JP3038692B2 - Bimorph vibrator and piezoelectric acceleration sensor - Google Patents
Bimorph vibrator and piezoelectric acceleration sensorInfo
- Publication number
- JP3038692B2 JP3038692B2 JP7246280A JP24628095A JP3038692B2 JP 3038692 B2 JP3038692 B2 JP 3038692B2 JP 7246280 A JP7246280 A JP 7246280A JP 24628095 A JP24628095 A JP 24628095A JP 3038692 B2 JP3038692 B2 JP 3038692B2
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- Japan
- Prior art keywords
- piezoelectric element
- acceleration sensor
- plate
- piezoelectric
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００１】[0001]
【発明の属する技術分野】本発明はバイモルフ振動子
と、板状圧電素子を片持ち保持した圧電形加速度センサ
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bimorph vibrator and a piezoelectric acceleration sensor holding a plate-shaped piezoelectric element in a cantilever manner.
【０００２】[0002]
【従来の技術】従来、バイモルフ振動子による板状圧電
素子を用いた圧電形加速度センサに係る発明として、実
公平６−２１２０号公報「圧電式振動センサ」に開示さ
れるものが知られている。この先行技術は、両面に電極
を設けて分極を行い、分極軸を貼り合わせて短冊状圧電
バイモルフ振動子とし、この短冊状圧電バイモルフ振動
子を、金属製管に封入されているステムの２本のリード
線の先端に半田または導電性接着剤で電気的に接続固定
している。2. Description of the Related Art Conventionally, as an invention relating to a piezoelectric acceleration sensor using a plate-like piezoelectric element formed by a bimorph vibrator, there is known an invention disclosed in Japanese Utility Model Publication No. Hei 6-2120, "Piezoelectric vibration sensor". . In this prior art, an electrode is provided on both surfaces to perform polarization, and a polarization axis is bonded to form a strip-shaped piezoelectric bimorph vibrator. The strip-shaped piezoelectric bimorph vibrator is composed of two stems sealed in a metal tube. Are electrically connected and fixed to the tips of the lead wires with solder or conductive adhesive.
【０００３】[0003]
【発明が解決しようとする課題】上記センサは、振動子
の一端を半田または導電性接着剤で固定しただけのリー
ド線のみで固定しているため、リード線にねじり方向や
曲げ方向の応力が作用すると外れてしまうおそれがあ
る。また、端部がしっかり固定されていないため、高い
周波数領域での応答を得ることができない。In the above-described sensor, since one end of the vibrator is fixed only by a lead wire in which only one end of the vibrator is fixed by solder or a conductive adhesive, a stress in a torsion direction or a bending direction is applied to the lead wire. If it acts, it may come off. Further, since the ends are not firmly fixed, a response in a high frequency region cannot be obtained.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するため
に本願の第１発明に係るバイモルフ振動子は、両面に電
極がそれぞれ形成された2枚の圧電セラミックを揃えて
貼り合わせて構成した圧電素子の自由端に導電性部材か
らなる断面コ字状の折曲片を嵌め込んで、前記圧電素子
の厚み方向の両端面に電路を形成した。In order to solve the above-mentioned problems, a bimorph vibrator according to a first invention of the present application is a piezoelectric device in which two piezoelectric ceramics each having electrodes formed on both surfaces are aligned and bonded. A bent piece having a U-shaped cross section made of a conductive member was fitted into a free end of the element, and an electric path was formed on both end faces in the thickness direction of the piezoelectric element.
【０００５】本願の第２発明に係る圧電形加速度センサ
は、端面に嵌合孔を有すると共に前記端面の芯線孔を介
してケーブルの芯線が導出される筒状のケーブル保持部
材と、絶縁材からなり一端に小径部が突出形成されると
共に側面に長さ方向の溝を形成してこの溝に前記板状圧
電素子の一端を嵌め込んで固定した柱状ベースとで構成
され、前記板状圧電素子に前記芯線を接続すると共に前
記小径部を前記嵌合孔に差込んで形成した。A piezoelectric acceleration sensor according to a second aspect of the present invention has a cylindrical cable holding member having a fitting hole on an end face and a core wire of the cable being led out through a core wire hole on the end face, and an insulating material. A small-diameter portion is formed at one end of the plate-shaped piezoelectric element, and a longitudinal groove is formed on a side surface of the plate-shaped piezoelectric element. And the small diameter portion was inserted into the fitting hole.
