JP3073640B2 - Vacuum chuck suction plate - Google Patents
Vacuum chuck suction plateInfo
- Publication number
- JP3073640B2 JP3073640B2 JP05288462A JP28846293A JP3073640B2 JP 3073640 B2 JP3073640 B2 JP 3073640B2 JP 05288462 A JP05288462 A JP 05288462A JP 28846293 A JP28846293 A JP 28846293A JP 3073640 B2 JP3073640 B2 JP 3073640B2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- suction plate
- plate
- vacuum chuck
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Jigs For Machine Tools (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は真空チャックの吸着板に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction plate of a vacuum chuck.
【０００２】[0002]
【従来の技術】一般に、ワークの搬送等に用いられる真
空チャックには、多数の透孔が形成された吸着板が設け
られ、その吸着板は金属やセラミックスといった硬度の
高い物質により形成されている。真空チャックは吸着板
の各透孔を介して真空チャック外部の空気を吸引するよ
うになっている。従って、ワークの端面に吸着板の吸着
面を当接させた状態で空気を吸引すると、吸着面にワー
クが吸着されてワークが真空チャックに保持固定される
ようになっている。2. Description of the Related Art In general, a vacuum chuck used for transporting a work or the like is provided with a suction plate having a large number of through holes, and the suction plate is formed of a material having high hardness such as metal or ceramics. . The vacuum chuck sucks air outside the vacuum chuck through each through hole of the suction plate. Therefore, when air is sucked while the suction surface of the suction plate is in contact with the end surface of the work, the work is suctioned to the suction surface and the work is held and fixed to the vacuum chuck.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、金属や
セラミックスといった硬度の高い物質で吸着板を形成す
ると、ワークを吸着したときにワークが傷付きやすいと
いう問題がある。特に、薄い金属板，液晶ガラス基板，
積層基板，積層コンデンサ等の精密部品では、わずかな
傷でも品質の低下に繋がる。However, when the suction plate is formed of a material having high hardness such as metal or ceramics, there is a problem that the work is easily damaged when the work is sucked. In particular, thin metal plates, liquid crystal glass substrates,
In precision parts such as a multilayer substrate and a multilayer capacitor, even a slight scratch leads to a decrease in quality.
【０００４】そこで、吸着板をプラスチックで形成した
ものが提案されている。プラスチックは金属やセラッミ
ックスに比べて硬度が低いため、吸着板をプラスチック
で形成した真空チャックの場合には、前記精密部品を吸
着した場合に傷がつきにくいという利点がある。[0004] Therefore, a device in which the suction plate is formed of plastic has been proposed. Since plastic has a lower hardness than metal or ceramics, a vacuum chuck having a suction plate made of plastic has an advantage that it is hardly damaged when the precision component is sucked.
【０００５】ところが、プラスチックは電気絶縁性が高
く吸湿性が低いため、吸着板には静電気が帯電し易い。
プラスチックで形成された吸着板の場合、約３０００Ｖ
／mmの静電気が帯電され、この静電気により吸着面に塵
埃が付着する。この状態で精密部品を吸着すると、吸着
面に付着した塵埃により精密部品に傷がつく。また、吸
着板に帯電した静電気自体が精密部品に悪影響を及ぼす
という新たな問題点が生じる。However, plastic has high electrical insulation and low hygroscopicity, so that the suction plate is easily charged with static electricity.
Approximately 3000V in the case of a suction plate made of plastic
/ Mm of static electricity, which causes dust to adhere to the adsorption surface. If the precision component is sucked in this state, the precision component is damaged by dust attached to the suction surface. In addition, a new problem arises in that static electricity itself charged on the suction plate has an adverse effect on precision parts.
【０００６】本発明は上記問題点を解決するためになさ
れたものであって、その目的は、プラスチックで吸着板
を形成したにも拘わらず、吸着板における静電気の帯電
を防止することのできる真空チャックの吸着板を提供す
ることにある。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum apparatus capable of preventing static electricity from being charged on an attraction plate despite the fact that the attraction plate is formed of plastic. An object of the present invention is to provide a chuck suction plate.
