JP2661727B2 - Manufacturing method of magnetic recording medium - Google Patents
Manufacturing method of magnetic recording mediumInfo
- Publication number
- JP2661727B2 JP2661727B2 JP63279803A JP27980388A JP2661727B2 JP 2661727 B2 JP2661727 B2 JP 2661727B2 JP 63279803 A JP63279803 A JP 63279803A JP 27980388 A JP27980388 A JP 27980388A JP 2661727 B2 JP2661727 B2 JP 2661727B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- recording medium
- magnetic recording
- film layer
- ferromagnetic metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、強磁性金属薄膜を磁気記録層とする磁気記
録媒体の製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a magnetic recording medium using a ferromagnetic metal thin film as a magnetic recording layer.
従来の技術 磁気記録の分野においては、高密度記録化が近年来要
望されており、これに応えるものとして金属薄膜型の磁
気記録媒体の開発が進められている。一般に、強磁性金
属薄膜は短波長記録に適した特性を有する反面、磁気ヘ
ッドやシリンダとの摩擦係数が大きくて摩耗や損傷を受
け易いこと、さらに耐候性が十分と言えないことなどの
欠点を有する。このため、従来より磁性層上に種々の保
護膜層を形成させて上記欠点を改良する試みが多く提案
されている。現在のところ、カーボンのスパッタや炭化
水素系ガスのプラズマCVDによるダイヤモンド状カーボ
ン薄膜層による保護が有望視されている（たとえば特開
昭53−143206号公報、特開昭59−127232号公報、特開昭
59−213030号公報、特開昭61−142525号公報等）。2. Description of the Related Art In the field of magnetic recording, high-density recording has been demanded in recent years, and a metal thin-film type magnetic recording medium has been developed to meet this demand. In general, ferromagnetic metal thin films have characteristics suitable for short-wavelength recording, but have the disadvantages that they have a large coefficient of friction with magnetic heads and cylinders and are susceptible to wear and damage, and that they cannot be said to have sufficient weather resistance. Have. For this reason, conventionally, many attempts have been made to improve the above drawbacks by forming various protective film layers on the magnetic layer. At present, protection by a diamond-like carbon thin film layer by sputtering of carbon or plasma CVD of hydrocarbon-based gas is considered promising (for example, JP-A-53-143206, JP-A-59-127232, Kaisho
59-213030, JP-A-61-142525, etc.).
発明が解決しようとする課題 本発明者らは種々の検討の結果、ダイヤモンド状カー
ボン薄膜層は前述の実用特性の改良に効果があることが
確認されたものの、所定の性能を満足する条件下で通常
の方法で形成すると、成膜速度が数Å/secと極めて低い
ことがわかった。このような成膜速度では特に一番用途
の多いテープ状の磁気記録媒体への展開は難しく、高速
化が必要とされる。Problems to be Solved by the Invention As a result of various studies, the present inventors have confirmed that the diamond-like carbon thin film layer is effective in improving the above-mentioned practical characteristics, but under the conditions satisfying the predetermined performance. It was found that the film formation rate was extremely low at several Å / sec when formed by the usual method. At such a film forming speed, it is particularly difficult to develop the film onto a tape-shaped magnetic recording medium which is most frequently used, and high speed is required.
本発明は、上記問題を解決するもので、量産性に優れ
たダイヤモンド状カーボン薄膜層を有する磁気記録媒体
の製造方法を提供することを目的とするものである。An object of the present invention is to solve the above problems and to provide a method for manufacturing a magnetic recording medium having a diamond-like carbon thin film layer excellent in mass productivity.
課題を解決するための手段 上記問題を解決するために、本発明の磁気記録媒体の
製造方法は、強磁性金属薄膜層自身を対向放電電極の片
方の電極として用い、この強磁性金属薄膜層の電極にマ
イナス電圧を印加し、導入した炭化水素系ガスによるグ
ロー放電を発生させ、強磁性金属薄膜層表面にダイヤモ
ンド状カーボン薄膜を形成させるようにしたものであ
る。Means for Solving the Problems In order to solve the above problems, the method for manufacturing a magnetic recording medium of the present invention uses the ferromagnetic metal thin film layer itself as one of the opposed discharge electrodes, A negative voltage is applied to the electrode to generate a glow discharge by the introduced hydrocarbon-based gas, thereby forming a diamond-like carbon thin film on the surface of the ferromagnetic metal thin film layer.
さらに、ダイヤモンド状カーボン薄膜を形成する際
に、その放電成膜領域で磁気記録媒体の端部を保護テー
プで覆いながら形成させるようにしたものである。Further, when the diamond-like carbon thin film is formed, the thin film is formed while covering the end of the magnetic recording medium with a protective tape in the discharge film formation region.