【０００６】本願の第３発明に係る圧電形加速度センサ
は、端面に嵌合孔を有すると共に前記端面の芯線孔を介
してケーブルの芯線が導出される筒状のケーブル保持部
材と、絶縁材からなり一端に小径部が突出形成されると
共に軸方向に沿い且つ端面から見た切り込み角度が互い
に異なる溝を２本形成し、この２本の溝のそれぞれに前
記板状圧電素子の一端を嵌め込んで固定した柱状ベース
とで構成され、前記板状圧電素子に前記芯線を接続する
と共に前記小径部を前記嵌合孔に差込んで形成した。A piezoelectric acceleration sensor according to a third aspect of the present invention has a cylindrical cable holding member having a fitting hole on an end face and a core of a cable being led out through a core wire hole on the end face, and an insulating material. One end is formed with a small-diameter portion, and two grooves are formed along the axial direction and having different cut angles as viewed from the end face. One end of the plate-shaped piezoelectric element is fitted into each of the two grooves. The core wire is connected to the plate-shaped piezoelectric element, and the small-diameter portion is inserted into the fitting hole.
【０００７】本願の第４発明に係る圧電形加速度センサ
は、前記板状圧電素子がバイモルフ振動子であると共に
前記圧電形加速度センサは絶縁材からなる柱状ベースの
側面に長さ方向の溝を形成し、この溝に前記板状圧電素
子の一端を嵌め込んで固定され、前記板状圧電素子の他
端には導電性部材からなる断面コ字状の折曲片が固定さ
れてなる。In a piezoelectric acceleration sensor according to a fourth aspect of the present invention, the plate-shaped piezoelectric element is a bimorph vibrator, and the piezoelectric acceleration sensor has a longitudinal groove formed on a side surface of a columnar base made of an insulating material. One end of the plate-like piezoelectric element is fitted and fixed in the groove, and a bent piece having a U-shaped cross section made of a conductive member is fixed to the other end of the plate-like piezoelectric element.
【０００８】本願の第5発明に係る圧電形加速度センサ
は、前記板状圧電素子がバイモルフ振動子であると共に
前記圧電形加速度センサは絶縁材からなる柱状ベースの
側面に軸方向に沿い且つ端面から見た切り込み角度が互
いに異なる溝を２本形成し、この２本の溝のそれぞれに
板状圧電素子の一端を嵌め込んで固定され、前記板状圧
電素子の他端には導電性部材からなる断面コ字状の折曲
片が固定されてなる。According to a fifth aspect of the present invention, in the piezoelectric acceleration sensor, the plate-like piezoelectric element is a bimorph vibrator, and the piezoelectric acceleration sensor extends along a side surface of a columnar base made of an insulating material in an axial direction and from an end face. Two grooves having mutually different cut angles are formed, and one end of a plate-shaped piezoelectric element is fitted and fixed in each of the two grooves, and the other end of the plate-shaped piezoelectric element is formed of a conductive member. A bent piece having a U-shaped cross section is fixed.
【０００９】[0009]
【発明の実施の形態】以下に本発明の実施の形態を添付
図面に基づいて説明する。図１は本発明に係る加速度セ
ンサの外観を示す斜視図であり、加速度センサ１は加速
度センサ本体１０とプロテクトチューブ５０とからな
る。Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view showing the appearance of an acceleration sensor according to the present invention. The acceleration sensor 1 includes an acceleration sensor main body 10 and a protect tube 50.
【００１０】加速度センサ本体１０は、耐熱金属、例え
ばインコネルからなる円筒状のケーブル保持部材１１の
両端に円筒状のカバー１２、１３を配設し、それぞれの
カバー１２、１３の先端に円筒状のガイド部１４，１５
をそれぞれ備える。The acceleration sensor main body 10 has cylindrical covers 12 and 13 disposed at both ends of a cylindrical cable holding member 11 made of a heat-resistant metal, for example, Inconel. Guide parts 14, 15
Respectively.