【０００７】又、本発明の別の目的は、帯電防止効果を
長期に亘って持続することができる真空チャックの吸着
板を提供することにある。Another object of the present invention is to provide a vacuum chuck capable of maintaining an antistatic effect for a long period of time.
To provide a board .
【０００８】[0008]
【課題を解決するための手段】上記目的を達成させるた
め、請求項１記載の発明は、表裏両面に連通する多数の
透孔を有するプラスチック板を形成し、そのプラスチッ
ク板を一方の面から空気を吸引することにより他方の面
に被吸着物を吸着する真空チャックの吸着板とし、前記
プラスチック板の吸着面以外の面に、該プラスチック板
に静電気が発生することを防止する帯電防止剤を設けた
ことをその要旨とする。In order to achieve the above object, according to the first aspect of the present invention, a plastic plate having a large number of through holes communicating with both front and back surfaces is formed, and the plastic plate is removed from one surface by air. Is used as a suction plate of a vacuum chuck for sucking an object to be sucked on the other surface by sucking the plastic plate.
The gist of the present invention is to provide an antistatic agent for preventing generation of static electricity .
【０００９】[0009]
【課題を解決するための手段】上記目的を達成させるた
め、本発明は、樹脂粉末を加熱、圧縮することにより表
裏両面に空気を流通する多数の透孔を全体に有するプラ
スチック板を成形して、そのプラスチック板を一方の面
から空気を吸引することにより他方の面に被吸着物を吸
着する真空チャックの吸着板とし、前記プラスチック板
の吸着面以外の面、及び前記プラスチック板全体の透孔
の内側面に、該プラスチック板に静電気が発生すること
を防止する、界面活性剤からなる帯電防止剤を設けたこ
とをその要旨とする。Means for Solving the Problems In order to achieve the above object, the present invention relates to a plastic having a large number of through-holes through which air flows on both sides by heating and compressing a resin powder. A plate is formed , and the plastic plate is used as a suction plate of a vacuum chuck that sucks an object to be suctioned onto the other surface by sucking air from one surface, and a surface other than the suction surface of the plastic plate, and the plastic plate. The gist of the invention is that an antistatic agent made of a surfactant is provided on the inner surface of the through-hole of the entire plate to prevent static electricity from being generated on the plastic plate.
【００１０】[0010]
【００１１】[0011]
【作用】従って、請求項１の発明では、真空チャックの
吸着板はプラスチック材料により構成されているため、
被吸着物が傷つくことなく吸着保持される。この時、被
吸着物を吸着する吸着面以外の面に帯電防止剤が設けら
れているため、静電気による被吸着物への悪影響が防止
される。又、被吸着物を吸着しても帯電防止剤が剥離さ
れにくく、帯電防止効果が長期に亘って持続されるとと
もに、剥離した帯電防止剤が被吸着物に付着して傷つく
ことが防止される。 According to the first aspect of the present invention, since the suction plate of the vacuum chuck is made of a plastic material,
The object to be sucked is held without being damaged. At this time,
Antistatic agent is provided on the surface other than the adsorption surface that adsorbs the adsorbate.
Prevents static electricity from adversely affecting objects to be adsorbed
Is done. In addition, the antistatic agent peels off even when the object is adsorbed.
And that the antistatic effect lasts for a long time
In particular, the peeled antistatic agent adheres to the adsorbed material and damages it
Is prevented.
【００１２】請求項２の発明では、真空チャックの吸着
板はプラスチック材料により構成されているため、被吸
着物が傷つくことなく吸着保持される。この時、被吸着
物を吸着する吸着面以外の面、及びプラスチック板が有
する多数の透孔の内側面に帯電防止剤が設けられている
ため、静電気による被吸着物への悪影響が防止される。
又、被吸着物を吸着しても帯電防止剤が剥離されないた
め、帯電防止効果が長期に亘って持続されるとともに、
剥離した帯電防止剤が被吸着物に付着して傷つくことが
防止される。According to the second aspect of the present invention, the suction of the vacuum chuck is performed.
