fourth embodiment.
【図１０】第４実施例に係る硬化部分を有する円盤状の
ブランクを示す平面図である。FIG. 10 is a plan view showing a disc-shaped blank having a cured portion according to a fourth embodiment.
【図１１】第４実施例に係る絞り加工方法を示す概要図
である。FIG. 11 is a schematic view illustrating a drawing method according to a fourth embodiment.
【図１２】第４実施例に係る外輪を示す側面図である。FIG. 12 is a side view showing an outer race according to a fourth embodiment.
【図１３】第４実施例に係る保持器付きシェル型軸受の
断面図である。FIG. 13 is a sectional view of a shell-type bearing with a cage according to a fourth embodiment.
【図１４】第５実施例に係る硬化部分を有する円盤状の
ブランクを示す平面図である。FIG. 14 is a plan view showing a disc-shaped blank having a cured portion according to a fifth embodiment.
【図１５】第５実施例に係る外輪を示す側面図である。FIG. 15 is a side view showing an outer race according to a fifth embodiment.
【図１６】第５実施例に係る薄型玉軸受の製品断面図で
ある。FIG. 16 is a sectional view of a product of a thin ball bearing according to a fifth embodiment.
【図１７】第５実施例に係る焼戻し条件（温度，時間）
とビッカース硬さとの関係を示す図である。FIG. 17 shows tempering conditions (temperature, time) according to a fifth embodiment.
It is a figure which shows the relationship between Vickers hardness.
１ 被加工物 ２ 高エネルギービーム ３ 硬化部分 １１ 球面受け ３１ インナウエイ ３２ アウタウエイ ３５ 波型保持器 ３６ 外輪 DESCRIPTION OF SYMBOLS 1 Workpiece 2 High energy beam 3 Hardened part 11 Spherical receiver 31 Inner way 32 Outer way 35 Wave type retainer 36 Outer ring
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C21D 9/00 - 9/44 C21D 9/50 C21D 1/09 F16C 33/64 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) C21D 9/00-9/44 C21D 9/50 C21D 1/09 F16C 33/64
Claims (3)
を照射して焼入れ硬化した後、前記被加工物を所望の形
状に成型加工した部材からなる転がり又は滑りを伴う部
品において、前記被加工物の軌道面又は摺動面となる部位にエネルギ
ービームを照射して前記部位が焼入硬化された板状，環
状体の少なくとも１つから選ばれる部品予備体が、前記
焼入硬化された部位を凹面側にして成型されてなる軌道
面又は摺動面を有する部品。 1. A part involving rolling or sliding, comprising a member obtained by irradiating an energy beam onto a desired portion of a workpiece and quenching and hardening the same, and then molding the workpiece into a desired shape . Energy on the track surface or sliding surface of
Plate-shaped, ring whose part is quenched and hardened by beam irradiation
The component spare body selected from at least one of the shape bodies is
Tracks molded with quenched and hardened part concave side
Parts having a surface or sliding surface.
化された部位に隣接して非硬化部位を有する請求項１に2. The method according to claim 1, further comprising:
記載の軌道面又は摺動面を有する部品。A part having the raceway surface or sliding surface described in the above.
け，転がり軸受の保持器，リニアスライドのインナウエ
イ又はアウタウエイ，ニードル軸受の外輪，薄型玉軸受
の外輪の少なくとも１つから選ばれる請求項１又は２に
記載の軌道面又は摺動面を有する部品。3. The work piece is selected from at least one of a spherical bearing of a pivot bearing, a retainer of a rolling bearing, an inner or outer way of a linear slide, an outer ring of a needle bearing, and an outer ring of a thin ball bearing. Or a component having the raceway surface or the sliding surface according to 2 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07141691A JP3158470B2 (en) | 1991-04-04 | 1991-04-04 | Parts with rolling or sliding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP07141691A JP3158470B2 (en) | 1991-04-04 | 1991-04-04 | Parts with rolling or sliding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04308038A JPH04308038A (en) | 1992-10-30 |
| JP3158470B2 true JP3158470B2 (en) | 2001-04-23 |
Family
ID=13459893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP07141691A Expired - Fee Related JP3158470B2 (en) | 1991-04-04 | 1991-04-04 | Parts with rolling or sliding |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3158470B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050004843A (en) | 2002-05-14 | 2005-01-12 | 고요 세이코 가부시키가이샤 | Method of producing bearing raceway member |
-
1991
- 1991-04-04 JP JP07141691A patent/JP3158470B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04308038A (en) | 1992-10-30 |
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