【００１１】プロテクトチューブ５０は、加速度センサ
本体１０からケーブル保持部材１１のケーブル孔１１ｂ
を介して導出されるＭＩケーブル１７，１８の周囲を被
覆し、ＭＩケーブル１７，１８の外力に起因する損傷を
防止するためのものである（図２参照）。The protect tube 50 is connected to the cable hole 11 b of the cable holding member 11 from the acceleration sensor main body 10.
This is to cover the periphery of the MI cables 17 and 18 led out through the cable and to prevent damage due to the external force of the MI cables 17 and 18 (see FIG. 2).
【００１２】なお、上記ＭＩケーブルは、金属性のシー
ス（チューブ）内に、金属導線を挿通し、導線とシース
間に鉱物質絶縁物、例えばＭｇＯ（酸化マグネシウム）
等の粉末を詰め固めた耐熱高絶縁を有するケーブルであ
り、高温雰囲気中で使用するケーブル部材（リード線）
として好適なものである。In the MI cable, a metal conductor is inserted into a metal sheath (tube), and a mineral insulator such as MgO (magnesium oxide) is interposed between the conductor and the sheath.
A cable with heat resistance and high insulation that is packed with powders and other materials and used in high-temperature atmosphere (lead wire)
It is suitable as.
【００１３】図２は本発明に係る加速度センサの断面図
であり、ケーブル保持部材１１の一端はケーブル孔１１
ｂを介して複数（ここでは２本）のＭＩケーブル１７，
１８を並列に挿通しており、ケーブル孔１１ｂの端部周
縁はＭＩケーブル１７，１８の外周に蝋付け１９、例え
ば銀蝋付けによって気密に固着されている。ここで、１
７ａ、１７ｂ、１８ａ、18ｂはＭＩケーブル１７，１８
の芯線であり、例えばステンレス線が使用される。FIG. 2 is a cross-sectional view of the acceleration sensor according to the present invention.
b, a plurality of (here, two) MI cables 17,
18 are inserted in parallel, and the periphery of the end of the cable hole 11b is hermetically fixed to the outer periphery of the MI cables 17 and 18 by brazing 19, for example, silver brazing. Where 1
7a, 17b, 18a, 18b are MI cables 17, 18
For example, a stainless wire is used.
【００１４】また、ケーブル保持部材１１の他端は分配
部材２２および位置決め部材３１をそれぞれ内部および
端部に耐熱性接着剤で固定し、ＭＩケーブル１７，１８
の端末を分配部材２２で区画される空間Ｓ内に密閉して
おり、この空間Ｓから両部材２２，３１にそれぞれ形成
した４つの芯線孔（図では、２つづつの芯線孔２２ａ、
２２ｂおよび３１ａ、３１ｂが見える）を介して２本の
ＭＩケーブル１７，１８のそれぞれの芯線１７ａ、１７
ｂおよび１８ａ、18ｂをカバー１２内に配置される振動
検知部３０へ導出し、それらの先端をベース３２によっ
て片持ち保持されている圧電素子３３，３４に接続して
いる。At the other end of the cable holding member 11, the distribution member 22 and the positioning member 31 are fixed to the inside and the end thereof with a heat-resistant adhesive, respectively.
Are sealed in a space S defined by the distribution member 22, and four core wire holes (two core wire holes 22a, two core wire holes 22a,
22b and 31a, 31b can be seen) and the respective core wires 17a, 17 of the two MI cables 17, 18, respectively.
b and 18a, 18b are led out to a vibration detecting section 30 arranged in the cover 12, and their ends are connected to piezoelectric elements 33, 34 which are cantilevered by a base 32.
【００１５】図３は振動検知部の分解斜視図であり、振
動検知部３０はベース位置決め部材３１、ベース３２お
よび圧電素子３３，３４を備え、ベース位置決め部材３
１はその中央且つ芯線孔３１ａ〜３１ｄと平行に所定直
径および深さの嵌合穴３１ｅを形成している。FIG. 3 is an exploded perspective view of the vibration detecting section. The vibration detecting section 30 includes a base positioning member 31, a base 32, and piezoelectric elements 33 and 34.
