JP2023066639A - 圧電素子、および圧電素子の製造方法 - Google Patents

圧電素子、および圧電素子の製造方法 Download PDF

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Publication number: JP2023066639A
Authority: JP; Japan
Prior art keywords: piezoelectric; atoms; piezoelectric element; lead; composition
Prior art date: 2021-10-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP2021177332A

Other languages

English (en)

Japanese (ja)

Inventor

吉進廣瀬

Yoshiyuki Hirose

健太郎市橋

Kentaro ICHIHASHI

崇笠島

Takashi Kasashima

正人山崎

Masato Yamazaki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Niterra Co Ltd

Original Assignee

NGK Spark Plug Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2021-10-29

Filing date

2021-10-29

Publication date

2023-05-16

2021-10-29 Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd

2021-10-29 Priority to JP2021177332A priority Critical patent/JP2023066639A/ja

2022-09-08 Priority to CN202280009189.3A priority patent/CN116710416A/zh

2022-09-08 Priority to EP22886473.2A priority patent/EP4284150A1/en

2022-09-08 Priority to KR1020237022496A priority patent/KR20230110810A/ko

2022-09-08 Priority to US18/271,817 priority patent/US20240065107A1/en

2022-09-08 Priority to PCT/JP2022/033711 priority patent/WO2023074139A1/ja

2022-09-08 Priority to CA3218650A priority patent/CA3218650A1/en

2022-10-27 Priority to TW111140813A priority patent/TW202318689A/zh

2023-05-16 Publication of JP2023066639A publication Critical patent/JP2023066639A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims description 11
239000000203 mixture Substances 0.000 claims abstract description 79
229910052788 barium Inorganic materials 0.000 claims abstract description 20
229910052791 calcium Inorganic materials 0.000 claims abstract description 20
229910052712 strontium Inorganic materials 0.000 claims abstract description 20
229910052783 alkali metal Inorganic materials 0.000 claims abstract description 16
150000001340 alkali metals Chemical class 0.000 claims abstract description 16
239000010953 base metal Substances 0.000 claims abstract description 8
239000000843 powder Substances 0.000 claims description 35
239000002994 raw material Substances 0.000 claims description 18
239000013078 crystal Substances 0.000 claims description 10
238000010344 co-firing Methods 0.000 claims description 9
150000001875 compounds Chemical class 0.000 claims description 6
206010021143 Hypoxia Diseases 0.000 claims description 5
238000001354 calcination Methods 0.000 claims description 5
238000000465 moulding Methods 0.000 claims description 4
238000005245 sintering Methods 0.000 claims description 3
238000002156 mixing Methods 0.000 claims description 2
239000003513 alkali Substances 0.000 abstract description 20
238000009413 insulation Methods 0.000 abstract description 13
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 10
229910052760 oxygen Inorganic materials 0.000 abstract description 10
239000001301 oxygen Substances 0.000 abstract description 10
230000002950 deficient Effects 0.000 abstract description 2
239000010955 niobium Substances 0.000 description 43
239000011572 manganese Substances 0.000 description 40
239000010410 layer Substances 0.000 description 29
239000000919 ceramic Substances 0.000 description 26
239000010936 titanium Substances 0.000 description 24
239000011575 calcium Substances 0.000 description 23
239000000523 sample Substances 0.000 description 22
230000015556 catabolic process Effects 0.000 description 21
238000012360 testing method Methods 0.000 description 16
229910052719 titanium Inorganic materials 0.000 description 11
229910052726 zirconium Inorganic materials 0.000 description 11
229910052735 hafnium Inorganic materials 0.000 description 10
238000000034 method Methods 0.000 description 10
PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
239000006104 solid solution Substances 0.000 description 10
239000000463 material Substances 0.000 description 8
239000002245 particle Substances 0.000 description 8
229910052700 potassium Inorganic materials 0.000 description 8
239000002002 slurry Substances 0.000 description 8
239000011734 sodium Substances 0.000 description 8
230000008878 coupling Effects 0.000 description 7
238000010168 coupling process Methods 0.000 description 7
238000005859 coupling reaction Methods 0.000 description 7
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
239000011230 binding agent Substances 0.000 description 5
229910052748 manganese Inorganic materials 0.000 description 5
229910052758 niobium Inorganic materials 0.000 description 5
229910052708 sodium Inorganic materials 0.000 description 5
238000010304 firing Methods 0.000 description 4
ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 4
229910052701 rubidium Inorganic materials 0.000 description 4
239000004065 semiconductor Substances 0.000 description 4
238000001035 drying Methods 0.000 description 3
230000005684 electric field Effects 0.000 description 3
238000005516 engineering process Methods 0.000 description 3
229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
229910052744 lithium Inorganic materials 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
239000011812 mixed powder Substances 0.000 description 3
229910052759 nickel Inorganic materials 0.000 description 3
GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
230000010287 polarization Effects 0.000 description 3
238000012545 processing Methods 0.000 description 3
VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
229910052792 caesium Inorganic materials 0.000 description 2
229910010293 ceramic material Inorganic materials 0.000 description 2
238000002485 combustion reaction Methods 0.000 description 2
230000007812 deficiency Effects 0.000 description 2
238000001514 detection method Methods 0.000 description 2
230000006866 deterioration Effects 0.000 description 2
239000002270 dispersing agent Substances 0.000 description 2
238000007606 doctor blade method Methods 0.000 description 2
239000007772 electrode material Substances 0.000 description 2
XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
230000005012 migration Effects 0.000 description 2
238000013508 migration Methods 0.000 description 2
230000007935 neutral effect Effects 0.000 description 2
239000003960 organic solvent Substances 0.000 description 2
238000002360 preparation method Methods 0.000 description 2
230000008569 process Effects 0.000 description 2
230000009467 reduction Effects 0.000 description 2
238000007650 screen-printing Methods 0.000 description 2
229920002545 silicone oil Polymers 0.000 description 2
238000010998 test method Methods 0.000 description 2
230000007704 transition Effects 0.000 description 2
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
229910001252 Pd alloy Inorganic materials 0.000 description 1
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
229910052784 alkaline earth metal Inorganic materials 0.000 description 1
150000001342 alkaline earth metals Chemical class 0.000 description 1
DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
229910000019 calcium carbonate Inorganic materials 0.000 description 1
235000010216 calcium carbonate Nutrition 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
238000011161 development Methods 0.000 description 1
NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
238000000921 elemental analysis Methods 0.000 description 1
230000007613 environmental effect Effects 0.000 description 1
230000001747 exhibiting effect Effects 0.000 description 1
239000012530 fluid Substances 0.000 description 1
-1 for example Substances 0.000 description 1
239000000446 fuel Substances 0.000 description 1
VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
230000006872 improvement Effects 0.000 description 1
238000010030 laminating Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
230000010355 oscillation Effects 0.000 description 1
239000003973 paint Substances 0.000 description 1
229910052697 platinum Inorganic materials 0.000 description 1
239000011591 potassium Substances 0.000 description 1
IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
239000002356 single layer Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
229910000018 strontium carbonate Inorganic materials 0.000 description 1
LEDMRZGFZIAGGB-UHFFFAOYSA-L strontium carbonate Chemical compound [Sr+2].[O-]C([O-])=O LEDMRZGFZIAGGB-UHFFFAOYSA-L 0.000 description 1
239000000758 substrate Substances 0.000 description 1
230000001629 suppression Effects 0.000 description 1

