JP2020047820A - 浮上搬送装置 - Google Patents
浮上搬送装置 Download PDFInfo
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- JP2020047820A JP2020047820A JP2018175852A JP2018175852A JP2020047820A JP 2020047820 A JP2020047820 A JP 2020047820A JP 2018175852 A JP2018175852 A JP 2018175852A JP 2018175852 A JP2018175852 A JP 2018175852A JP 2020047820 A JP2020047820 A JP 2020047820A
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- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
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- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
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- 229910052742 iron Inorganic materials 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/01—Hydraulic transport of articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
12‐搬入部
14-前水洗チャンバ
161‐第1のエッチングチャンバ
18-後水洗チャンバ
24‐ガラス基板
30-搬送ローラ
60-浮上搬送ユニット
62‐水浮上搬送部
64-エアナイフ
66-第1のエア浮上搬送部
68-第2のエア浮上搬送部
Claims (4)
- 被処理基板を浮上させた状態で搬送する浮上搬送装置であって、
表面上に水膜を形成するように構成された水膜形成プレートを有する水浮上搬送部と、
前記水浮上搬送部の後段に配置され、前記被処理基板にエアを噴射するように構成されたエアナイフと、
前記エアナイフの後段に配置され、前記被処理基板に下方からエアを噴射する噴射孔が形成された浮上搬送プレートを有するエア浮上搬送部と、
前記水浮上搬送部および前記エア浮上搬送部において、前記被処理基板の搬送方向に沿って配置される搬送ローラと、
を少なくとも備える浮上搬送装置。 - 前記エア浮上搬送部は、第1のエア浮上搬送部と、第2のエア浮上搬送部と、
を有し、
第1のエア浮上搬送部は、前記エアナイフと前記第2のエア浮上搬送部の間に配置され、
前記第2のエア浮上搬送部は、前記浮上搬送プレートの表面にエアを吸引する吸引孔が形成されていることを特徴とする請求項1に記載の浮上搬送装置。 - 前記第1の浮上搬送部は、前記エアナイフと接する領域にエアを吸引する吸引孔を備えることを特徴とする請求項2に記載の浮上搬送装置。
- 前記エアナイフは、前記被処理基板の両主面にエアを噴射することを特徴とする請求項1〜3のいずれか1項に記載の浮上搬送装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018175852A JP6853520B2 (ja) | 2018-09-20 | 2018-09-20 | 浮上搬送装置 |
CN201980075803.4A CN113412535B (zh) | 2018-09-20 | 2019-09-19 | 悬浮输送装置 |
PCT/JP2019/036747 WO2020059796A1 (ja) | 2018-09-20 | 2019-09-19 | 浮上搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018175852A JP6853520B2 (ja) | 2018-09-20 | 2018-09-20 | 浮上搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020047820A true JP2020047820A (ja) | 2020-03-26 |
JP6853520B2 JP6853520B2 (ja) | 2021-03-31 |
Family
ID=69888457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018175852A Active JP6853520B2 (ja) | 2018-09-20 | 2018-09-20 | 浮上搬送装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6853520B2 (ja) |
CN (1) | CN113412535B (ja) |
WO (1) | WO2020059796A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115156142B (zh) * | 2022-05-30 | 2024-04-30 | 江苏亚电科技股份有限公司 | Psg水膜喷淋机构及光伏硅片附水膜方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP2005350174A (ja) * | 2004-06-09 | 2005-12-22 | Ishikawajima Harima Heavy Ind Co Ltd | 搬送装置 |
US20110097160A1 (en) * | 2008-06-19 | 2011-04-28 | Rena Gmbh | Method and apparatus for the transporting of objects |
JP2012186325A (ja) * | 2011-03-07 | 2012-09-27 | Zebiosu:Kk | 非接触浮上搬送機能を有する基板処理装置 |
JP2013095617A (ja) * | 2011-10-28 | 2013-05-20 | Nsc:Kk | ガラス基板の製造方法 |
JP2013159407A (ja) * | 2012-02-01 | 2013-08-19 | Ihi Corp | 搬送装置 |
WO2014132339A1 (ja) * | 2013-02-26 | 2014-09-04 | 株式会社Ihi | 搬送装置 |
JP2016121015A (ja) * | 2014-12-24 | 2016-07-07 | 株式会社タンケンシールセーコウ | 非接触搬送装置、および非接触吸着盤 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4217963B2 (ja) * | 2003-07-08 | 2009-02-04 | 株式会社ダイフク | 板状体搬送装置 |
JP2005247516A (ja) * | 2004-03-05 | 2005-09-15 | Tokyo Electron Ltd | 浮上式基板搬送処理装置 |
JP4745040B2 (ja) * | 2005-12-05 | 2011-08-10 | 東京エレクトロン株式会社 | 基板搬送装置及び基板処理装置 |
JP5125290B2 (ja) * | 2007-07-27 | 2013-01-23 | 株式会社Ihi | 浮上搬送装置及び処理搬送システム |
JP5426890B2 (ja) * | 2009-02-03 | 2014-02-26 | 株式会社渡辺商行 | 浮上搬送装置および浮上搬送方法 |
JP2010206037A (ja) * | 2009-03-05 | 2010-09-16 | Tokyo Electron Ltd | 基板搬送装置 |
JP5369128B2 (ja) * | 2011-03-01 | 2013-12-18 | 東京エレクトロン株式会社 | 浮上式塗布装置 |
JP5912642B2 (ja) * | 2012-02-20 | 2016-04-27 | 日本電気硝子株式会社 | ガラス板の搬送装置及びその搬送方法 |
JP5943799B2 (ja) * | 2012-09-28 | 2016-07-05 | AvanStrate株式会社 | ガラス基板の搬送装置、および、ガラス基板の製造方法 |
-
2018
- 2018-09-20 JP JP2018175852A patent/JP6853520B2/ja active Active
-
2019
- 2019-09-19 CN CN201980075803.4A patent/CN113412535B/zh active Active
- 2019-09-19 WO PCT/JP2019/036747 patent/WO2020059796A1/ja active Application Filing
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP2005350174A (ja) * | 2004-06-09 | 2005-12-22 | Ishikawajima Harima Heavy Ind Co Ltd | 搬送装置 |
US20110097160A1 (en) * | 2008-06-19 | 2011-04-28 | Rena Gmbh | Method and apparatus for the transporting of objects |
JP2012186325A (ja) * | 2011-03-07 | 2012-09-27 | Zebiosu:Kk | 非接触浮上搬送機能を有する基板処理装置 |
JP2013095617A (ja) * | 2011-10-28 | 2013-05-20 | Nsc:Kk | ガラス基板の製造方法 |
JP2013159407A (ja) * | 2012-02-01 | 2013-08-19 | Ihi Corp | 搬送装置 |
WO2014132339A1 (ja) * | 2013-02-26 | 2014-09-04 | 株式会社Ihi | 搬送装置 |
JP2016121015A (ja) * | 2014-12-24 | 2016-07-07 | 株式会社タンケンシールセーコウ | 非接触搬送装置、および非接触吸着盤 |
Also Published As
Publication number | Publication date |
---|---|
CN113412535B (zh) | 2024-06-07 |
WO2020059796A1 (ja) | 2020-03-26 |
JP6853520B2 (ja) | 2021-03-31 |
CN113412535A (zh) | 2021-09-17 |
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