1 has a fitting hole 31e of a predetermined diameter and depth formed in the center thereof and in parallel with the core wire holes 31a to 31d.
【００１６】ベース３２はセラミックで丸棒形状に形成
されるとともに一端の中央に前記嵌合穴３１ｅに差込み
可能な小径部３２ａを突出形成している。このベース３
２はその側面に所定の幅を有する第１の溝３２ｂと、こ
の第１の溝３２ｂの切込み方向と直交する切込み方向を
有するとともに第１の溝３２ｂと略々同一の幅を有する
第２の溝３２ｃがそれぞれ高さ方向に形成されている。
尚、溝３２ｂ、３２ｃは必ずしも直交させなくともよく
端面から見た切込み角度が互いに異なっていればよい。The base 32 is formed of ceramic in the shape of a round bar, and has a small-diameter portion 32a projecting from the center of one end thereof so as to be inserted into the fitting hole 31e. This base 3
2 has a first groove 32b having a predetermined width on a side surface thereof and a second groove 32b having a cutting direction orthogonal to the cutting direction of the first groove 32b and having a width substantially the same as that of the first groove 32b. Each of the grooves 32c is formed in the height direction.
The grooves 32b and 32c do not necessarily have to be orthogonal to each other, and may have different cutting angles as viewed from the end faces.
【００１７】圧電素子３３，３４は曲げ応力に応じた電
圧を発生させる耐熱性を備えた矩形板状のバイモルフ振
動子（厚さは溝の幅より若干薄い）を用い、この実施例
では２枚のバイモルフ振動子を用いる。なお、圧電素子
３３，３４は矩形板状のバイモルフ振動子に限るもので
はなく、例えば矩形板状のユニモルフ型の圧電素子を用
いてもよいことは勿論である。As the piezoelectric elements 33 and 34, use is made of a heat-resistant rectangular plate-shaped bimorph vibrator (thickness is slightly smaller than the width of the groove) which generates a voltage corresponding to a bending stress. Is used. The piezoelectric elements 33 and 34 are not limited to the rectangular plate-shaped bimorph vibrator, but may be, for example, rectangular plate-shaped unimorph type piezoelectric elements.
【００１８】図４は上記圧電素子をベースに取付けた状
態を示す斜視図であり、２枚圧電素子（バイモルフ振動
子）３３，３４を、ベース３２側面から第１の溝３２ｂ
および第２の溝３２ｃにそれぞれの一端を嵌め込み、適
宜の冶具を用いてベース３２の長さ（軸）方向と圧電素
子３３，３４の長さ方向を一致させ、その後接着剤を溝
３２ｂ、３２ｃに注入して硬化させて、ベース３２によ
って片持ち保持する。この接着剤としては、無機物から
なる高温用の水溶性接着剤、例えば、スミセラム−Ｓ
（登録商標）を使用することができる。上記の構成を採
用することによって、圧電素子３３，３４をベース３２
に強固に保持することができ、従ってそれぞれの圧電素
子の厚み方向の加速度成分、すなわち２方向の加速度成
分を安定に検出できる。FIG. 4 is a perspective view showing a state in which the piezoelectric element is mounted on a base. Two piezoelectric elements (bimorph vibrators) 33 and 34 are inserted into a first groove 32b from the side of the base 32.
And one end of each of them into the second groove 32c, and the length (axial) direction of the base 32 and the length direction of the piezoelectric elements 33 and 34 are made to coincide with each other using an appropriate jig, and then the adhesive is applied to the grooves 32b and 32c. And hardened, and held by the base 32 in a cantilever manner. As the adhesive, a water-soluble adhesive made of an inorganic substance for high temperature, for example, Sumiceram-S
(Registered trademark) can be used. By adopting the above configuration, the piezoelectric elements 33 and 34 are
Therefore, the acceleration components in the thickness direction of each piezoelectric element, that is, the acceleration components in two directions can be stably detected.
【００１９】図５は他の実施例に係る圧電素子をベース
に取付けた状態を示す斜視図であり、圧電素子が１枚、
例えば圧電素子３３だけの場合である。この実施例によ
れば、前記実施例と同様に圧電素子３３をベース３２に
強固に保持できるとともにより簡単な構造の振動検知部
を構成できる。FIG. 5 is a perspective view showing a state in which a piezoelectric element according to another embodiment is mounted on a base.
