JP2023172843A - ターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール - Google Patents
ターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール Download PDFInfo
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- 230000009977 dual effect Effects 0.000 title claims abstract description 36
- 239000000523 sample Substances 0.000 title claims description 98
- 229910000679 solder Inorganic materials 0.000 claims description 15
- 238000007598 dipping method Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000007547 defect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000010354 integration Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000007792 addition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/005—Soldering by means of radiant energy
- B23K1/0056—Soldering by means of radiant energy soldering by means of beams, e.g. lasers, E.B.
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/04—Heating appliances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0607—Solder feeding devices
- B23K3/0638—Solder feeding devices for viscous material feeding, e.g. solder paste feeding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0646—Solder baths
- B23K3/0669—Solder baths with dipping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0646—Solder baths
- B23K3/0669—Solder baths with dipping means
- B23K3/0676—Conveyors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/087—Soldering or brazing jigs, fixtures or clamping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0426—Fixtures for other work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0461—Welding tables
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/047—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Laser Beam Processing (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
Description
1310:本体部
1320:第1レーザ接続部
1321、1331:コリメーションレンズ
1322:回折光学素子(DOE)レンズ
1330:第2レーザ接続部
1340:レーザフィルタ部
1350:重畳レーザ出射部
1351:フォーカシングレンズ
LB1、LB2:第1、第2レーザビーム
LB1+LB2:同焦点重畳レーザビーム
Claims (7)
- 水平線上で360度回転しながらトレイ上に置かれたプローブピンを一対の左右の鉗子で構成されたピングリッパで取った後、搬送するピックアップユニットと、前記ピックアップユニットによって搬送されたプローブピンにはんだペーストを塗布するディッピングユニットと、前記ピックアップユニットによってディッピングユニットから搬送されたプローブピンのはんだペーストに2つのレーザビームをそれぞれ照射することにより、前記プローブピンをプローブカードにボンディングするレーザボンディングユニットを含むターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュールにおいて、
内側が空の円形または多角形の本体部と、
前記本体部の内部に向かって第1方向に接続され、特定の波長帯の第1レーザビームが入射する第1レーザ接続部と、
前記本体部の内部に向かって第1方向と直交する第2方向に接続され、特定の波長帯の第2レーザビームが入射する第2レーザ接続部と、
前記本体部の内部に設けられ、前記本体部の内部で合った第1レーザビームと第2レーザビームがそれぞれ透過または反射されることによって同焦点(co-focus)を有するように重畳するレーザフィルタ部と、
前記レーザフィルタ部によって同焦点(co-focus)を有するように重畳されたレーザビームを本体部の第3方向に出射する重畳レーザ出射部とを含む、
ターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。 - 前記第1および第2レーザ接続部は、それぞれ異なる波長帯を有する第1および第2レーザビームが本体部の内部に垂直に入射するように、本体部の周りに垂直または水平方向で分割して設けられることを特徴とする、
請求項1に記載のターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。 - 前記レーザフィルタ部は、本体部の内部に前記第1および第2レーザ接続部に向かって斜めに設けられる、
請求項2に記載のターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。 - 前記第1および第2レーザ接続部は、内部にコリメーションレンズがそれぞれ設けられ、前記第1および第2レーザ接続部のいずれか1つは内部に回折光学素子(DOE:Diffractive Optical Element)レンズがさらに設けられる、
請求項1に記載のターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。 - 前記重畳レーザ出射部は、内部にフォーカシングレンズが設けられる、
請求項1に記載のターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。 - 前記重畳レーザ出射部から出射される第1および第2レーザビームは、波長と面積がそれぞれ異なることを特徴とする、
請求項1に記載のターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。 - 前記第1および第2レーザビームの波長はそれぞれ980nmと808nmであることを特徴とする、
請求項1に記載のターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2022-0063643 | 2022-05-24 | ||
KR1020220063643A KR20230163832A (ko) | 2022-05-24 | 2022-05-24 | 턴테이블 방식 프로브핀 레이저 본딩장치의 듀얼 레이저 옵틱 모듈 |
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JP2023172843A true JP2023172843A (ja) | 2023-12-06 |
Family
ID=83995009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2022171886A Pending JP2023172843A (ja) | 2022-05-24 | 2022-10-27 | ターンテーブル方式のプローブピンレーザボンディング装置におけるデュアルレーザオプティックモジュール |
Country Status (5)
Country | Link |
---|---|
US (1) | US20230405712A1 (ja) |
EP (1) | EP4282569A1 (ja) |
JP (1) | JP2023172843A (ja) |
KR (1) | KR20230163832A (ja) |
CN (1) | CN117139760A (ja) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0818125B2 (ja) * | 1989-10-03 | 1996-02-28 | 日本電気株式会社 | レーザはんだ付け装置 |
JP4580065B2 (ja) * | 2000-07-10 | 2010-11-10 | ミヤチテクノス株式会社 | レーザ溶接方法及び装置 |
JP2006263771A (ja) * | 2005-03-24 | 2006-10-05 | Mitsubishi Heavy Ind Ltd | レーザ加工装置及びレーザ加工方法 |
JP2007319878A (ja) * | 2006-05-31 | 2007-12-13 | Mitsubishi Heavy Ind Ltd | レーザ加工装置及びレーザ加工方法 |
KR101748583B1 (ko) | 2015-08-04 | 2017-06-21 | 크루셜머신즈 주식회사 | 프로브핀 본딩 장치 |
KR101879376B1 (ko) | 2016-05-13 | 2018-07-20 | 크루셜머신즈 주식회사 | 프로브핀 레이저 본딩 장치 및 방법 |
CN110860751A (zh) * | 2018-08-16 | 2020-03-06 | 台达电子工业股份有限公司 | 多光束焊锡***及多光束焊锡方法 |
KR102501497B1 (ko) | 2020-03-13 | 2023-02-21 | 레이저쎌 주식회사 | 턴테이블 방식의 프로브핀 레이저 본딩장치 |
-
2022
- 2022-05-24 KR KR1020220063643A patent/KR20230163832A/ko not_active Application Discontinuation
- 2022-10-24 EP EP22203348.2A patent/EP4282569A1/en active Pending
- 2022-10-25 CN CN202211313921.4A patent/CN117139760A/zh active Pending
- 2022-10-27 JP JP2022171886A patent/JP2023172843A/ja active Pending
- 2022-10-28 US US17/976,072 patent/US20230405712A1/en active Pending
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US20230405712A1 (en) | 2023-12-21 |
CN117139760A (zh) | 2023-12-01 |
KR20230163832A (ko) | 2023-12-01 |
EP4282569A1 (en) | 2023-11-29 |
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