JP2911949B2 - Method of forming pyrolytic carbon film - Google Patents
Method of forming pyrolytic carbon filmInfo
- Publication number
- JP2911949B2 JP2911949B2 JP2056137A JP5613790A JP2911949B2 JP 2911949 B2 JP2911949 B2 JP 2911949B2 JP 2056137 A JP2056137 A JP 2056137A JP 5613790 A JP5613790 A JP 5613790A JP 2911949 B2 JP2911949 B2 JP 2911949B2
- Authority
- JP
- Japan
- Prior art keywords
- resins
- carbon film
- pyrolytic carbon
- forming
- refractory particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、熱分解炭素皮膜の生成方法に関するもので
ある。The present invention relates to a method for forming a pyrolytic carbon film.
従来の炭素皮膜の生成方法としてはメタン、プロパン
などの炭化水素ガスを高温域に導入し、それらを気相で
熱分解させ基体上に蒸着させ炭素皮膜を生成させる方法
が知られている。しかし均一な特性を持つ皮膜を得るた
めに高温真空炉の加熱温度、真空度及びガスの流量を調
製しなければならなかった。As a conventional method for forming a carbon film, there is known a method in which a hydrocarbon gas such as methane or propane is introduced into a high-temperature region, and these are thermally decomposed in a gas phase and deposited on a substrate to form a carbon film. However, in order to obtain a film having uniform characteristics, the heating temperature of the high-temperature vacuum furnace, the degree of vacuum, and the gas flow rate had to be adjusted.
本発明者らは上記課題を解決するために、鋭意研究を
行った結果、加熱温度、真空度、ガス流量等の調整なし
に簡便に基体上へ均一に熱分解炭素皮膜を生成させる方
法を見出し、本発明を完成するに到った。The present inventors have conducted intensive studies to solve the above problems, and as a result, have found a method for easily and uniformly forming a pyrolytic carbon film on a substrate without adjusting heating temperature, vacuum degree, gas flow rate, and the like. Thus, the present invention has been completed.
即ち、本発明は、熱分解炭素皮膜となりうる有機化合
物を被覆した耐火性粒子を、基体と共に加熱することを
特徴とする熱分解炭素皮膜の生成方法を提供するもので
ある。That is, the present invention provides a method for producing a pyrolytic carbon film, which comprises heating refractory particles coated with an organic compound that can be a pyrolytic carbon film together with a substrate.
本発明に用いられる熱分解炭素皮膜となりうる有機化
合物としては、ベンゼン、トルエン、キシレン等の芳香
族系のモノマー；ポリエチレン、ポリブテン、石油樹
脂、ジシクロペンタジエン樹脂、クマロンインデン樹
脂、ジエン樹脂等の炭化水素系樹脂；アクリル酸系樹
脂；酢酸ビニル及びビニルアルコール系樹脂；塩化ビニ
ル樹脂、塩化ビニリデン樹脂等の含ハロゲン系樹脂；フ
ェノールホルマリン樹脂、クレゾールホルマリン樹脂等
のフェノール系樹脂；尿素樹脂、メラミン樹脂等のアミ
ノ樹脂；キシレン樹脂、トルエン樹脂、アルキルベンゼ
ン樹脂等の芳香族炭化水素系樹脂；ケトン樹脂；飽和ア
ルキード樹脂；不飽和ポリエステル樹脂等のポリエステ
ル型樹脂;6ナイロン、6.6ナイロンなどのポリアミド型
樹脂；グリシジル型エポキサイド、ビスフェノール型エ
ポキシ樹脂等のエポキシ樹脂；フェノキシ樹脂；ポリフ
ェニレン樹脂；カゼイン等のタンパク質系樹脂；ロジ
ン、リグニン等の天然樹脂；桐油、あまに油等の油脂類
等が挙げられる。Examples of the organic compound capable of forming a pyrolytic carbon film used in the present invention include aromatic monomers such as benzene, toluene, and xylene; polyethylene, polybutene, petroleum resin, dicyclopentadiene resin, cumarone indene resin, and diene resin. Hydrocarbon resins; acrylic acid resins; vinyl acetate and vinyl alcohol resins; halogen-containing resins such as vinyl chloride resins and vinylidene chloride resins; phenolic resins such as phenol formalin resins and cresol formalin resins; urea resins and melamine resins Amino resins such as xylene resins, toluene resins, and alkylbenzene resins; ketone resins; saturated alkyd resins; polyester resins such as unsaturated polyester resins; polyamide resins such as 6 nylon and 6.6 nylon; Glycidyl type epoxa Phenoxy resins; de, epoxy resins such as bisphenol epoxy resins polyphenylene resin; protein-based resins such as casein; rosin, natural resins lignin; tung, fats and oils such as oils and the like linseed.