For example, this is a case where only the piezoelectric element 33 is provided. According to this embodiment, as in the previous embodiment, the piezoelectric element 33 can be firmly held on the base 32 and a vibration detecting unit having a simpler structure can be configured.
【００２０】図６はバイモルフ振動子（圧電素子）の拡
大分解斜視図であり、圧電素子３３，３４は、同じ構成
のものであるので、以下に圧電素子３３のみについて説
明する。圧電素子３３は、例えば両面に電極ｅｌｔ１、
ｅｌｔ２およびｅｌｔ３、ｅｌｔ４がそれぞれ形成され
た2枚の圧電セラミック３３ａ、３３ｂを揃えて貼り合
わせて構成され、それぞれの一方の電極ｅｌｔ１および
ｅｌｔ３に芯線１７ａ、１７ｂの先端を蝋付けまたは導
電性接着剤により接続固定している。FIG. 6 is an enlarged exploded perspective view of a bimorph vibrator (piezoelectric element). Since the piezoelectric elements 33 and 34 have the same configuration, only the piezoelectric element 33 will be described below. The piezoelectric element 33 includes, for example, electrodes elt1 on both surfaces,
The two piezoelectric ceramics 33a, 33b on which elt2, elt3, and elt4 are formed are aligned and bonded, and the ends of the core wires 17a, 17b are brazed to one of the electrodes elt1 and elt3, or a conductive adhesive is used. The connection is fixed.
【００２１】そして、この圧電素子３３は、電極ｅｌｔ
１、ｅｌｔ２およびｅｌｔ３、ｅｌｔ４に対して垂直な
方向から応力が印加されて屈曲すると上下にある圧電セ
ラミック３３ａ、３３ｂが圧縮もしくは引っ張り応力を
受けて印加応力と比例する電圧を発生する。The piezoelectric element 33 is connected to the electrode elt
When a stress is applied from a direction perpendicular to 1, elt2 and elt3, elt4, and bends, the upper and lower piezoelectric ceramics 33a, 33b receive a compressive or tensile stress to generate a voltage proportional to the applied stress.
【００２２】３５は導電性部材からなる断面コ字状の折
曲片であり、この折曲片３５を2枚の圧電セラミック３
３ａ、３３ｂの自由端に嵌め込み、導電性接着剤で接着
固定し、電極ｅｌｔ１と電極ｅｌｔ４間に電路を形成す
る（従来はリード線等により電路を形成していた）と共
に、重錘の機能を果たす。したがってこの構成はバイモ
ルフ振動子の厚み方向の両端面の電極ｅｌｔ１、ｅｌｔ
４を短絡する電路部材と、重錘を兼用することができ、
別途電路部材を必要としないという利点を有する。Reference numeral 35 denotes a bent piece having a U-shaped cross section made of a conductive member.
3a and 33b are fitted to the free ends and fixed with a conductive adhesive to form an electric path between the electrode elt1 and the electrode elt4 (an electric path was conventionally formed by a lead wire or the like), and the function of the weight was added. Fulfill. Therefore, this configuration is advantageous in that the electrodes elt, elt on both end faces in the thickness direction of the bimorph vibrator are provided.
4 can be used both as an electric path member for short-circuiting and a weight,
There is an advantage that no separate electric circuit member is required.
【００２３】このように、上記圧電素子３３は自由端に
大型の重錘を配置していないが、これはこの圧電素子３
３が幅に比べて長さが十分長いので、重錘を設けなくと
も所定の感度を得ることができるからであり、より高い
感度を求めるときは折曲片３５を大型化して重錘として
機能するようにすればよい。この際、加速度感度は重錘
の質量に応じて高くなるが、共振点が低くなって測定帯
域が狭くなることを考慮する必要がある。As described above, the piezoelectric element 33 does not have a large weight disposed at its free end.
3 is sufficiently long compared to the width, so that a predetermined sensitivity can be obtained without providing a weight. When higher sensitivity is required, the bent piece 35 is enlarged to function as a weight. What should I do? At this time, the acceleration sensitivity increases according to the mass of the weight, but it is necessary to consider that the resonance point decreases and the measurement band narrows.