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- H—ELECTRICITY
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- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
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- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H—ELECTRICITY
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
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- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
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Chemical & Material Sciences (AREA)
Manufacturing & Machinery (AREA)
Ceramic Engineering (AREA)
Materials Engineering (AREA)
Inorganic Chemistry (AREA)
Structural Engineering (AREA)
Organic Chemistry (AREA)
Compositions Of Oxide Ceramics (AREA)
Physics & Mathematics (AREA)
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JP2021177332A 2021-10-29 2021-10-29 圧電素子、および圧電素子の製造方法 Pending JP2023066639A (ja)

Priority Applications (8)

Application Number	Priority Date	Filing Date	Title
JP2021177332A JP2023066639A (ja)	2021-10-29	2021-10-29	圧電素子、および圧電素子の製造方法
CN202280009189.3A CN116710416A (zh)	2021-10-29	2022-09-08	压电元件和压电元件的制造方法
EP22886473.2A EP4284150A1 (en)	2021-10-29	2022-09-08	Piezoelectric element and method for manufacturing piezoelectric element
KR1020237022496A KR20230110810A (ko)	2021-10-29	2022-09-08	압전 소자, 및 압전 소자의 제조 방법
US18/271,817 US20240065107A1 (en)	2021-10-29	2022-09-08	Piezoelectric element and production method therefor
PCT/JP2022/033711 WO2023074139A1 (ja)	2021-10-29	2022-09-08	圧電素子、および圧電素子の製造方法
CA3218650A CA3218650A1 (en)	2021-10-29	2022-09-08	Piezoelectric element and production method therefor
TW111140813A TW202318689A (zh)	2021-10-29	2022-10-27	壓電元件、及壓電元件之製造方法

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US20080302658A1 (en) *	2007-06-08	2008-12-11	Tsutomu Sasaki	Oxide body, piezoelectric device, and liquid discharge device
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KR20230110810A (ko)	2023-07-25
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WO2023074139A1 (ja)	2023-05-04
TW202318689A (zh)	2023-05-01

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