作用 上記構成により、強磁性金属薄膜層をマイナス電極と
してグロー放電を発生させると、その前面に多量の正の
空間電荷が形成され、これが強い電界を生じて、強磁性
金属薄膜層表面への陽イオンの突入やそれにともなう電
子放出を加速し、放電成膜領域の中ではこの部分が最も
活性となる。したがって導入した炭化水素系ガスの分
解、重合が強磁性金属薄膜層表面で最も進行すると考え
られ、これが成膜速度の向上となってあらわれる。Operation According to the above configuration, when a glow discharge is generated using the ferromagnetic metal thin film layer as a negative electrode, a large amount of positive space charges are formed on the front surface of the glow discharge, which generates a strong electric field, and a positive electric field is applied to the ferromagnetic metal thin film surface. Acceleration of ion intrusion and associated electron emission are accelerated, and this portion becomes the most active in the discharge film formation region. Therefore, it is considered that the decomposition and polymerization of the introduced hydrocarbon-based gas proceed most on the surface of the ferromagnetic metal thin film layer, and this appears to improve the film formation rate.
このとき、強磁性金属薄膜層を電極として使用するこ
とから、新たな問題も生ずる。すなわち、電界集中しや
すい端部をトリガーして異常マーク放電が多発するよう
になり、この放電が発生すると、その端部を中心に電流
が集中し、結果として強磁性金属薄膜層が樹枝状に飛散
し、重欠陥を生じさせる。これを防ぐ目的で端部を保護
テープで覆いながら形成する。特に、印加するマイナス
電圧を増加させ、反応をさらに促進させるときに、この
保護テープは有効に作用する。At this time, a new problem arises because the ferromagnetic metal thin film layer is used as an electrode. That is, an abnormal mark discharge occurs frequently by triggering the end where the electric field tends to concentrate, and when this discharge occurs, current concentrates around the end, and as a result, the ferromagnetic metal thin film layer becomes dendritic. Scatters, causing heavy defects. In order to prevent this, it is formed while covering the end with a protective tape. In particular, this protective tape works effectively when the applied negative voltage is increased to further promote the reaction.
実施例 以下、図面に基づいて本発明の一実施例を図面に基づ
いて説明する。An embodiment of the present invention will be described below with reference to the drawings.
第２図は本発明より得られる磁気記録媒体の断面図で
ある。第２図において、１はポリエチレンテレフタレー
ト、ポリイミド、ポリアミド、ポリカーボネイトなどの
高分子フィルム、２は鉄、コバルト、ニッケルなどの強
磁性金属を主要構成とする合金を電気メッキ、無電界メ
ッキ、スパッタリング、蒸着、イオンプレーティングな
どの方法により形成した強磁性金属薄膜層、３はダイヤ
モンド状カーボン薄膜層である。FIG. 2 is a sectional view of a magnetic recording medium obtained according to the present invention. In FIG. 2, reference numeral 1 denotes a polymer film such as polyethylene terephthalate, polyimide, polyamide, and polycarbonate; , 3 is a diamond-like carbon thin film layer formed by a method such as ion plating.
第１図は本発明を実施するのに用いたカーボン薄膜形
成装置の一例を示す概略構成である。この装置は、真空
ポンプ４が接続された真空容器５内に供給ロール６、巻
取ロール７とから成る原反走行系と、端面保護テープ８
の走行系と、放電電極関連部材、モノマーガス供給管９
から成る放電成膜系が組み込まれている。真空容器５内
は真空ポンプ４により10-4〜10-5torrまで排気され、そ
の後モノマーガス供給管９よりメタンガスを中心とした
炭化水素系ガスが、場合に応じてアルゴンガスなどと混
合されて10-1〜10-3torrの真空度となるまで導入され
る。FIG. 1 is a schematic configuration showing an example of a carbon thin film forming apparatus used for carrying out the present invention. This apparatus comprises a raw roll running system including a supply roll 6 and a take-up roll 7 in a vacuum vessel 5 to which a vacuum pump 4 is connected, and an end face protection tape 8.
Traveling system, discharge electrode-related members, monomer gas supply pipe 9
Is formed. The inside of the vacuum vessel 5 is evacuated to 10 -4 to 10 -5 torr by the vacuum pump 4, and then a hydrocarbon-based gas, mainly methane gas, is mixed from the monomer gas supply pipe 9 with an argon gas or the like as occasion demands. It is introduced until the degree of vacuum reaches 10 -1 to 10 -3 torr.