【００２４】なお、上記実施例においては、高温下で使
用される加速度センサであることを考慮し、各部材を高
温に耐え得る素材から構成したが、常温で使用する加速
度センサに対しては、例えば絶縁材料としてエンジニア
リング・プラスティック材料を使用してもよい。In the above embodiment, each member is made of a material that can withstand high temperatures in consideration of the fact that the acceleration sensor is used at high temperatures. For example, an engineering plastic material may be used as the insulating material.
【００２５】[0025]
【発明の効果】以上説明したように本発明のバイモルフ
振動子によれば、両面に電極がそれぞれ形成された2枚
の圧電セラミックを揃えて貼り合わせて構成した圧電素
子の自由端に導電性部材からなる断面コ字状の折曲片を
被着することで、バイモルフ振動子の厚み方向の端面を
短絡する電路部材と、重錘を兼用することができ、別途
電路部材を必要とせず、この分製造コストを低減でき
る。As described above, according to the bimorph vibrator of the present invention, a conductive member is provided at the free end of a piezoelectric element formed by aligning and bonding two piezoelectric ceramics each having electrodes formed on both surfaces. By attaching a bent piece having a U-shaped cross section consisting of: a circuit member that short-circuits the end face in the thickness direction of the bimorph vibrator, it can also be used as a weight, and this does not require a separate circuit member. Manufacturing cost can be reduced.
【００２６】また、本発明の圧電形加速度センサは、端
面に嵌合孔を有すると共に端面の芯線孔を介してケーブ
ルの芯線が導出される筒状のケーブル保持部材と、絶縁
材からなり一端に小径部が突出形成されると共に側面に
長さ方向の溝を形成してこの溝に板状圧電素子の一端を
嵌め込んで固定した柱状ベースとで構成されており、板
状圧電素子に芯線を接続すると共に小径部を嵌合孔に差
込んで形成しているので簡単な構造によって矩形板状の
圧電素子の方向精度を損なわせずに強固に保持でき、高
い周波数領域への応用も可能になる。Further, the piezoelectric acceleration sensor of the present invention has a cylindrical cable holding member having a fitting hole on an end face and from which a core of a cable is led out through a core wire hole on the end face, and one end made of an insulating material. A small diameter portion is formed protruding and a longitudinal groove is formed on the side surface, and a columnar base is fixed by fitting one end of the plate-shaped piezoelectric element into this groove, and a core wire is attached to the plate-shaped piezoelectric element. Since the connection and the small diameter part are inserted into the fitting hole, it can be firmly held by a simple structure without impairing the directional accuracy of the rectangular plate-shaped piezoelectric element, and it can be applied to high frequency range Become.
【００２７】また、本発明の圧電形加速度センサは、端
面に嵌合孔を有すると共に端面の芯線孔を介してケーブ
ルの芯線が導出される筒状のケーブル保持部材と、絶縁
材からなり一端に小径部が突出形成されると共に軸方向
に沿い且つ端面から見た切り込み角度が互いに異なる溝
を２本形成し、この２本の溝のそれぞれに板状圧電素子
の一端を嵌め込んで固定した柱状ベースとで構成されて
おり、板状圧電素子に芯線を接続すると共に小径部を嵌
合孔に差込んで形成しているので２枚の圧電素子の厚み
方向の加速度成分、すなわち２方向の加速度成分を高い
周波数領域においても安定に検出できる。Further, the piezoelectric acceleration sensor of the present invention has a cylindrical cable holding member having a fitting hole on the end face and from which the core of the cable is led out through the core hole on the end face, and one end made of an insulating material. A columnar shape in which a small-diameter portion protrudes and is formed along the axial direction and has two mutually different cut angles as viewed from the end face, and one end of a plate-like piezoelectric element is fitted into each of the two grooves and fixed. It is composed of a base and a core wire connected to a plate-shaped piezoelectric element, and a small diameter portion is formed by being inserted into a fitting hole. Therefore, acceleration components in the thickness direction of the two piezoelectric elements, that is, acceleration in two directions. The component can be stably detected even in a high frequency region.