Since the plate is made of plastic material,
The kimono is absorbed and held without being damaged. At this time,
There is a surface other than the adsorption surface that adsorbs objects and a plastic plate
Antistatic agent is provided on the inner surface of many through holes
Therefore, adverse effects on the object by static electricity can be prevented.
Also, the antistatic agent was not peeled off even when the object was adsorbed .
The antistatic effect is maintained for a long time,
The peeled antistatic agent is prevented from adhering to the object and being damaged.
【００１３】[0013]
【００１４】[0014]
【実施例】以下、本発明を具体化した一実施例を図１〜
図４に従って説明する。図１〜図３に示すように、真空
チャック１のチャック本体２は有底円筒状に形成され、
その底部中央にはチャック本体２の内側中空部２ａから
空気を吸い出すための空気吸出口３が形成されている。
又、チャック本体２は金属製であって、その上側にはチ
ャック本体２と同径に形成された金属製のチャック円板
４がボルト５により固着され、このチャック円板４によ
りチャック本体２の上側開口部が閉塞されている。尚、
チャック本体２とチャック円板４との接合面には図示し
ないパッキンが介在されている。前記チャック円板４の
上面には、同心円状で径の異なる複数の環状溝６が形成
され、各環状溝６の底部には所定間隔をおいて複数の空
気吸出孔７が形成されている。そして、この空気吸出孔
７により環状溝６とチャック本体２の内側中空部２ａと
が連通されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will now be described with reference to FIGS.
This will be described with reference to FIG. As shown in FIGS. 1 to 3, the chuck body 2 of the vacuum chuck 1 is formed in a bottomed cylindrical shape,
An air suction port 3 for sucking air from the inner hollow portion 2a of the chuck body 2 is formed at the bottom center.
The chuck body 2 is made of metal, and a metal chuck disk 4 having the same diameter as the chuck body 2 is fixed to the upper side of the chuck body 2 with bolts 5. The upper opening is closed. still,
A packing (not shown) is interposed on the joint surface between the chuck body 2 and the chuck disk 4. A plurality of concentric annular grooves 6 having different diameters are formed on the upper surface of the chuck disk 4, and a plurality of air suction holes 7 are formed at predetermined intervals at the bottom of each annular groove 6. Then, the annular groove 6 and the inner hollow portion 2a of the chuck main body 2 communicate with each other through the air suction hole 7.
【００１５】前記チャック円板４の上面には、チャック
円板４と同径の円板状に形成されたプラスチック板より
なる吸着板８が接着剤により接着されている。その接着
剤は前記チャック円板４の上面外周部のみに塗布されて
いるため、チャック円板４と吸着板８との接合面から空
気が漏れないようになっている。又、吸着板８のチャッ
ク円板４側と反対の面は被吸着物を吸着する吸着面９と
なっている。On the upper surface of the chuck disk 4, a suction plate 8 made of a plastic plate having the same diameter as the chuck disk 4 is adhered by an adhesive. Since the adhesive is applied only to the outer peripheral portion of the upper surface of the chuck disk 4, air does not leak from the joint surface between the chuck disk 4 and the suction plate 8. The surface of the suction plate 8 opposite to the chuck disk 4 side is a suction surface 9 for sucking an object to be suctioned.
【００１６】この吸着板８はプラスチック材料により形
成されており、吸着板８は円板状の吸着部８ａとその吸
着部８ａの外周部全体に周回するように形成されたシー
ル部８ｂとから構成されている。吸着部８ａには、図４
（ｂ）に示すように、空気を流通する透孔１１が形成さ
れている。一方、シール部８ｂには吸着部８ａに形成さ
れているような空気を流通する透孔は形成されておら
ず、このシール部８ｂから吸着部８ａを流通する空気が
吸着板８の外周面から漏れないようになっている。The suction plate 8 is formed of a plastic material. The suction plate 8 includes a disk-shaped suction portion 8a and a seal portion 8b formed so as to extend around the entire outer periphery of the suction portion 8a. Have been. As shown in FIG.
