JP3007237U - Upper polishing body in double-sided polishing machine - Google Patents

Abstract

(57)【要約】 （修正有） 【目的】光学ガラス等の平面状のワークを表裏両面より
同時に研磨する両面研磨機において上部研磨部材を上
昇、下降してワークの交換作業を容易とすることがで
き、研磨に際して常に一定の加圧条件下にセットできる
上部研磨体を得る。 【構成】上部研磨体９を回転駆動する主軸１０の下部に
研磨皿連結部を設け、研磨皿連結部と研磨皿１６との間
にコイルスプリング２０等の弾性体よりなる調圧手段を
備えたバランス調整部１３を円周方向に間隔を置いて配
設すると共に、主軸１０にスプライン軸２４を軸線方向
にスライド可能に嵌合し、スプライン軸２４の下端球面
体を研磨皿中心部に傾動可能に押圧し、バランス調整部
１３の調圧手段に抗して研磨皿１６全面をワークに対し
均一に圧接するように加圧し、さらに上記の上部研磨体
９をワーク３の取付け交換作業が可能な上方位置と、ワ
ークの研磨作業が可能な下方位置とに上昇、下降し得る
ように機体に対して取付けた。 (57) [Summary] (Modified) [Purpose] To facilitate work replacement work by raising and lowering the upper polishing member in a double-sided polishing machine that simultaneously polishes planar workpieces such as optical glass from both front and back sides. Thus, an upper polishing body that can be set under a constant pressure condition during polishing is obtained. A polishing dish connecting portion is provided below a main shaft 10 that rotationally drives an upper polishing body 9, and pressure adjusting means made of an elastic body such as a coil spring 20 is provided between the polishing dish connecting portion and the polishing dish 16. The balance adjusting parts 13 are arranged at intervals in the circumferential direction, and the spline shaft 24 is slidably fitted on the main shaft 10 so that the lower spherical body of the spline shaft 24 can be tilted to the center of the polishing dish. And presses the entire surface of the polishing dish 16 against the pressure adjusting means of the balance adjusting section 13 so as to uniformly contact the work, and the work 3 can be attached and replaced with the upper polishing body 9 described above. It was attached to the machine so that it could be raised and lowered to an upper position and a lower position where the work could be polished.

Description

【考案の詳細な説明】[Detailed description of the device]

【０００１】[0001]

【産業上の利用分野】[Industrial applications]

この考案は、主として光学ガラス等の平面状のワークを表裏両面より同時に研 磨する両面研磨機における上部研磨体についての装置に関するものである。 The present invention mainly relates to an apparatus for an upper polishing body in a double-side polishing machine that simultaneously polishes a planar work such as optical glass from both front and back surfaces.

【０００２】[0002]

【従来の技術】[Prior art]

従来この種の両面研磨機は、ワークを装着した円板状のキャリヤを上下から挟 むように一対の研磨皿を互いに反対方向に回転させると共に、キャリヤを自転さ せて研磨加工するものであるが、この両面研磨機は摩耗量が多くなり過ぎて表面 の平滑度を向上させることができず、その上、両研磨皿間で回動する力が働いて 加工圧がワーク表面全体に対して均一とならず、加工歪みが発生する等の欠点が あった。 また、この点を改良した先行技術として特開平４−７５８６９号公報には、一 対の研磨部材を用い、これら各研磨部材を、キャリヤに装着したワークの表裏両 面に当接させた状態で、両研磨部材を同一方向に回転させ、キャリヤをこれら両 研磨部材の回転に追従して回転すると共に、該キャリヤを水平方向に往復移動さ せるようにした装置が開示されている。 Conventionally, this type of double-sided polishing machine rotates a pair of polishing trays in opposite directions so as to sandwich a disk-shaped carrier on which a work is mounted from above and below, and rotates the carrier to perform polishing. This double-sided polishing machine cannot increase the smoothness of the surface due to excessive wear, and in addition, the force that rotates between both polishing plates acts to make the processing pressure uniform over the entire work surface. However, there were drawbacks such as processing distortion. As a prior art to improve this point, Japanese Unexamined Patent Publication (Kokai) No. 4-75869 uses a pair of polishing members, and these polishing members are contacted with both front and back surfaces of a workpiece mounted on a carrier. An apparatus is disclosed in which both polishing members are rotated in the same direction, the carrier is rotated following the rotation of both polishing members, and the carrier is reciprocally moved in the horizontal direction.

