JP2019139079A - 液晶パネル用基板の製造方法 - Google Patents
液晶パネル用基板の製造方法 Download PDFInfo
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- JP2019139079A JP2019139079A JP2018022815A JP2018022815A JP2019139079A JP 2019139079 A JP2019139079 A JP 2019139079A JP 2018022815 A JP2018022815 A JP 2018022815A JP 2018022815 A JP2018022815 A JP 2018022815A JP 2019139079 A JP2019139079 A JP 2019139079A
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- 239000000758 substrate Substances 0.000 title claims abstract description 125
- 238000000034 method Methods 0.000 title claims abstract description 110
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims abstract description 70
- 239000003566 sealing material Substances 0.000 claims description 27
- 238000005507 spraying Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 abstract description 55
- 238000007664 blowing Methods 0.000 abstract description 20
- 239000000126 substance Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 62
- 239000007789 gas Substances 0.000 description 13
- 230000007547 defect Effects 0.000 description 9
- 238000007689 inspection Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 238000005286 illumination Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000004744 fabric Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000010407 vacuum cleaning Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Liquid Crystal (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
本発明は上記記述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も本発明の技術的範囲に含まれる。
(1)上記実施形態では、液晶パネル用基板として、CF基板を製造するためのマザーCF基板19を例示したが、これに限定されない。液晶パネル用基板としては、配向膜を備える基板であればよく、アレイ基板を製造するためのマザーアレイ基板を例示することができる。
(2)上記第1清掃工程及び第3清掃工程では、エアノズル55に対してマザーガラス基板41を移動させることを例示したが、これに限定されず、マザーガラス基板41に対してエアノズル55を移動させてもよい。
(3)上記実施形態では、ラビング処理の方向がマザーガラス基板41の短辺方向に沿う場合を例示したが、これに限定されない。ラビング処理の方向がマザーガラス基板41の長辺方向に沿うものであってもよいし、ラビング処理の方向がマザーガラス基板41の一辺方向(長辺方向又は短辺方向)に対して傾斜していてもよい。また、マザーガラス基板41の形状は、上記実施形態で例示したものに限定されず、例えば正方形状をなしていてもよい。
(4)清掃工程において配向膜11に吹き付ける気体は空気に限定されない。吹き付けることで配向膜11上の異物を除去可能な気体であればよい。なお、吹き付ける気体が空気である場合には、CDA(クリーンドライエアー)が好ましく、空気以外の気体を吹き付ける場合には、窒素ガス等の不活性ガスが好ましい。水分を多く含む気体を配向膜11に過剰に吹き付けると、配向膜11が吸湿しその異方性が低下するため、液晶の配向規制力が低下する事態が懸念される。また、活性ガスを配向膜11に吹き付けた場合も、同様に配向規制力が低下する事態が懸念される。吹き付ける気体としてCDAや不活性ガスを用いることで、配向規制力が低下する事態を抑制することができる。
Claims (4)
- 基板上に形成された配向膜に対してラビング処理を行うラビング工程と、
前記ラビング工程の後に実行され、前記配向膜に対して前記ラビング処理の方向に沿って気体を吹き付ける清掃工程と、を備える液晶パネル用基板の製造方法。 - 前記清掃工程では、
前記気体を前記配向膜に吹き付けると共に前記配向膜から飛散した異物を吸引する請求項1に記載の液晶パネル用基板の製造方法。 - 前記清掃工程では、
ステージ上に載置した前記基板に対して吹付装置を用いて前記気体を吹き付けるものとされ、
前記吹付装置に対して前記ステージを前記ラビング処理の方向に沿って移動させる請求項1又は請求項2に記載の液晶パネル用基板の製造方法。 - 前記ラビング工程と前記清掃工程の間に実行され、前記配向膜を囲む形で前記基板上に枠状のシール材を塗布するシール材塗布工程を備える請求項1から請求項3のいずれか1項に記載の液晶パネル用基板の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018022815A JP6657275B2 (ja) | 2018-02-13 | 2018-02-13 | 液晶パネル用基板の製造方法 |
US16/272,651 US20190250469A1 (en) | 2018-02-13 | 2019-02-11 | Method of producing substrate for liquid crystal panel |
CN201910111066.0A CN110161727A (zh) | 2018-02-13 | 2019-02-12 | 液晶面板用基板的制造方法 |
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JP2018022815A JP6657275B2 (ja) | 2018-02-13 | 2018-02-13 | 液晶パネル用基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2019139079A true JP2019139079A (ja) | 2019-08-22 |
JP6657275B2 JP6657275B2 (ja) | 2020-03-04 |
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JP2018022815A Active JP6657275B2 (ja) | 2018-02-13 | 2018-02-13 | 液晶パネル用基板の製造方法 |
Country Status (3)
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US (1) | US20190250469A1 (ja) |
JP (1) | JP6657275B2 (ja) |
CN (1) | CN110161727A (ja) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3192759B2 (ja) * | 1992-06-10 | 2001-07-30 | オプトレックス株式会社 | 板状材のクリーニング装置及びクリーニング方法 |
JPH0777677A (ja) * | 1993-09-09 | 1995-03-20 | Dainippon Screen Mfg Co Ltd | ラビング処理後の基板の洗浄方法並びに洗浄装置 |
JP3816063B2 (ja) * | 2003-03-31 | 2006-08-30 | 株式会社飯沼ゲージ製作所 | ラビング装置および方法ならびに液晶表示素子 |
US7244627B2 (en) * | 2003-08-25 | 2007-07-17 | Lg.Philips Lcd Co., Ltd. | Method for fabricating liquid crystal display device |
TWI257327B (en) * | 2004-05-18 | 2006-07-01 | Au Optronics Corp | Apparatus for cleaning a rubbing cloth |
KR20070064119A (ko) * | 2005-12-16 | 2007-06-20 | 엘지.필립스 엘시디 주식회사 | 액정 표시 패널의 배향막 러빙장치 |
TWI352244B (en) * | 2007-01-11 | 2011-11-11 | Au Optronics Corp | Apparatus for rubbing the alignment layer on a sub |
CN101000437A (zh) * | 2007-01-24 | 2007-07-18 | 友达光电股份有限公司 | 配向膜的配向装置 |
CN102662273A (zh) * | 2012-05-11 | 2012-09-12 | 昆山天卓贸易有限公司 | 一种配向微尘清洁装置 |
CN203299496U (zh) * | 2013-05-27 | 2013-11-20 | 京东方科技集团股份有限公司 | 一种摩擦取向装置 |
CN106094352A (zh) * | 2016-08-22 | 2016-11-09 | 深圳市华星光电技术有限公司 | 一种摩擦配向装置 |
-
2018
- 2018-02-13 JP JP2018022815A patent/JP6657275B2/ja active Active
-
2019
- 2019-02-11 US US16/272,651 patent/US20190250469A1/en not_active Abandoned
- 2019-02-12 CN CN201910111066.0A patent/CN110161727A/zh active Pending
Also Published As
Publication number | Publication date |
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US20190250469A1 (en) | 2019-08-15 |
CN110161727A (zh) | 2019-08-23 |
JP6657275B2 (ja) | 2020-03-04 |
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