【図１】本発明に係る加速度センサの外観を示す斜視図FIG. 1 is a perspective view showing the appearance of an acceleration sensor according to the present invention.
【図２】本発明に係る加速度センサの断面図FIG. 2 is a sectional view of an acceleration sensor according to the present invention.
【図３】振動検知部の分解斜視図FIG. 3 is an exploded perspective view of a vibration detection unit.
【図４】圧電素子をベースに取付けた状態を示す斜視図FIG. 4 is a perspective view showing a state where a piezoelectric element is mounted on a base.
【図５】他の実施例に係る圧電素子をベースに取付けた
状態を示す斜視図FIG. 5 is a perspective view showing a state where a piezoelectric element according to another embodiment is mounted on a base.
【図６】バイモルフ振動子の拡大分解斜視図FIG. 6 is an enlarged exploded perspective view of a bimorph vibrator.
1…加速度センサ、１０…加速度センサ本体、１１…ケ
ーブル保持部材、１２、１３…カバー、１４、１５…ガ
イド部、１７、１８…ＭＩケーブル、１９…蝋付け、２
２…分配部材、３０…振動検知部、３１…位置決め部
材、３２…ベース、３２ｂ、３２ｃ…溝、３３，３４…
圧電素子、５０…プロテクトチューブ。DESCRIPTION OF SYMBOLS 1 ... Acceleration sensor, 10 ... Acceleration sensor main body, 11 ... Cable holding member, 12, 13 ... Cover, 14, 15 ... Guide part, 17, 18 ... MI cable, 19 ... Brazing, 2
2 ... distribution member, 30 ... vibration detection unit, 31 ... positioning member, 32 ... base, 32b, 32c ... groove, 33, 34 ...
Piezoelectric element, 50 ... Protective tube.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01P 15/08 - 15/09 H01L 29/84 H01L 41/08 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01P 15/08-15/09 H01L 29/84 H01L 41/08
Claims (5)
の圧電セラミックを揃えて貼り合わせて構成した圧電素
子の自由端に導電性部材からなる断面コ字状の折曲片を
嵌め込んで、前記圧電素子の厚み方向の両端面に電路を
形成したことを特徴とするバイモルフ振動子。1. A piezoelectric element formed by aligning and bonding two piezoelectric ceramics each having electrodes formed on both surfaces thereof, and fitting a bent piece of a U-shaped cross section made of a conductive member into a free end thereof. A bimorph vibrator, wherein electric paths are formed on both end faces in the thickness direction of the piezoelectric element.
応力を加え、この曲げ応力に応じた電圧を発生させる圧
電形加速度センサにおいて、この圧電形加速度センサは
端面に嵌合孔を有すると共に前記端面の芯線孔を介して
ケーブルの芯線が導出される筒状のケーブル保持部材
と、絶縁材からなり一端に小径部が突出形成されると共
に側面に長さ方向の溝を形成してこの溝に前記板状圧電
素子の一端を嵌め込んで固定した柱状ベースとで構成さ
れ、前記板状圧電素子に前記芯線を接続すると共に前記
小径部を前記嵌合孔に差込んで形成したことを特徴とす
る圧電形加速度センサ。2. A piezoelectric acceleration sensor for applying a bending stress to a cantilevered plate-like piezoelectric element and generating a voltage corresponding to the bending stress, wherein the piezoelectric acceleration sensor has a fitting hole on an end face and has a fitting hole. A cylindrical cable holding member through which a core wire of the cable is led through the core wire hole on the end face; a small-diameter portion protrudingly formed at one end made of an insulating material; And a columnar base in which one end of the plate-shaped piezoelectric element is fitted and fixed, and the core wire is connected to the plate-shaped piezoelectric element, and the small-diameter portion is inserted into the fitting hole. Piezoelectric acceleration sensor.
