JP2020136449A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2020136449A JP2020136449A JP2019027207A JP2019027207A JP2020136449A JP 2020136449 A JP2020136449 A JP 2020136449A JP 2019027207 A JP2019027207 A JP 2019027207A JP 2019027207 A JP2019027207 A JP 2019027207A JP 2020136449 A JP2020136449 A JP 2020136449A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K3/04—Heating appliances
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- H05K3/341—Surface mounted components
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
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- H05K3/3494—Heating methods for reflowing of solder
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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Abstract
Description
以下、図面を参照して、第1の実施の形態の半導体装置の製造方法について、図1を用いて説明する。図1は、第1の実施の形態の半導体装置の製造方法の各工程を説明するための図である。なお、図1(A)〜図1(C)では、半導体装置の製造方法のうち、特に、リフローはんだ付け工程に関する工程の側図を時系列的に示している。また、図1(D)は、図1(C)の工程に対する参考例を示している。
第2の実施の形態では、第1の実施の形態の半導体装置の製造方法についてより具体的に説明する。まず、半導体装置について図2及び図3を用いて説明する。図2は、第2の実施の形態の半導体装置を示す平面図であり、図3は、第2の実施の形態の半導体装置を示す側面図である。なお、図2は、封止部材の図示を省略している。図3では、封止部材を破線で示している。また、第2の実施の形態では、複数の回路パターン層12、複数の半導体素子20、複数のコンタクト部品30、複数のボンディングワイヤ35、複数の外部接続端子40に対して、それぞれ区別することなく、同じ符号を付して同じ符号で説明する。なお、これらの構成以外の構成についても、複数あるものはそれぞれ区別することなく、同じ符号を付して同じ符号で説明する。但し、コンタクト部品については、複数のコンタクト部品30のうち、一部のコンタクト部品30をコンタクト部品30a〜30jとする。
以上により、ステップS11では、基板位置決め治具60が用いられ、ステップS13では、部品位置決め治具70が用いられ、ステップS15では、押え治具80が用いられている。このような基板位置決め治具60、部品位置決め治具70及び押え治具80が用いられて、図2及び図3に示した半導体装置50が製造される。
1a,11 絶縁層
1b1,1b2,12 回路パターン層
1c,13 金属層
2a〜2c,30,30a〜30j コンタクト部品
3a〜3c 接合部材
4,80 押え治具
4a,83 押圧領域
10 セラミック回路基板
20 半導体素子
31 はんだ
35 ボンディングワイヤ
40 外部接続端子
45 封止部材
50 半導体装置
60 基板位置決め治具
61 収納部
62 ガイドピン
70 部品位置決め治具
72,82 ガイド孔
73 素子ガイド部
74 コンタクトガイド部
81 枠部
84〜87 押圧ブロック
84a〜87a 押圧面
84b〜87b,84c〜87c 支持部
84b1 凸部
85b1 凹部
84d〜87d 押圧部
T 隙間
R 領域
Claims (8)
- 絶縁層と前記絶縁層のおもて面に形成された回路パターン層と前記絶縁層の裏面に形成され前記回路パターン層よりも広い面積である金属層とを有する積層基板、及び、複数のコンタクト部品を用意する工程と、
前記積層基板の前記回路パターン層上に接合部材を介して前記複数のコンタクト部品をそれぞれ配置する工程と、
平板状の押え治具の主面に設定された押圧領域を前記複数のコンタクト部品上に配置する押圧前工程と、
加熱しながら、前記押え治具の前記押圧領域を前記積層基板に生じる反りに追随して傾斜させて、前記複数のコンタクト部品を前記積層基板に対して押圧する押圧工程と、
を有する半導体装置の製造方法。 - 前記押え治具は、押圧面をそれぞれ備え、前記複数の押圧面が平面状に組み合って前記押圧領域を構成する複数の押圧ブロックを含んでいる、
請求項1に記載の半導体装置の製造方法。 - 前記押圧前工程において、前記押え治具の前記複数の押圧面が前記複数のコンタクト部品により支持されて、
前記押圧工程において、前記積層基板の反りに伴う前記複数のコンタクト部品の移動により前記複数の押圧面もそれぞれ移動して、前記複数のコンタクト部品を前記積層基板に対して押圧する、
請求項2に記載の半導体装置の製造方法。 - 前記押え治具において、前記複数の押圧面の間の境界線は前記押圧領域の中心点から所定方向に位置ずれしている、
請求項2または3に記載の半導体装置の製造方法。 - 前記押え治具は、前記複数の押圧ブロックと前記複数の押圧ブロックを備える枠部とを含んでいる、
請求項2乃至4のいずれかに記載の半導体装置の製造方法。 - 前記複数の押圧ブロックの前記複数の押圧面の反対側の面の周縁部に前記枠部に支持される支持部がそれぞれ形成されている、
請求項5に記載の半導体装置の製造方法。 - 前記複数の支持部の幅は、前記複数の押圧ブロック間の隙間よりも広い、
請求項6に記載の半導体装置の製造方法。 - 前記複数の押圧ブロックのうち、押圧面の面積が最大である最大押圧ブロックと前記最大押圧ブロックと隣接する隣接押圧ブロックとのそれぞれ対向する面に凹部及び前記凹部に嵌合する凸部がそれぞれ形成されている、
請求項7に記載の半導体装置の製造方法。
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