被処理原反10は６〜20μｍ厚さのポリエチレンテレフ
タレートの高分子フィルム１上0.2μｍ膜厚のコパルト
ニッケル斜め蒸着膜の強磁性金属薄膜層２を形成させた
磁気記録媒体を代表として用いた。最初は供給ロール６
に捲回されていて、成膜が始まると順次引き出され、終
了すると巻取ロール７と捲回される。搬送速度は必要と
されるダイヤモンド状カーボン薄膜厚に応じて１〜30m/
minに調整可能となっている。放電成膜領域は隔壁11に
より供給ロール６、巻取ロール７の側と仕切られてい
る。その中に設置されている対向電極12には正の電圧
を、もう一方の電極となる強磁性金属薄膜層２には通電
ローラ13を介して負の電圧がそれぞれ印加できるように
電源14に接続されている。このとき商用周波交流、高周
波交流も効果はあるが、直流が最も効果が発揮される。
また、異常アーク放電を防ぐために、被処理原反10の両
端部を保護するように被処理原反10と平行接触させて端
面保護テープ８を走行させる。これは第２図に示すよう
に、供給ロール・巻取ロール方式でもよいし、エンドレ
ス方式でもよい。また、材質としても高分子フィルムで
も金属箔でもかまわない。金属箔を使用した場合は、通
電ローラ13の代わりに、これを介してマイナス電圧を強
磁性金属薄膜層２に印加するようにしてもよい。さて、
以上のような製造方法で作製した試料をテープＡと呼ぶ
ことにする。The raw material 10 to be treated was a magnetic recording medium in which a ferromagnetic metal thin film layer 2 of a 0.2 μm thick obliquely deposited copartu nickel film was formed on a polyethylene terephthalate polymer film 1 having a thickness of 6 to 20 μm. . Initially supply roll 6
When the film formation is started, the film is sequentially pulled out, and when the film formation is completed, the film is wound around the winding roll 7. The transport speed is 1 to 30m / depending on the required diamond-like carbon thin film thickness.
Adjustable to min. The discharge film formation region is separated from the supply roll 6 and the take-up roll 7 by a partition wall 11. A positive voltage is applied to the opposing electrode 12 installed therein and a negative voltage is applied to the ferromagnetic metal thin film layer 2 serving as the other electrode via a current supply roller 13 so that a negative voltage can be applied. Have been. At this time, commercial frequency AC and high frequency AC are effective, but DC is most effective.
In order to prevent abnormal arc discharge, the end face protection tape 8 is run in parallel contact with the raw material 10 so as to protect both ends of the raw material 10. As shown in FIG. 2, this may be a supply roll / winding roll system or an endless system. Also, the material may be a polymer film or a metal foil. When a metal foil is used, a negative voltage may be applied to the ferromagnetic metal thin film layer 2 via the current roller 13 instead of the roller 13. Now,
The sample manufactured by the above manufacturing method is referred to as a tape A.
さらに、比較例として端面保護テープ８を用いずに成
膜して試作したものをテープＢ、強磁性金属薄膜層２を
マイナス電極とせずに被処理原反10をサンドイッチする
ような位置に別のマイナス電極を設けて成膜して試作し
たものをテープＣと呼ぶことにする。Furthermore, as a comparative example, a tape B was formed without using the end face protection tape 8 and a trial production was performed at another position where the material to be processed 10 was sandwiched without using the ferromagnetic metal thin film layer 2 as a negative electrode. A prototype formed by forming a film by providing a negative electrode is referred to as a tape C.
この実験では、各々メタン−アルゴンガス雰囲気で80
0Vの直流電圧を印加し、放電成膜領域を約40cmに規定
し、被処理原反搬送速度以外を同一とした条件でダイヤ
モンド状カーボン薄膜層を100Å形成させた。In this experiment, 80
A DC voltage of 0 V was applied, the discharge film formation area was defined to be about 40 cm, and a diamond-like carbon thin film layer was formed 100 mm under the same conditions except for the transport speed of the material to be processed.
このとき、テープＡとＢは10〜15mm/minという高速の
被処理原反搬送速度で製作でき、一方テープＣは1m/min
であった。また、テープＢの作製時においては、異常ア
ーク放電が数10回発生し、それにともなって強磁性金属
薄膜層の欠損が見られた。At this time, the tapes A and B can be manufactured at a high material transfer speed of 10 to 15 mm / min, while the tape C is 1 m / min.
Met. Further, during the production of the tape B, abnormal arc discharge occurred several tens of times, and accompanying this, a defect in the ferromagnetic metal thin film layer was observed.