As shown in (b), a through hole 11 through which air flows is formed. On the other hand, the seal portion 8b is not provided with a through-hole through which air flows as in the suction portion 8a, and the air flowing through the suction portion 8a from the seal portion 8b flows from the outer peripheral surface of the suction plate 8. It does not leak.
【００１７】従って、図示しない空気吸引装置によりチ
ャック本体２の空気吸出口３から空気を吸引すると、内
側中空部２ａ，空気吸出孔７，環状溝６，吸着部８ａの
透孔１１を介して、吸着板８の吸着面９付近の空気が吸
い込まれるようになっている。そして、被吸着物の端面
に吸着部８ａの吸着面９を接触させて空気吸出口３から
空気を吸引すると、被吸着物は吸着面９に吸着されて真
空チャック１に保持固定されるようになっている。Therefore, when air is sucked from the air suction outlet 3 of the chuck body 2 by an air suction device (not shown), the air is sucked through the inner hollow portion 2a, the air suction hole 7, the annular groove 6, and the through hole 11 of the suction portion 8a. Air near the suction surface 9 of the suction plate 8 is sucked. When the suction surface 9 of the suction portion 8a is brought into contact with the end surface of the suction object and air is sucked from the air suction port 3, the suction object 9 is sucked by the suction surface 9 and held and fixed to the vacuum chuck 1. Has become.
【００１８】又、吸着板８の吸着面以外の面及び、図４
（ｂ）に示す透孔１１の内側面には、静電気の帯電を防
止するための電導性薄層１２が設けられている。そし
て、本実施例では、吸着板８の裏面に形成された電導性
薄層１２がチャック円板４と接触するようになってい
る。従って、この電導性薄層１２により吸着板８の吸着
面以外の面及び透孔１１の内側面の電導性が向上し、吸
着板８における静電気の帯電が防止されるようになって
いる。Also, the surface of the suction plate 8 other than the suction surface and FIG.
A conductive thin layer 12 for preventing static electricity from being charged is provided on the inner surface of the through hole 11 shown in FIG. In this embodiment, the conductive thin layer 12 formed on the back surface of the suction plate 8 comes into contact with the chuck disk 4. Therefore, the conductive thin layer 12 improves the conductivity of the surface other than the suction surface of the suction plate 8 and the inner surface of the through hole 11, thereby preventing the suction plate 8 from being charged with static electricity.
【００１９】次に真空チャック１に設けられた吸着板８
の製造方法を説明する。吸着板８は、吸着部８ａを成形
する工程と吸着部８ａの外周面にシール部８ｂを成形す
る工程とを経て成形される。Next, the suction plate 8 provided on the vacuum chuck 1
Will be described. The suction plate 8 is formed through a process of forming the suction portion 8a and a process of forming a seal portion 8b on the outer peripheral surface of the suction portion 8a.
【００２０】まず、吸着部８ａを成形する工程を説明す
る。粒子径約１００μｍの樹脂粉末を成形金型に充填し
て加熱するとともに、圧縮すると吸着部８ａが形成され
る。このとき、図４（ａ）に示すように、各樹脂粉末が
半溶解して互いに結合されるため、樹脂１０には直径約
０．１mmの透孔１１が形成される。その透孔１１は吸着
部８ａの表面１cm2 当たり約５１００個形成されてい
る。First, the step of forming the suction portion 8a will be described. A resin mold having a particle diameter of about 100 μm is filled in a molding die, heated, and compressed to form an adsorption portion 8a. At this time, as shown in FIG. 4A, since the respective resin powders are semi-dissolved and bonded to each other, a through hole 11 having a diameter of about 0.1 mm is formed in the resin 10. Approximately 5,100 perforations 11 are formed per 1 cm 2 of the surface of the adsorption portion 8a.
【００２１】次に、シール部８ｂを成形する工程を説明
する。まず、前記吸着部８ａを同吸着部８ａより大径の
成形型に入れ、吸着部８ａと成形型との間に予め完全に
溶解させてある樹脂を流し込む。すると、吸着部８ａの
外周には透孔の形成されないシール部８ｂが形成され、
吸着部８ａとシール部８ｂとから吸着板８が構成され
る。Next, a process of forming the seal portion 8b will be described. First, the suction section 8a is put into a mold having a larger diameter than the suction section 8a, and a resin that has been completely dissolved beforehand is poured between the suction section 8a and the mold. Then, a seal portion 8b without a through hole is formed on the outer periphery of the suction portion 8a,
The suction plate 8 is constituted by the suction portion 8a and the seal portion 8b.