【０００３】[0003]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、従来技術および先行技術のものは、いずれもキャリヤに装着し たワークの表裏両面を一対の研磨皿或いは研磨部材で上下から単に加圧挟持して 研磨するに過ぎず、ワークの交換作業の都度、例えば上部研磨部材を上昇、下降 させると、研磨加工の際、ワークの表裏両面に当接する上下研磨部材の加圧条件 が微妙に変化し、常に一定の条件下にセットできない上、上部研磨部材全面が均 一にワークの表面に当接できず、いずれかに傾いた状態で接するため、研磨歪み を生じワークの研磨精度の悪いものとなるものであった。 そこで、この考案は、上記従来技術および先行技術の問題点に鑑み、これを解 決すべくなされたものであって、上部研磨部材を上昇、下降してワークの交換作 業を容易とすることができ、研磨に際して常に一定の加圧条件下にセットできる 上、研磨皿全面を均一な加圧力に保持されてワークを高精度に研磨することので きる両面研磨機における上部研磨体を得ることを目的としたものである。 However, in both the prior art and the prior art, both front and back surfaces of the work mounted on the carrier are simply sandwiched by pressing with a pair of polishing plates or polishing members from above and below to polish the work. For example, if the upper polishing member is raised or lowered each time, the pressing conditions of the upper and lower polishing members that come into contact with the front and back surfaces of the workpiece during polishing will change slightly, and it will not be possible to set under constant conditions. Since the entire surface of the member could not evenly contact the surface of the work, but contacted in either direction in an inclined state, polishing distortion occurred and the polishing accuracy of the work deteriorated. Therefore, the present invention has been made in order to solve the above-mentioned problems of the prior art and the prior art, and it is possible to raise and lower the upper polishing member to facilitate the work replacement work. The objective is to obtain an upper polishing body in a double-sided polishing machine that can be set under constant pressure conditions during polishing and that can maintain high accuracy on the entire surface of the polishing dish to polish a workpiece with high precision. It is what

【０００４】[0004]

【課題を解決するための手段】[Means for Solving the Problems]

これを達成する手段として、この考案は、キャリヤに装着したワークの両面を 研磨する両面研磨機であって、上部研磨体を回転駆動する主軸の下部に研磨皿連 結部を設け、該研磨皿連結部と研磨皿との間にコイルスプリング等の弾性体より なる調圧手段を備えたバランス調整部を円周方向に間隔を置いて配設すると共に 、上記主軸にスプライン軸を軸線方向にスライド可能に嵌合し、該スプライン軸 の下端球面体を研磨皿中心部に傾動可能に押圧し、上記バランス調整部の調圧手 段に抗して研磨皿全面をワークに対し均一に圧接するように加圧し、さらに上記 の上部研磨体をワークの取付け交換作業が可能な上方位置と、ワークの研磨作業 が可能な下方位置とに上昇、下降し得るように機体に対して取付けたものである 。 As a means for achieving this, the present invention is a double-sided polishing machine for polishing both sides of a workpiece mounted on a carrier, and a polishing dish connecting portion is provided below a main spindle for rotationally driving an upper polishing body. A balance adjusting part having a pressure adjusting means made of an elastic material such as a coil spring is arranged between the connecting part and the polishing dish at circumferential intervals, and a spline shaft is slid in the axial direction on the main shaft. It fits as much as possible and presses the lower spherical body of the spline shaft to the center of the polishing dish in a tiltable manner so that the entire surface of the polishing dish is evenly pressed against the work against the pressure adjustment step of the balance adjustment unit. It is attached to the machine so that it can be raised and lowered to an upper position where work can be attached and replaced and a lower position where work can be polished. .