本実施例の高速の成膜速度で形成したテープＡと従来
方式で成膜したテープＣの膜質比較のために、その保護
効果すなわち高温高湿の耐候試験とスチル寿命試験を検
討した。その結果、両者には差異がないことが確認さ
れ、保護膜として有効であることがわかった。In order to compare the film quality of the tape A formed at a high film forming speed of the present embodiment with the tape C formed by the conventional method, the protection effect, that is, the high-temperature and high-humidity weather test and the still life test were examined. As a result, it was confirmed that there was no difference between the two, which proved to be effective as a protective film.
発明の効果 以上のように本発明によれば、ダイヤモンド状カーボ
ン薄膜を強磁性金属薄膜層上に高速で、かつ欠陥を生ず
ること無く形成できるといったすぐれた効果があり、ま
た、得られたアモリファスカーボン薄膜の保護効果も従
来と同様のレベルである。Effect of the Invention As described above, according to the present invention, there is an excellent effect that a diamond-like carbon thin film can be formed on a ferromagnetic metal thin film layer at high speed without generating defects. The protection effect of the carbon thin film is also at the same level as the conventional one.
【図面の簡単な説明】 第１図は本発明の一実施例に用いたカーボン薄膜形成装
置の概要図、第２図は本発明の方法により製造した磁器
記録媒体の一例を示す断面図である。 １……高分子フィルム、２……強磁性金属薄膜層、３…
…ダイヤモンド状カーボン薄膜層、４……真空ポンプ、
５……真空容器、６……供給ロール、７……巻取ロー
ル、８……端面保護テープ、９……モノマーガス供給
管、10……被処理原反、11……隔壁、12……対向電極、
13……通電ローラ。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a carbon thin film forming apparatus used in one embodiment of the present invention, and FIG. 2 is a cross-sectional view showing an example of a porcelain recording medium manufactured by the method of the present invention. . 1 ... polymer film, 2 ... ferromagnetic metal thin film layer, 3 ...
... Diamond-like carbon thin film layer, 4 ... Vacuum pump,
5 Vacuum container, 6 Supply roll, 7 Take-up roll, 8 End face protection tape, 9 Monomer gas supply pipe, 10 Material to be processed, 11 Partition wall, 12 Counter electrode,
13 ... energizing roller.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 村居 幹夫 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 昭62−241137（ＪＰ，Ａ) 特開 昭60−29936（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Mikio Murai 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP-A-62-241137 (JP, A) JP-A-60 −29936 (JP, A)
Claims (2)
磁気記録媒体の製造方法であって、前記強磁性金属薄膜
層にマイナス電圧を印加し、炭化水素系ガスを導入し、
グロー放電を発生させて前記強磁性金属薄膜層表面にダ
イヤモンド状カーボン薄膜を形成する磁気記録媒体の製
造方法。1. A method of manufacturing a magnetic recording medium comprising a ferromagnetic metal thin film layer provided on a non-magnetic substrate, wherein a negative voltage is applied to the ferromagnetic metal thin film layer to introduce a hydrocarbon-based gas.
A method for producing a magnetic recording medium, wherein glow discharge is generated to form a diamond-like carbon thin film on the surface of the ferromagnetic metal thin film layer.
に、磁気記録媒体の端部を保護テープで覆いながら形成
する請求項１記載の磁気記録媒体の製造方法。2. The method for manufacturing a magnetic recording medium according to claim 1, wherein the diamond-like carbon thin film is formed while covering an end of the magnetic recording medium with a protective tape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63279803A JP2661727B2 (en) | 1988-11-04 | 1988-11-04 | Manufacturing method of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63279803A JP2661727B2 (en) | 1988-11-04 | 1988-11-04 | Manufacturing method of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02126422A JPH02126422A (en) | 1990-05-15 |
| JP2661727B2 true JP2661727B2 (en) | 1997-10-08 |
Family
ID=17616133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63279803A Expired - Lifetime JP2661727B2 (en) | 1988-11-04 | 1988-11-04 | Manufacturing method of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2661727B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5292696B2 (en) * | 2007-01-11 | 2013-09-18 | Ｔｄｋ株式会社 | Plasma CVD apparatus, thin film manufacturing method, and laminated substrate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6029936A (en) * | 1983-07-29 | 1985-02-15 | Denki Kagaku Kogyo Kk | Magnetic recording medium and its production |
| JPH077504B2 (en) * | 1986-04-11 | 1995-01-30 | 松下電器産業株式会社 | Method and apparatus for manufacturing magnetic recording medium |
-
1988
- 1988-11-04 JP JP63279803A patent/JP2661727B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02126422A (en) | 1990-05-15 |
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