【００２２】次に、以上のように成形された吸着板８に
静電気の発生を防止するための帯電防止加工を施す工程
について説明する。まず、液状の帯電防止剤に吸着板８
を浸すことにより、図４（ａ）に示す透孔１１の内側面
に液状の帯電防止剤を浸透させる。その後、吸着板８を
温度約８０℃で１時間ほど乾燥させると、吸着板８の外
面及び、図４（ｂ）に示す透孔１１の内側面には電導性
薄層１２が形成される。この電導性薄層１２により吸着
板８の外面及び透孔１１の内側面の電導性が向上し、吸
着板８における静電気の帯電が防止される。Next, a process of performing antistatic processing for preventing generation of static electricity on the suction plate 8 formed as described above will be described. First, the adsorption plate 8 is applied to the liquid antistatic agent.
4A, a liquid antistatic agent penetrates into the inner surface of the through hole 11 shown in FIG. Thereafter, when the suction plate 8 is dried at a temperature of about 80 ° C. for about one hour, a conductive thin layer 12 is formed on the outer surface of the suction plate 8 and the inner surface of the through hole 11 shown in FIG. The conductive thin layer 12 improves the conductivity of the outer surface of the suction plate 8 and the inner surface of the through hole 11, and prevents the electrostatic charge on the suction plate 8.
【００２３】最後に、帯電防止加工が施された吸着板８
に仕上げ加工が施される。仕上げ加工は、乾燥後の吸着
板８の吸着面９を数μｍ研削することにより、吸着面９
に形成された電導性薄層１２を除去する。即ち、吸着面
９の電導性薄層１２を除去することにより、吸着面９に
被吸着物を吸着する際に電導性薄層１２が被吸着物に直
接接触しないようにする。又、研削された吸着面９はそ
の凹凸が１μｍ以下に抑えられる。Finally, the suction plate 8 which has been subjected to antistatic processing
Is subjected to finishing. Finishing is performed by grinding the suction surface 9 of the suction plate 8 after drying by several μm.
The conductive thin layer 12 formed on the substrate is removed. That is, by removing the conductive thin layer 12 on the adsorption surface 9, the conductive thin layer 12 is prevented from directly contacting the object when the object is adsorbed on the adsorption surface 9. Further, the asperities of the ground suction surface 9 are suppressed to 1 μm or less.
【００２４】以上詳述したように本実施例では、真空チ
ャック１の吸着板８を液状の帯電防止剤に浸し、その後
に乾燥させて吸着板８の外面及び透孔１１の内側面に電
導性薄層１２を形成した。この電動性薄層１２により吸
着板８の外面及び透孔１１の内側面の電導性が向上して
静電気の帯電が防止され、吸着板８に発生する静電気は
１．０Ｖ／mmと非常に小さくなる。従って、静電気によ
り吸着板８の吸着面９に塵埃が吸着されることがないた
め、薄い金属板や液晶ガラス基板等の精密部品を傷つけ
ることなく吸着板８に吸着することができる。更に、吸
着板８に発生する静電気は１．０Ｖ／mmと非常に小さい
ため、静電気により液晶ガラス基板等の精密部品に悪影
響を及ぼすことがない。As described in detail above, in the present embodiment, the suction plate 8 of the vacuum chuck 1 is immersed in a liquid antistatic agent, and then dried to form a conductive material on the outer surface of the suction plate 8 and the inner surface of the through hole 11. A thin layer 12 was formed. The electrically conductive thin layer 12 improves the conductivity of the outer surface of the suction plate 8 and the inner surface of the through hole 11 to prevent static electricity from being charged, and the static electricity generated on the suction plate 8 is extremely small at 1.0 V / mm. Become. Therefore, dust is not attracted to the attraction surface 9 of the attraction plate 8 by static electricity, so that precision components such as a thin metal plate and a liquid crystal glass substrate can be attracted to the attraction plate 8 without being damaged. Further, since the static electricity generated on the suction plate 8 is extremely small, 1.0 V / mm, the static electricity does not adversely affect precision parts such as a liquid crystal glass substrate.