【０００５】[0005]

【実施例】【Example】

この考案の構成を図面に示す実施例について以下詳細に説明する。 １は機体、２はキャリヤ、３はキャリヤ２に嵌合したワークであり、キャリヤ ２の表裏両面を下部研磨体７と上部研磨体９で上下より挟圧して作動することで ワークの両面を研磨加工する。 キャリヤ２は機体１に設置した回転用モーター４によって回転されると共に、 揺動用モーター５に取付けた偏心機構６によって下部研磨体７の中心に対して偏 心状態にセットされて左右に揺動される。このキャリヤ２は例えば回転数６乃至 ３０ｒ．ｐ．ｍ、揺動偏心量０乃至５０ｍｍ、揺動数６乃至３０ｒ．ｐ．ｍで作 動される。 下部研磨体７はキャリヤ２を受止めるように機体１に設置され、回転用モータ ー８により回転されるものであり、例えば回転数２０乃至１００ｒ．ｐ．ｍで回 転駆動されるように構成されている。 上部研磨体９は機体１に対して上昇、下降し得るように移動可能に取付けられ ている。この取付け構造は、上部研磨体９の主軸１０を支持腕２９の先端に枢着 し、支持腕２９に取付けた回転用モーター３０と主軸１０に取付けたプーリー３ １との間に掛け渡したベルト３２によって回転駆動する。なお、この回転数は下 部研磨体７と同様に例えば回転数２０乃至１００ｒ．ｐ．ｍで回転駆動される。 またこの支持腕２９は機体１に設けたガイドレール３３に摺動自在に嵌合する と共に、機体１の上端に設置した昇降用モーター３４のネジ杆３５に螺合して支 持腕２９を上昇、下降し得るように構成されている。 主軸１０はパイプ状で、その内面にスプライン１１が形成され、これに後記す るスプライン軸２４を軸線方向にスライド可能に嵌合する。 主軸１０の下部には研磨皿連結部である筒状カバー１２が結合され、該筒状カ バー１２には円周方向に等間隔に複数箇所、最低３箇所にバランス調整部１３を 突設し、該バランス調整部１３に穿設した嵌合孔１４に筒状のバネ受体１５を嵌 合する。 この主軸１０の下端に連結される研磨皿１６には上記筒状カバー１２に摺動嵌 合する筒状体１７を突設し、この筒状体１７の外周鍔部１８にバネ調節杆１９の 下端を立設して上記バランス調整部１３のバネ受体１５に貫挿し、上端よりコイ ルスプリング２０、ワッシャー２１の順に嵌入した後、該バネ調節杆１９の先端 部に螺設したねじ部にナット２２をねじ込むことでコイルスプリング２０を圧縮 調整する。 また研磨皿１５には中心部に軸受座２３を設け、該軸受座２３にスプライン軸 ２４の下端に形成した球面体２５を当接すると共に、球面体２５の上部にピン２ ６を嵌挿し、これを軸受座２３に形成して外周壁の切込溝２７に遊嵌してカバー ２８で被蓋する。 スプライン軸２４の上端寄りに枢着した連結体３６を支持腕２９に設置した加 圧用エアーシリンダー３７に連結して、該スプライン軸２４を上下動可能に作動 し、下端球面体２５を軸受座２３に押圧するように取付けられている。 なお、３８はスプライン軸２４に形成された研磨液流通路であって、スプライ ン軸２４の上端にロータリージョイントされている研磨液供給部３９と研磨皿１ ５に取付けたホース４０とに連通するように取付けられている。 The configuration of the present invention will be described in detail below with reference to an embodiment shown in the drawings. 1 is a machine body, 2 is a carrier, 3 is a work fitted to the carrier 2, and both sides of the work are polished by pressing the front and back surfaces of the carrier 2 between the lower polishing body 7 and the upper polishing body 9 from above and below. To process. The carrier 2 is rotated by a rotation motor 4 installed on the machine body 1, and is eccentrically set with respect to the center of the lower polishing body 7 by an eccentric mechanism 6 attached to a rocking motor 5 and rocked to the left and right. It The carrier 2 has, for example, a rotation speed of 6 to 30 r. p. m, swing eccentricity 0 to 50 mm, swing number 6 to 30 r. p. It is operated by m. The lower polishing body 7 is installed in the machine body 1 so as to receive the carrier 2 and is rotated by a rotation motor 8. For example, the rotation speed is 20 to 100 r. p. It is configured to be rotationally driven by m. The upper polishing body 9 is movably attached to the machine body 1 so as to be able to move up and down. In this mounting structure, the main shaft 10 of the upper polishing body 9 is pivotally attached to the tip of the support arm 29, and the belt is hung between the rotation motor 30 attached to the support arm 29 and the pulley 31 attached to the main shaft 10. It is rotationally driven by 32. Note that this rotation speed is similar to that of the lower polishing body 7, for example, 20 to 100 rpm. p. It is driven to rotate by m. The support arm 29 is slidably fitted to a guide rail 33 provided on the machine body 1, and is screwed to a screw rod 35 of a lifting motor 34 installed on the upper end of the machine body 1 to raise the support arm 29. , So that it can descend. The main shaft 10 has a pipe shape, and a spline 11 is formed on the inner surface thereof, and a spline shaft 24, which will be described later, is fitted to the main shaft 10 so as to be slidable in the axial direction. A cylindrical cover 12, which is a polishing dish connecting portion, is coupled to the lower part of the main shaft 10, and a plurality of balance adjusting portions 13 are provided on the cylindrical cover 12 at a plurality of positions at equal intervals in the circumferential direction, at least at three positions. The cylindrical spring receiver 15 is fitted into the fitting hole 14 formed in the balance adjusting portion 13. The polishing dish 16 connected to the lower end of the main shaft 10 is provided with a cylindrical body 17 which is slidably fitted to the cylindrical cover 12, and an outer peripheral flange portion 18 of the cylindrical body 17 is provided with a spring adjusting rod 19. The lower end is erected and inserted into the spring receiver 15 of the balance adjusting section 13, and the coil spring 20 and the washer 21 are fitted in this order from the upper end, and then the screw section screwed to the tip end of the spring adjusting rod 19 is inserted. The coil spring 20 is compressed and adjusted by screwing in the nut 22. Further, a bearing seat 23 is provided at the center of the polishing dish 15, and a spherical body 25 formed at the lower end of the spline shaft 24 is brought into contact with the bearing seat 23, and a pin 26 is fitted on the spherical body 25. Is formed on the bearing seat 23, is loosely fitted in the notch 27 in the outer peripheral wall, and is covered by the cover 28. A connecting body 36 pivotally mounted near the upper end of the spline shaft 24 is connected to a pressurizing air cylinder 37 installed on a support arm 29, and the spline shaft 24 is operated so as to be movable up and down, and a lower spherical body 25 is attached to a bearing seat 23. It is mounted so as to press against. Reference numeral 38 denotes a polishing liquid flow passage formed in the spline shaft 24, which communicates with a polishing liquid supply portion 39 that is rotary-joint to the upper end of the spline shaft 24 and a hose 40 attached to the polishing dish 15. Is installed as.

