JP2020089037A - ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置 - Google Patents
ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置 Download PDFInfo
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- JP2020089037A JP2020089037A JP2018219437A JP2018219437A JP2020089037A JP 2020089037 A JP2020089037 A JP 2020089037A JP 2018219437 A JP2018219437 A JP 2018219437A JP 2018219437 A JP2018219437 A JP 2018219437A JP 2020089037 A JP2020089037 A JP 2020089037A
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- Prior art keywords
- piezo
- blocks
- fluid control
- fluid
- voltage
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- 239000012530 fluid Substances 0.000 title claims description 66
- 230000015556 catabolic process Effects 0.000 claims abstract description 29
- 230000008602 contraction Effects 0.000 claims abstract description 13
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 238000003860 storage Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/005—Electrical or magnetic means for measuring fluid parameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/34—Testing dynamo-electric machines
- G01R31/343—Testing dynamo-electric machines in operation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
- G01R31/1263—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2829—Testing of circuits in sensor or actuator systems
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Flow Control (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
1 ・・・ボディ
2 ・・・流量センサ
3 ・・・流体制御バルブ
4 ・・・筐体
5 ・・・バルブ制御部
61 ・・・弁座
62 ・・・弁体
7 ・・・ピエゾアクチュエータ
71 ・・・ピエゾブロック
72 ・・・駆動回路
PS ・・・電源部
R ・・・制限抵抗
Claims (7)
- 圧電セラミック層と電極層とを交互に積層して形成された複数のピエゾブロックと、
複数の前記ピエゾブロックに接続された駆動回路と、を備え、
複数の前記ピエゾブロックがそれぞれ伸縮方向に並べて設けられており、
前記駆動回路が、
複数の前記ピエゾブロックがそれぞれ並列に接続される電源部と、
複数の前記ピエゾブロックに対してそれぞれ直列に設けられた複数の制限抵抗と、を備えたピエゾアクチュエータ。 - 複数の前記制限抵抗の抵抗値が、複数の前記ピエゾブロックに絶縁破壊が生じた際に前記駆動回路に流れる電流値が前記電源部の電流供給能力以下となるように設定されている請求項1記載のピエゾアクチュエータ。
- 請求項1又は2記載のピエゾアクチュエータと、
前記ピエゾアクチュエータによって駆動され、弁座に対して接離する弁体と、を備えた流体制御バルブ。 - 請求項3記載の流体制御バルブと、
流体の圧力又は流量を測定する流体センサと、
流体センサで測定される測定値が、予め設定される目標値となるように前記電源部が出力する電圧を制御するバルブ制御部と、を備えた流体制御装置。 - 複数の前記ピエゾブロックが正常な場合における流体の圧力又は流量と、前記電源部から出力される電圧との関係である基準関係を記憶する基準関係記憶部と、
前記電源部が出力する電圧を検出する電圧モニタと、
前記流体センサで測定される測定値又はバルブ制御部に設定される目標値と、前記電圧モニタで検出される電圧と、前記基準関係に基づいて、複数の前記ピエゾブロックにおける故障の有無を判定する故障判定部と、を備えた請求項4記載の流体制御装置。 - 複数の前記ピエゾブロックが、それぞれ伸縮方向の長さ寸法が同じものである請求項5記載の流体制御装置。
- 複数の前記ピエゾブロックの少なくとも1つが他の前記ピエゾブロックと伸縮方向の長さ寸法が異なっている請求項5記載の流体制御装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018219437A JP2020089037A (ja) | 2018-11-22 | 2018-11-22 | ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置 |
KR1020190142053A KR20200060256A (ko) | 2018-11-22 | 2019-11-07 | 피에조 액츄에이터, 유체 제어 밸브, 및 유체 제어 장치 |
US16/680,001 US10920898B2 (en) | 2018-11-22 | 2019-11-11 | Piezo actuator, fluid control valve, and fluid control apparatus |
CN201911099390.1A CN111207241A (zh) | 2018-11-22 | 2019-11-12 | 压电致动器、流体控制阀和流体控制装置 |
TW108141596A TW202021259A (zh) | 2018-11-22 | 2019-11-15 | 壓電致動器、流體控制閥和流體控制裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018219437A JP2020089037A (ja) | 2018-11-22 | 2018-11-22 | ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2020089037A true JP2020089037A (ja) | 2020-06-04 |
Family
ID=70770319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018219437A Pending JP2020089037A (ja) | 2018-11-22 | 2018-11-22 | ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10920898B2 (ja) |
JP (1) | JP2020089037A (ja) |
KR (1) | KR20200060256A (ja) |
CN (1) | CN111207241A (ja) |
TW (1) | TW202021259A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7344012B2 (ja) * | 2019-06-07 | 2023-09-13 | 株式会社堀場エステック | 流体制御バルブ、流量制御装置、及び、駆動回路 |
JP7382796B2 (ja) * | 2019-11-05 | 2023-11-17 | 株式会社堀場エステック | ピエゾバルブ、流体制御装置、及び、ピエゾバルブ診断方法 |
JP2022047691A (ja) * | 2020-09-14 | 2022-03-25 | 株式会社堀場エステック | 流体制御弁及び流体制御装置 |
CN112906875B (zh) * | 2021-04-29 | 2021-07-27 | 常州高凯电子有限公司 | 一种用于精密气体流量阀的控制***及方法 |
JP2023077714A (ja) * | 2021-11-25 | 2023-06-06 | 株式会社堀場エステック | 流体制御バルブ及び流体制御装置 |
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-
2018
- 2018-11-22 JP JP2018219437A patent/JP2020089037A/ja active Pending
-
2019
- 2019-11-07 KR KR1020190142053A patent/KR20200060256A/ko not_active Application Discontinuation
- 2019-11-11 US US16/680,001 patent/US10920898B2/en active Active
- 2019-11-12 CN CN201911099390.1A patent/CN111207241A/zh not_active Withdrawn
- 2019-11-15 TW TW108141596A patent/TW202021259A/zh unknown
Patent Citations (11)
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JPH0229366U (ja) * | 1988-08-15 | 1990-02-26 | ||
JPH02291184A (ja) * | 1989-04-28 | 1990-11-30 | Oki Electric Ind Co Ltd | 積層形アクチュエータ |
JPH10318077A (ja) * | 1997-05-20 | 1998-12-02 | Denso Corp | 圧電素子駆動装置 |
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US10920898B2 (en) | 2021-02-16 |
US20200166150A1 (en) | 2020-05-28 |
TW202021259A (zh) | 2020-06-01 |
CN111207241A (zh) | 2020-05-29 |
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