【００２５】また、吸着板８の帯電防止加工では、吸着
板８の外面及び透孔１１の内側面に電導性薄層１２を形
成した後に、吸着板８の吸着面９を数μｍ研削して電導
性薄層１２が被吸着物に直接接触しないようした。即
ち、吸着板８の吸着面９には電導性薄層１２が形成され
ていないため、被吸着物を吸着するときの衝撃によって
電導性薄層１２が剥離することがない。従って、吸着板
８から剥離した電導性薄層１２により被吸着物を傷つけ
ることがないため、精密部品を吸着するのに好適であ
る。In the antistatic process of the suction plate 8, after forming the conductive thin layer 12 on the outer surface of the suction plate 8 and the inner surface of the through hole 11, the suction surface 9 of the suction plate 8 is ground by several μm. The conductive thin layer 12 was prevented from directly contacting the object to be adsorbed. That is, since the conductive thin layer 12 is not formed on the suction surface 9 of the suction plate 8, the conductive thin layer 12 does not peel off due to an impact when the object to be sucked is sucked. Therefore, the conductive thin layer 12 peeled off from the suction plate 8 does not damage the object to be sucked, which is suitable for sucking a precision component.
【００２６】更に、被吸着物を吸着するときの衝撃によ
って電導性薄層１２が剥離することがないため、吸着回
数が増加しても帯電防止効果を損なうことがなく、帯電
防止効果を長期間に亘って保持することができる。Further, since the conductive thin layer 12 does not peel off due to the impact when the object is adsorbed, the antistatic effect is not impaired even if the number of times of adsorption is increased, and the antistatic effect is maintained for a long time. Can be held.
【００２７】また、吸着板８の帯電防止加工方法では、
真空チャック１の吸着板８を液状の帯電防止剤に浸すこ
とにより、吸着板８の透孔１１の内側面に液状の帯電防
止剤を浸透させ、その後に吸着板８を乾燥させた。従っ
て、吸着板８の外面だけでなく透孔１１の内側面にも電
導性薄層１２が形成されるため、吸着面９を研削し、同
吸着面９の電導性薄層１２を除去しても十分な帯電防止
効果を得ることができる。In the antistatic processing method for the suction plate 8,
By immersing the suction plate 8 of the vacuum chuck 1 in a liquid antistatic agent, the liquid antistatic agent penetrated into the inner surface of the through hole 11 of the suction plate 8, and then the suction plate 8 was dried. Therefore, since the conductive thin layer 12 is formed not only on the outer surface of the suction plate 8 but also on the inner surface of the through hole 11, the suction surface 9 is ground and the conductive thin layer 12 on the suction surface 9 is removed. Can also obtain a sufficient antistatic effect.
【００２８】尚、本発明は上記実施例に限定されるもの
ではなく、例えば以下のように変更して具体化してもよ
い。 The present invention is not limited to the above embodiment, but may be embodied with the following modifications, for example .
【００２９】[0029]
【００３０】（１）上記実施例の樹脂粉末は、四フッ化
エチレン樹脂，三フッ化塩化エチレン樹脂，ポリアミド
樹脂，ポリエチレン樹脂ポリスチレン，ポリ塩化ビニル
樹脂，ポリビニルアルコール樹脂，ポリカーボネート樹
脂，アクリル樹脂等により具体化することができる。( 1 ) The resin powder of the above embodiment is made of ethylene tetrafluoride resin, ethylene trifluorochloride resin, polyamide resin, polyethylene resin polystyrene, polyvinyl chloride resin, polyvinyl alcohol resin, polycarbonate resin, acrylic resin, etc. Can be embodied.