【０００６】 この様に構成されているので、ワーク３の両面を研磨加工するには、上部研磨 体９を上方位置に移動して置き、ワーク３をキャリヤ２に装着した後、機体１に 設置した昇降用モーター３４を駆動して上部研磨体９を下降し、ワークの研磨作 業が可能な下方位置に移動する。 ついで、支持腕２９に設置した加圧用エアーシリンダー３７を作動してスプラ イン軸２４を主軸１０に対して降下させ、スプライン軸２４下端の球面体２５を 軸受座２３に押圧する。これによって、軸受座２３側の研磨皿１６は降下するが 、その際研磨皿１６に取付けたバネ調節杆１９がバネ受体１５に嵌入しているコ イルスプリング２０を圧縮して研磨皿１６を降下し、ワーク３上面側を押圧する ので下面側の下部研磨体７とで上下よりワーク３の表裏両面を挟圧する。この状 態でキャリヤ２、下部研磨体７、上部研磨体９を夫々駆動するが、キャリヤ２は 回転用モーター４によって回転すと共に、揺動用モーター５の偏心機構６によっ て左右に揺動し、また下部研磨体７は回転用モーター８により回転し、上部研磨 体９も回転用モーター３０によって回転駆動してワーク３の両面を同時に研磨加 工する。その際上部研磨体９は主軸１０に対してスプライン軸２４が降下し、コ イルスプリング２０を圧縮した状態で研磨皿１６がワーク３上面側を押圧して研 磨するものであるから、スプライン軸２４下端の球面体２５で研磨皿１６の中心 部を押圧する押圧力はバランス調整部１３によって研磨皿１６全体に均等に分散 され、ワーク３に対して均一な加圧力で高精度に研磨することができる。また万 一研磨中に不均一な抵抗力が作用して研磨皿１６が僅かに傾くバタツキ現象を生 ずると、圧縮状態のコイルスプリング２０は復元張力が働き、研磨皿１６を引き 上げて不均一な抵抗力を減衰して順応しバタツキ現象を確実に防止してバランス が保たれ平滑な研磨面に研磨することができる。 ワーク３を研磨し終わった際は、機体１の昇降用モーター３４を駆動して上部 研磨体９を上昇してワークの取付け交換作業が可能な上方位置に移動する。これ によってワーク３を容易に交換等の作業ができるものである。With this configuration, in order to polish both sides of the work 3, the upper polishing body 9 is moved to an upper position and placed, and the work 3 is mounted on the carrier 2 and then installed on the machine body 1. The lifting motor 34 is driven to lower the upper polishing body 9 and move it to a lower position where the work can be polished. Then, the pressurizing air cylinder 37 installed on the support arm 29 is operated to lower the spline shaft 24 with respect to the main shaft 10, and the spherical body 25 at the lower end of the spline shaft 24 is pressed against the bearing seat 23. As a result, the polishing dish 16 on the bearing seat 23 side is lowered, but at this time, the spring adjusting rod 19 attached to the polishing dish 16 compresses the coil spring 20 fitted in the spring receiver 15 to move the polishing dish 16 to the lower position. As the work 3 descends and presses the upper surface side of the work 3, the front and back surfaces of the work 3 are clamped from above and below with the lower polishing body 7 on the lower surface side. In this state, the carrier 2, the lower polishing body 7, and the upper polishing body 9 are respectively driven, but the carrier 2 is rotated by the rotation motor 4 and is swung left and right by the eccentric mechanism 6 of the swing motor 5. Further, the lower polishing body 7 is rotated by the rotation motor 8 and the upper polishing body 9 is also rotationally driven by the rotation motor 30 to simultaneously polish both surfaces of the work 3. At this time, the spline shaft 24 of the upper polishing body 9 is lowered with respect to the main shaft 10, and the polishing plate 16 presses the upper surface side of the work 3 for polishing while the coil spring 20 is compressed. 24 The pressing force that presses the center of the polishing dish 16 with the spherical body 25 at the lower end is evenly distributed to the entire polishing dish 16 by the balance adjusting section 13, and the work 3 is highly accurately polished with uniform pressure. You can If uneven resistance is applied during polishing to cause a flapping phenomenon in which the polishing dish 16 is slightly tilted, restoring tension acts on the coil spring 20 in a compressed state, pulling up the polishing dish 16 and causing unevenness. It is possible to grind to a smooth and smooth surface with good balance by maintaining the balance by surely preventing the flapping phenomenon by accommodating and accommodating various resistance forces. When the work 3 has been polished, the elevating motor 34 of the machine body 1 is driven to raise the upper polishing body 9 to move it to an upper position where the work can be attached and replaced. As a result, the work 3 can be easily replaced.