これら有機化合物を耐火性粒子に被覆するには、耐火
性粒子と直接混合しても良いし、予めテトラヒドロフラ
ン（THF）等の溶剤で溶解させて混合しても良い。To coat these organic compounds on the refractory particles, the refractory particles may be directly mixed with the refractory particles, or may be previously dissolved and mixed with a solvent such as tetrahydrofuran (THF).
本発明に用いられる耐火性粒子としては、粒径が10μ
ｍ〜5mmのアルミナ、シリカ、石英質を主成分とする硅
砂の他、ジルコン、クロマイト、オリビン、ムライト、
硅石、黒鉛などが挙げられる。The refractory particles used in the present invention have a particle size of 10μ.
m ~ 5mm alumina, silica, silica sand mainly composed of quartz, zircon, chromite, olivine, mullite,
Examples include silica stone and graphite.
本発明において、炭素皮膜を生成させる基体は有機化
合物を被覆した耐火性粒子の中へうめ込んでも良いし、
耐火性粒子上へ置いても良い。また、例えばるつぼ等の
耐熱性容器の内壁へ炭素皮膜を生成させる場合は、るつ
ぼへ耐火性粒子を充填すれば良い。In the present invention, the substrate for forming the carbon film may be embedded in the refractory particles coated with the organic compound,
It may be placed on the refractory particles. When a carbon film is formed on the inner wall of a heat-resistant container such as a crucible, the crucible may be filled with refractory particles.
炉内の雰囲気はN2などの不活性ガスで置換した方が好
ましいが、自己雰囲気が還元性になる場合は特に置換し
なくても良い。また加熱温度は600〜1500℃が好まし
い。It is preferable to replace the atmosphere in the furnace with an inert gas such as N 2, but it is not necessary to replace the atmosphere when the self-atmosphere becomes reducing. The heating temperature is preferably from 600 to 1500 ° C.
以下、実施例を挙げて、本発明を具体的に説明する
が、本発明は、これらの実施例のみに限定されるもので
はない。Hereinafter, the present invention will be described specifically with reference to Examples, but the present invention is not limited to these Examples.
実施例 硅砂100重量部と、キシレン樹脂（商品名ニカノールL
LL、三菱瓦斯化学（株）製）２重量部を混合し、これを
磁製るつぼ中へ充填し、ふたをした。800℃に加熱した
電気炉へこのるつぼを入れ、空気中で５分間焼成し、室
温まで冷却した後、るつぼ内の硅砂を取り出すと、るつ
ぼ内壁に厚さ約７μｍの炭素皮膜が得られた。Example 100 parts by weight of silica sand and xylene resin (trade name: Nicanol L
LL, manufactured by Mitsubishi Gas Chemical Co., Ltd.) were mixed, and the mixture was filled in a porcelain crucible and capped. This crucible was placed in an electric furnace heated to 800 ° C., baked in air for 5 minutes, cooled to room temperature, and then the silica sand in the crucible was taken out. As a result, a carbon film having a thickness of about 7 μm was obtained on the inner wall of the crucible.
Claims (2)
覆した耐火性粒子を、基体と共に加熱することを特徴と
する熱分解炭素皮膜の生成方法。1. A method for producing a pyrolytic carbon film, comprising heating refractory particles coated with an organic compound capable of forming a pyrolytic carbon film together with a substrate.
載の熱分解炭素皮膜の生成方法。2. The method according to claim 1, wherein the heating temperature is from 600 to 1500 ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2056137A JP2911949B2 (en) | 1990-03-06 | 1990-03-06 | Method of forming pyrolytic carbon film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2056137A JP2911949B2 (en) | 1990-03-06 | 1990-03-06 | Method of forming pyrolytic carbon film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03257007A JPH03257007A (en) | 1991-11-15 |
| JP2911949B2 true JP2911949B2 (en) | 1999-06-28 |
Family
ID=13018688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2056137A Expired - Fee Related JP2911949B2 (en) | 1990-03-06 | 1990-03-06 | Method of forming pyrolytic carbon film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2911949B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2270771A1 (en) | 1999-04-30 | 2000-10-30 | Hydro-Quebec | New electrode materials with high surface conductivity |
| JP5921955B2 (en) * | 2012-05-25 | 2016-05-24 | 株式会社半導体エネルギー研究所 | Method for producing crucible for vapor deposition |
-
1990
- 1990-03-06 JP JP2056137A patent/JP2911949B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03257007A (en) | 1991-11-15 |
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