【００３１】（２）上記実施例の帯電防止剤は、ポリキ
シエチレンアルキルアミン，ポリオキシエチレンアルキ
ルアミド，ポリオキシエチレンアルキルエーテル，ポリ
オキシエチレンアルキルフェニルエーテル，グリセリン
酸脂肪酸エステル，ソルビタン脂肪酸エステル等の非イ
オン系界面活性剤と、第４級アンモニウムクロライド，
第４級アンモニウムサルフェート，第四級アンモニウム
ナイトレート等のカチオン系界面活性剤と、アルキルベ
タイン，アルキルイミダゾリン，アルキルアラニン等の
両性系界面活性剤の内、適宜の界面活性剤を選択して具
体化することができる。又、前記各界面活性剤の内、二
種類以上の界面活性剤を適宜複合して帯電防止剤を具体
化することもできる。( 2 ) Examples of the antistatic agent in the above embodiment include polyoxyethylene alkylamine, polyoxyethylene alkylamide, polyoxyethylene alkyl ether, polyoxyethylene alkyl phenyl ether, glyceric acid fatty acid ester, sorbitan fatty acid ester and the like. A nonionic surfactant, a quaternary ammonium chloride,
An appropriate surfactant is selected from a cationic surfactant such as quaternary ammonium sulfate and quaternary ammonium nitrate and an amphoteric surfactant such as alkyl betaine, alkyl imidazoline and alkyl alanine, and is embodied. can do. In addition, an antistatic agent can also be embodied by appropriately combining two or more of the above surfactants.
【００３２】[0032]
【００３３】（３）本実施例の製造方法では、吸着板８
の吸着面９のみを研削したが、この場合、吸着板８をチ
ャック円板４に接着する際に、吸着面９側を誤ってチャ
ック円板４に接合してしまう恐れがある。これを防止す
るため、更に反対の面を吸着面９と同様に研削してもよ
い。( 3 ) In the manufacturing method of this embodiment, the suction plate 8
However, in this case, when the suction plate 8 is bonded to the chuck disk 4, the suction surface 9 may be erroneously joined to the chuck disk 4. In order to prevent this, the opposite surface may be ground in the same manner as the suction surface 9.
【００３４】（４）本実施例では、樹脂粉末を所定温
度，所定圧力で加熱、圧縮して吸着板８を成形し、この
吸着板８の成形時に透孔１１を形成したが、本発明はこ
れに限定されない。即ち、吸着板８をプラスチック材料
により透孔１１ができないように成形した後、吸着板８
の表裏両面を連通する透孔１１、例えば直径０．１mm程
の透孔１１を形成してもよい。( 4 ) In the present embodiment, the resin powder is heated and compressed at a predetermined temperature and a predetermined pressure to form the suction plate 8, and the through holes 11 are formed when the suction plate 8 is formed. It is not limited to this. That is, after the suction plate 8 is formed of a plastic material so that the through holes 11 cannot be formed, the suction plate 8 is
May be formed, for example, a through hole 11 having a diameter of about 0.1 mm.
【００３５】[0035]
【発明の効果】以上詳述したように、請求項１及び請求
項２記載の発明によれば、プラスチックで吸着板を形成
したにも拘わらず、吸着板表面における静電気の帯電を
防止することができる。しかも、その帯電防止効果を長
期に亘って持続させることができるとともに、被吸着物
を傷つけることを防止することができる優れた効果があ
る。As described in detail above, claims 1 and 2
According to the invention described in Item 2, it is possible to prevent static electricity from being charged on the surface of the suction plate despite the fact that the suction plate is formed of plastic . Moreover, its antistatic effect is long
Can be maintained over a period of time
There is an excellent effect that can prevent damage to the surface.
【００３６】[0036]
【図１】真空チャックを示す切り欠き斜視図である。FIG. 1 is a cutaway perspective view showing a vacuum chuck.
【図２】真空チャックを示す斜視図である。FIG. 2 is a perspective view showing a vacuum chuck.
【図３】真空チャックを示す断面図である。FIG. 3 is a sectional view showing a vacuum chuck.