【０００７】[0007]

【考案の効果】[Effect of device]

以上、実施例について詳述したように、この考案は、上部研磨体の主軸はスラ イド可能にスプライン軸を嵌合し、下端の球面体で研磨皿の中心部に対する押圧 力はバランス調整部によって研磨皿全体に均等に分散され、ワークに対して均一 な加圧力で高精度に研磨することができる。また研磨中にバタツキ現象を生じて も研磨皿はコイルスプリングによる調圧手段の作動で不均一な抵抗力を減衰させ て常に研磨皿をワークに一定圧に接するようなバランス作用が働き、バタッキ現 象を確実に防止して平滑な研磨面に研磨することができる。さらに上部研磨体を 上昇、下降させワークの交換作業を容易にすると共に、研磨に際して常に一定の 加圧条件下にセットできる上、研磨皿全面を均一な加圧力で研磨してワークを高 精度に仕上げることができる等の優れた効果を奏するものである。 As described above in detail with reference to the embodiments, in the present invention, the main shaft of the upper polishing body is fitted with the spline shaft so that it can slide, and the spherical body at the lower end is used by the balance adjusting unit to apply the pressing force to the center of the polishing dish. Evenly distributed over the entire polishing dish, it is possible to highly accurately polish the work with uniform pressure. In addition, even if a flapping phenomenon occurs during polishing, the polishing plate attenuates the uneven resistance force by the operation of the pressure adjusting means by the coil spring, and the polishing plate has a balance action so that the polishing plate is always in contact with the workpiece at a constant pressure. It is possible to surely prevent elephants and polish to a smooth polished surface. In addition to raising and lowering the upper polishing body to facilitate work replacement work, it is possible to always set a constant pressurizing condition during polishing, and the entire surface of the polishing dish is polished with a uniform pressing force for high precision work. It has excellent effects such as finishing.

