JP2019152468A - X線発生装置、及びx線分析装置 - Google Patents
X線発生装置、及びx線分析装置 Download PDFInfo
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- JP2019152468A JP2019152468A JP2018036208A JP2018036208A JP2019152468A JP 2019152468 A JP2019152468 A JP 2019152468A JP 2018036208 A JP2018036208 A JP 2018036208A JP 2018036208 A JP2018036208 A JP 2018036208A JP 2019152468 A JP2019152468 A JP 2019152468A
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- 230000003287 optical effect Effects 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000000235 small-angle X-ray scattering Methods 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
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- G—PHYSICS
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- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
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- G—PHYSICS
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- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/308—Accessories, mechanical or electrical features support of radiation source
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- G—PHYSICS
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- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/067—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators using surface reflection, e.g. grazing incidence mirrors, gratings
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
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- G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (5)
- 線状X線源と、
多層膜鏡と、
2枚の凹面鏡が接合線を共有するよう互いに接合される、サイドバイサイド反射鏡と、
を備える、X線発生装置であって、
前記多層膜鏡の反射面の断面は放物線形状を有するとともに、該放物線形状の焦点が前記線状X線源に位置し、
前記サイドバイサイド反射鏡の2枚の凹面鏡の反射面の断面はそれぞれ放物線形状を有するとともに、該放物線形状の焦点それぞれは、前記多層膜鏡とは反対側に位置する、
ことを特徴とする、X線発生装置。 - 請求項1に記載のX線発生装置であって、
平面視して、前記サイドバイサイド反射鏡の接合線の延長線は、多層膜鏡及び線状X線源を貫く、
ことを特徴とする、X線発生装置。 - 請求項1又は2に記載のX線発生装置であって、
前記線状X線源と、前記多層膜鏡と、前記サイドバイサイドとは、互いの相対的位置が固定されており、
前記線状X線源と、前記多層膜鏡と、前記サイドバイサイドと、を一体のものとして、X線ビームの光軸方向と交差する方向へ並進移動させる、移動機構を、
さらに備える、X線発生装置。 - 請求項1乃至3のいずれかに記載のX線発生装置と、
前記サイドバイサイド反射鏡の2枚の凹面鏡それぞれの焦点を含むよう配置される試料を支持する、支持台と、
を備える、X線分析装置。 - 請求項1乃至3のいずれかに記載のX線発生装置と、
前記サイドバイサイド反射鏡の2枚の凹面鏡それぞれの焦点が検出面を結ぶ線上のいずれかの点を含むよう配置される検出器と、
前記サイドバイサイド反射鏡と前記検出器の間に、前記サイドバイサイド反射鏡が出射するX線を照射させるよう配置される試料を支持する、支持台と、
を備える、X線分析装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018036208A JP6857400B2 (ja) | 2018-03-01 | 2018-03-01 | X線発生装置、及びx線分析装置 |
US16/284,777 US10854348B2 (en) | 2018-03-01 | 2019-02-25 | X-ray generator and x-ray analysis device |
EP19159575.0A EP3534679A1 (en) | 2018-03-01 | 2019-02-27 | X-ray generator and x-ray analysis device |
CN201910150250.6A CN110223797B (zh) | 2018-03-01 | 2019-02-28 | X射线产生装置和x射线分析装置 |
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JP2018036208A JP6857400B2 (ja) | 2018-03-01 | 2018-03-01 | X線発生装置、及びx線分析装置 |
Publications (3)
Publication Number | Publication Date |
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JP2019152468A true JP2019152468A (ja) | 2019-09-12 |
JP2019152468A5 JP2019152468A5 (ja) | 2020-05-07 |
JP6857400B2 JP6857400B2 (ja) | 2021-04-14 |
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US (1) | US10854348B2 (ja) |
EP (1) | EP3534679A1 (ja) |
JP (1) | JP6857400B2 (ja) |
CN (1) | CN110223797B (ja) |
Cited By (1)
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---|---|---|---|---|
JP2021107789A (ja) * | 2019-12-27 | 2021-07-29 | 株式会社リガク | 散乱測定解析方法、散乱測定解析装置、及び散乱測定解析プログラム |
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US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
DE112019002822T5 (de) | 2018-06-04 | 2021-02-18 | Sigray, Inc. | Wellenlängendispersives röntgenspektrometer |
GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
WO2020051061A1 (en) | 2018-09-04 | 2020-03-12 | Sigray, Inc. | System and method for x-ray fluorescence with filtering |
WO2020051221A2 (en) | 2018-09-07 | 2020-03-12 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
WO2021162947A1 (en) | 2020-02-10 | 2021-08-19 | Sigray, Inc. | X-ray mirror optics with multiple hyperboloidal / hyperbolic surface profiles |
JP2022069273A (ja) * | 2020-10-23 | 2022-05-11 | 株式会社リガク | 結像型x線顕微鏡 |
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2019
- 2019-02-25 US US16/284,777 patent/US10854348B2/en active Active
- 2019-02-27 EP EP19159575.0A patent/EP3534679A1/en active Pending
- 2019-02-28 CN CN201910150250.6A patent/CN110223797B/zh active Active
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Publication number | Publication date |
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CN110223797B (zh) | 2023-10-24 |
US10854348B2 (en) | 2020-12-01 |
EP3534679A1 (en) | 2019-09-04 |
CN110223797A (zh) | 2019-09-10 |
JP6857400B2 (ja) | 2021-04-14 |
US20190272929A1 (en) | 2019-09-05 |
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