力を加え、この曲げ応力に応じた電圧を発生させる圧電
形加速度センサにおいて、この圧電形加速度センサは端
面に嵌合孔を有すると共に前記端面の芯線孔を介してケ
ーブルの芯線が導出される筒状のケーブル保持部材と、
絶縁材からなり一端に小径部が突出形成されると共に軸
方向に沿い且つ端面から見た切り込み角度が互いに異な
る溝を２本形成し、この２本の溝のそれぞれに前記板状
圧電素子の一端を嵌め込んで固定した柱状ベースとで構
成され、前記板状圧電素子に前記芯線を接続すると共に
前記小径部を前記嵌合孔に差込んで形成したことを特徴
とする圧電形加速度センサ。3. A piezoelectric acceleration sensor for applying a bending stress to a cantilevered plate-like piezoelectric element and generating a voltage corresponding to the bending stress, wherein the piezoelectric acceleration sensor has a fitting hole on an end face and A cylindrical cable holding member from which the core of the cable is led out through the core hole of the end face,
One end of the plate-shaped piezoelectric element is formed of an insulating material having two small grooves protruding from one end and having different cutting angles along the axial direction and viewed from the end face. A piezoelectric acceleration sensor comprising: a column-shaped base fitted with and fixed to the plate-shaped piezoelectric element, wherein the core wire is connected to the plate-shaped piezoelectric element, and the small-diameter portion is inserted into the fitting hole.
力を加え、この曲げ応力に応じた電圧を発生させる圧電
形加速度センサにおいて、前記板状圧電素子はバイモル
フ振動子であると共に前記圧電形加速度センサは絶縁材
からなる柱状ベースの側面に長さ方向の溝を形成し、こ
の溝に前記板状圧電素子の一端を嵌め込んで固定され、
前記板状圧電素子の他端には導電性部材からなる断面コ
字状の折曲片が固定されてなることを特徴とする圧電形
加速度センサ。4. A piezoelectric acceleration sensor for applying a bending stress to a cantilevered plate-shaped piezoelectric element to generate a voltage corresponding to the bending stress, wherein the plate-shaped piezoelectric element is a bimorph vibrator and the piezoelectric element is a piezoelectric element. The shape acceleration sensor forms a longitudinal groove on the side surface of a columnar base made of an insulating material, and is fixed by fitting one end of the plate-like piezoelectric element into this groove,
A piezoelectric acceleration sensor, wherein a bent piece having a U-shaped cross section made of a conductive member is fixed to the other end of the plate-shaped piezoelectric element.
力を加え、この曲げ応力に応じた電圧を発生させる圧電
形加速度センサにおいて、前記板状圧電素子はバイモル
フ振動子であると共に前記圧電形加速度センサは絶縁材
からなる柱状ベースの側面に軸方向に沿い且つ端面から
見た切り込み角度が互いに異なる溝を２本形成し、この
２本の溝のそれぞれに板状圧電素子の一端を嵌め込んで
固定され、前記板状圧電素子の他端には導電性部材から
なる断面コ字状の折曲片が固定されてなることを特徴と
する圧電形加速度センサ。5. A piezoelectric acceleration sensor for applying a bending stress to a cantilevered plate-shaped piezoelectric element to generate a voltage corresponding to the bending stress, wherein the plate-shaped piezoelectric element is a bimorph vibrator and the piezoelectric element is a piezoelectric element. In the shape-type acceleration sensor, two grooves are formed on the side surface of a columnar base made of an insulating material along the axial direction and have different cutting angles as viewed from the end face, and one end of a plate-like piezoelectric element is fitted into each of the two grooves. A piezoelectric acceleration sensor, wherein a bent piece having a U-shaped cross section made of a conductive member is fixed to the other end of the plate-shaped piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7246280A JP3038692B2 (en) | 1995-09-25 | 1995-09-25 | Bimorph vibrator and piezoelectric acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7246280A JP3038692B2 (en) | 1995-09-25 | 1995-09-25 | Bimorph vibrator and piezoelectric acceleration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0989923A JPH0989923A (en) | 1997-04-04 |
| JP3038692B2 true JP3038692B2 (en) | 2000-05-08 |
Family
ID=17146198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7246280A Expired - Lifetime JP3038692B2 (en) | 1995-09-25 | 1995-09-25 | Bimorph vibrator and piezoelectric acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3038692B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007096386A (en) * | 2005-09-27 | 2007-04-12 | Akita Denshi Systems:Kk | Speaker |
-
1995
- 1995-09-25 JP JP7246280A patent/JP3038692B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0989923A (en) | 1997-04-04 |
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