【図面の簡単な説明】[Brief description of drawings]

【図１】この考案の両面研磨機全体の一部切断せる概略
正面図FIG. 1 is a schematic front view of a part of the double-sided polishing machine of the present invention, which can be partially cut.

【図２】同じくこの考案の両面研磨機全体の一部切断せ
る概略側面図FIG. 2 is a schematic side view of the double-sided polishing machine of the present invention, which can partially cut the entire machine.

【図３】同じくこの考案の要部である上部研磨体の一部
切断せる側面図FIG. 3 is a side view of the upper polishing body, which is also an essential part of the present invention, in which a part of the upper polishing body can be cut.

【符号の説明】[Explanation of symbols]

１ 機体 ２ キャリヤ ３ ワーク ７ 下部研磨体 ９ 上部研磨体 １０ 主軸 １１ スプライン １３ バランス調整部 １５ バネ受体 １６ 研磨皿 １９ バネ調節杆 ２０ コイルスプリング ２３ 軸受座 ２４ スプライン軸 ２５ 球面体 ２９ 支持腕 ３０ 回転用モーター ３１ プーリー ３２ ベルト ３４ 昇降用モーター ３６ 連結体 ３７ 加圧用エアーシリンダー 1 Aircraft 2 Carrier 3 Workpiece 7 Lower polishing body 9 Upper polishing body 10 Spindle 11 Spline 13 Balance adjusting part 15 Spring receiving body 16 Polishing plate 19 Spring adjusting rod 20 Coil spring 23 Bearing seat 24 Spline shaft 25 Spherical body 29 Support arm 30 Rotation Motor 31 Pulley 32 Belt 34 Lifting motor 36 Connected body 37 Pressurizing air cylinder

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項１】 キャリヤに装着したワークの両面を研磨
する両面研磨機であって、上部研磨体を回転駆動する主
軸の下部に研磨皿連結部を設け、該研磨皿連結部と研磨
皿との間にコイルスプリング等の弾性体よりなる調圧手
段を備えたバランス調整部を円周方向に間隔を置いて配
設すると共に、上記主軸にスプライン軸を軸線方向にス
ライド可能に嵌合し、該スプライン軸の下端球面体を研
磨皿中心部に傾動可能に押圧し、上記バランス調整部の
調圧手段に抗して研磨皿全面をワークに対し均一に圧接
するように加圧することを特徴とする両面研磨機におけ
る上部研磨体。1. A double-sided polishing machine for polishing both sides of a work mounted on a carrier, wherein a polishing dish connecting portion is provided below a main shaft for rotationally driving an upper polishing body, and the polishing dish connecting portion and the polishing dish are connected to each other. A balance adjusting portion provided with a pressure adjusting means made of an elastic body such as a coil spring is provided at intervals in the circumferential direction, and a spline shaft is slidably fitted to the main shaft in the axial direction. The lower end spherical body of the spline shaft is tiltably pressed to the center of the polishing dish, and the entire surface of the polishing dish is uniformly pressed against the work against the pressure adjusting means of the balance adjusting unit. Upper polishing body for double-sided polishing machine. 【請求項２】 上部研磨体をワークの取付け交換作業が
可能な上方位置と、ワークの研磨作業が可能な下方位置
とに上昇、下降し得るように機体に対して取付けること
を特徴とする請求項１記載の両面研磨機における上部研
磨体。2. The upper polishing body is attached to the machine body so as to be able to move up and down between an upper position where work attachment and replacement work can be performed and a lower position where work polishing work can be performed. The upper polishing body in the double-sided polishing machine according to Item 1.