【図４】図４（ａ）は吸着板に透孔が形成された状態を
示す説明図であり、図４（ｂ）は透孔の内側面に電導性
薄層が形成された状態を示す説明図である。FIG. 4 (a) is an explanatory view showing a state in which a through hole is formed in the suction plate, and FIG. 4 (b) shows a state in which a conductive thin layer is formed on the inner side surface of the through hole. FIG.
８…プラスチック板としての吸着板、９…吸着面、１１
…透孔、１２…帯電防止剤としての電導性薄層。8 ... Suction plate as plastic plate, 9 ... Suction surface, 11
... through-hole, 12 ... conductive thin layer as antistatic agent.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 奥田 浩喜 愛知県小牧市大字北外山字早崎3005番地 シーケーディ 株式会社内 (56)参考文献 特開 平５−275513（ＪＰ，Ａ) 特開 平４−35827（ＪＰ，Ａ) 特開 平５−293733（ＪＰ，Ａ) 特開 平４−252287（ＪＰ，Ａ) 特公 昭57−15784（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.7，ＤＢ名) B23Q 3/08 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hiroki Okuda 3005 Hayasaki, Kita-gaiyama, Komaki City, Aichi Prefecture Inside CK Corporation (56) References JP-A-5-275513 (JP, A) JP-A-4- 35827 (JP, A) JP-A-5-293733 (JP, A) JP-A-4-252287 (JP, A) JP-B-57-15784 (JP, B2) (58) Fields investigated (Int. Cl. 7 , DB name) B23Q 3/08
Claims (1)
裏両面に空気を流通する多数の透孔（１１）を全体に有
するプラスチック板（８）を成形して、そのプラスチッ
ク板（８）を一方の面から空気を吸引することにより他
方の面（９）に被吸着物を吸着する真空チャックの吸着
板とし、前記プラスチック板（８）の吸着面（９）以外
の面、及び前記プラスチック板（８）全体の透孔（１
１）の内側面に、該プラスチック板（８）に静電気が発
生することを防止する、界面活性剤からなる帯電防止剤
（１２）を設けたことを特徴とする真空チャックの吸着
板。1. A resin powder heated by compression molding a plastic plate having a whole number of through holes for circulating air in Table <br/> back duplex (11) (8), the plastic plate (8) is a suction plate of a vacuum chuck for sucking an object to be sucked onto the other surface (9) by sucking air from one surface, and a surface other than the suction surface (9) of the plastic plate (8); And through holes (1) in the entire plastic plate (8).
An adsorption plate for a vacuum chuck, wherein an antistatic agent (12) made of a surfactant is provided on the inner surface of (1) to prevent static electricity from being generated on the plastic plate (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05288462A JP3073640B2 (en) | 1993-11-17 | 1993-11-17 | Vacuum chuck suction plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05288462A JP3073640B2 (en) | 1993-11-17 | 1993-11-17 | Vacuum chuck suction plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07156035A JPH07156035A (en) | 1995-06-20 |
| JP3073640B2 true JP3073640B2 (en) | 2000-08-07 |
Family
ID=17730531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05288462A Expired - Lifetime JP3073640B2 (en) | 1993-11-17 | 1993-11-17 | Vacuum chuck suction plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3073640B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09309037A (en) * | 1996-05-24 | 1997-12-02 | Hitachi Denshi Ltd | Adsorbing fixing device for thin plate work |
| KR20040036404A (en) * | 2002-10-25 | 2004-04-30 | 주식회사 마이크로 세미콘 | Multi Dressing Chuck Table |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01262638A (en) * | 1988-04-14 | 1989-10-19 | Seiko Epson Corp | Sucking pad |
| JPH02303744A (en) * | 1989-05-16 | 1990-12-17 | Nikko Rika Kk | Vacuum chuck |
| JP2979194B2 (en) * | 1990-05-31 | 1999-11-15 | 京セラ株式会社 | Vacuum suction device |
| JPH05293733A (en) * | 1992-04-23 | 1993-11-09 | Sony Corp | Vacuum chuck device |
-
1993
- 1993-11-17 JP JP05288462A patent/JP3073640B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07156035A (en) | 1995-06-20 |
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